CN100526800C - Flexible static compensation type coil moment-increasing fluid gyroscope - Google Patents
Flexible static compensation type coil moment-increasing fluid gyroscope Download PDFInfo
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- CN100526800C CN100526800C CNB2007100414613A CN200710041461A CN100526800C CN 100526800 C CN100526800 C CN 100526800C CN B2007100414613 A CNB2007100414613 A CN B2007100414613A CN 200710041461 A CN200710041461 A CN 200710041461A CN 100526800 C CN100526800 C CN 100526800C
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Abstract
A flexible electrostatic compensation type electrostatic moment fluid micro-gyroscopes which belongs to micro-electromechanical system domain includes a rotor, a stator, and a flexible girder, wherein the rotor is composed by a substrate and a ring cavity full of metal fluid, and the stator comprises a second substrate, a rotary drive coil, a detecting electrode, a feedback moment coil and a flexible compensation electrostatic electrode, and eight rotary drive coils, eight detecting electrodes, four feedback moment coils, eight flexible compensation electrostatic electrodes are distributed on the second substrate from inside to outside. The invention is capable of making the stator generate angular momentum using the high speed rotation of metal fluid without relative rotation between rigid structures, eliminating the influence of interference moment caused by flexible girder transmogrification by the electrostatic force moment generated by electrostatic induction between the flexible compensation electrostatic electrode and the rotor, and performing feedback control to the rotor by using the feedback moment electrostatic electrode.
Description
Technical field
What the present invention relates to is a kind of little gyro of field of micro electromechanical technology, specifically is a kind of flexible static compensation type coil moment-increasing fluid gyroscope.
Background technology
The current gyroscope that is widely studied can be divided into two kinds, and a kind of is the suspension rotor gyro that declines, and another kind is a flexure gyroscope, and they respectively have its characteristics.The suspension rotor gyro that declines, rotor is high speed rotating under suspended state, the bigger raising that rotating speed obtains, help to realize high precision, gyro generally adopts double-stator structure but suspension rotor declines, and needs process side to control electrode for the lateral rigidity that improves rotor, makes the decline processing technology complexity of gyro of suspension rotor.And being subjected to the influence of air resistance in order to remove rotor, the common suspension rotor gyro that declines will use Vacuum Package.Flexure gyroscope is a kind of high-performance, the higher gyro of precision cheaply, and it replaces traditional suspension technology and bring a series of advantage with flexible support, so obtain widespread use in inertial navigation system.
Find that through the literature search to prior art the Chinese patent publication number is: CN1712894A, name is called: flexible microgyrorotor and electromagnetic drive and dynamic tune.Mentioning this system in this patent literary composition comprises: double-stator structure, motor-driven bearing, the rotor that links to each other with bearing.This system drives the rotor high-speed rotation by the motor-driven bearing to produce angular momentum, adopt double-stator structure, used two rotors of driving rotor and rotor, thus complex structure, and on technology, be difficult to utilize micro fabrication accurately to process the motor-driven bearing, the technological requirement height.
Summary of the invention
The objective of the invention is to overcome deficiency of the prior art, propose a kind of flexible static compensation type coil moment-increasing fluid gyroscope.This gyroscope uses single stator structure, and rotor structure is simple, and the angular momentum of gyro is that the high speed rotating by metal fluid produces, and by flexible beam rotor and stator is connected as a single entity, and makes this gyroscope have very strong impact resistance.Rotor matrix is made material with metal, and machined electrode applies electrostatic force by electrostatic induction to rotor and compensates the disturbance torque that flexible beam produces on stator, makes rotor become free supporter.The processing detecting electrode is by forming the offset situation that differential capacitance comes detection rotor with rotor on stator, and uses feedback to add the square coil rotor is carried out FEEDBACK CONTROL.
The present invention is achieved by the following technical solutions, the present invention includes: rotor, flexible beam, stator.Rotor comprises first matrix and annular housing, and annular housing is positioned at first matrix, is marked with metal fluid in the annular housing, and the metal fluid in the annular housing rotates under the effect of the rotation rotating magnetic field that drive coil applied, and produces angular momentum; Rotor and stator connect as one by flexible beam, and flexible beam can corresponding distortion take place along with the skew of rotor and stator relative position; Stator comprises second matrix, the rotation drive coil, detecting electrode, feedback adds square coil and flexible compensated for electrostatic electrode, eight rotation drive coils are from inside to outside distributing on second matrix, eight detecting electrodes, four feedbacks add the square coil, eight flexible compensated for electrostatic electrodes, wherein feedback adds the square coil, it is on the annulus at center with the stator center that flexible compensated for electrostatic electrode is in same, feedback adds the square coil, the internal diameter of flexible compensated for electrostatic electrode is identical respectively with external diameter, two flexible compensated for electrostatic electrodes that abut one another form flexible compensated for electrostatic electrode pair, flexible compensated for electrostatic electrode pair and feedback add the square coil and replace each other, the rotation drive coil is positioned at the position at the most close center of stator, eight rotation drive coils are symmetrical distribution in a circumferential direction, eight detecting electrodes are distributing in the outside of rotation drive coil, eight detecting electrodes are symmetrical distribution in a circumferential direction, and four feedbacks add the square coil and four pairs of flexible compensated for electrostatic electrodes all are symmetrical distribution at circumferencial direction.
The structure of flexible static compensation type coil moment-increasing fluid gyroscope of the present invention is to adopt microfabrication (fine body processing and fine surface working) technology to process.The matrix material of rotor is a nickel, the matrix of stator is a glass, in processing Seed Layer on glass, again by a series of micro fabrications on Seed Layer, process rotation drive coil, detecting electrode, feedback adds square coil and flexible compensated for electrostatic electrode, it all is to be material with copper that rotation drive coil, detecting electrode, feedback add square electrostatic attraction electrode and flexible compensated for electrostatic electrode, and the material of flexible beam is a nickel.The matrix of stator also can use metal to make material, with metal during as matrix material, need be on the stator matrix sputter one deck Al
2O
3Insulation course is again at Al
2O
3Processing rotation drive coil, detecting electrode, feedback add square coil and flexible compensated for electrostatic electrode on the insulation course.
Total system of the present invention adopts single stator, single rotor, and by flexible beam rotor and stator is connected as a single entity, and makes system architecture simple, and is easy to process, possessed very strong impact resistance again simultaneously, can satisfy under complex environment and use.Drive the angular momentum that the metal fluid high speed rotating produces gyro by the rotation drive coil, do not have relatively rotating between the rigid structure, the system that makes does not need to adopt Vacuum Package.Disturbance torque and three kinds of technology of coil moment-increasing FEEDBACK CONTROL that the metal fluid high speed rotating produces angular momentum, electrostatic Compensation flexible beam have fully been merged among the present invention, and adopt the MEMS technology, characteristics such as make that this gyroscope has again that cost is low, precision is high, easy batch, power consumption are little.
Rotor matrix of the present invention is to make material with nickel, and the flexible compensated for electrostatic electrode of processing produces electrostatic force moment by electromagnetic induction and compensates the disturbance torque that flexible beam produces on stator, makes rotor become free supporter.Processing detecting electrode and rotor form the offset situation that differential capacitance comes detection rotor on stator, and use feedback to add the square coil rotor is carried out FEEDBACK CONTROL.
Description of drawings
Fig. 1 is a general structure stereographic map of the present invention
Fig. 2 is stator structure stereographic map under the present invention
Fig. 3 is a flexible beam stereographic map of the present invention
Fig. 4 is a rotor structure cut-open view of the present invention
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment has provided detailed embodiment and process being to implement under the prerequisite with the technical solution of the present invention, but protection scope of the present invention is not limited to following embodiment.
As Fig. 1, Fig. 2, Fig. 3, shown in Figure 4, present embodiment comprises: rotor 1, flexible beam 2, stator 3.Rotor 1 connects as one by flexible beam 2 with stator 3, and flexible beam 2 can deform along with the skew of rotor 1 and stator 3 relative positions.Rotor 1 is made of first matrix 8 and annular housing 9.Be processed with rotation drive coil 4, detecting electrode 5 on second matrix 10 of stator 3, feedback adds square coil 6, flexible compensated for electrostatic electrode 7.
As shown in Figure 2, rotation drive coil 4, detecting electrode 5, the feedback of distributing from inside to outside on second matrix 10 of stator 3 adds square coil 6, flexible compensated for electrostatic electrode 7, wherein feedback adds square coil 6, flexible compensated for electrostatic electrode 7 to be in same is on the annulus in the center of circle with stator 2 centers, and the internal diameter that feedback adds square coil 6, flexible compensated for electrostatic electrode 7 is identical respectively with external diameter.Two flexible compensated for electrostatic electrodes 7 that are closely adjacent to each other form flexible compensated for electrostatic electrode pair, and flexible compensated for electrostatic electrode pair and feedback add square coil 6 and replace each other.Selected for use eight rotation drive coils 4, eight detecting electrodes 5, four feedbacks to add square coil 6 and four pairs of flexible compensated for electrostatic electrodes 7 among the present invention.Rotation drive coil 4 is positioned at the position at the most close center of stator 3, and eight rotation drive coils 4 are symmetrical distribution in a circumferential direction.In order to form rotating magnetic field, adjacent rotation drive coil 4 current and phase differences are 90 °.Eight detecting electrodes 5 are distributing in the outside of rotation drive coil 4, eight detecting electrodes 5 are symmetrical distribution in a circumferential direction, the capacitance that forms between detecting electrode 5 and the rotor 1 forms the attitude variation that differential capacitance can detect little rotor 1 with different variation of attitude of rotor 1 between detecting electrode 5 and the rotor 1.Four feedbacks add square coil 6 and are symmetrical distribution at circumferencial direction, be used for detecting the situation that rotor 1 departs from horizontal level according to detecting electrode 5, apply voltage on the square coil 6 and produce electromagnetic force and make rotor 1 return to the equilibrium position by adding, to reach the effect of rotor 1 being carried out FEEDBACK CONTROL in feedback.When skew took place rotor 1, because flexible beam 2 can produce disturbance torque, this disturbance torque can cause that rotor 1 departs from the equilibrium position, therefore needed this disturbance torque of compensation, and the result of compensation is in order to make rotor 1 become free supporter, to realize free deflection.Four pairs of flexible compensated for electrostatic electrodes 7 are symmetrical distribution 7 at circumferencial direction and are used to compensate the disturbance torque that flexible beam 2 produces.Obtain compensation effect, use the material of nickel as rotor 1, the flexible compensated for electrostatic electrode 7 of processing applies electrostatic force by electrostatic induction to rotor 1 on stator 3.When rotor 1 was in the equilibrium position, total electrostatic force that the flexible compensated for electrostatic electrode 7 that rotor 1 is subjected to is applied was zero; When rotor 1 departed from the equilibrium position, moment that total electrostatic force that rotor 1 suffered flexible compensated for electrostatic electrode 7 is applied produces and flexible beam 2 reached compensation effect because the disturbance torque that distortion produces offsets.
As shown in Figure 3, by the flexible beam 2 that shows among Fig. 3 rotor 1 and stator 3 are connected as a single entity, the structure of flexible beam 2 is the right cylinder of being small at both ends and big in the middle, and cylindrical two size is identical, and the two ends of flexible beam 2 are connected with the center of rotor 1 with stator 3 respectively.
As shown in Figure 4, rotor 1 is to be made of first matrix 8 and annular housing 9.In first matrix 8, process an annular housing 9 by micro fabrication, the internal diameter of annular housing 9 is identical with the internal diameter of rotation drive coil 4 on the circumferencial direction that with stator 3 centers is the center of circle on the stator 3, and the external diameter of annular housing 9 is identical with the external diameter of rotation drive coil 4 on the circumferencial direction that with stator 3 centers is the center of circle on the stator 3.After annular housing 9 generates, use body processing technology to punch in first matrix 8, metal fluid injects annular housing 9 by the hole, forms the endless metal fluid chamber.Metal fluid in the annular housing 9 is subjected to rotating the effect of the rotating magnetic field that drive coil 4 applies, and high speed rotating produces angular momentum, thereby can respond the variation of extraneous angular velocity.
The structure of flexible static compensation type coil moment-increasing fluid gyroscope of the present invention is to adopt microfabrication (fine body processing and fine surface working) technology to process.First matrix, 8 materials of rotor 1 are nickel.In processing Seed Layer on glass, again by a series of micro fabrications on Seed Layer, process rotation drive coil 4, detecting electrode 5, feedback adds square coil 6 and flexible compensated for electrostatic electrode 7, it all is to be material with copper that rotation drive coil 4, detecting electrode 5, feedback add square coil 6 and flexible compensated for electrostatic electrode 7, and the material of flexible beam 2 is a nickel.
Claims (8)
1, a kind of flexible static compensation type coil moment-increasing fluid gyroscope comprises: rotor (1), flexible beam (2) and stator (3) is characterized in that rotor (1) connects as one by flexible beam (2) with stator (3);
Rotor (1) comprising: first matrix (8) and annular housing (9), annular housing (9) is positioned at first matrix (8), be marked with metal fluid in the annular housing (9) in the rotor (1), metal fluid in the annular housing (9) is rotation under the effect of the rotating magnetic field that rotation drive coil (4) is applied, and produces angular momentum;
Stator (3) comprising: second matrix (10), rotation drive coil (4), detecting electrode (5), feedback adds square coil (6) and flexible compensated for electrostatic electrode (7), eight rotation drive coils (4) are from inside to outside distributing on second matrix (10), eight detecting electrodes (5), four feedbacks add square coil (6), eight flexible compensated for electrostatic electrodes (7), eight rotation drive coils (4) are symmetrical distribution in a circumferential direction, rotation drive coil (4) is positioned at the position at the most close center of stator (3), eight detecting electrodes (5) are distributing in the outside of rotation drive coil (4), feedback adds square coil (6) and flexible compensated for electrostatic electrode (7), and to be in same be on the annulus at center with stator (3) center, feedback adds square coil (6), the internal diameter of flexible compensated for electrostatic electrode (7) is identical respectively with external diameter, two the flexible compensated for electrostatic electrodes (7) that abut one another form flexible compensated for electrostatic electrode pair, flexible compensated for electrostatic electrode pair and feedback add square coil (6) and replace each other, eight detecting electrodes (5) are symmetrical distribution in a circumferential direction, and four feedbacks add square coil (6) and four pairs of flexible compensated for electrostatic electrodes (7) all are symmetrical distribution at circumferencial direction.
2, flexible static compensation type coil moment-increasing fluid gyroscope according to claim 1, it is characterized in that upward the internal diameter of rotation drive coil (4) on the circumferencial direction that with stator (3) center is the center of circle is identical with second matrix (10) of stator (3) for the internal diameter of the annular housing (9) on the described rotor (1).
3, flexible static compensation type coil moment-increasing fluid gyroscope according to claim 1 is characterized in that, described flexible beam (2) can corresponding distortion take place along with the skew of rotor (1) and stator (3) relative position.
4, flexible static compensation type coil moment-increasing fluid gyroscope according to claim 1 and 2, it is characterized in that the external diameter of rotation drive coil (4) on the circumferencial direction that with stator (3) center is the center of circle on second matrix (10) of the external diameter of described annular housing (9) and stator (3) is identical.
5, flexible static compensation type coil moment-increasing fluid gyroscope according to claim 1 and 2 is characterized in that, adjacent rotation drive coil (4) current and phase difference is 90 °.
6, flexible static compensation type coil moment-increasing fluid gyroscope according to claim 1, it is characterized in that, the structure of described flexible beam (2) is the right cylinder of being small at both ends and big in the middle, and cylindrical two size is identical, and the two ends of flexible beam (2) are connected with the center of rotor (1) with stator (3) respectively.
7, flexible static compensation type coil moment-increasing fluid gyroscope according to claim 1, it is characterized in that, described four feedbacks add square coil (6) and detect the situation that rotor (1) departs from horizontal level according to detecting electrode (5), apply voltage on the square coil (6) and produce electromagnetic force and make rotor (1) return to the equilibrium position by adding, realize FEEDBACK CONTROL rotor (1) in feedback.
8, flexible static compensation type coil moment-increasing fluid gyroscope according to claim 1 and 2 is characterized in that, the matrix material of described rotor (1) is a metallic nickel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100414613A CN100526800C (en) | 2007-05-31 | 2007-05-31 | Flexible static compensation type coil moment-increasing fluid gyroscope |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100414613A CN100526800C (en) | 2007-05-31 | 2007-05-31 | Flexible static compensation type coil moment-increasing fluid gyroscope |
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| CN101055180A CN101055180A (en) | 2007-10-17 |
| CN100526800C true CN100526800C (en) | 2009-08-12 |
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| CNB2007100414613A Expired - Fee Related CN100526800C (en) | 2007-05-31 | 2007-05-31 | Flexible static compensation type coil moment-increasing fluid gyroscope |
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| WO2012037539A1 (en) | 2010-09-18 | 2012-03-22 | Fairchild Semiconductor Corporation | Micromachined 3-axis accelerometer with a single proof-mass |
| KR20130057485A (en) | 2010-09-18 | 2013-05-31 | 페어차일드 세미컨덕터 코포레이션 | Packaging to reduce stress on microelectromechanical systems |
| US9278845B2 (en) | 2010-09-18 | 2016-03-08 | Fairchild Semiconductor Corporation | MEMS multi-axis gyroscope Z-axis electrode structure |
| CN103221779B (en) | 2010-09-18 | 2017-05-31 | 快捷半导体公司 | The axle inertial sensor of micromechanics monoblock type six |
| WO2012037501A2 (en) | 2010-09-18 | 2012-03-22 | Cenk Acar | Flexure bearing to reduce quadrature for resonating micromachined devices |
| EP2619536B1 (en) | 2010-09-20 | 2016-11-02 | Fairchild Semiconductor Corporation | Microelectromechanical pressure sensor including reference capacitor |
| WO2013116514A1 (en) * | 2012-02-01 | 2013-08-08 | Cenk Acar | Mems multi-axis gyroscope with central suspension and gimbal structure |
| US9488693B2 (en) | 2012-04-04 | 2016-11-08 | Fairchild Semiconductor Corporation | Self test of MEMS accelerometer with ASICS integrated capacitors |
| EP2647955B8 (en) | 2012-04-05 | 2018-12-19 | Fairchild Semiconductor Corporation | MEMS device quadrature phase shift cancellation |
| EP2647952B1 (en) | 2012-04-05 | 2017-11-15 | Fairchild Semiconductor Corporation | Mems device automatic-gain control loop for mechanical amplitude drive |
| KR102058489B1 (en) | 2012-04-05 | 2019-12-23 | 페어차일드 세미컨덕터 코포레이션 | Mems device front-end charge amplifier |
| US9625272B2 (en) | 2012-04-12 | 2017-04-18 | Fairchild Semiconductor Corporation | MEMS quadrature cancellation and signal demodulation |
| DE102013014881B4 (en) | 2012-09-12 | 2023-05-04 | Fairchild Semiconductor Corporation | Enhanced silicon via with multi-material fill |
| CN104578570B (en) * | 2015-01-05 | 2017-03-29 | 中国船舶重工集团公司第七0七研究所 | A kind of dynamical perturbation rotation modulation mechanism |
| US10697994B2 (en) | 2017-02-22 | 2020-06-30 | Semiconductor Components Industries, Llc | Accelerometer techniques to compensate package stress |
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| CN101055180A (en) | 2007-10-17 |
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