CN101216309B - Circular and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor electrostatic rotating micro gyroscope - Google Patents
Circular and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor electrostatic rotating micro gyroscope Download PDFInfo
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- CN101216309B CN101216309B CN2008100324734A CN200810032473A CN101216309B CN 101216309 B CN101216309 B CN 101216309B CN 2008100324734 A CN2008100324734 A CN 2008100324734A CN 200810032473 A CN200810032473 A CN 200810032473A CN 101216309 B CN101216309 B CN 101216309B
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Abstract
An electrostatic rotary micro-gyroscope with cylindrical and multi-ring-shaped axial magnetizing, permanent magnetic and diamagnetic rotors belongs to the field of the micro-electromechanical system and comprises an upper stator, rotors and a lower stator. The invention can realize uncontrolled self-supporting suspension by providing suspension force and lateral stabilizing force to diamagnetic rotors by the cylindrical and multi-ring-shaped axial magnetizing and permanent magnet in the upper and the lower stators, and can realize high-speed rotation of the rotors by a variable-capacitance motor formed by the rotating electrodes of the upper and the lower stators and the rotors, and meanwhile, the axial detection of the upper and the lower stators, the lateral detection of a feedback electrode and the lower stator and the electrostatic force between the feedback electrode and the rotors can be used for improving the axial rigidity, the lateral rigidity and the shock resistance of the micro-gyroscope, improving stable suspension performance, and reducing supporting and supporting control difficulties of the rotors, so as to realize self-stabilization without complex control mechanisms. The invention has the advantages of low power consumption, convenient implementation and small size; and can be used for measuring the acceleration of three axes along X-axis, Y-axis and Z-axis and the two axial angle acceleration around the X-axis and the Y-axis at the same time.
Description
Technical field
What the present invention relates to is a kind of minisize gyroscopes of field of micro electromechanical technology, specifically is a kind of circle and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor electrostatic rotating micro-gyroscope.
Background technology
Inertial navigation system is a kind of self-aid navigation technology, directly calculates the navigational parameters such as position, course and attitude of carrier according to newton law of inertia.In the course of the work, neither to extraneous emitted energy, do not obtain information from the outside yet, have interference-free, can use anywhere, distinct advantages such as dynamic property is good, navigation output information is abundant, obtained using widely in fields such as Aeronautics and Astronautics and navigations, the appearance of MEMS (Micro-electromechanical Systems, MEMS (micro electro mechanical system)) technology impels inertial navigation system to develop to direction low-cost, microminiaturized, low-power consumption.The suspension rotor micro gyro that utilizes the MEMS technical design to make does not have the machinery friction, both had high-precision advantage, have again that size is little, mass, characteristics that cost is low, on the military and civilian equipment in modern and future, be with a wide range of applications, can satisfy the demand of the portable autonomous navigation of microminiature platform especially.
Find through literature search prior art, people such as Takao MURAKOSHI are at " Jpn.J.Appl.Phys. " (Vol.42.2003, the 2468-2472 page or leaf) delivers " Electrostatically LevitatedRing-Shaped Rotational-Gyro/Accelerometer " on, propose the little gyro/micro-acceleration gauge of a kind of disk type rotor electrostatic suspension in this article.Its weak point is: rotor radially in the outside, be provided with the radially control electrode that is used to control rotor radial (X, Y direction) position, on the glass substrate of upper and lower layer, be provided with the axial control electrode that is used to realize rotor Z axial location Suspension Control, like this, the suspension supporting of rotor needs 5 degree of freedom of control, has increased the requirement that rotor has been suspended and propped up greatly, and technology is more complicated also.
Summary of the invention
The objective of the invention is at above-mentioned deficiency of the prior art, a kind of circle and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor electrostatic rotating micro-gyroscope are provided, in the dependence, cylindrical and multi-ring shaped axial magnetizing permanent magnetism body in the following stator provides suspending power and lateral stability power to antimagnetic rotor, realizing not having control suspends from steady, achieve the stable suspension of diamagnetic sensitive mass, on utilizing again simultaneously, the axial detection of following stator and feedback electrode and following stator side electrostatic force between detection and feedback electrode and rotor improves the axial rigidity of little gyro, lateral rigidity and impact resistance strengthen the stable suspersion performance.
The present invention is achieved through the following technical solutions, and the present invention is made of last stator, rotor and following stator three parts, and last stator tips upside down on down on the stator, make two end faces of stator and following stator relative, finish assembling, thereby form cavity, rotor then is suspended in this cavity.When assembling, the face over against rotor in the last stator structure all is referred to as end face, and corresponding another side then is referred to as the bottom surface, and same, the face over against rotor in the following stator structure also all is referred to as end face, and corresponding another side then is referred to as the bottom surface.
Described down stator comprise down stator side to detection and feedback electrode, down stator public capacitance pole plate, stator shaft orientation detects and FEEDBACK CONTROL electrode, stator matrix, the cylindrical axial charging permanent magnet of stator, a plurality of stator ring axial charging permanent magnet down, stator rotation drive electrode down down down down; On the cylindrical axial charging permanent magnet structure of following stator is columniform, and following stator ring axial charging permanent magnet is annular, and these two kinds of permanent magnets all are axial chargings; On the end face of following stator matrix, distributing stator public capacitance pole plate, following stator rotation drive electrode, following stator shaft orientation detection and feedback electrode, following stator side to detection and feedback electrode from inside to outside successively, following stator side is to detecting and feedback electrode is distributed in down the outermost of the end face of stator matrix, and circumferentially; Bottom surface at following stator matrix, the cylindrical axial charging permanent magnet of following stator is positioned at the midline position of stator matrix surface geometry down, the midline position of the then following stator matrix surface of other annular permanent magnet geometry is that the center of circle is from inside to outside arranged successively, the tight nested cooperation of adjacent two annular permanent magnets, cylindrical permanent magnet closely is nested in the annular permanent magnet of annulus inside radius minimum, the magnetic polarity of the same end face of adjacent permanent magnet is different (to be N, the S arranged alternate), described axial charging is meant that the pole orientation of cylindrical and annular permanent magnet is along how much cylindrical or annular axis (also being rotation) directions.
Describedly go up that stator comprises the stator matrix, goes up stator public capacitance pole plate and last stator shaft orientation detection and feedback electrode, goes up the cylindrical axial charging permanent magnet of stator, a plurality ofly goes up the stator ring axial charging permanent magnet, upward stator rotates drive electrode; On the cylindrical axial charging permanent magnet structure of last stator is columniform, and last stator ring axial charging permanent magnet is annular, and these two kinds of permanent magnets all are axial chargings; Bottom surface at last stator matrix, the cylindrical axial charging permanent magnet of last stator is positioned at the midline position of stator matrix surface geometry, the midline position of the then above stator matrix surface of other annular permanent magnet geometry is that the center of circle is from inside to outside arranged successively, the tight nested cooperation of adjacent two annular permanent magnets, cylindrical permanent magnet closely is nested in the annular permanent magnet of annulus inside radius minimum, the magnetic polarity of the same end face of adjacent permanent magnet is different (to be N, the S arranged alternate), described axial charging is meant that the pole orientation of cylindrical and annular permanent magnet is along how much cylindrical or annular axis (also being rotation) directions.Last stator public capacitance pole plate, go up stator rotation drive electrode and last stator shaft orientation detects and the annexation of feedback electrode for stator public capacitance pole plate on distributing successively from inside to outside on the end face of last stator matrix, on stator rotate drive electrode and detection of last stator shaft orientation and feedback electrode.
Described rotor is a disc-shaped structure, comprises rotor upper surface layer (material is Cr/Au or Cr/Cu), the middle anti-magnetic structure layer of rotor, rotor undersurface layer (material is Cr/Au or Cr/Cu).The upper and lower surface of anti-magnetic structure layer is covered with rotor upper surface layer and rotor undersurface layer respectively in the middle of rotor.The fan-shaped hole of rotor evenly distributes with certain circumference, is embedded in the rotor.
Cylindrical axial charging permanent magnet of last stator and the cylindrical axial charging permanent magnet of following stator, last stator ring axial charging permanent magnet is identical with following stator ring axial charging permanent magnet size from inside to outside, promptly go up the diameter of stator circular permanent magnet and height with the diameter of following stator circular permanent magnet with highly equate, for stator up and down, from circular permanent magnet, annular permanent magnet from inside to outside is called first annular permanent magnet successively, second annular permanent magnet, by that analogy, then go up the ring interior diameter of first annular permanent magnet of stator, ring overall diameter and height should with the ring interior diameter of first annular permanent magnet of following stator, ring overall diameter and highly equal, the ring interior diameter of second annular permanent magnet of last stator, ring overall diameter and height should with the ring interior diameter of second annular permanent magnet of following stator, ring overall diameter and highly equal, and the like.
When last stator tips upside down on down on the stator, the opposite face of need to make going up stator and the corresponding permanent magnet of play stator vertical direction form N-N or S-S one to one pole polarity concern; The end face of last stator matrix needs face-to-face positioned opposite with the end face of following stator matrix, the end face of last stator matrix is distributed with stator and detects and feedback electrode, the end face of following stator matrix is distributed with down stator and detects and feedback electrode, and stator side is right to electrostatic attraction electrode under being distributed with on the end face outmost turns circumference of following stator matrix.
When last stator tips upside down on down on the stator, following stator public capacitance pole plate and last stator public capacitance pole plate, following stator rotation drive electrode and last stator rotation drive electrode, following stator shaft orientation detection and feedback electrode detect with last stator shaft orientation and feedback electrode should be corresponding up and down on the locus, avoid dislocation, promptly along the axis direction projection of device, following stator public capacitance pole plate and last stator public capacitance pole plate, following stator rotation drive electrode and last stator rotation drive electrode, following stator shaft orientation detection and feedback electrode detect with last stator shaft orientation and feedback electrode is overlapping perpendicular to the projection in the plane of axis.
Typical technology feature of the present invention be anti-magnetic structure layer in the middle of the rotor upper and lower surface respectively material-covered be Cr/Au or Cr/Cu rotor upper surface layer and rotor undersurface layer.The fan-shaped hole of rotor evenly distributes with circumference on rotor, and is to connect rotor.The cylindrical axial charging permanent magnet of following stator, a plurality of stator ring axial charging permanent magnet down are axial chargings, the midline position of following stator matrix surface geometry be the center of circle from inside to outside successively cloth deposit the cylindrical axial charging permanent magnet of stator, a plurality of down stator ring axial charging permanent magnets, the adjacent permanent magnet magnetizing direction is different; The cylindrical axial charging permanent magnet of last stator, last stator ring axial charging permanent magnet are axial chargings, the midline position of above stator matrix surface geometry is that the center of circle is from inside to outside arranged the upward cylindrical axial charging permanent magnet of stator, a plurality of stator ring axial charging permanent magnet of going up successively, and the adjacent permanent magnet magnetizing direction is different; Following stator rotation drive electrode has a plurality of, be and arrange in garden week, following stator public capacitance pole plate is circular, following stator shaft orientation detects and feedback electrode has a plurality of, be and arrange in garden week, following stator rotation drive electrode stator public capacitance pole plate and following stator shaft orientation down detect and feedback electrode between, following stator side is positioned at outside stator shaft orientation detection down and the feedback electrode to detecting and feedback electrode also is and arranges in garden week; Last stator public capacitance pole plate is circular, last stator rotation drive electrode has a plurality of, is and garden week arranges that last stator shaft orientation detects and feedback electrode has a plurality of, be and arrange in garden week, last stator rotation drive electrode last stator public capacitance pole plate, between stator shaft orientation detection and the feedback electrode.
Rotor rotation of the present invention: adopt power transformation to hold the electrostatic rotary drive principle, usually it is three-phase that the rotation drive electrode that will go up stator is divided into three groups, correspondingly playing the rotation drive electrode of stator also to be divided into three groups is three-phase, adopt the three-phase dc voltage to drive, the homophase electrostatic capacitance pole plate of upper and lower stator applies the driving DC voltage of equivalent contrary sign, then when rotor during in the equilibrium position, the clean axial driving force and the clean radial drive power that act on rotor all are zero, but tangential driving force produces the driving torque to rotor, drives rotor with certain rotating speed rotation.By the FEEDBACK CONTROL of subsequent conditioning circuit, make rotor keep permanent high-speed rotation, produce gyroscopic effect.
The invention solves the deficiencies in the prior art, adopt cylindrical permanent magnet and many annular permanent magnets of axial charging to arrange, be highly susceptible to processing and magnetizing, and form needed static magnetic field gradient and distribution easily, and can form garden Zhou Fangxiang in theory and go up the no change static magnetic field, electromagnetic damping in the time of can effectively avoiding the rotor rotation, be the useful thinking and the scheme of a kind of magnet arrangement and the design of magnetizing, the rotor that is provided with diamagnetic substance like this is very easy in this static magnetic field realize that stable support suspends, and makes things convenient for to such an extent that realize stable suspersion to support the big technology important document that this suspension rotor micro gyro is wanted operate as normal.The rotor design has Cr/Au or Cr/Cu material and the fan-shaped hole of rotor, constitute synchronous motor with the rotation drive electrode in the stator up and down, rotation drive electrode in the stator applies DC voltage up and down, just can drive the rotor high-speed rotation, owing to adopt direct voltage drive, power consumption is little, and magnet arrangement of the present invention and magnetize and arrange and can effectively avoid electromagnetic damping, makes things convenient for to such an extent that realize rotor stability to rotate another big technology important document that this suspension rotor micro gyro is wanted operate as normal.
The present invention's cylindrical and multi-ring shaped axial magnetizing permanent magnetism body of stator up and down provides suspending power and lateral stability power to antimagnetic rotor, realizing not having control suspends from steady, utilize simultaneously the axial detection of upper and lower stator and feedback electrode and following stator side electrostatic force between detection and feedback electrode and rotor to improve axial rigidity, lateral rigidity and the impact resistance of little gyro, enhancing stable suspersion performance again.The present invention is before applying electrostatic potential, and rotor has been suspended in the equilibrium position because of diamagnetic effect, so compare general electrostatic suspension, has reduced playing a process and playing a control difficulty of rotor.It can detect simultaneously and comprise along the linear acceleration of X, Y, Z axle and around X, Y-axis angular acceleration, and then can be used for object is accurately located, and is used to detect the attitude or the navigation of carrier.
Description of drawings
Fig. 1 is a general structure synoptic diagram of the present invention
Fig. 2 is stator Facad structure synoptic diagram under the present invention
Fig. 3 is stator structure synoptic diagram under the present invention
Fig. 4 is stator Facad structure synoptic diagram in the present invention
Fig. 5 is stator structure synoptic diagram in the present invention
Fig. 6 is a rotor structure synoptic diagram of the present invention
Fig. 7 is stator permanent magnet structural representation in the present invention
Fig. 8 is stator permanent magnet structural representation under the present invention
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment has provided detailed embodiment and process being to implement under the prerequisite with the technical solution of the present invention, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, what present embodiment adopted is three-decker, is made of last stator 1, rotor 3 and following stator 2 three parts, last stator 1 tips upside down on down on the stator 2, makes 2 two end faces of stator 1 and following stator relative, finishes assembling, thereby the formation cavity, 3 of rotors are suspended in this cavity.When assembling, the face over against rotor 3 in last stator 1 structure all is referred to as end face, and corresponding another side then is referred to as the bottom surface, and same, the face over against rotor 3 in following stator 2 structures also all is referred to as end face, and corresponding another side then is referred to as the bottom surface.
As Fig. 2, Fig. 3, shown in Figure 7, described stator 2 down comprises that stator side (in the present embodiment is four groups to detection and feedback electrode 6 down, every group comprises two pole plates), down stator public capacitance pole plate 4, stator shaft orientation detects and FEEDBACK CONTROL electrode 5 (in the present embodiment be four groups, every group comprises two pole plates), stator matrix 7, the cylindrical axial charging permanent magnet 8 of stator, a plurality of stator ring axial charging permanent magnet 9 down, stator rotation drive electrode 18 down down down down; On the end face of following stator matrix 7, distributing stator public capacitance pole plate 4, following stator rotation drive electrode 18, following stator shaft orientation detection and feedback electrode 5, following stator side to detection and feedback electrode 6 from inside to outside successively, following stator side is distributed in down the outermost of the end face of stator matrix to detection and feedback electrode 6, and circumferentially, following stator rotates drive electrode 18 circumferentially, and following stator shaft orientation detection and feedback electrode 5 are also circumferentially; Bottom surface at following stator matrix 7, the cylindrical axial charging permanent magnet 8 of following stator is positioned at the midline position of stator matrix 7 surface geometries down, the midline position of other the then following stator matrix surface of following stator ring axial charging permanent magnet 9 geometry is that the center of circle is from inside to outside arranged successively, the tight nested cooperation of two annular permanent magnets that following stator 2 is adjacent, following stator cylindrical permanent magnet 8 closely is nested in the annular permanent magnet of annulus inside radius minimum, the magnetic polarity of the same end face of permanent magnet that following stator 2 is adjacent is different (to be N, the S arranged alternate), described axial charging is meant that the pole orientation of cylindrical and annular permanent magnet is along how much cylindrical or annular axis (also being rotation) directions.
As Fig. 4, Fig. 5, shown in Figure 8, described stator 1 primary structure of going up comprises stator matrix 12, goes up stator public capacitance pole plate 10, goes up stator rotation drive electrode 19 and detection of last stator shaft orientation and feedback electrode 11 (in the present embodiment be four groups, every group comprises two pole plates), goes up the cylindrical axial charging permanent magnet 14 of stator, goes up stator ring axial charging permanent magnet 13; Bottom surface at last stator matrix 12, the cylindrical axial charging permanent magnet 14 of last stator is positioned at the midline position of stator matrix 12 surface geometries, the midline position of other then above stator matrix 12 surface geometries of last stator ring axial charging permanent magnet 13 is that the center of circle is from inside to outside arranged successively, the tight nested cooperation of two annular permanent magnets that last stator 1 is adjacent, last stator cylindrical permanent magnet 14 closely is nested in the annular permanent magnet of annulus inside radius minimum, the magnetic polarity of the same end face of permanent magnet that last stator 1 is adjacent is different (to be N, the S arranged alternate), described axial charging is meant that the pole orientation of cylindrical and annular permanent magnet is along how much cylindrical or annular axis (also being rotation) directions.Last stator public capacitance pole plate 10, go up stator rotation drive electrode 19 and last stator shaft orientation detects and the annexation of feedback electrode 11 for stator public capacitance pole plate 10 on distributing successively from inside to outside on the end face of last stator matrix 12, on stator rotate drive electrode 19 and detection of last stator shaft orientation and feedback electrode 11.
Described rotor 3 is disc-shaped structures, comprises rotor upper surface layer 15 (material is Cr/Au or Cr/Cu), the middle anti-magnetic structure layer 16 of rotor, rotor undersurface layer 17 (material is Cr/Au or Cr/Cu), the fan-shaped hole 20 of rotor.The fan-shaped hole 20 of rotor evenly distributes with certain circumference, is embedded in the rotor 3.The upper and lower surface of anti-magnetic structure layer 16 is covered with rotor upper surface layer 15 and rotor undersurface layer 17 respectively in the middle of rotor.The circumferential edges of rotor 3 detects with following stator shaft orientation and the external arc edge in the vertical direction of feedback electrode 5 and detection of last stator shaft orientation and feedback electrode 11 aligns, and promptly person's rotor 3 external diameters equate with the external diameter of last stator shaft orientation detection and feedback electrode 11 and detection of following stator shaft orientation and feedback electrode 5.The external diameter of the fan-shaped hole 20 of rotor equates with the external diameter of last stator rotation drive electrode 19 and following stator rotation drive electrode 18.
The physical dimension of the circular axial charging permanent magnet of last stator 1 and following stator 2 should be identical, last stator 1 is identical with the from inside to outside corresponding a plurality of ring shaped axial magnetizing permanent magnetism body profile sizes of following stator 2, promptly play the diameter of stator circular axial charging permanent magnet 8 and height with the diameter of last stator circular axial charging permanent magnet 14 with highly equate, for last stator 1, from last stator circular axial charging permanent magnet 14, a plurality of stator ring axial charging permanent magnets of going up from inside to outside are called the stator first ring shaped axial magnetizing permanent magnetism body successively, the last stator second ring shaped axial magnetizing permanent magnetism body, by that analogy, for following stator 2, from following stator circular axial charging permanent magnet 8, a plurality of stator ring axial charging permanent magnets down from inside to outside are called the stator first ring shaped axial magnetizing permanent magnetism body down successively, the following stator second ring shaped axial magnetizing permanent magnetism body, by that analogy, then go up the ring interior diameter of the stator first ring shaped axial magnetizing permanent magnetism body, the ring overall diameter and the height should with the ring interior diameter of the following stator first ring shaped axial magnetizing permanent magnetism body, ring overall diameter and highly equal, the ring interior diameter of the second ring shaped axial magnetizing permanent magnetism body of last stator, ring overall diameter and height should with the ring interior diameter of the second ring shaped axial magnetizing permanent magnetism body of following stator, ring overall diameter and highly equal, and the like.
When last stator 1 tips upside down on down on the stator 2, the end face of last stator matrix 12 needs face-to-face positioned opposite with the end face of following stator matrix 7, need make simultaneously stator 1 and play stator 2 corresponding axial charging the permanent magnet opposite face vertical direction form N-N or S-S one to one pole polarity concern, promptly going up cylindrical axial charging permanent magnet 14 of stator and the cylindrical axial charging permanent magnet 8 of following stator is that axial charging and magnetizing direction are opposite, the last stator first ring shaped axial magnetizing permanent magnetism body is that axial charging and magnetizing direction are opposite with the following stator first ring shaped axial magnetizing permanent magnetism body, the last stator second ring shaped axial magnetizing permanent magnetism body is that axial charging and magnetizing direction are opposite with the following stator second ring shaped axial magnetizing permanent magnetism body, by that analogy.
When last stator 1 tips upside down on down on the stator 2, following stator public capacitance pole plate 4 and last stator public capacitance pole plate 10, following stator rotation drive electrode 18 and last stator rotation drive electrode 19, following stator shaft orientation detects and feedback electrode 5 detects with last stator shaft orientation and feedback electrode 11 should be corresponding up and down on the locus, avoid dislocation, promptly along the axis direction projection of device, following stator public capacitance pole plate 4 and last stator public capacitance pole plate 10, following stator rotation drive electrode 18 and last stator rotation drive electrode 19, following stator shaft orientation detects and feedback electrode 5 detects with last stator shaft orientation and feedback electrode 11 is overlapping perpendicular to the projection in the plane of axis.
Rotor rotation of the present invention: adopt power transformation to hold the electrostatic rotary drive principle, usually will going up stator rotation drive electrode 19, to be divided into three groups be three-phase, correspondingly playing stator rotation drive electrode 18 also to be divided into three groups is three-phase, adopt the three-phase dc voltage to drive, the homophase electrostatic capacitance pole plate of upper and lower stator applies the driving DC voltage of equivalent contrary sign, then when rotor 3 during in the equilibrium position, the clean axial driving force and the clean radial drive power that act on rotor 3 all are zero, but tangential driving force produces the driving torque to rotor 3, drives rotor with certain rotating speed rotation.By the FEEDBACK CONTROL of subsequent conditioning circuit, make rotor 3 keep permanent high-speed rotation, produce gyroscopic effect.
As Fig. 2-8, during present embodiment work, comprise following three aspects:
(1) when being used to detect the acceleration signal of vertical direction z axle input, apply same frequency for last stator shaft orientation detection and feedback electrode 11 and the detection of following stator shaft orientation and feedback electrode 5, the amplitude equal and opposite in direction, the high-frequency ac carrier wave of phase differential 180 degree, by last stator public capacitance pole plate 10 and following stator public capacitance pole plate 4 output differential capacitance signals, can detect the z axle acceleration of input through the circuit aftertreatment, simultaneously by detect for last stator shaft orientation and feedback electrode plate group 11 and following stator shaft orientation detects and feedback electrode 5 to apply amplitude equal, opposite polarity DC feedback voltage is withdrawn into the equilibrium position to rotor 3;
(2) when being used for the acceleration signal of detection level direction x axle input, under giving upper left one group stator side to detect and one group of two capacitor plates of feedback electrode 6 and lower-left under stator detect and two capacitor plates of feedback electrode plate 6, apply same frequency respectively, the amplitude equal and opposite in direction, the high-frequency ac carrier wave of phase differential 180 degree, by last stator public capacitance pole plate 10 and following stator public capacitance pole plate 4 output differential capacitance signals, can detect the x axle acceleration of input through the circuit aftertreatment, simultaneously under upper left one group stator side to detect and one group of two capacitor plates of feedback electrode 6 and lower-left under stator detect and two capacitor plates of feedback electrode plate 6, apply amplitude and equate, opposite polarity DC feedback voltage is withdrawn into the equilibrium position to rotor 3;
(3) when being used to detect the acceleration signal of vertical direction y axle input, under giving upper right one group stator side to detect and one group of two capacitor plates of feedback electrode 6 and bottom right under stator detect and two capacitor plates of feedback electrode plate 6, apply same frequency respectively, the amplitude equal and opposite in direction, the high-frequency ac carrier wave of phase differential 180 degree, by last stator public capacitance pole plate 10 and following stator public capacitance pole plate 4 output differential capacitance signals, can detect the y axle acceleration of input through the circuit aftertreatment, simultaneously under upper right one group stator side to detect and one group of two capacitor plates of feedback electrode 6 and bottom right under stator detect and two capacitor plates of feedback electrode plate 6, apply amplitude and equate, opposite polarity DC feedback voltage is withdrawn into the equilibrium position to rotor 3;
(4) when detecting around X, during the input angular velocity of Y-axis, is identical because of detecting around X-axis with input angular velocity principle around Y-axis, the course of work that detects around the X-axis input angular velocity is only described herein, as around the X-axis input angular velocity time, gap between detection of corresponding stator shaft orientation down and feedback electrode 5 and the detection of last stator shaft orientation and feedback electrode 11 and the rotor 3 changes, thereby stator public electrode outgoing carrier modulation signal up and down, this signal is carried out modulation, and the output feedback voltage detects and feedback electrode 5 and detection of last stator shaft orientation and feedback electrode 11 to corresponding stator shaft orientation down, rotor is withdrawn into the equilibrium position, just can angle measurement speed according to the size of feedback moment, moment that Here it is is the method for balancing side angular velocity again.
The course of work of the present invention is as follows: because the bottom surface of last stator 1 and following stator 2 is provided with permanent magnet, and rotor 3 itself is a diamagnetic body, will form interaction force between rotor 3 and last stator 1 and the following stator 2 is that coercive force provides Z to (axially) suspending power for the suspension antimagnetic rotor, simultaneously also for rotor 3 provides lateral stability power along X, Y direction, and then rotor 3 has been realized that self-stabilization 2 of last stator 1 and play stators rises and has been propped up suspension; Simultaneously, by detecting for down stator shaft orientation and feedback electrode 5 and last stator shaft orientation detects and feedback electrode 11 applies voltage, following stator 2 and rotor 3, go up the electrostatic force of generation between stator 1 and the rotor 3, strengthened the axial rigidity of rotor 3; By applying FEEDBACK CONTROL voltage in the peripheral following stator side that distributes of stator on detection and feedback electrode 6, following stator side produces electrostatic force to electrostatic attraction electrode 6 and rotor 3, has strengthened the lateral rigidity of rotor 3.Last stator shaft orientation detect and feedback electrode 11, down stator shaft orientation detect and feedback electrode 5, down stator side to detect and feedback electrode 6 on apply carrier wave, when having axial and lateral deviation, by the signal that generates on last stator public capacitance pole plate 10 and the following stator public capacitance pole plate 4 is picked up, processing such as amplification, modulation, and judge, apply DC voltage on corresponding capacitance pole plate group or side direction electrostatic attraction electrode, the electrostatic force of generation is withdrawn into the equilibrium position with little rotor.Can improve like this be in inverse magnetic suspension state lower rotor part axially and lateral rigidity, improve the impact resistance of little gyro, ensure that rotor 3 is at 2 of last stator 1 and following stators stable suspersion more.Simultaneously, because before applying electrostatic potential, rotor 3 is compared the little gyro of general electrostatic suspension because diamagnetic effect has been suspended in the equilibrium position, reduced playing a process and playing a control difficulty of rotor 3.
Process using Micrometer-Nanometer Processing Technology of the present invention (MEMS technology) combines with Precision Machining, specifically: go up last stator public capacitance pole plate 10 on the stator 1, go up that stator shaft orientation detects and feedback electrode 11, go up stator rotation drive electrode 19, and down the following stator public capacitance pole plate 4 on the stator 2, stator shaft orientation detects and feedback electrode 5, stator side is to detecting and feedback electrode 6, stator rotation drive electrode 18 adopts the Micrometer-Nanometer Processing Technologies realizations down down down; Capacitor plate and side direction electrostatic attraction electrode material generally adopt electric conductivity to be preferably copper, the Micrometer-Nanometer Processing Technology that technology generally adopts photoetching to electroplate; Following stator cylindrical magnet piece and annular permanent magnet and last stator cylindrical permanent magnet and annular permanent magnet can adopt cobalt nickel manganese phosphorus (CoNiMnP), neodymium iron boron (NdFeB), by Precision Machining or little machine-shaping, and magnetize and obtain; 3 of rotors are to be earlier two surface sputtering Cr/Cu or Cr/Au of the middle anti-magnetic structure layer of rotor at substrate, obtain through fine electric spark processing then, and what substrate adopted is diamagnetic material, as pyrolytic graphite.
Claims (9)
1. circle and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor electrostatic rotating micro-gyroscope, constitute by last stator (1), rotor (3) and following stator (2), last stator (1) tips upside down on down on the stator (2), rotor (3) then is suspended in the cavity of stator (1) and following stator (2) formation, it is characterized in that:
Described stator (2) down comprises that stator side is to detecting and feedback electrode (6) down, following stator public capacitance pole plate (4), following stator shaft orientation detects and feedback electrode (5), following stator matrix (7), the cylindrical axial charging permanent magnet of following stator (8), a plurality of stator ring axial charging permanent magnets (9) down, following stator rotation drive electrode (18) is distributing stator public capacitance pole plate (4) from inside to outside successively on the end face of following stator matrix (7), following stator rotation drive electrode (18), following stator shaft orientation detects and feedback electrode (5), following stator side is to detecting and feedback electrode (6); Bottom surface at following stator matrix (7), the cylindrical axial charging permanent magnet of following stator (8) is positioned at the midline position of stator matrix (7) surface geometry down, a plurality of midline positions of the then following stator matrix surface of stator ring axial charging permanent magnet (9) geometry down are that the center of circle is from inside to outside arranged successively, the tight nested cooperation of adjacent two annular permanent magnets, following stator cylindrical permanent magnet (8) closely is nested in the annular permanent magnet of annulus inside radius minimum, and the magnetic polarity of the same end face of permanent magnet that following stator (2) is adjacent is different;
The described stator (1) of going up comprises stator matrix (12), last stator public capacitance pole plate (10) and last stator shaft orientation detect and feedback electrode (11), the cylindrical axial charging permanent magnet of last stator (14), last stator ring axial charging permanent magnet (13), last stator rotation drive electrode (19), bottom surface at last stator matrix (12), the cylindrical axial charging permanent magnet of last stator (14) is positioned at the midline position of stator matrix (12) surface geometry, a plurality of midline positions of going up the then above stator matrix of stator ring axial charging permanent magnet (13) (12) surface geometry are that the center of circle is from inside to outside arranged successively, the tight nested cooperation of two annular permanent magnets that last stator (1) is adjacent, the cylindrical axial charging permanent magnet of last stator (14) closely is nested in the annular permanent magnet of annulus inside radius minimum, the magnetic polarity of the same end face of permanent magnet that last stator (1) is adjacent is different, is distributing successively from inside to outside to go up stator public capacitance pole plate (10) on the end face of last stator matrix (12), last stator rotation drive electrode (19), last stator shaft orientation detects and feedback electrode (11);
The circumferential edges of described rotor (3) detects with following stator shaft orientation and the external arc edge in the vertical direction of feedback electrode (5) and detection of last stator shaft orientation and feedback electrode (11) aligns.
2. circle according to claim 1 and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor electrostatic rotating micro-gyroscope, it is characterized in that, the cylindrical axial charging permanent magnet of last stator (14) of described upward stator (1) and the cylindrical axial charging permanent magnet of following stator (8) diameter of following stator (2) and highly equal, the from inside to outside corresponding a plurality of ring shaped axial magnetizing permanent magnetism body profile of last stator (1) and following stator (2) are measure-alike.
3. circle according to claim 1 and 2 and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor electrostatic rotating micro-gyroscope, it is characterized in that, the permanent magnet opposite face of the described corresponding axial charging of going up stator (1) and play stator (2) vertical direction formation N-N or S-S one to one pole polarity concern.
4. circle according to claim 1 and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor electrostatic rotating micro-gyroscope is characterized in that, the described face-to-face positioned opposite of end face that goes up end face with the following stator matrix (7) of stator matrix (12).
5. circle according to claim 1 and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor electrostatic rotating micro-gyroscope, it is characterized in that, described stator side down is distributed in down the outermost of the end face of stator matrix to detection and feedback electrode (6), and circumferentially, following stator shaft orientation detect and feedback electrode (5) also circumferentially.
6. circle according to claim 1 and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor electrostatic rotating micro-gyroscope, it is characterized in that, described rotor (3) is a disc-shaped structure, comprise rotor upper surface layer (15), the middle anti-magnetic structure layer (16) of rotor, rotor undersurface layer (17), the upper and lower surface of anti-magnetic structure layer (16) is covered with rotor upper surface layer (15) and rotor undersurface layer (17) respectively in the middle of rotor.
7. according to claim 1 or 6 described circles and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor electrostatic rotating micro-gyroscope, it is characterized in that described rotor (3) which is provided with the fan-shaped hole of rotor (20), the fan-shaped hole of rotor (20) evenly distributes with circumference, and is embedded in the rotor (3).
8. according to claim 1 or 7 described circles and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor electrostatic rotating micro-gyroscope, it is characterized in that the external diameter of the fan-shaped hole of rotor (20) of described rotor (3) equates with the external diameter of last stator rotation drive electrode (19) and following stator rotation drive electrode (18).
9. circle according to claim 6 and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor electrostatic rotating micro-gyroscope, it is characterized in that, the material of described rotor upper surface layer (15) is Cr/Au or Cr/Cu, the material of anti-magnetic structure layer (16) is a diamagnetic material in the middle of the rotor, and rotor undersurface layer (17) material is Cr/Au or Cr/Cu.
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| CN2008100324734A CN101216309B (en) | 2008-01-10 | 2008-01-10 | Circular and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor electrostatic rotating micro gyroscope |
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| CN101886924B (en) * | 2010-06-09 | 2012-02-22 | 中国科学院电工研究所 | Circuit for extracting displacement signal of eight-electrode electrostatic gyro |
| CN102506840A (en) * | 2011-09-26 | 2012-06-20 | 中国船舶重工集团公司第七0七研究所 | Dynamically tuned gyroscope of high-precision hemispherical dynamic pressure motor |
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| CN1375825A (en) * | 2002-01-28 | 2002-10-23 | 武汉理工大学 | Mangetically suspended fixed disk drive based on force control |
| EP1275934A1 (en) * | 2000-02-23 | 2003-01-15 | TOKIMEC Inc. | Acceleration detection type gyro device |
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| CN1963244A (en) * | 2006-11-21 | 2007-05-16 | 浙江大学 | Rotor weight self-adaptive type permanent magnet thrust bearing |
| CN101021420A (en) * | 2007-03-22 | 2007-08-22 | 上海交通大学 | Diamagnetic rotor electromagnetic induction driving micro-gyroscope |
| CN101059344A (en) * | 2007-05-31 | 2007-10-24 | 上海交通大学 | Fluid and rotary drive integral flexible hard magnet compensation type static moment-increasing gyroscope |
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| EP1275934A1 (en) * | 2000-02-23 | 2003-01-15 | TOKIMEC Inc. | Acceleration detection type gyro device |
| CN1375825A (en) * | 2002-01-28 | 2002-10-23 | 武汉理工大学 | Mangetically suspended fixed disk drive based on force control |
| CN1570563A (en) * | 2004-04-29 | 2005-01-26 | 上海交通大学 | Suspended rotor MEMS micro-gyroscope utilizing static and charge relaxation to work |
| CN1963244A (en) * | 2006-11-21 | 2007-05-16 | 浙江大学 | Rotor weight self-adaptive type permanent magnet thrust bearing |
| CN101021420A (en) * | 2007-03-22 | 2007-08-22 | 上海交通大学 | Diamagnetic rotor electromagnetic induction driving micro-gyroscope |
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