CN100510629C - Two-rotor statically stable electromagnetic suspension micro-rotary gyro - Google Patents
Two-rotor statically stable electromagnetic suspension micro-rotary gyro Download PDFInfo
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- CN100510629C CN100510629C CNB2006101162916A CN200610116291A CN100510629C CN 100510629 C CN100510629 C CN 100510629C CN B2006101162916 A CNB2006101162916 A CN B2006101162916A CN 200610116291 A CN200610116291 A CN 200610116291A CN 100510629 C CN100510629 C CN 100510629C
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Abstract
The invention relates to a dual-stator static stabilize electromagnetic suspension micro-rotation gyroscope, wherein it comprises: upper base, upper stator, micro rotator, lower stator, lower base, and sealing ring; said micro rotor is a conductive ring; the upper stator is above the upper base to be fixed with the upper base; the lower stator is above the lower base to be fixed with lower base; the edge of lower base is arranged with sealing ring, to be fixed with lower base; the sealing ring and upper base via bonding technique are fixed; the upper and lower stators, from outer to inner, are arranged with stabilize suspension outer coil, sensing electrode, connecting wire stabilize suspension inner coil, and rotation coil; the center of lower stator is arranged with anti-adhesive post. The invention leads in the static electrode, to improve the side rigidity of suspended micro rotator, and the anti-impact ability of micro gyroscope system.
Description
Technical field
What the present invention relates to is a kind of device of micro-electromechanical system field, specifically is a kind of two-rotor statically stable electromagnetic suspension micro-rotary gyro.
Background technology
In the time of two more than ten years in the past, the micro machining process of domestic and international application silicon or body Micrometer-Nanometer Processing Technology have processed a variety of little oscillation gyros, but little for various reasons oscillation gyro is difficult to reach the high precision of traditional gyro.The nineties in last century, people such as Shearwood have proposed a kind of electromagnetic suspension micro-rotary gyro, the electromagnetic suspension micro-rotary gyro is made up of major parts such as planar coil, induction electrode and little rotors, and wherein planar coil is divided into three kinds of suspended coil, revolving coil and ballast coils again according to its function difference.The electromagnetic suspension micro-rotary gyro relies on electromagnetic induction principle and electromagnetic force theory to be suspended and rotates, the planar coil top is placed with little rotor, suspended coil is positioned at the position at close center, near suspended coil is revolving coil, revolving coil can be divided into heterogeneous, little rotor is in the rotating magnetic field, and what be in the stator coil outermost is ballast coil, and also distributing between the stator coil has the sensing capacitance electrode.
Find that through literature search U.S. Patent number is to prior art: 5955800, name is called: suspension system (Leivitation Systems).Mentioning this system in this patent literary composition is that following components is formed: a) maximum gauge is the high conductivity body of 1500 μ m; B) suspending power generation device; C) micro device that rotor is rotated.Adopt electromagnetic force from steady structure at this electromagnetic suspension micro-rotary gyro.In the electromagnetic suspension micro-rotary gyro, when little rotor relative stator was in the center, the electromagnetic force of responding on little rotor distributed axisymmetricly, thereby its cross component force is zero.Because extraneous interference, make little rotor center displacement take place its stator coil center relatively, the electromagnetic force of responding on little rotor will be asymmetric distribution, thereby generation cross component force, in structure reasonable in design, the off-centered direction of the direction of cross component force and rotor is opposite, thereby stops little rotor to be dished out.This electromagnetic field distribution asymmetry that causes owing to little rotor eccentricity, and then the stable suspersion process that stops little rotor to be dished out is called as suspending from steady of little rotor.Certainly there is intrinsic deficiency in steady suspension of little rotor, the lateral rigidity of microactuator suspension rotor is provided by side force, and the size of side force increases along with the increase of offset, lateral rigidity when therefore little rotor is in the center is almost nil, for very poor from little rotor antijamming capability of steady suspended state, the extraneous disturbance that has slightly all can cause the swing of little rotor in the center, and this steady operation to the little gyro of electromagnetic suspension rotor is totally unfavorable.In addition, being under steady duty that the little gyro requirement of electromagnetic suspension rotor side direction disturbs can not be too big, in case when the side direction perturbed force surpassed the electromagnetic force cross component force limit, little rotor will be dished out, out of trim.These deficiencies have limited the application of electromagnetic suspension micro-rotary gyro.
Also find in the retrieval, in " Development of a levitated micromotor forapplication as a gyroscope " (applied research of floated micro motor in gyro) article of 85 pages of magazine " Sensors and Actuators " (sensor and actuator) the 83rd volumes (2000), people such as Shearwood have provided the achievement in research of single stator electromagnetic suspension micro-rotary gyro.At diameter is 520 microns, and thickness is 12 microns rotor, and the maximum (top) speed that obtains is 1000 commentaries on classics per minutes.This rotating speed does not reach the requirement of the little gyro of high precision far away.Have offset when analyzing one of reason that little rotor speed can not further improve in the literary composition and be little rotor rotation, along with the raising of rotating speed, the centrifugal force of little rotor increases, and final little rotor is dished out under action of centrifugal force, loses stable rotation.This is the intrinsic defective of electromagnetic suspension micro-rotary gyro under steady duty.
Summary of the invention
The objective of the invention is to overcome deficiency of the prior art, a kind of two-rotor statically stable electromagnetic suspension micro-rotary gyro is provided, adopt two stator sandwiched type structures, and around stator, be distributed with a plurality of electrostatic attraction electrodes.The electrostatic force that provides by electrostatic attraction electrode increases the lateral rigidity of little rotor, and two-rotor statically stable electromagnetic suspension micro-rotary gyro has solved disadvantages of background technology.
The present invention is achieved by the following technical solutions, the present invention includes: go up stator, following stator, electrostatic attraction electrode, O-ring seal, little rotor.Last stator is located on the matrix, and is fixedly connected with last matrix formation; Following stator is located on the lower substrate, and formation is fixedly connected with lower substrate; Outer rim at lower substrate is provided with O-ring seal, and formation is fixedly connected with lower substrate; O-ring seal and last matrix form by bonding technology and are fixedly connected, little rotor last stator, down under the effect of stator field electromagnetic force stable suspersion in the closed cavity of last matrix, lower substrate and O-ring seal formation.
Among the present invention, last stator and following stator are symmetrical structures, on last stator and play stator, all be distributed with stable suspersion coil outer ring, sensing electrode, tie stable suspersion coil inner ring, revolving coil from outside to inside successively, following stator central authorities also are provided with the anti-post of adhering.Separate by O-ring seal between the upper and lower stator, form little working rotor cavity of sealing.Outboard shafts at upper and lower stator is symmetrically distributed with a plurality of electrostatic attraction electrodes.Respectively be distributed with four suspending stabilized coils on upper and lower stator, suspending stabilized coil distributes in a circumferential direction axisymmetricly.The magnetic field force that suspending stabilized coil magnetic field is responded in little rotor makes little rotor stability be suspended in the central authorities of cavity.Near on the position of upper and lower stator center eight revolving coils are being arranged respectively, the rotating magnetic field that revolving coil produces makes little rotor rotation.Two sensing electrodes are all arranged in each suspending stabilized coil, and the electric capacity that sensing electrode and little rotor form is used for the detection of little rotor space position.
In structure of the present invention, little working rotor is in the space magnetic field that upper and lower stator forms, the electromagnetic force of induction is with the central authorities of little rotor " clamping " at cavity, thereby the little rotor that suspends is controlled in certain height, has improved the impact resistance of little rotor on short transverse.Increase along with the stable suspersion electric current, little rotor hoverheight in cavity can not change, but improved little rotor vertically and the rigidity on the horizontal direction, the hoverheight of little rotor and vertically and the rigidity on the horizontal direction can be by change about the size of current of the suspending stabilized coil of stator regulate.Rigidity on the high horizontal direction helps the raising of little rotary speed of rotator.Double-stator structure can increase the rotary torque that rotating magnetic field produces greatly, and this is owing to increased the quantity of revolving coil than this structure of single stator structure, thereby has increased the intensity of rotating magnetic field; In addition, little rotor is controlled on the very little hoverheight, and this can improve the rotary torque of little rotor.
After little rotor stability suspended, by apply FEEDBACK CONTROL voltage on the peripheral electrostatic attraction electrode that distributes of stator, the electrostatic field around the electrostatic attraction electrode was responded to electrostatic force on little rotor.When the sensing electrode on the upper and lower stator detect little rotor side direction exist eccentric in, by increase voltage on corresponding electrostatic attraction electrode, the electrostatic force of generation is withdrawn into middle position with little rotor.Can improve the lateral rigidity that is in little rotor under the suspended state like this.The electromagnetic suspension micro-rotary gyro of the double-stator structure that employing electrostatic force is stable can increase the side direction antijamming capability of little rotor greatly, this micro-rotary gyro can be operated under the rugged environment, and can be operated under inclination and the vertical state, overcome from stabilized electromagnetic suspension micro-rotary gyro lateral rigidity defect of insufficient.
To the research of suspension rotor micro-rotary gyro still is the thing in nearly ten years, what the electromagnetic suspension micro-rotary gyro of mentioning in the prior art adopted all is single stator structure, little rotor rotation speed of this micro-rotary gyro is not high, and impact resistance is very poor, therefore can't reach practical level.The electrostatic force that the electromagnetic force that the two-rotor statically stable electromagnetic suspension micro-rotary gyro that the present invention proposes produces by stator field up and down and the electrostatic field of electrostatic attraction electrode produce limited little rotor in the horizontal direction with the degree of freedom of vertical direction, by increasing electrostatic attraction electrode in the stator periphery, can increase the lateral rigidity of little rotor greatly, and then the impact resistance of increase electromagnetic suspension rotor micro-rotary gyro, make the electromagnetic suspension rotor micro-rotary gyro to be applied, as the navigation and the guidance of military weapon in a lot of fields, little inertia combined system, the attitude control of micro-nano satellite, virtual reality etc.
Description of drawings
Fig. 1 is an overall construction drawing of the present invention
Fig. 2 is the following stator space view of the little gyro of the present invention;
Fig. 3 is the vertical view of suspending stabilized coil, revolving coil, sensing electrode and the anti-adhesion post of the little gyro of the present invention;
Fig. 4 is the revolving coil of the little gyro of the present invention, the space view of anti-adhesion post;
Fig. 5 is the space view of little gyrocontrol suspended coil of the present invention and sensing electrode;
Fig. 6 is the space view of the electrostatic attraction electrode and the O-ring seal of the little gyro of the present invention;
Fig. 7 is little rotor space view of the little gyro of the present invention.
Embodiment
As shown in Figure 1, the present invention includes: last matrix 1, last stator 2, little rotor 3, following stator 4, O-ring seal 5, lower substrate 6.Last stator 2 adopts fine machining method to be produced on the matrix 1 and 1 formation of last matrix is fixedly connected.Following stator 4 adopts fine machining method to be produced on the lower substrate 6 and lower substrate 6 formation are fixedly connected.Except being manufactured with the anti-adhesion post 12 on the stator 4 down, other structures and the last stator 2 of following stator 4 are identical.Adopting fine machining method to be manufactured with O-ring seal 5 and lower substrate 6 in the outer rim of lower substrate 6 forms and is fixedly connected.Utilize bonding technology, O-ring seal 5 and last matrix 1 form and are fixedly connected.Little rotor 3 last stator 2, down under the effect of stator 4 magnetic field electromagnetic forces stable suspersion in the closed cavity of last matrix 1, lower substrate 6 and O-ring seal 5 formation.On last stator 2 and play stator 4, all be distributed with stable suspersion coil outer ring 7, sensing electrode 8, tie 9, stable suspersion coil inner ring 10, revolving coil 11 from outside to inside successively, following stator 4 central authorities also are provided with the anti-post 12 of adhering.
Shown in Fig. 2,3, on following stator 4, be distributed with stable suspersion coil outer ring 7, sensing electrode 8, tie 9, stable suspersion coil inner ring 10, revolving coil 11, anti-adhesion post 12 from outside to inside successively.
As shown in Figure 4, revolving coil 11 is positioned at the position at close center of following stator 4, and example of the present invention is selected 8 revolving coils 11 for use, is symmetrical distribution in a circumferential direction.The external diameter of revolving coil 11 is bigger than the internal diameter of little rotor 3.In order to form rotating magnetic field, adjacent revolving coil current and phase difference is 90 °.In each revolving coil inside anti-adhesion post 12 is arranged, anti-adhesion post 12 is than stable suspersion coil outer ring 7, tie 9, stable suspersion coil inner ring 10, revolving coil 11 and sensing electrode 8 high 3 to 5 microns.When little gyro quit work, anti-adhesion post 12 can reduce the contact area between little rotor 3 and the following stator 4, can prevent the generation of little rotor 3 adhesions.
As shown in Figure 5, each stable suspersion coil outer ring 7, tie 9 and stable suspersion coil inner ring 10 link together, and form the stable suspersion coil of sealing.The stable suspersion coil has 4, is symmetrical distribution at circumferencial direction.The stable suspersion coil is positioned at the outside of stator down.Stable suspersion coil outer ring 7 diameters are bigger than the external diameter of little rotor, and the diameter of stable suspersion coil inner ring 10 is littler than the external diameter of little rotor.When being connected with the phase place exchange current identical with amplitude in four stable suspersion coils, alternating magnetic field can induce electromagnetic force in little rotor 3.The electromagnetic force that little rotor 3 central authorities induce distributes near rotational symmetry, and it is made a concerted effort straight up, overcomes the suffered action of gravity of little rotor 3.Little rotor 3 outside electromagnetic forces are also for tilting, and when little rotor 3 does not have eccentric the time, there are not the component of horizontal direction in little rotor 3 outside electromagnetic forces near the rotational symmetry distribution yet.When there is when departing from the upper and lower relatively in the horizontal direction stator of little rotor 2,4 centers, because little rotor outside electromagnetic force no longer is symmetrical distribution, can produce the component on the horizontal direction, divide force direction to point to the center of circle, can prevent that little rotor from being dished out.Each stable suspersion coil inside all has a pair of sensing electrode 8, and the capacitance that forms between they and the little rotor 3 changes with the position of little rotor 3 is different with attitude.Eight sensing electrodes 8 form four and detect locus and the attitude that electric capacity can detect little rotor 3.
As shown in Figure 6, the outer rim at following stator 4 is distributed with electrostatic attraction electrode 13 and O-ring seal 5.O-ring seal 5 is higher 20 to 30 microns than electrostatic attraction electrode 13.Electrostatic attraction electrode 13 has eight, and adjacent two electrostatic attraction electrodes 13 form a pair of electrostatic attraction electrode.When sensing electrode 8 detects little rotor after on certain direction lateral shift taking place, identical by the electrostatic attraction electrode on the respective direction being applied size, opposite polarity voltage, thus the little rotor 3 after suspending is applied electrostatic force, little rotor 3 is withdrawn into the center.By increasing the normal threshold voltage of electrostatic attraction electrode, can increase the lateral rigidity after little rotor 3 suspends.Electrostatic attraction electrode 13 and O-ring seal all belong to high aspect ratio structure, can adopt LiGA or UV-LiGA technology to make.
Except not anti-adhesion post 12, other structures of last stator 2 and following stator 4 are identical.Because upper and lower stator 2,4 all can produce electromagnetic force, little rotor 3 not only can retrain motion in the horizontal direction under the effect of electromagnetic force, has also retrained the motion of in the vertical direction simultaneously, has increased impact resistance greatly.
As shown in Figure 7, little rotor 3 is a disc conductor, and the outer rim of disc conductor is between stable suspersion coil outer ring 7, the stable suspersion coil inner ring 10.
Stable suspersion coil and sensing electrode all are planar structures, and material generally adopts electric conductivity copper preferably, adopt photoetching to electroplate the fine machining method manufacturing.In order to reduce the dissipation of electromagnetic energy, the matrix material employing magnetic property material of the little rotor of ferrite preferably is electric conductivity copper or an aluminium preferably, can adopt laser processing manufacturing.Anti-adhesion post can be realized by the graphical etching of deposition of aluminium oxide.For the insulation between little rotor and matrix upper conductor is provided, all deposit one deck insulating material on coil or the electrode.
Claims (9)
1, a kind of two-rotor statically stable electromagnetic suspension micro-rotary gyro, comprise: last matrix (1), last stator (2), little rotor (3), following stator (4), O-ring seal (5), lower substrate (6), it is characterized in that: go up stator (2) and be located on the matrix (1), and formation is fixedly connected with last matrix (1); Following stator (4) is located on the lower substrate (6), and and lower substrate (6) form and to be fixedly connected; Outer rim at lower substrate (6) is provided with O-ring seal (5), and and lower substrate (6) form and to be fixedly connected; O-ring seal (5) and last matrix (1) form by bonding technology and are fixedly connected, little rotor (3) last stator (2), down under the effect of stator (4) magnetic field electromagnetic force stable suspersion in the closed cavity of last matrix (1), lower substrate (6) and O-ring seal (5) formation; On last stator (2) and following stator (4), all be distributed with stable suspersion coil outer ring (7), sensing electrode (8), tie (9), stable suspersion coil inner ring (10), revolving coil (11) from outside to inside successively, following stator (4) central authorities also are provided with anti-adhesion post (12), are distributed with electrostatic attraction electrode (13) in the outer rim of playing stator (4).
2, two-rotor statically stable electromagnetic suspension micro-rotary gyro according to claim 1, it is characterized in that, revolving coil (11) is positioned at the position at close center of following stator (4), be symmetrical distribution in a circumferential direction, the external diameter of revolving coil (11) is bigger than the internal diameter of little rotor (3), and this little rotor (3) is an annular.
3, two-rotor statically stable electromagnetic suspension micro-rotary gyro according to claim 1 is characterized in that, adjacent revolving coil (11) current and phase difference is 90 °, and anti-adhesion post (12) is arranged in each revolving coil (11) inside.
4, two-rotor statically stable electromagnetic suspension micro-rotary gyro according to claim 1, it is characterized in that anti-adhesion post (12) is than high 3 to 5 microns of stable suspersion coil outer ring (7), tie (9), stable suspersion coil inner ring (10), revolving coil (11) and sensing electrode (8).
5, two-rotor statically stable electromagnetic suspension micro-rotary gyro according to claim 1, it is characterized in that, each stable suspersion coil outer ring (7), tie (9) and stable suspersion coil inner ring (10) link together, form the stable suspersion coil of sealing, the stable suspersion coil has 4, be symmetrical distribution at circumferencial direction, the stable suspersion coil is positioned at the outside of stator (4) down, each stable suspersion coil inside all has a pair of sensing electrode (8), and the capacitance that forms between they and the little rotor (3) changes with the position of little rotor (3) is different with attitude.
6, two-rotor statically stable electromagnetic suspension micro-rotary gyro according to claim 5 is characterized in that, stable suspersion coil outer ring (7) diameter is bigger than the external diameter of little rotor (3), and the diameter of stable suspersion coil inner ring (10) is littler than the external diameter of little rotor (3).
7, according to claim 5 or 6 described two-rotor statically stable electromagnetic suspension micro-rotary gyros, it is characterized in that, little rotor (3) is a disc conductor, and the outer rim of disc conductor is between stable suspersion coil outer ring (7), the stable suspersion coil inner ring (10).
8, two-rotor statically stable electromagnetic suspension micro-rotary gyro according to claim 1 is characterized in that, electrostatic attraction electrode (13) has eight, and adjacent two electrostatic attraction electrodes (13) form a pair of electrostatic attraction electrode.
9, two-rotor statically stable electromagnetic suspension micro-rotary gyro according to claim 1 is characterized in that, O-ring seal (5) is distributed in down the outer rim of stator (4), and O-ring seal (5) is higher 20 to 30 microns than electrostatic attraction electrode (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101162916A CN100510629C (en) | 2006-09-21 | 2006-09-21 | Two-rotor statically stable electromagnetic suspension micro-rotary gyro |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101162916A CN100510629C (en) | 2006-09-21 | 2006-09-21 | Two-rotor statically stable electromagnetic suspension micro-rotary gyro |
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| Publication Number | Publication Date |
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| CN1920480A CN1920480A (en) | 2007-02-28 |
| CN100510629C true CN100510629C (en) | 2009-07-08 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2006101162916A Expired - Fee Related CN100510629C (en) | 2006-09-21 | 2006-09-21 | Two-rotor statically stable electromagnetic suspension micro-rotary gyro |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101561276B (en) * | 2009-05-27 | 2011-06-01 | 上海交通大学 | Suspension motor micro gyro operated by adopting electromagnetism and corona |
| JP2017525325A (en) * | 2014-06-11 | 2017-08-31 | アークス パックス ラブズ，インコーポレイテッド | Propulsion and control for magnetically levitated vehicles |
| CN107971199A (en) * | 2016-10-25 | 2018-05-01 | 钟志刚 | Phased electromagnetic oriented vibration device |
| CN107957506B (en) * | 2017-10-11 | 2019-11-19 | 杭州电子科技大学 | A kind of three-dimensional acceleration detection method |
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Granted publication date: 20090708 Termination date: 20120921 |