CN100552381C - Fluid and rotary drive integral flexible hard magnet compensation type static moment-increasing gyroscope - Google Patents
Fluid and rotary drive integral flexible hard magnet compensation type static moment-increasing gyroscope Download PDFInfo
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- CN100552381C CN100552381C CNB2007100414670A CN200710041467A CN100552381C CN 100552381 C CN100552381 C CN 100552381C CN B2007100414670 A CNB2007100414670 A CN B2007100414670A CN 200710041467 A CN200710041467 A CN 200710041467A CN 100552381 C CN100552381 C CN 100552381C
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Abstract
The fluid in a kind of MEMS (micro electro mechanical system) field and rotary drive integral flexible hard magnet compensation type static moment-increasing gyroscope, comprise: rotor, stator, flexible beam, rotor is made of rotation drive coil, flexible compensation Hard Magnetic annulus, insulation course, angular momentum layer, and the angular momentum layer is made of matrix and the annular housing that is marked with metal fluid.Stator comprises that first matrix, detecting electrode, feedback add square electrostatic attraction electrode, flexible compensation Hard Magnetic pole plate, are connected as a single entity stator and rotor by flexible beam.The present invention uses the high-speed rotation of metal fluid to make rotor produce angular momentum, do not have relatively rotating between the rigid structure, eliminate the influence that flexible beam is out of shape the disturbance torque that brings by the magnetic torque that produces between flexible compensation Hard Magnetic pole plate and the flexible compensation Hard Magnetic annulus.Processing rotation drive coil on rotor effectively reduces the magnetic field that produced by the rotation drive coil to the interference that rotor caused, and uses feedback to add the square electrostatic attraction electrode rotor is carried out FEEDBACK CONTROL, adopts single stator structure.
Description
Technical field
What the present invention relates to is a kind of little gyro of field of micro electromechanical technology, specifically is a kind of fluid and rotary drive integral flexible hard magnet compensation type static moment-increasing gyroscope.
Background technology
The current gyroscope that is widely studied can be divided into two kinds, and a kind of is the suspension rotor gyro that declines, and another kind is a flexure gyroscope, and they respectively have its characteristics.The suspension rotor gyro that declines, rotor is high speed rotating under suspended state, the bigger raising that rotating speed obtains, help to realize high precision, gyro generally adopts double-stator structure but suspension rotor declines, and need process side to control electrode for the lateral rigidity that improves rotor, make the decline processing technology complexity of gyro of suspension rotor.And being subjected to the influence of air resistance in order to remove rotor, the common suspension rotor gyro that declines will use Vacuum Package.Flexure gyroscope is a kind of high-performance, the higher gyro of precision cheaply, and it replaces traditional suspension technology and bring a series of advantage with flexible support, so obtain widespread use in inertial navigation system.
Find that through the literature search to prior art the Chinese patent publication number is: CN1712894A, name is called: flexible microgyrorotor and electromagnetic drive and dynamic tune.Mentioning this system in this patent literary composition comprises: double-stator structure, motor-driven bearing, the rotor that links to each other with bearing.This system drives the rotor high-speed rotation by the motor-driven bearing to produce angular momentum, adopt double-stator structure, used two rotors of driving rotor and rotor, thus complex structure, and on technology, be difficult to utilize micro fabrication accurately to process the motor-driven bearing, the technological requirement height.
Summary of the invention
The objective of the invention is to overcome deficiency of the prior art, propose a kind of fluid and rotary drive integral flexible hard magnet compensation type static moment-increasing gyroscope.This gyroscope uses single stator structure, and the angular momentum of gyro is that the high speed rotating by metal fluid produces, and by flexible beam rotor and stator is connected as a single entity, and makes this gyroscope have very strong impact resistance.Processing rotation drive coil on rotor, the rotation drive coil becomes one with rotor, effectively reduces magnetic field by the generation of rotation drive coil to the interference that rotor caused, thereby makes rotor can better respond the variation of extraneous angular velocity.The matrix of rotor is to make material with metal, and the upper surface of rotor insulation layer has been processed an annulus of being made by hard magnetic material.Process hard magnetic material on stator, the Hard Magnetic annulus of the upper surface of hard magnetic material on the stator and rotor insulation layer has magnetic attraction, thereby can compensate the disturbance torque that flexible beam produces, and makes rotor become free supporter.Processing detecting electrode and rotor form the offset situation that differential capacitance comes detection rotor on stator, and use feedback to add the square electrostatic attraction electrode rotor is carried out FEEDBACK CONTROL.
The present invention is achieved by the following technical solutions.The present invention includes: rotor, flexible beam, stator.Rotor comprises the rotation drive coil, flexible compensation Hard Magnetic annulus, insulation course, the angular momentum layer, the angular momentum layer is made of second matrix and annular housing again, annular housing is positioned at second matrix, be marked with metal fluid in the annular housing, metal fluid in the annular housing rotates under the effect of the rotation rotating magnetic field that drive coil applied, produce angular momentum, insulation course is located at the upper surface of angular momentum layer, the rotation drive coil is located at the upper surface of insulation course, the rotation drive coil is symmetrical distribution on the circumferencial direction that with the centre of rotor is the center of circle, upper surface at insulation course, flexible compensation Hard Magnetic annulus is positioned at the outside of rotation drive coil, and on the circumferencial direction that with the rotor center is the center of circle, be symmetrical distribution, rotor and stator connect as one by flexible beam, and flexible beam can corresponding distortion take place along with the skew of rotor and stator relative position; Stator comprises that first matrix, detecting electrode, feedback add square electrostatic attraction electrode, flexible compensation Hard Magnetic pole plate, the outside of upper surface of eight detecting electrodes, first matrix eight feedbacks that distributing that distributing in the inboard of the upper surface of first matrix add square electrostatic attraction electrode, four flexible compensation Hard Magnetic pole plates, wherein feedback adds square electrostatic attraction electrode, flexible compensation Hard Magnetic pole plate to be in same is on the annulus in the center of circle with the stator center, and the internal diameter that feedback adds square electrostatic attraction electrode, flexible compensation Hard Magnetic pole plate is identical respectively with external diameter.Two next-door neighbours' feedback adds the square electrostatic attraction electrode and forms feedback to add the square electrostatic attraction electrode right, it is alternate with each other with flexible compensation Hard Magnetic pole plate that feedback adds square electrostatic attraction electrode pair, eight detecting electrodes are symmetrical distribution in a circumferential direction, and the four pairs of feedbacks add the square electrostatic attraction electrode and four Hard Magnetics compensation pole plates all are symmetrical distribution at circumferencial direction.
The structure of fluid of the present invention and rotary drive integral flexible hard magnet compensation type static moment-increasing gyroscope is to adopt microfabrication (fine body processing and fine surface working) technology to process.The matrix material of rotor is a metal, and the matrix material of rotor also can use soft magnetic materials such as nickel, to obtain better flexible compensation effect.The material of rotation drive coil is a copper, and flexible compensation Hard Magnetic pole plate and flexible compensation Hard Magnetic annulus are made material with Hard Magnetic.The matrix of stator is a glass, in processing Seed Layer on glass, again by a series of micro fabrications on Seed Layer, process detecting electrode, feedback adds square electrostatic attraction electrode and flexible compensation Hard Magnetic pole plate, it all also is to be material with copper that detecting electrode, feedback add the square electrostatic attraction electrode, the material of flexible beam is a nickel.The matrix of stator also can use metal to make material, with metal during as matrix material, need be on matrix sputter one deck Al
2O
3Insulation course is again at Al
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3Process detecting electrode on the insulation course, feedback adds square electrostatic attraction electrode and flexible compensation Hard Magnetic pole plate.
Total system of the present invention adopts single stator, single rotor, and by flexible beam rotor and stator is connected as a single entity, and makes system architecture simple, and is easy to process, possessed very strong impact resistance again simultaneously, can satisfy under complex environment and use.Produce the angular momentum of gyro by the high speed rotating of metal fluid, do not have relatively rotating between the rigid structure, the system that makes does not need to adopt Vacuum Package.Drive the angular momentum that the metal fluid high speed rotating produces gyro by the rotation drive coil, and will rotate drive coil and be machined on the rotor, rotation drive coil and rotor are become one, effectively reduce the magnetic field that produces by the rotation drive coil to the interference that rotor caused, thereby make rotor can better respond the variation of extraneous angular velocity.Disturbance torque and three kinds of technology of static moment-increasing FEEDBACK CONTROL that the metal fluid high speed rotating produces angular momentum, Hard Magnetic compensation flexible beam have fully been merged among the present invention, and adopt the MEMS technology, characteristics such as make that this gyroscope has again that cost is low, precision is high, easy batch, power consumption are little.
Rotor of the present invention is to make material with metal, and the flexible compensation Hard Magnetic annulus of processing compensates the disturbance torque that flexible beam produces by magnetic attraction on flexible compensation Hard Magnetic pole plate of processing and rotor on the stator, makes rotor become free supporter.Processing detecting electrode and rotor form the offset situation that differential capacitance comes detection rotor on stator, and use feedback to add the square electrostatic attraction electrode rotor is carried out FEEDBACK CONTROL.
Description of drawings
Fig. 1 is an one-piece construction synoptic diagram of the present invention
Fig. 2 is stator structure stereographic map under the present invention
Fig. 3 is a flexible beam structural perspective of the present invention
Fig. 4 is a rotor structure stereographic map of the present invention
Fig. 5 is a rotor angular momentum layer structure cut-open view of the present invention
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment has provided detailed embodiment and process being to implement under the prerequisite with the technical solution of the present invention, but protection scope of the present invention is not limited to following embodiment.
As Fig. 1, Fig. 2, Fig. 3, Fig. 4, shown in Figure 5, present embodiment comprises: rotor 1, flexible beam 2, stator 3.Rotor 1 is connected as a single entity by flexible beam 2 with stator 3, and flexible beam 2 meetings along with the skew of the relative position of rotor 1 and stator 3 deformation take place.Rotor 1 is made of rotation drive wire 8 circles, flexible compensation Hard Magnetic annulus 9, insulation course 10, angular momentum layer 11, and angular momentum layer 11 is made of second matrix 12 and annular housing 13 again.Stator 3 adds square electrostatic attraction electrode 6, flexible compensation Hard Magnetic pole plate 7 by first matrix 4, detecting electrode 5, feedback.
As shown in Figure 2, detecting electrode 5 is distributing in the inboard of the upper surface of first matrix 4 of stator 3, the outside of the upper surface of first matrix 4 is distributing to feed back and is adding square electrostatic attraction electrode 6, flexible compensation Hard Magnetic pole plate 7, wherein feedback adds square electrostatic attraction electrode 6, flexible compensation Hard Magnetic pole plate 7 to be in same is on the annulus in the center of circle with stator 3 centers, and the internal diameter that feedback adds square electrostatic attraction electrode 6, flexible compensation Hard Magnetic pole plate 7 is identical respectively with external diameter.Two next-door neighbours' feedback adds square electrostatic attraction electrode 6 and forms feedback to add the square electrostatic attraction electrode right, and feedback adds the square electrostatic attraction electrode and pair replaces each other with flexible compensation Hard Magnetic pole plate 7.Selected for use eight detecting electrodes 5, four pairs of feedbacks to add square electrostatic attraction electrode 6 and four flexible compensation Hard Magnetic pole plates 7 among the present invention.Eight detecting electrodes 5 are symmetrical distribution in a circumferential direction, and the capacitance that forms between detecting electrode 5 and the rotor 1 is with different variation of attitude of rotor 1, thus the change in location that the Differential Detection electric capacity that detecting electrode 5 and rotor 1 form can detection rotor 1.The four pairs of feedbacks add square electrostatic attraction electrode 6 and are symmetrical distribution at circumferencial direction, be used for detecting the situation that rotor 1 departs from horizontal level according to detecting electrode 5, add on the square electrostatic attraction electrode 6 in feedback and to apply voltage, by electrostatic induction, to on rotor 1, produce induced charge, produce electrostatic force and make rotor 1 return to the equilibrium position thereby add between square electrostatic attraction electrode 6 and the rotor 1, to reach the effect of rotor 1 being carried out FEEDBACK CONTROL in feedback.Four flexible compensation Hard Magnetic pole plates 7 also are symmetrical distribution at circumferencial direction, and flexible compensation Hard Magnetic pole plate 7 is used to compensate flexible beam 2 because the disturbance torque that deformation produces.When skew took place rotor 1, because flexible beam 2 can produce disturbance torque, this disturbance torque can make rotor 1 depart from the equilibrium position, therefore needed this disturbance torque of compensation, and the purpose of compensation is in order to make rotor 1 become free supporter.Obtain compensation effect, at flexible compensation Hard Magnetic annulus 9 of rotor 1 upper surface processing, the internal diameter of flexible compensation Hard Magnetic annulus 9 is identical with the internal diameter of flexible compensation Hard Magnetic pole plate 7 on the circumferencial direction that with stator 3 centers is the center of circle on the stator 3, and the external diameter of flexible compensation Hard Magnetic annulus 9 is identical with the external diameter of flexible compensation Hard Magnetic pole plate 7 on the circumferencial direction that with stator 3 centers is the center of circle on the stator 3.The one side that this flexible compensation Hard Magnetic annulus 9 is connected with rotor 1 insulation course 10 is that S utmost point hard magnetic material layer, another side are the hard magnetic material layer of the N utmost point, and flexible compensation Hard Magnetic pole plate 7 also is a hard magnetic material on the stator 3, the one side towards rotor 1 of flexible compensation Hard Magnetic pole plate 7 is that the N utmost point, another side are the S utmost point, therefore between flexible compensation Hard Magnetic pole plate 7 and the flexible compensation Hard Magnetic annulus 9 magnetic attraction is arranged.When rotor 1 is in the equilibrium position, total magnetic attraction that flexible compensation Hard Magnetic annulus 9 is subjected to flexible compensation Hard Magnetic pole plate 7 is zero, because flexible compensation Hard Magnetic annulus 9 is ingredients of rotor 1, thereby make that the rotor 1 suffered total force that magnetic material applied is zero; When rotor 1 departs from the equilibrium position, flexible compensation Hard Magnetic annulus 9 is subjected to the moment of total magnetic attraction generation of flexible compensation Hard Magnetic pole plate 7, that is the moment that produces of the suffered total force that hard magnetic material applied of rotor 1 with flexible beam 2 because the disturbance torque of deformation generation offsets, reach compensation effect.
As shown in Figure 3, by the flexible beam 2 that shows among Fig. 3 rotor 1 and stator 3 are connected as a single entity, the structure of flexible beam 2 is the right cylinder of being small at both ends and big in the middle, and cylindrical two size is identical, and the two ends of flexible beam 2 are connected with the center of rotor 1 with stator 3 respectively.
As shown in Figure 4 and Figure 5, rotor 1 is to pass through fine process, is the annular housing 13 in the center of circle one of the inside of second matrix 12 processing with rotor 1 center, after annular housing 13 generates, punching in second matrix 12, metal fluid is injected annular housing 13 by the hole, form the endless metal fluid chamber.Second matrix 12 is combined as angular momentum layer 11 with annular housing 13.Again at upper surface sputter one deck Al of second matrix 12
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3Insulation course 10, and process eight at the upper surface of insulation course 10 and rotate drive coils 8.Eight rotation drive coils 8 are symmetrical distribution on the circumferencial direction that with rotor 1 center is the center of circle.In order to form rotating magnetic field, the current and phase difference of adjacent rotation drive coil 8 is 90 °.Metal fluid in the annular housing 13 is subjected to rotating the effect of the rotating magnetic field that drive coil 8 applies and high speed rotating produces angular momentum, thereby can respond the variation of extraneous angular velocity.On the circumferencial direction of rotor 1, the internal diameter of annular housing 13 is identical with the internal diameter of rotation drive coil 8, the external diameter of annular housing 13 is identical with the external diameter of rotation drive coil 8, drives effect so that the metal fluid in 8 pairs of annular housings 13 of rotation drive coil has best rotation.At the upper surface of insulation course 10, flexible compensation Hard Magnetic annulus 9 is positioned at the outside of rotation drive coil 8, and is symmetrical distribution on the circumferencial direction that with rotor 1 center is the center of circle.Flexible compensation Hard Magnetic annulus 9 is used to compensate flexible beam 2 because the disturbance torque that deformation produces.
The structure of present embodiment fluid and rotary drive integral flexible hard magnet compensation type static moment-increasing gyroscope is to adopt microfabrication (fine body processing and fine surface working) technology to process.Second matrix, 12 materials of rotor 1 are nickel, and the material of rotation drive coil 8 is a copper, and flexible compensation Hard Magnetic pole plate 7 and flexible compensation Hard Magnetic annulus 9 are made material with Hard Magnetic.First matrix 4 of stator 3 is a glass, in processing Seed Layer on glass, again by a series of micro fabrications on Seed Layer, process detecting electrode 5, feedback adds square electrostatic attraction electrode 6 and flexible compensation Hard Magnetic pole plate 7, it all also is to be material with copper that detecting electrode 5, feedback add square electrostatic attraction electrode 6, and the material of flexible beam 2 is a nickel.
Claims (8)
1, a kind of fluid and rotary drive integral flexible hard magnet compensation type static moment-increasing gyroscope comprise: rotor (1), flexible beam (2), stator (3) is characterized in that rotor (1) connects as one by flexible beam (2) with stator (3);
Rotor (1) comprises rotation drive coil (8), flexible compensation Hard Magnetic annulus (9), insulation course (10), angular momentum layer (11), angular momentum layer (11) is made of second matrix (12) and annular housing (13) again, annular housing (13) is positioned at second matrix (12), rotation drive coil (8) is located at the upper surface of insulation course (10), insulation course (10) is located at the upper surface of angular momentum layer (11), rotate on the circumferencial direction that drive coil (8) is the center of circle at the center with rotor (1) and be symmetrical distribution, upper surface in insulation course (10), flexible compensation Hard Magnetic annulus (9) is positioned at the outside of rotation drive coil (8), and on the circumferencial direction that with rotor (1) center is the center of circle, be symmetrical distribution, be marked with metal fluid in the annular housing (13) in the described rotor (1), metal fluid in the annular housing (13) is rotation under the effect of the rotating magnetic field that rotation drive coil (8) is applied, and produces angular momentum;
Stator (3) comprises first matrix (4), detecting electrode (5), feedback adds square electrostatic attraction electrode (6), flexible compensation Hard Magnetic pole plate (7), eight detecting electrodes (5) are distributing in the inboard of the upper surface of first matrix (4), the outside of the upper surface of first matrix (4) eight feedbacks that distributing add square electrostatic attraction electrode (6), four flexible compensation Hard Magnetic pole plates (7), wherein feedback adds square electrostatic attraction electrode (6), it is on the annulus in the center of circle with stator (3) center that flexible compensation Hard Magnetic pole plate (7) is in same, feedback adds square electrostatic attraction electrode (6), the internal diameter of flexible compensation Hard Magnetic pole plate (7) is identical respectively with external diameter, two next-door neighbours' feedback adds square electrostatic attraction electrode (6) and forms feedback to add the square electrostatic attraction electrode right, it is alternate with each other with flexible compensation Hard Magnetic pole plate that feedback adds square electrostatic attraction electrode pair, eight detecting electrodes (5) are symmetrical distribution in a circumferential direction, and the four pairs of feedbacks add square electrostatic attraction electrode (6) and four flexible compensation Hard Magnetic pole plates (7) all are symmetrical distribution at circumferencial direction.
2, fluid according to claim 1 and rotary drive integral flexible hard magnet compensation type static moment-increasing gyroscope, it is characterized in that the internal diameter of the annular housing (13) on the described rotor (1) and rotation drive coil (8) are that the internal diameter on the circumferencial direction in the center of circle is identical at the center with rotor (1).
3, fluid according to claim 1 and rotary drive integral flexible hard magnet compensation type static moment-increasing gyroscope, it is characterized in that, the structure of described flexible beam (2) is the right cylinder of being small at both ends and big in the middle, and cylindrical two size is identical, the two ends of flexible beam (2) are connected with the center of rotor (1) with stator (3) respectively, and flexible beam (2) can corresponding distortion take place along with the skew of rotor (1) and stator (3) relative position.
4, fluid according to claim 1 and 2 and rotary drive integral flexible hard magnet compensation type static moment-increasing gyroscope, it is characterized in that the external diameter of the annular housing (13) on the described rotor (1) is identical with the external diameter of rotation drive coil (8) on the circumferencial direction that with rotor (1) center is the center of circle.
5, fluid according to claim 1 and 2 and rotary drive integral flexible hard magnet compensation type static moment-increasing gyroscope is characterized in that, the current and phase difference of described adjacent rotation drive coil (8) is 90 °.
6, fluid according to claim 1 and rotary drive integral flexible hard magnet compensation type static moment-increasing gyroscope, it is characterized in that upward the internal diameter of flexible compensation Hard Magnetic pole plate (7) on the circumferencial direction that with stator (3) center is the center of circle is identical with stator (3) for the internal diameter of described flexible compensation Hard Magnetic annulus (9).
7, according to claim 1 or 6 described fluids and rotary drive integral flexible hard magnet compensation type static moment-increasing gyroscope, it is characterized in that upward the external diameter of flexible compensation Hard Magnetic pole plate (7) on the circumferencial direction that with stator (3) center is the center is identical with stator (3) for the external diameter of described flexible compensation Hard Magnetic annulus (9).
8, according to claim 1 or 6 described fluids and rotary drive integral flexible hard magnet compensation type static moment-increasing gyroscope, it is characterized in that, the one side that described flexible compensation Hard Magnetic annulus (9) is connected with rotor (1) insulation course (10) is that S utmost point hard magnetic material layer, another side are the hard magnetic material layer of the N utmost point, and the last flexible compensation Hard Magnetic pole plate (7) of stator (3) also is a hard magnetic material, and the one side towards rotor (1) of flexible compensation Hard Magnetic pole plate (7) is that the N utmost point, another side are the S utmost point.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100414670A CN100552381C (en) | 2007-05-31 | 2007-05-31 | Fluid and rotary drive integral flexible hard magnet compensation type static moment-increasing gyroscope |
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| CNB2007100414670A CN100552381C (en) | 2007-05-31 | 2007-05-31 | Fluid and rotary drive integral flexible hard magnet compensation type static moment-increasing gyroscope |
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| CN101059344A CN101059344A (en) | 2007-10-24 |
| CN100552381C true CN100552381C (en) | 2009-10-21 |
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| CNB2007100414670A Expired - Fee Related CN100552381C (en) | 2007-05-31 | 2007-05-31 | Fluid and rotary drive integral flexible hard magnet compensation type static moment-increasing gyroscope |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101216309B (en) * | 2008-01-10 | 2010-06-02 | 上海交通大学 | Circular and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor electrostatic rotating micro gyroscope |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4655096A (en) * | 1984-08-31 | 1987-04-07 | Northrop Corporation | Flexure mount assembly for a dynamically tuned gyroscope |
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Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4655096A (en) * | 1984-08-31 | 1987-04-07 | Northrop Corporation | Flexure mount assembly for a dynamically tuned gyroscope |
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Granted publication date: 20091021 Termination date: 20120531 |