CN100543416C - Fluid and rotary drive flexible hard magnet soft magnet compensation type coil moment-increasing gyroscope - Google Patents
Fluid and rotary drive flexible hard magnet soft magnet compensation type coil moment-increasing gyroscope Download PDFInfo
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- CN100543416C CN100543416C CNB2007100414717A CN200710041471A CN100543416C CN 100543416 C CN100543416 C CN 100543416C CN B2007100414717 A CNB2007100414717 A CN B2007100414717A CN 200710041471 A CN200710041471 A CN 200710041471A CN 100543416 C CN100543416 C CN 100543416C
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Abstract
The fluid in a kind of MEMS (micro electro mechanical system) field and rotary drive flexible hard magnet soft magnet compensation type coil moment-increasing gyroscope, comprise: rotor, stator, flexible beam, rotor is made of rotation drive coil, insulation course, angular momentum layer, and the angular momentum layer is made of matrix and the annular housing that is marked with metal fluid.Stator comprises that first matrix, detecting electrode, feedback add square coil, flexible compensation Hard Magnetic pole plate, are connected as a single entity stator and rotor by flexible beam.The present invention uses the high-speed rotation of metal fluid to make rotor produce angular momentum, does not have relatively rotating between the rigid structure, eliminates the influence that flexible beam is out of shape the disturbance torque that brings by the magnetic torque that produces between flexible compensation Hard Magnetic pole plate and the rotor.Processing rotation drive coil on rotor, the rotation drive coil becomes one with rotor, effectively reduces the magnetic field that produced by the rotation drive coil to the interference that rotor caused, and uses to feed back and add the square coil rotor is carried out FEEDBACK CONTROL, adopts single stator structure.
Description
Technical field
What the present invention relates to is a kind of little gyro of field of micro electromechanical technology, specifically is a kind of fluid and rotary drive flexible hard magnet soft magnet compensation type coil moment-increasing gyroscope.
Background technology
The current gyroscope that is widely studied can be divided into two kinds, and a kind of is the suspension rotor gyro that declines, and another kind is a flexure gyroscope, and they respectively have its characteristics.The suspension rotor gyro that declines, rotor is high speed rotating under suspended state, the bigger raising that rotating speed obtains, help to realize high precision, gyro generally adopts double-stator structure but suspension rotor declines, and need process side to control electrode for the lateral rigidity that improves rotor, make the decline processing technology complexity of gyro of suspension rotor.And being subjected to the influence of air resistance in order to remove rotor, the common suspension rotor gyro that declines will use Vacuum Package.Flexure gyroscope is a kind of high-performance, the higher gyro of precision cheaply, and it replaces traditional suspension technology and bring a series of advantage with flexible support, so obtain widespread use in inertial navigation system.
Find that through the literature search to prior art the Chinese patent publication number is: CN1712894A, name is called: flexible microgyrorotor and electromagnetic drive and dynamic tune.Mentioning this system in this patent literary composition comprises: double-stator structure, motor-driven bearing, the rotor that links to each other with bearing.This system drives the rotor high-speed rotation by the motor-driven bearing to produce angular momentum, adopt double-stator structure, used two rotors of driving rotor and rotor, thus complex structure, and on technology, be difficult to utilize micro fabrication accurately to process the motor-driven bearing, the technological requirement height.
Summary of the invention
The objective of the invention is to overcome deficiency of the prior art, propose a kind of fluid and rotary drive flexible hard magnet soft magnet compensation type coil moment-increasing gyroscope.This gyroscope uses single stator structure, and the angular momentum of gyro is that the high speed rotating by metal fluid produces, and by flexible beam rotor and stator is connected as a single entity, and makes this gyroscope have very strong impact resistance.Processing rotation drive coil on rotor, the rotation drive coil becomes one with rotor, effectively reduces magnetic field by the generation of rotation drive coil to the interference that rotor caused, thereby makes rotor can better respond the variation of extraneous angular velocity.The matrix of rotor is to make material with soft magnetism, processes hard magnetic material on stator, and the hard magnetic material on the stator and the soft magnetic material of rotor have magnetic attraction, thereby can compensate the disturbance torque that flexible beam produces, and makes rotor become free supporter.Processing detecting electrode and rotor form the offset situation that differential capacitance comes detection rotor on stator, and use feedback to add the square coil rotor is carried out FEEDBACK CONTROL.
The present invention is achieved by the following technical solutions, the present invention includes: rotor, flexible beam, stator.Rotor comprises that rotation drive coil, insulation course, angular momentum layer constitute, the angular momentum layer is made of second matrix and annular housing again, annular housing is positioned at second matrix, second matrix is made material with soft magnetism, be marked with metal fluid in the annular housing, metal fluid in the annular housing rotates under the effect of the rotation rotating magnetic field that drive coil applied, and produces angular momentum; Insulation course is located at the upper surface of angular momentum layer, the rotation drive coil is located at the upper surface of insulation course, the rotation drive coil is symmetrical distribution on the circumferencial direction that with the centre of rotor is the center of circle, rotor and stator connect as one by flexible beam, and flexible beam can corresponding distortion take place along with the skew of rotor and stator relative position; Stator comprises that first matrix, detecting electrode, feedback add square coil, flexible compensation Hard Magnetic pole plate, detecting electrode is distributing in the inboard of the upper surface of first matrix, the outside of the upper surface of first matrix is distributing to feed back and is adding square coil, flexible compensation Hard Magnetic pole plate, wherein feedback adds square coil, flexible compensation Hard Magnetic pole plate to be in same is on the annulus at center with the stator center, the internal diameter that feedback adds square coil, flexible compensation Hard Magnetic pole plate is identical respectively with external diameter, and feedback adds the square coil and flexible compensation Hard Magnetic pole plate is alternate with each other.Eight detecting electrodes are symmetrical distribution in a circumferential direction, and four feedbacks add the square coil and four Hard Magnetics compensation pole plates all are symmetrical distribution at circumferencial direction.
The structure of fluid of the present invention and rotary drive flexible hard magnet soft magnet compensation type coil moment-increasing gyroscope is to adopt microfabrication (fine body processing and fine surface working) technology to process.The matrix material of rotor is a nickel, and the material of rotation drive coil is a copper, and the insulation course of rotor is Al
2O
3Insulation course, flexible compensation Hard Magnetic pole plate is made material with Hard Magnetic.The matrix of stator is a glass, in processing Seed Layer on glass, again by a series of micro fabrications on Seed Layer, process detecting electrode, feedback adds square coil and flexible compensation Hard Magnetic pole plate, it all also is to be material with copper that detecting electrode, feedback add the square coil, the material of flexible beam is a nickel.The matrix of stator also can use metal to make material, with metal during as matrix material, need be on matrix sputter one deck Al
2O
3Insulation course is again at Al
2O
3Process detecting electrode on the insulation course, feedback adds square coil and flexible compensation Hard Magnetic pole plate.
Total system of the present invention adopts single stator, single rotor, and by flexible beam rotor and stator is connected as a single entity, and makes system architecture simple, and is easy to process, possessed very strong impact resistance again simultaneously, can satisfy under complex environment and use.Produce the angular momentum of gyro by the high speed rotating of metal fluid, do not have relatively rotating between the rigid structure, the system that makes does not need to adopt Vacuum Package.Drive the metal fluid high speed rotating by the rotation drive coil, and will rotate drive coil and be machined on the rotor, rotation drive coil and rotor are become one, effectively reduce the magnetic field that produces by the rotation drive coil to the interference that rotor caused, thereby make rotor can better respond the variation of extraneous angular velocity.Disturbance torque and three kinds of technology of coil moment-increasing FEEDBACK CONTROL that the metal fluid high speed rotating produces angular momentum, hard magnet soft magnet compensation flexible beam have fully been merged among the present invention, and adopt the MEMS technology, characteristics such as make that this gyroscope has again that cost is low, precision is high, easy batch, power consumption are little.
Rotor matrix of the present invention is to make material with soft magnetism, compensates the disturbance torque that flexible beam produces at the flexible compensation Hard Magnetic pole plate of processing on the stator by the magnetic attraction moment between Hard Magnetic and the soft magnetism, makes rotor become free supporter.Processing detecting electrode and rotor form the offset situation that differential capacitance comes detection rotor on stator, and use feedback to add the square coil rotor is carried out FEEDBACK CONTROL.
Description of drawings
Fig. 1 is an one-piece construction synoptic diagram of the present invention
Fig. 2 is stator structure stereographic map under the present invention
Fig. 3 is a flexible beam structural perspective of the present invention
Fig. 4 is a rotor structure stereographic map of the present invention
Fig. 5 is a rotor angular momentum layer structure cut-open view of the present invention
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment has provided detailed embodiment and process being to implement under the prerequisite with the technical solution of the present invention, but protection scope of the present invention is not limited to following embodiment.
As Fig. 1, Fig. 2, Fig. 3, Fig. 4, shown in Figure 5, present embodiment comprises: rotor 1, flexible beam 2, stator 3.Rotor 1 is connected as a single entity by flexible beam 2 with stator 3, and flexible beam 2 meetings along with the skew of the relative position of rotor 1 and stator 3 deformation take place.Rotor 1 is made of rotation drive coil 8, insulation course 9, angular momentum layer 10, and angular momentum layer 10 is made of second matrix 11 and annular housing 12 again.Stator 3 by first matrix 4, detecting electrode 5, feedback adds square coil 6, flexible compensation Hard Magnetic pole plate 7 constitutes.
As shown in Figure 2, detecting electrode 5 is distributing in the inboard of the upper surface of first matrix 4 of stator 3, the outside of the upper surface of first matrix 4 is distributing to feed back and is adding square coil 6, flexible compensation Hard Magnetic pole plate 7, wherein feedback adds square coil 6, flexible compensation Hard Magnetic pole plate 7 to be in same is on the annulus in the center of circle with stator 3 centers, the internal diameter that feedback adds square coil 6, flexible compensation Hard Magnetic pole plate 7 is identical respectively with external diameter, and feedback adds square coil 6 and replaces each other with flexible compensation Hard Magnetic pole plate 7.Selected for use eight detecting electrodes 5, four feedbacks to add square coil 6 and four flexible compensation Hard Magnetic pole plates 7 among the present invention.Eight detecting electrodes 5 are symmetrical distribution in a circumferential direction, and the capacitance that forms between detecting electrode 5 and the rotor 1 is with different variation of attitude of rotor 1, thus the change in location that the Differential Detection electric capacity that detecting electrode 5 and rotor 1 form can detection rotor 1.Four feedbacks add square coil 6 and are symmetrical distribution at circumferencial direction, be used for detecting the situation that rotor 1 departs from horizontal level according to detecting electrode, add in feedback and to apply voltage on the square coil 6 and produce electromagnetic force and make rotor 1 return to the equilibrium position, to reach the effect of rotor 1 being carried out FEEDBACK CONTROL.Four flexible compensation Hard Magnetic pole plates 7 also are symmetrical distribution at circumferencial direction, and flexible compensation Hard Magnetic pole plate 7 is used to compensate flexible beam 2 because the disturbance torque that deformation produces.When skew took place rotor 1, because flexible beam 2 can produce disturbance torque, this disturbance torque can make rotor 1 depart from the equilibrium position, therefore needed this disturbance torque of compensation, and the purpose of compensation is in order to make rotor 1 become free supporter.Obtain compensation effect, use the matrix material of nickel, and the flexible compensation Hard Magnetic pole plate 7 on the stator 3 is a hard magnetic material, and rotor 1 is had magnetic attraction as rotor 1.When rotor 1 was in the equilibrium position, rotor 1 suffered total attractive force that hard magnetic material applied was zero; When rotor 1 departed from the equilibrium position, moment that rotor 1 suffered total attractive force that magnetic material applied produces and flexible beam 2 reached compensation effect because the disturbance torque that distortion produces offsets.
As shown in Figure 3, by the flexible beam 2 that shows among Fig. 3 rotor 1 and stator 3 are connected as a single entity, the structure of flexible beam 2 is the right cylinder of being small at both ends and big in the middle, and cylindrical two size is identical, and the two ends of flexible beam 2 are connected with the center of rotor 1 with stator 3 respectively.
As shown in Figure 4 and Figure 5, rotor 1 is to pass through fine process, is the annular housing 12 in the center of circle one of the inside of second matrix 11 processing with rotor 1 center, after annular housing 12 generates, punching in second matrix 11, metal fluid is injected annular housing 12 by the hole, form the endless metal fluid chamber.Second matrix 11 is combined as angular momentum layer 10 with annular housing 12.Again at upper surface sputter one deck Al of second matrix 11
2O
3Insulation course 9, and at eight rotations of the surface working of insulation course 9 drive coil 8.Eight rotation drive coils 8 are symmetrical distribution on the circumferencial direction that with rotor 1 center is the center of circle.In order to form rotating magnetic field, the current and phase difference of adjacent rotation drive coil 8 is 90
0Metal fluid in the annular housing 12 is subjected to rotating the effect of the rotating magnetic field that drive coil 8 applies and high speed rotating produces angular momentum, thereby can respond the variation of extraneous angular velocity.On the circumferencial direction of rotor 1, the internal diameter of annular housing 12 is identical with the internal diameter of rotation drive coil 8, the external diameter of annular housing 12 is identical with the external diameter of rotation drive coil 8, drives effect so that the metal fluid in 8 pairs of annular housings 12 of rotation drive coil has best rotation.
The structure of present embodiment fluid and rotary drive flexible hard magnet soft magnet compensation type coil moment-increasing gyroscope is to adopt microfabrication (fine body processing and fine surface working) technology to process.Second matrix, 11 materials of rotor 1 are nickel, and the material of rotation drive coil 8 is a copper, and insulation course 9 is Al
2O
3Insulation course, flexible compensation Hard Magnetic pole plate 7 are made material with Hard Magnetic.First matrix 4 of stator 3 is a glass, in processing Seed Layer on glass, again by a series of micro fabrications on Seed Layer, process detecting electrode 5, feedback adds square coil 6 and flexible compensation Hard Magnetic pole plate 7, it all also is to be material with copper that detecting electrode 5, feedback add square coil 6, and the material of flexible beam 2 is a nickel.
Claims (9)
1, a kind of fluid and rotary drive flexible hard magnet soft magnet compensation type coil moment-increasing gyroscope comprise: rotor (1), flexible beam (2) and stator (3) is characterized in that: rotor (1) connects as one by flexible beam (2) with stator (3);
Rotor (1) comprising: rotation drive coil (8), insulation course (9) and angular momentum layer (10), wherein: angular momentum layer (10) is made of second matrix (11) and annular housing (12) again, insulation course (9) is located at the upper surface of angular momentum layer (10), rotation drive coil (8) is located at the upper surface of insulation course (10), rotate on the circumferencial direction that drive coil (8) is the center of circle at the center with rotor (1) and be symmetrical distribution, annular housing (12) is positioned at second matrix (11), and second matrix (11) is made material with soft magnetism; Be marked with metal fluid in the annular housing (12) in the described rotor (1), the metal fluid in the annular housing (12) is rotation under the effect of the rotating magnetic field that rotation drive coil (8) is applied, and produces angular momentum;
Stator (3) comprising: first matrix (4), detecting electrode (5), feedback adds square coil (6) and flexible compensation Hard Magnetic pole plate (7), wherein: detecting electrode (5) is distributing in the inboard of the upper surface of first matrix (4), the outside of the upper surface of first matrix (4) is distributing to feed back and is adding square coil (6), flexible compensation Hard Magnetic pole plate (7), wherein feedback adds square coil (6), it is on the annulus at center with stator (3) center that flexible compensation Hard Magnetic pole plate (7) is in same, feedback adds square coil (6), the internal diameter of flexible compensation Hard Magnetic pole plate (7) is identical respectively with external diameter, it is alternate with each other with flexible compensation Hard Magnetic pole plate (7) that feedback adds square coil (6), eight detecting electrodes (5) are symmetrical distribution in a circumferential direction, and four feedbacks add square coil (6) and four flexible compensation Hard Magnetic pole plates (7) all are symmetrical distribution at circumferencial direction.
2, fluid according to claim 1 and rotary drive flexible hard magnet soft magnet compensation type coil moment-increasing gyroscope, it is characterized in that the internal diameter of the annular housing (12) on the described rotor (1) and rotation drive coil (8) are that the internal diameter on the circumferencial direction in the center of circle is identical at the center with rotor (1).
3, fluid according to claim 1 and rotary drive flexible hard magnet soft magnet compensation type coil moment-increasing gyroscope is characterized in that, described flexible beam (2) can corresponding distortion take place along with the skew of rotor (1) and stator (3) relative position.
4, fluid according to claim 1 and rotary drive flexible hard magnet soft magnet compensation type coil moment-increasing gyroscope, it is characterized in that, described stator (3), wherein feedback adds square coil (6), flexible compensation Hard Magnetic pole plate (7) to be in same is on the annulus at center with stator (3) center, the internal diameter that feedback adds square coil (6), flexible compensation Hard Magnetic pole plate (7) is identical respectively with external diameter, and it is alternate with each other with flexible compensation Hard Magnetic pole plate (7) that feedback adds square coil (6).
5, fluid according to claim 1 and 2 and rotary drive flexible hard magnet soft magnet compensation type coil moment-increasing gyroscope, it is characterized in that the external diameter of the annular housing (12) on the described rotor (1) is identical with the external diameter of rotation drive coil (8) on the circumferencial direction that with rotor (1) center is the center of circle.
6, fluid according to claim 1 and 2 and rotary drive flexible hard magnet soft magnet compensation type coil moment-increasing gyroscope is characterized in that, the current and phase difference of adjacent rotation drive coil (8) is 90 °.
7, fluid according to claim 1 and rotary drive flexible hard magnet soft magnet compensation type coil moment-increasing gyroscope, it is characterized in that, the structure of described flexible beam (2) is the right cylinder of being small at both ends and big in the middle, and cylindrical two size is identical, and the two ends of flexible beam (2) are connected with the center of rotor (1) with stator (3) respectively.
8, fluid according to claim 1 and rotary drive flexible hard magnet soft magnet compensation type coil moment-increasing gyroscope, it is characterized in that, described feedback adds square coil (6) and detects the situation that rotor (1) departs from horizontal level according to detecting electrode, add in feedback and to apply voltage on the square coil (6) and produce electromagnetic force and make rotor (1) return to the equilibrium position, realize FEEDBACK CONTROL rotor (1).
9, fluid according to claim 1 and 2 and rotary drive flexible hard magnet soft magnet compensation type coil moment-increasing gyroscope is characterized in that, the matrix material of described rotor (1) is a nickel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100414717A CN100543416C (en) | 2007-05-31 | 2007-05-31 | Fluid and rotary drive flexible hard magnet soft magnet compensation type coil moment-increasing gyroscope |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100414717A CN100543416C (en) | 2007-05-31 | 2007-05-31 | Fluid and rotary drive flexible hard magnet soft magnet compensation type coil moment-increasing gyroscope |
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| Publication Number | Publication Date |
|---|---|
| CN101055187A CN101055187A (en) | 2007-10-17 |
| CN100543416C true CN100543416C (en) | 2009-09-23 |
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| CNB2007100414717A Expired - Fee Related CN100543416C (en) | 2007-05-31 | 2007-05-31 | Fluid and rotary drive flexible hard magnet soft magnet compensation type coil moment-increasing gyroscope |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115165005B (en) * | 2022-08-26 | 2024-03-08 | 南京高华科技股份有限公司 | MEMS flow sensor and preparation method thereof |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4655096A (en) * | 1984-08-31 | 1987-04-07 | Northrop Corporation | Flexure mount assembly for a dynamically tuned gyroscope |
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- 2007-05-31 CN CNB2007100414717A patent/CN100543416C/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4655096A (en) * | 1984-08-31 | 1987-04-07 | Northrop Corporation | Flexure mount assembly for a dynamically tuned gyroscope |
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| CN101055187A (en) | 2007-10-17 |
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Granted publication date: 20090923 Termination date: 20120531 |