CN100526801C - Flexible hard magnet compensation type static moment-increasing fluid gyroscope - Google Patents
Flexible hard magnet compensation type static moment-increasing fluid gyroscope Download PDFInfo
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- CN100526801C CN100526801C CNB2007100414628A CN200710041462A CN100526801C CN 100526801 C CN100526801 C CN 100526801C CN B2007100414628 A CNB2007100414628 A CN B2007100414628A CN 200710041462 A CN200710041462 A CN 200710041462A CN 100526801 C CN100526801 C CN 100526801C
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Abstract
A flexible hard-magnetic compensation type electrostatic moment fluid micro-gyroscopes which belongs to micro-electromechanical system domain includes a rotor, a stator, a flexible girder, and a flexible compensation hard-magnetic ring, wherein the rotor is composed by a substrate and a ring cavity full of metal fluid, and the stator comprises a second substrate, a rotary drive coil, a detecting electrode, a feedback moment coil and a flexible compensation electrostatic electrode, and eight rotary drive coils, eight detecting electrodes, eight feedback moment electrostatic electrodes, and four flexible hard-magnetic compensation plates are distributed on the second substrate from inside to outside. The invention is capable of making the stator generate angular momentum using the high speed rotation of metal fluid without relative rotation between rigid structures, eliminating the influence of interference moment caused by flexible girder transmogrification by the magnetic moment generated between the flexible compensation hard-magnetic plate and the flexible compensation hard-magnetic ring, and performing feedback control to the rotor by using the feedback moment electrostatic electrode.
Description
Technical field
What the present invention relates to is a kind of little gyro of field of micro electromechanical technology, specifically is a kind of flexible hard magnet compensation type static moment-increasing fluid gyroscope.
Background technology
The current gyroscope that is widely studied can be divided into two kinds, and a kind of is the suspension rotor gyro that declines, and another kind is a flexure gyroscope, and they respectively have its characteristics.The suspension rotor gyro that declines, rotor is high speed rotating under suspended state, the bigger raising that rotating speed obtains, help to realize high precision, gyro generally adopts double-stator structure but suspension rotor declines, and needs process side to control electrode for the lateral rigidity that improves rotor, makes the decline processing technology complexity of gyro of suspension rotor, and being subjected to the influence of air resistance in order to remove rotor, the common suspension rotor gyro that declines will use Vacuum Package.Flexure gyroscope is a kind of high-performance, the higher gyro of precision cheaply, and it replaces traditional suspension technology and bring a series of advantage with flexible support, so obtain widespread use in inertial navigation system.
Find that through the literature search to prior art the Chinese patent publication number is: CN1712894A, name is called: flexible microgyrorotor and electromagnetic drive and dynamic tune.Mentioning this system in this patent literary composition comprises: double-stator structure, motor-driven bearing, the rotor that links to each other with bearing.This system drives the rotor high-speed rotation by the motor-driven bearing to produce angular momentum, adopt double-stator structure, used two rotors of driving rotor and rotor, thus complex structure, and on technology, be difficult to utilize micro fabrication accurately to process the motor-driven bearing, the technological requirement height.
Summary of the invention
The objective of the invention is to overcome deficiency of the prior art, propose a kind of flexible hard magnet compensation type static moment-increasing fluid gyroscope.This gyroscope uses single stator structure, and rotor structure is simple, and the angular momentum of gyro is that the high speed rotating by metal fluid produces, and by flexible beam rotor and stator is connected as a single entity, and makes this gyroscope have very strong impact resistance.Rotor matrix is made material with metal, and the rotor upper surface has been processed an annulus of being made by hard magnetic material, and this annulus and rotor are connected as a single entity.Process hard magnetic material on stator, the Hard Magnetic annulus of hard magnetic material on the stator and rotor upper surface has magnetic attraction, thereby can compensate the disturbance torque that flexible beam produces, and makes rotor become free supporter.The processing detecting electrode is by forming the offset situation that differential capacitance comes detection rotor with rotor on stator, and uses feedback to add the square electrostatic attraction electrode rotor is carried out FEEDBACK CONTROL.
The present invention is achieved by the following technical solutions, the present invention includes: rotor, flexible beam, stator, flexible compensation Hard Magnetic annulus.Rotor comprises first matrix and annular housing, and annular housing is positioned at first matrix, is marked with metal fluid in the annular housing, and the metal fluid in the annular housing rotates under the effect of the rotation rotating magnetic field that drive coil applied, and produces angular momentum; Flexible compensation Hard Magnetic annulus links to each other with rotor, is positioned at the upper surface of rotor; Rotor and stator connect as one by flexible beam, and flexible beam can corresponding distortion take place along with the skew of rotor and stator relative position; Stator comprises second matrix, the rotation drive coil, detecting electrode, feedback adds square electrostatic attraction electrode and flexible compensation Hard Magnetic pole plate, eight rotation drive coils are from inside to outside distributing on second matrix, eight detecting electrodes, eight feedbacks add the square electrostatic attraction electrode, four flexible compensation Hard Magnetic pole plates, wherein feedback adds the square electrostatic attraction electrode, it is on the annulus at center with the stator center that flexible compensation Hard Magnetic pole plate is in same, feedback adds the square electrostatic attraction electrode, the internal diameter of flexible compensation Hard Magnetic pole plate is identical respectively with external diameter, two next-door neighbours' feedback adds the square electrostatic attraction electrode and forms a feedback to add the square electrostatic attraction electrode right, feedback adds square electrostatic attraction electrode pair and replaces each other with flexible compensation Hard Magnetic pole plate, the rotation drive coil is positioned at the position at the most close center of stator, eight rotation drive coils are symmetrical distribution in a circumferential direction, eight detecting electrodes are distributing in the outside of rotation drive coil, eight detecting electrodes are symmetrical distribution in a circumferential direction, and the four pairs of feedbacks add the square electrostatic attraction electrode and four Hard Magnetics compensation pole plates all are symmetrical distribution at circumferencial direction.
The structure of flexible hard magnet compensation type static moment-increasing fluid gyroscope of the present invention is to adopt microfabrication (fine body processing and fine surface working) technology to process.The matrix material of rotor is a metal, and the matrix material of rotor also can be to use soft magnetic materials such as nickel, to obtain better flexible compensation effect.The matrix of stator is a glass, in processing Seed Layer on glass, again by a series of micro fabrications on Seed Layer, process rotation drive coil, detecting electrode, feedback adds square electrostatic attraction electrode and flexible compensation Hard Magnetic pole plate, it all is to be material with copper that rotation drive coil, detecting electrode, feedback add the square electrostatic attraction electrode, flexible compensation Hard Magnetic pole plate and flexible compensation Hard Magnetic annulus are made material with Hard Magnetic, and the material of flexible beam is a nickel.The matrix of stator also can use metal to make material, with metal during as matrix material, need be on matrix sputter one deck Al
2O
3Insulation course is again at Al
2O
3Processing rotation drive coil, detecting electrode, feedback add square electrostatic attraction electrode and flexible compensation Hard Magnetic pole plate on the insulation course.
Total system of the present invention adopts single stator, single rotor, and by flexible beam rotor and stator is connected as a single entity, and makes system architecture simple, and is easy to process, possessed very strong impact resistance again simultaneously, can satisfy under complex environment and use.Produce the angular momentum of gyro by the high speed rotating of metal fluid, do not have relatively rotating between the rigid structure, the system that makes does not need to adopt Vacuum Package.Drive the metal fluid high speed rotating by the rotation drive coil.Disturbance torque and three kinds of technology of static moment-increasing FEEDBACK CONTROL that the metal fluid high speed rotating produces angular momentum, Hard Magnetic compensation flexible beam have fully been merged among the present invention, and adopt the MEMS technology, characteristics such as make that this gyroscope has again that cost is low, precision is high, easy batch, power consumption are little.
Rotor matrix of the present invention is to make material with metal, and the flexible compensation Hard Magnetic annulus of processing compensates the disturbance torque that flexible beam produces by magnetic attraction on flexible compensation Hard Magnetic pole plate of processing and rotor on the stator, makes rotor become free supporter.Processing detecting electrode and rotor form the offset situation that differential capacitance comes detection rotor on stator, and use feedback to add the square electrostatic attraction electrode rotor is carried out FEEDBACK CONTROL.
Description of drawings
Fig. 1 is a general structure stereographic map of the present invention
Fig. 2 is stator structure stereographic map under the present invention
Fig. 3 is a flexible beam stereographic map of the present invention
Fig. 4 is a rotor structure cut-open view of the present invention
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment has provided detailed embodiment and process being to implement under the prerequisite with the technical solution of the present invention, but protection scope of the present invention is not limited to following embodiment.
As Fig. 1, Fig. 2, Fig. 3, shown in Figure 4, present embodiment comprises: rotor 1, flexible beam 2, stator 3, flexible compensation Hard Magnetic annulus 4.Flexible compensation Hard Magnetic annulus 4 links to each other with rotor 1, and rotor 1 connects as one by flexible beam 2 with stator 3, rotor 1 is made of first matrix 9 and annular housing 10, and stator 3 is added square electrostatic attraction electrode 7 and constituted with flexible compensation Hard Magnetic pole plate 8 by second matrix 11, rotation drive coil 5, detecting electrode 6, feedback.
As shown in Figure 2, rotation drive coil 5, detecting electrode 6, the feedback of distributing from inside to outside on second matrix 11 of stator 3 adds square electrostatic attraction electrode 7, flexible compensation Hard Magnetic pole plate 8, wherein feedback adds square electrostatic attraction electrode 7, flexible compensation Hard Magnetic pole plate 8 to be in same is on the annulus in the center of circle with stator 3 centers, and the internal diameter that feedback adds square electrostatic attraction electrode 7, flexible compensation Hard Magnetic pole plate 8 is identical respectively with external diameter.Two next-door neighbours' feedback adds square electrostatic attraction electrode 7 and forms a feedback to add the square electrostatic attraction electrode right, and feedback adds the square electrostatic attraction electrode and pair replaces each other with flexible compensation Hard Magnetic pole plate 8.Selected for use eight rotation drive coils 5, eight detecting electrodes 6, four pairs of feedbacks to add square electrostatic attraction electrode 7 and four flexible compensation Hard Magnetic pole plates 8 among the present invention.Rotation drive coil 5 is positioned at the position at the most close center of stator 3, and eight rotation drive coils 5 are symmetrical distribution in a circumferential direction.In order to form rotating magnetic field, adjacent rotation drive coil 5 current and phase differences are 90 °.Eight detecting electrodes 6 are distributing in the outside of rotation drive coil 5, eight detecting electrodes 6 are symmetrical distribution in a circumferential direction, the capacitance that forms between detecting electrode 6 and the rotor 1 is with different variation of attitude of rotor 1, changes thereby detecting electrode 6 and rotor 1 form the attitude that differential capacitance can detection rotor 1.The four pairs of feedbacks add square electrostatic attraction electrode 7 and are symmetrical distribution at circumferencial direction, be used for detecting 6 the situations that depart to rotor 1 according to detecting electrode, add on the square electrostatic attraction electrode 7 in feedback and to apply voltage, by electrostatic induction, to on rotor 1, produce induced charge, produce electrostatic force and make rotor return to the equilibrium position thereby add between square electrostatic attraction electrode 7 and the rotor 1, to reach the effect of rotor 1 being carried out FEEDBACK CONTROL in feedback.When skew took place rotor 1, because flexible beam 2 can produce disturbance torque, this disturbance torque can make rotor 1 depart from the equilibrium position, therefore needed this disturbance torque of compensation, and the purpose of compensation is in order to make rotor 1 become free supporter.Four flexible compensation Hard Magnetic pole plates 8 are symmetrical distribution at circumferencial direction and are used to compensate the disturbance torque that flexible beam 2 produces.Obtain compensation effect, at flexible compensation Hard Magnetic annulus 4 of rotor 1 upper surface processing, the internal diameter of flexible compensation Hard Magnetic annulus 4 is identical with the internal diameter of flexible compensation Hard Magnetic pole plate 8 on the circumferencial direction that with stator 3 centers is the center of circle on the stator 3, and the external diameter of flexible compensation Hard Magnetic annulus 4 is identical with the external diameter of flexible compensation Hard Magnetic pole plate 8 on the circumferencial direction that with stator 3 centers is the center of circle on the stator 3.The one side that this flexible compensation Hard Magnetic annulus 4 is connected with rotor 1 is that S utmost point hard magnetic material layer, another side are N utmost point hard magnetic material layer, and flexible compensation Hard Magnetic pole plate 8 also is a hard magnetic material on the stator 3, the one side towards rotor 1 of flexible compensation Hard Magnetic pole plate 8 is that the N utmost point, another side are the S utmost point, therefore between flexible compensation Hard Magnetic pole plate 8 and the flexible compensation Hard Magnetic annulus 4 magnetic attraction is arranged.When rotor 1 is in the equilibrium position, total magnetic attraction that flexible compensation Hard Magnetic annulus 4 is subjected to flexible compensation Hard Magnetic pole plate 8 is zero, because rotor 1 links to each other with flexible compensation Hard Magnetic annulus 4, thereby make that the rotor 1 suffered total force that hard magnetic material applied is zero; When rotor 1 departs from the equilibrium position, flexible compensation Hard Magnetic annulus 4 is subjected to the moment of total magnetic attraction generation of flexible compensation Hard Magnetic pole plate 8, that is the moment that produces of the suffered total force that hard magnetic material applied of rotor 1 with flexible post 2 because the disturbance torque of deformation generation offsets, reach compensation effect.
As shown in Figure 3, by flexible beam 2 as shown in Figure 3 rotor 1 and stator 3 are connected as a single entity, the structure of flexible beam 2 is the right cylinder of being small at both ends and big in the middle, and cylindrical two size is identical, and the two ends of flexible beam 2 are connected with the center of rotor 1 with stator 3 respectively.
As shown in Figure 4, rotor 1 is to be made of first matrix 9 and annular housing 10.In first matrix 9, process an annular housing 10 by micro fabrication, the internal diameter of annular housing 10 is identical with the internal diameter of rotation drive coil 5 on the circumferencial direction that with stator 3 centers is the center of circle on the stator 3, and the external diameter of annular housing 10 is identical with the external diameter of rotation drive coil 5 on the circumferencial direction that with stator 3 centers is the center of circle on the stator 3.Use micro fabrication to punch in matrix, metal fluid injects first matrix 9 by the hole, thereby forms the endless metal fluid chamber.Metal fluid in the annular housing 10 is subjected to rotating the effect of the rotating magnetic field that drive coil 5 applies, and high speed rotating produces angular momentum, thereby can respond the variation of extraneous angular velocity.
The structure of flexible hard magnet compensation type static moment-increasing fluid gyroscope of the present invention is to adopt microfabrication (fine body processing and fine surface working) technology to process.The material of first matrix 9 of rotor 1 is a nickel, the material of second matrix 11 of stator 3 is a glass, in processing Seed Layer on glass, again by a series of micro fabrications on Seed Layer, process rotation drive coil 5, detecting electrode 6, feedback adds square electrostatic attraction electrode 7 and flexible compensation Hard Magnetic pole plate 8, it all is to be material with copper that rotation drive coil 5, detecting electrode 6, feedback add square electrostatic attraction electrode 7, flexible compensation Hard Magnetic pole plate 8 and flexible compensation Hard Magnetic annulus 4 are made material with Hard Magnetic, and the material of flexible beam 2 is a nickel.
Claims (9)
1, a kind of flexible hard magnet compensation type static moment-increasing fluid gyroscope, comprise: rotor (1), flexible beam (2), stator (3), flexible compensation Hard Magnetic annulus (4), it is characterized in that, rotor (1) connects as one by flexible beam (2) with stator (3), flexible compensation Hard Magnetic annulus (4) links to each other with rotor (1), is positioned at the upper surface of rotor (1);
Rotor (1) comprises first matrix (9) and annular housing (10), and annular housing (10) is positioned at first matrix (9); Be marked with metal fluid in the annular housing (10) in the rotor (1), the metal fluid in the annular housing (10) is rotation under the effect of the rotating magnetic field that rotation drive coil (5) is applied, and produces angular momentum;
Stator (3) comprises second matrix (11), rotation drive coil (5), detecting electrode (6), feedback adds square electrostatic attraction electrode (7) and flexible compensation Hard Magnetic pole plate (8), eight rotation drive coils (5) are from inside to outside distributing on second matrix (11), eight detecting electrodes (6), eight feedbacks add square electrostatic attraction electrode (7), four flexible compensation Hard Magnetic pole plates (8), eight rotation drive coils (5) are symmetrical distribution in a circumferential direction, rotation drive coil (5) is positioned at the position at the most close center of stator (3), eight detecting electrodes (6) are distributing in the outside of rotation drive coil (5), eight detecting electrodes (6) are symmetrical distribution in a circumferential direction, and the four pairs of feedbacks add square electrostatic attraction electrode (7) and four flexible compensation Hard Magnetic pole plates (8) all are symmetrical distribution at circumferencial direction.
2, flexible hard magnet compensation type static moment-increasing fluid gyroscope according to claim 1, it is characterized in that the internal diameter of the annular housing (10) on the described rotor (1) is identical with the internal diameter of upward rotation drive coil (5) on the circumferencial direction that with stator (3) center is the center of circle of second matrix (11) of stator (3).
3, flexible hard magnet compensation type static moment-increasing fluid gyroscope according to claim 1, it is characterized in that, the structure of described flexible beam (2) is the right cylinder of being small at both ends and big in the middle, and cylindrical two size is identical, the two ends of flexible beam (2) are connected with the center of rotor (1) with stator (3) respectively, and flexible beam (2) can corresponding distortion take place along with the skew of rotor (1) and stator (3) relative position.
4, flexible hard magnet compensation type static moment-increasing fluid gyroscope according to claim 1, it is characterized in that, described stator (3), wherein feedback adds square electrostatic attraction electrode (7), flexible compensation Hard Magnetic pole plate (8) to be in same is on the annulus at center with the stator center, the internal diameter that feedback adds square electrostatic attraction electrode (7), flexible compensation Hard Magnetic pole plate (8) is identical respectively with external diameter, two next-door neighbours' feedback adds square electrostatic attraction electrode (7) and forms a feedback to add the square electrostatic attraction electrode right, and feedback adds the square electrostatic attraction electrode and pair replaces each other with flexible compensation Hard Magnetic pole plate (8).
5, flexible hard magnet compensation type static moment-increasing fluid gyroscope according to claim 1 and 2, it is characterized in that the external diameter of rotation drive coil (5) on the circumferencial direction that with stator (3) center is the center of circle on second matrix (11) of the external diameter of described annular housing (10) and stator (3) is identical.
6, flexible hard magnet compensation type static moment-increasing fluid gyroscope according to claim 1, it is characterized in that upward the internal diameter of flexible compensation Hard Magnetic pole plate (8) on the circumferencial direction that with stator (3) center is the center of circle is identical with stator (3) for the internal diameter of described flexible compensation Hard Magnetic annulus (4).
7, according to claim 1 or 6 described flexible hard magnet compensation type static moment-increasing fluid gyroscopes, it is characterized in that upward the external diameter of flexible compensation Hard Magnetic pole plate (8) on the circumferencial direction that with stator (3) center is the center of circle is identical with stator (3) for the external diameter of described flexible compensation Hard Magnetic annulus (4).
8, flexible hard magnet compensation type coil moment-increasing fluid gyroscope according to claim 1 and 2 is characterized in that, adjacent rotation drive coil (5) current and phase difference is 90 °.
9, flexible hard magnet compensation type coil moment-increasing fluid gyroscope according to claim 1, it is characterized in that, the one side that described flexible compensation Hard Magnetic annulus (4) is connected with rotor (1) is that S utmost point hard magnetic material layer, another side are the hard magnetic material layer of the N utmost point, and the last flexible compensation Hard Magnetic pole plate (8) of stator (3) is a hard magnetic material, and the one side towards rotor (1) of flexible compensation Hard Magnetic pole plate (8) is that the N utmost point, another side are the S utmost point.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100414628A CN100526801C (en) | 2007-05-31 | 2007-05-31 | Flexible hard magnet compensation type static moment-increasing fluid gyroscope |
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| CNB2007100414628A CN100526801C (en) | 2007-05-31 | 2007-05-31 | Flexible hard magnet compensation type static moment-increasing fluid gyroscope |
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| CN101055181A CN101055181A (en) | 2007-10-17 |
| CN100526801C true CN100526801C (en) | 2009-08-12 |
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| CNB2007100414628A Expired - Fee Related CN100526801C (en) | 2007-05-31 | 2007-05-31 | Flexible hard magnet compensation type static moment-increasing fluid gyroscope |
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| CN103225651B (en) * | 2013-04-24 | 2015-05-20 | 中国科学院电工研究所 | Superconducting magnetic levitation and static suspension mixing suspension supporting arrangement |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4655096A (en) * | 1984-08-31 | 1987-04-07 | Northrop Corporation | Flexure mount assembly for a dynamically tuned gyroscope |
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Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4655096A (en) * | 1984-08-31 | 1987-04-07 | Northrop Corporation | Flexure mount assembly for a dynamically tuned gyroscope |
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Granted publication date: 20090812 Termination date: 20120531 |