CN101216309B - Circular and multi-ring axially magnetized permanent magnet anti-magnetic rotor electrostatic rotating micro gyroscope - Google Patents

Abstract

A circular and multi-ring axially magnetized permanent magnet anti-magnetic rotor electrostatic rotating micro-gyroscope in the field of micro-electromechanical systems, which is composed of an upper stator, a rotor and a lower stator, and relies on cylindrical and multi-ring axial gyroscopes in the upper and lower stators. Magnetized permanent magnets provide levitation force and lateral stabilizing force to the anti-magnet rotor to realize uncontrolled self-stabilizing levitation. The rotating electrodes of the upper and lower stators and the rotor form a variable capacitance motor to pull the rotor to rotate at high speed. At the same time, the upper and lower stators are used to The axial detection of the rotor, the lateral detection of the feedback electrode and the lower stator, and the electrostatic force between the feedback electrode and the rotor are used to improve the axial stiffness, lateral stiffness and impact resistance of the micro-gyroscope, enhance the stable suspension performance, and reduce the starting of the rotor. It is difficult to control the branching process and the branching process, self-stabilization can be achieved without complicated control mechanism, low power consumption, convenient implementation, small size, and can simultaneously detect the acceleration of three axes including along the X, Y, and Z axes and the acceleration around the X, Y axes Biaxial angular acceleration.

Description

Circular and multi-ring axially magnetized permanent magnet anti-magnetic rotor electrostatic rotating micro gyroscope

technical field

The invention relates to a miniature gyroscope in the field of micro-electromechanical technology, in particular to a circular and multi-ring axially magnetized permanent-magnet anti-magnetic rotor electrostatically rotating micro-gyroscope.

Background technique

The inertial navigation system is an autonomous navigation technology that directly calculates the navigation parameters such as the position, heading and attitude of the carrier according to Newton's law of inertia. During the working process, it neither transmits energy to the outside world nor obtains information from the outside. It has unique advantages such as being free from interference, can be used anywhere, has good dynamic performance, and rich navigation output information. It is widely used in the fields of aviation, aerospace and navigation. It has been widely used, and the emergence of MEMS (Micro-electromechanical Systems, micro-electromechanical systems) technology has prompted the inertial navigation system to develop in the direction of low cost, miniaturization, and low power consumption. The suspended rotor micro-gyroscope designed and manufactured by MEMS technology has no mechanical friction. It not only has the advantages of high precision, but also has the characteristics of small size, batch production and low cost. It has broad application prospects in modern and future military and civilian equipment. It can especially meet the requirements of portable autonomous navigation for micro-miniature platforms.

After searching the literature of the prior art, it was found that Takao MURAKOSHI et al published "Electrostatically Levitated Ring-Shaped Rotational-Gyro/Accelerometer" in "Jpn.J.Appl.Phys." (Vol.42.2003, pages 2468-2472), the In this paper, a disc-rotor electrostatic levitation micro-gyroscope/micro-accelerometer is proposed. Its shortcoming is that radial control electrodes for controlling the radial (X, Y) position of the rotor are arranged on the radially inner and outer sides of the rotor; Axial control electrodes for suspension control of the axial position. In this way, the suspension support of the rotor needs to control 5 degrees of freedom, which greatly increases the requirements for the suspension support of the rotor, and the process is also more complicated.

Contents of the invention

The purpose of the present invention is to address the above-mentioned deficiencies in the prior art, and to provide a circular and multi-annular axially magnetized permanent magnet reverse magnetic rotor electrostatic rotating micro-gyroscope, relying on the cylindrical and multi-annular shafts in the upper and lower stators The levitation force and lateral stabilizing force are provided to the magnetized permanent magnet for the anti-magnetic rotor to realize the uncontrolled self-stabilizing suspension, so that it can realize the stable suspension of the anti-magnetic sensitive quality, and at the same time, it uses the axial detection and Feedback electrode and lower stator lateral detection and electrostatic force between feedback electrode and rotor improve the axial stiffness, lateral stiffness and impact resistance of the micro gyroscope, and enhance the stable suspension performance.

The present invention is realized through the following technical solutions. The present invention consists of three parts: an upper stator, a rotor and a lower stator. The upper stator is buckled upside down on the lower stator, so that the two top surfaces of the upper stator and the lower stator are opposite to each other, and the assembly is completed, thereby forming cavity in which the rotor is suspended. During assembly, the surface facing the rotor in the upper stator structure is called the top surface, and the corresponding other surface is called the bottom surface. Similarly, the surface facing the rotor in the lower stator structure is also called the top surface, and the corresponding other surface is called the bottom surface. One side is called the bottom side.

The lower stator includes lower stator lateral detection and feedback electrodes, lower stator common capacitor plates, lower stator axial detection and feedback control electrodes, lower stator base body, lower stator cylindrical axially magnetized permanent magnets, multiple lower stator The annular axially magnetized permanent magnet and the lower stator rotate the drive electrodes; the cylindrical axially magnetized permanent magnet of the lower stator is cylindrical in structure, and the annular axially magnetized permanent magnet of the lower stator is annular. Both permanent magnets are It is axially magnetized; on the top surface of the lower stator base body, the lower stator common capacitor plate, the lower stator rotating drive electrode, the lower stator axial detection and feedback electrode, the lower stator lateral detection and The feedback electrodes, the lateral detection and feedback electrodes of the lower stator are distributed on the outermost periphery of the top surface of the lower stator base, and are distributed along the circumference; on the bottom surface of the lower stator base, the cylindrical axially magnetized permanent magnets of the lower stator are located on the surface of the lower stator base The centerline position of the geometric structure, while the other ring-shaped permanent magnets are arranged sequentially from the inside to the outside with the centerline position of the surface geometry of the lower stator base as the center. Two adjacent ring-shaped permanent magnets are closely nested and matched, and the cylindrical permanent magnet is tightly nested in the In the ring-shaped permanent magnet with the smallest radius inside the ring, the magnetic polarities of the same end faces of adjacent permanent magnets are different (that is, N and S are alternately arranged). The axial magnetization refers to the magnetic pole direction of the cylindrical and ring-shaped permanent magnets. Along the direction of the geometric central axis (also the axis of rotation) of the cylinder or ring.

The upper stator includes an upper stator base body, an upper stator common capacitor plate, an upper stator axial detection and feedback electrode, an upper stator cylindrical axial magnetization permanent magnet, a plurality of upper stator annular axial magnetization permanent magnets, an upper stator Rotating drive electrodes; the cylindrical axially magnetized permanent magnet of the upper stator is cylindrical in structure, and the annular axially magnetized permanent magnet of the upper stator is annular, and both permanent magnets are axially magnetized; the upper stator On the bottom surface of the base body, the cylindrical axially magnetized permanent magnet of the upper stator is located at the midline position of the surface geometric structure of the upper stator base body, while the other annular permanent magnets are arranged sequentially from the inside to the outside with the center line position of the surface geometric structure of the upper stator base body as the center. Two adjacent ring-shaped permanent magnets are tightly nested and fitted, and the cylindrical permanent magnet is tightly nested in the ring-shaped permanent magnet with the smallest inner radius of the ring. The magnetic polarities of the same end faces of adjacent permanent magnets are different (that is, N and S are arranged alternately). The axial magnetization means that the direction of the magnetic poles of the cylindrical and annular permanent magnets is along the geometric central axis (also the axis of rotation) of the cylindrical or annular. The connection relationship between the upper stator common capacitance plate, the upper stator rotation drive electrode and the upper stator axial detection and feedback electrode is that the upper stator common capacitance plate, the upper stator rotation Drive electrodes and upper stator axial detection and feedback electrodes.

The rotor is a disc-shaped structure, including a rotor upper surface layer (material is Cr/Au or Cr/Cu), a rotor middle diamagnetic structure layer, and a rotor lower surface layer (material is Cr/Au or Cr/Cu). The upper and lower surfaces of the diamagnetic structure layer in the middle of the rotor cover the upper surface layer of the rotor and the lower surface layer of the rotor respectively. The fan-shaped holes of the rotor are evenly distributed in a certain circle and embedded in the rotor.

The cylindrical axially magnetized permanent magnets of the upper stator and the cylindrical axially magnetized permanent magnets of the lower stator, the annular axially magnetized permanent magnets of the upper stator and the annular axially magnetized permanent magnets of the lower stator must have the same size from the inside to the outside, namely The diameter and height of the circular permanent magnets of the upper stator are equal to those of the circular permanent magnets of the lower stator. For the upper and lower stators, starting from the circular permanent magnets, the ring permanent magnets from the inside to the outside are called the first ring permanent magnets in turn. magnet, the second annular permanent magnet, and so on, then the inner diameter of the ring of the first annular permanent magnet of the upper stator, the outer diameter of the ring and the height should be the inner diameter of the ring of the first annular permanent magnet of the lower stator, the outer diameter of the ring and Equal in height, the ring inner diameter, ring outer diameter and height of the second annular permanent magnet of the upper stator should be equal to the ring inner diameter, ring outer diameter and height of the second annular permanent magnet of the lower stator, and so on.

When the upper stator is buckled upside down on the lower stator, it is necessary to make the opposite surfaces of the corresponding permanent magnets of the upper stator and the lower stator form a N-N or S-S one-to-one magnetic pole polarity relationship in the vertical direction; the top surface of the upper stator base and the lower stator The top surface of the sub-base should be arranged face to face. The top surface of the upper stator base is distributed with upper stator detection and feedback electrodes, and the top surface of the lower stator base is distributed with lower stator detection and feedback electrodes. The outermost ring on the top surface of the lower stator base A pair of lateral electrostatic electrodes of the lower stator are distributed on the circumference.

When the upper stator is buckled upside down on the lower stator, the common capacitor plates of the lower stator and the common capacitor plates of the upper stator, the rotating drive electrodes of the lower stator and the rotating drive electrodes of the upper stator, the axial detection and feedback electrodes of the lower stator and the axial direction of the upper stator The detection and feedback electrodes should correspond up and down in spatial position to avoid misalignment, that is, projection along the axis of the device, the common capacitance plate of the lower stator and the common capacitance plate of the upper stator, the rotating drive electrode of the lower stator and the rotating drive electrode of the upper stator, The projections of the lower stator axial detection and feedback electrodes and the upper stator axial detection and feedback electrodes in a plane perpendicular to the axis coincide.

The typical technical feature of the invention is that the upper and lower surfaces of the diamagnetic structure layer in the middle of the rotor are respectively covered with Cr/Au or Cr/Cu rotor upper surface layer and rotor lower surface layer. The fan-shaped holes of the rotor are uniformly distributed on the circumference of the rotor and penetrate the rotor. The cylindrical axially magnetized permanent magnets of the lower stator and the multiple annular axially magnetized permanent magnets of the lower stator are axially magnetized. The center line of the geometric structure of the lower stator base body is the center of the circle, and the cylindrical shafts of the lower stator are arranged sequentially from the inside to the outside. Directional magnetization permanent magnets, multiple lower stator annular axial magnetization permanent magnets, the magnetization directions of adjacent permanent magnets are different; upper stator cylindrical axial magnetization permanent magnets, upper stator annular axial magnetization permanent magnets are axial For magnetization, the centerline position of the surface geometric structure of the above stator base is the center of the circle, and from the inside to the outside, the upper stator cylindrical axially magnetized permanent magnets, a plurality of upper stator annular axially magnetized permanent magnets, and the adjacent permanent magnets are magnetized The directions are different; there are multiple electrodes for the rotation drive of the lower stator, which are arranged in a circle. The electrodes are located between the common capacitance plate of the lower stator and the axial detection and feedback electrodes of the lower stator, and the lateral detection and feedback electrodes of the lower stator are also arranged in a circle, outside the axial detection and feedback electrodes of the lower stator; The pole plate is circular, and there are multiple rotating drive electrodes on the upper stator, which are arranged around the circle. There are multiple axial detection and feedback electrodes on the upper stator, which are arranged around the circle. The rotating drive electrodes on the upper stator are located on the common capacitor plate of the upper stator. , Between the axial detection and feedback electrodes of the upper stator.

Rotation of the rotor in the present invention: adopting the variable capacitance electrostatic rotation driving principle, usually the rotating driving electrodes of the upper stator are divided into three groups or three phases, and the corresponding rotating driving electrodes of the lower stator are also divided into three groups or three phases, and are driven by a three-phase DC voltage. When the same-phase electrostatic capacitance plates of the upper and lower stators apply DC driving voltages of equal magnitude and different sign, when the rotor is in the equilibrium position, the net axial driving force and net radial driving force acting on the rotor are both zero, but the tangential The driving force generates a driving torque to the rotor, which drives the rotor to rotate at a certain speed. Through the feedback control of the follow-up circuit, the rotor keeps rotating at a constant high speed to produce a gyroscopic effect.

The invention solves the deficiencies of the prior art, and adopts axially magnetized cylindrical permanent magnets and multi-ring permanent magnet arrangements, which is very easy to process and magnetize, and is easy to form the required static magnetic field gradient and distribution, and theoretically can Forming a static magnetic field with no change in the circumferential direction can effectively avoid electromagnetic damping when the rotor rotates. It is a beneficial idea and solution for magnet arrangement and magnetization design. In this way, the rotor equipped with diamagnetic material is very easy to realize in this static magnetic field. The stable support suspension has conveniently realized a major technical requirement for the normal operation of the suspended rotor micro-gyroscope, which is a stable suspension support. The rotor is designed with Cr/Au or Cr/Cu material and fan-shaped holes in the rotor. It forms a synchronous motor with the rotating drive electrodes in the upper and lower stators. When DC voltage is applied to the rotating drive electrodes in the upper and lower stators, the rotor can be driven to rotate at high speed. Due to the use of DC voltage Drive, low power consumption, and the magnet arrangement and magnetization arrangement of the present invention can effectively avoid electromagnetic damping, and conveniently realize the stable rotation of the rotor, another major technical requirement for the normal operation of the suspended rotor micro-gyroscope.

The cylindrical and multi-ring axially magnetized permanent magnets of the upper and lower stators of the present invention provide levitation force and lateral stabilizing force to the anti-magnetic rotor to realize uncontrolled self-stabilizing levitation, and at the same time, use the axial detection and control of the upper and lower stators Feedback electrode and lower stator lateral detection and electrostatic force between feedback electrode and rotor improve the axial stiffness, lateral stiffness and impact resistance of the micro gyroscope, and enhance the stable suspension performance. Before the electrostatic voltage is applied, the rotor has been suspended in the equilibrium position due to the diamagnetic effect, so compared with the general electrostatic suspension, the rotor starting process and the difficulty of starting control are reduced. It can simultaneously detect the linear acceleration along the X, Y, and Z axes and the angular acceleration around the X, and Y axes, which can then be used to precisely position objects, and to detect the attitude or navigation of the carrier.

Description of drawings

Fig. 1 is a schematic diagram of the overall structure of the present invention

Fig. 2 is a schematic diagram of the front structure of the lower stator of the present invention

Fig. 3 is a schematic diagram of the back structure of the lower stator of the present invention

Fig. 4 is a schematic diagram of the front structure of the upper stator of the present invention

Fig. 5 is a schematic diagram of the back structure of the upper stator of the present invention

Fig. 6 is a structural schematic diagram of the rotor of the present invention

Fig. 7 is a schematic diagram of the structure of the upper stator permanent magnet of the present invention

Fig. 8 is a structural schematic diagram of the lower stator permanent magnet of the present invention

Detailed ways

The embodiments of the present invention are described in detail below in conjunction with the accompanying drawings: the present embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and processes are provided, but the protection scope of the present invention is not limited to the following implementations example.

As shown in Figure 1, this embodiment adopts a three-layer structure, which is composed of upper stator 1, rotor 3 and lower stator 2. The upper stator 1 is buckled upside down on the lower stator 2, so that the upper stator 1 and the lower stator 2 The two top surfaces face each other, and the assembly is completed, thereby forming a cavity, and the rotor 3 is suspended in the cavity. During assembly, the surface facing the rotor 3 in the structure of the upper stator 1 is called the top surface, and the corresponding other surface is called the bottom surface. Similarly, the surface facing the rotor 3 in the structure of the lower stator 2 is also called the top surface. , and the corresponding other side is called the bottom side.

As shown in Fig. 2, Fig. 3 and Fig. 7, the lower stator 2 includes the lower stator side detection and feedback electrodes 6 (four groups in this embodiment, each group including two pole plates), the lower stator common capacitor pole Plate 4, lower stator axial detection and feedback control electrodes 5 (four groups in this embodiment, each group including two pole plates), lower stator base 7, lower stator cylindrical axially magnetized permanent magnet 8, multiple The lower stator annular axially magnetized permanent magnet 9, the lower stator rotating drive electrode 18; the lower stator common capacitor pole plate 4, the lower stator rotating driving electrode 18, and the lower stator base body 7 are sequentially distributed from inside to outside on the top surface of the lower stator base body 7. The sub-axial detection and feedback electrodes 5, the lower stator lateral detection and feedback electrodes 6, the lower stator lateral detection and feedback electrodes 6 are distributed on the outermost periphery of the top surface of the lower stator base, and are distributed along the circumference, and the lower stator rotates and drives the electrodes 18 are distributed along the circumference, and the axial detection and feedback electrodes 5 of the lower stator are also distributed along the circumference; on the bottom surface of the lower stator base 7, the cylindrical axially magnetized permanent magnet 8 of the lower stator is located at the center line of the surface geometry of the lower stator base 7, The other lower stator annular axially magnetized permanent magnets 9 are arranged sequentially from the inside to the outside with the midline position of the geometric structure of the lower stator base body as the center of the circle. Shaped permanent magnet 8 is tightly nested in the annular permanent magnet with the smallest radius in the ring, and the magnetic polarities of the same end faces of the adjacent permanent magnets of the lower stator 2 are different (that is, N and S are alternately arranged), and the axial magnetization It means that the magnetic pole direction of the cylindrical and annular permanent magnet is along the geometric central axis (also the axis of rotation) of the cylindrical or annular.

As shown in Fig. 4, Fig. 5 and Fig. 8, the main structure of the upper stator 1 includes an upper stator base body 12, an upper stator common capacitor plate 10, an upper stator rotating drive electrode 19 and an upper stator axial detection and feedback electrode 11 ( In the present embodiment, there are four groups, and each group includes two pole plates), an upper stator cylindrical axially magnetized permanent magnet 14, and an upper stator annular axially magnetized permanent magnet 13; on the bottom surface of the upper stator base 12, the upper stator The cylindrical axially magnetized permanent magnet 14 is located at the center line of the surface geometry of the upper stator base 12, while the other ring-shaped axially magnetized permanent magnets 13 of the upper stator are centered at the center line of the surface geometry of the upper stator base 12. Arranged in sequence, the two adjacent ring-shaped permanent magnets of the upper stator 1 are tightly nested and matched, and the cylindrical permanent magnet 14 of the upper stator is closely nested in the ring-shaped permanent magnet with the smallest radius inside the ring, and the adjacent permanent magnets of the upper stator 1 are the same The magnetic polarities of the end faces are different (that is, N and S are alternately arranged), and the axial magnetization refers to the direction of the magnetic poles of the cylindrical and annular permanent magnets along the geometric central axis (also the axis of rotation) of the cylinder or ring. . The connection relationship between the upper stator common capacitor plate 10, the upper stator rotating drive electrode 19 and the upper stator axial detection and feedback electrode 11 is that the upper stator common capacitor plate is distributed sequentially from the inside to the outside on the top surface of the upper stator base 12 10. The upper stator rotation drive electrode 19 and the upper stator axial detection and feedback electrode 11 .

Described rotor 3 is a disc-shaped structure, comprises rotor upper surface layer 15 (material is Cr/Au or Cr/Cu), rotor middle diamagnetic structure layer 16, rotor lower surface layer 17 (material is Cr/Au or Cr/Cu) /Cu), rotor sector hole 20. The fan-shaped holes 20 of the rotor are uniformly distributed on a certain circumference and embedded in the rotor 3 . The upper and lower surfaces of the diamagnetic structure layer 16 in the middle of the rotor are respectively covered with a rotor upper surface layer 15 and a rotor lower surface layer 17 . The circumferential edge of the rotor 3 is vertically aligned with the outer arc edge of the lower stator axial detection and feedback electrode 5 and the upper stator axial detection and feedback electrode 11, that is, the outer diameter of the rotor 3 is aligned with the upper stator axial detection and feedback electrode 11. The outer diameters of the feedback electrode 11 and the lower stator axial detection and feedback electrode 5 are equal. The outer diameters of the rotor fan-shaped holes 20 are equal to the outer diameters of the upper stator rotating driving electrodes 19 and the lower stator rotating driving electrodes 18 .

The outer dimensions of the circular axially magnetized permanent magnets of the upper stator 1 and the lower stator 2 should be the same, and the outer dimensions of the corresponding annular axially magnetized permanent magnets of the upper stator 1 and the lower stator 2 should be the same from the inside to the outside, that is, the lower stator 1 and the lower stator 2 should have the same outer dimensions. The diameter and the height of the sub-circular axially magnetized permanent magnet 8 are equal to the diameter and the height of the upper stator circular axially magnetized permanent magnet 14. For the upper stator 1, from the upper stator circular axially magnetized permanent magnet Starting from 14, the multiple ring-shaped axially magnetized permanent magnets of the upper stator from the inside to the outside are called the first ring-shaped axially magnetized permanent magnets of the upper stator and the second ring-shaped axially magnetized permanent magnets of the upper stator, and so on. For the lower stator 2, starting from the circular axially magnetized permanent magnet 8 of the lower stator, a plurality of annular axially magnetized permanent magnets of the lower stator from the inside to the outside are called the first annular axially magnetized permanent magnets of the lower stator in turn, The second annular axially magnetized permanent magnet of the lower stator, and so on, the ring inner diameter, ring outer diameter and height of the first annular axially magnetized permanent magnet of the upper stator should be the same as the first annular axially magnetized permanent magnet of the lower stator The ring inner diameter, ring outer diameter and height of the magnet are equal, and the ring inner diameter, ring outer diameter and height of the second annular axial magnetization permanent magnet of the upper stator should be the same as the second annular axial magnetization permanent magnet of the lower stator. Ring inner diameter, ring outer diameter and height are equal, and so on.

When the upper stator 1 is buckled upside down on the lower stator 2, the top surface of the upper stator base 12 and the top surface of the lower stator base 7 need to be arranged face to face, and at the same time, the corresponding axial magnetization of the upper stator 1 and the lower stator 2 must be made The opposite faces of the permanent magnets form a N-N or S-S one-to-one magnetic pole polarity relationship in the vertical direction, that is, the upper stator cylindrical axially magnetized permanent magnet 14 and the lower stator cylindrical axially magnetized permanent magnet 8 are axially charged Magnetic and magnetization directions are opposite, the first annular axially magnetized permanent magnet of the upper stator and the first annular axially magnetized permanent magnet of the lower stator are axially magnetized and the magnetization direction is opposite, and the second annular axially magnetized permanent magnet of the upper stator The permanent magnet and the second annular axially magnetized permanent magnet of the lower stator are axially magnetized and the direction of magnetization is opposite, and so on.

When the upper stator 1 is buckled upside down on the lower stator 2, the lower stator common capacitor plate 4 and the upper stator common capacitor plate 10, the lower stator rotating drive electrode 18 and the upper stator rotating drive electrode 19, the axial detection and feedback of the lower stator The electrode 5 and the upper stator axial detection and feedback electrode 11 should correspond up and down in space to avoid misalignment, that is, projection along the axis of the device, the lower stator common capacitor plate 4 and the upper stator common capacitor plate 10, the lower stator The projections of the rotation drive electrode 18 and the upper stator rotation drive electrode 19 , the lower stator axial detection and feedback electrode 5 and the upper stator axial detection and feedback electrode 11 in a plane perpendicular to the axis coincide.

Rotation of the rotor in the present invention: adopting the principle of variable capacitance electrostatic rotation drive, usually the upper stator rotation drive electrodes 19 are divided into three groups or three phases, and the corresponding lower stator rotation drive electrodes 18 are also divided into three groups or three phases, which are driven by three-phase DC voltage. When the same-phase electrostatic capacitance plates of the upper and lower stators apply DC driving voltages of equal magnitude and different sign, when the rotor 3 is in the equilibrium position, the net axial driving force and the net radial driving force acting on the rotor 3 are both zero, but The tangential driving force generates a driving torque to the rotor 3, which drives the rotor to rotate at a certain speed. Through the feedback control of the follow-up circuit, the rotor 3 is kept rotating at a constant high speed to generate a gyroscopic effect.

As shown in Figure 2-8, when this embodiment works, it includes the following three aspects:

(1) When used to detect the acceleration signal input by the z-axis in the vertical direction, apply the same frequency, equal amplitude and phase difference of 180 to the upper stator axial detection and feedback electrode 11 and the lower stator axial detection and feedback electrode 5 The high-frequency AC carrier wave of high frequency outputs the differential capacitance signal through the upper stator common capacitor plate 10 and the lower stator common capacitor plate 4, and the input z-axis acceleration can be detected through the post-processing of the circuit, and at the same time, through the upper stator axial detection and The feedback electrode plate group 11 and the lower stator axial detection and feedback electrode 5 apply a DC feedback voltage with equal amplitude and opposite polarity to pull the rotor 3 back to the equilibrium position;

(2) When used to detect the acceleration signal input by the x-axis in the horizontal direction, two capacitive plates for the upper left group of lower stator side detection and feedback electrodes 6 and two capacitive plates for the lower left group of lower stator detection and feedback electrodes 6 Each capacitor plate applies high-frequency AC carrier waves with the same frequency, equal amplitude, and 180-degree phase difference, and outputs differential capacitance signals through the upper stator common capacitor plate 10 and the lower stator common capacitor plate 4, which are post-processed by the circuit The input x-axis acceleration can be detected, and at the same time, the upper left group of the lower stator side detection and feedback electrodes 6 of the two capacitive plates and the left lower group of the lower stator detection and feedback electrode plates 6 of the two capacitive plates apply the amplitude The DC feedback voltage of equal and opposite polarity pulls the rotor 3 back to the equilibrium position;

(3) When used to detect the acceleration signal input by the y-axis in the vertical direction, the two capacitive plates for the upper right group of lower stator side detection and feedback electrodes 6 and the lower right group of lower stator detection and feedback electrode plates 6 The two capacitive plates of the two capacitive plates respectively apply high-frequency AC carriers with the same frequency, equal amplitude, and 180-degree phase difference, and output differential capacitance signals through the upper stator common capacitive plate 10 and the lower stator common capacitive plate 4, and pass through the circuit The post-processing can detect the input y-axis acceleration, and at the same time, the upper right group of the lower stator lateral detection and feedback electrodes 6 two capacitive plates and the lower right group of the lower stator detection and feedback electrode plates 6 two capacitive plates, Apply DC feedback voltages with equal amplitude and opposite polarity to pull the rotor 3 back to the equilibrium position;

(4) When detecting the input angular velocity around the X and Y axes, since the principle of detecting the input angular velocity around the X axis and around the Y axis is the same, only the working process of detecting the input angular velocity around the X axis is described here. When the shaft inputs the angular velocity, the gap between the corresponding lower stator axial detection and feedback electrode 5 and the upper stator axial detection and feedback electrode 11 and the rotor 3 changes, so that the common electrodes of the upper and lower stators output carrier modulation signals, and the signals are processed Modulate and demodulate, and output the feedback voltage to the corresponding lower stator axial detection and feedback electrode 5 and upper stator axial detection and feedback electrode 11, pull the rotor back to the equilibrium position, and measure the angular velocity according to the magnitude of the feedback torque, which It is the method of torque rebalancing to measure angular velocity.

The working process of the present invention is as follows: since the bottom surfaces of the upper stator 1 and the lower stator 2 are provided with permanent magnets, and the rotor 3 itself is an anti-magnet, an interaction force will be formed between the rotor 3 and the upper stator 1 and the lower stator 2. The magnetic force provides the Z-direction (axial) levitation force for the suspended diamagnetic rotor, and also provides the lateral stability force for the rotor 3 along the X and Y axes, and then the rotor 3 realizes the balance between the upper stator 1 and the lower stator 2. Self-stabilizing suspension; at the same time, by applying voltage to the lower stator axial detection and feedback electrode 5 and the upper stator axial detection and feedback electrode 11, the static generated between the lower stator 2 and the rotor 3, the upper stator 1 and the rotor 3 The electric power enhances the axial stiffness of the rotor 3; by applying a feedback control voltage on the lower stator lateral detection and feedback electrodes 6 distributed around the stator, the lower stator lateral electrostatic electrodes 6 and the rotor 3 generate electrostatic force, which strengthens the rotor 3 the lateral stiffness. Carriers are applied to the upper stator axial detection and feedback electrode 11, the lower stator axial detection and feedback electrode 5, and the lower stator lateral detection and feedback electrode 6. When there is axial and lateral deviation, the common The signal induced on the capacitor plate 10 and the lower stator common capacitor plate 4 is picked up, amplified, modulated and demodulated, and judged, and a DC voltage is applied to the corresponding capacitor plate group or the side electrostatic electrode to generate Electrostatic forces pull the microrotor back to its equilibrium position. In this way, the axial and lateral rigidity of the rotor in the anti-magnetic levitation state can be improved, the impact resistance of the micro-gyroscope can be improved, and the rotor 3 can be more stably suspended between the upper stator 1 and the lower stator 2 . At the same time, since the rotor 3 has been suspended in the equilibrium position due to the diamagnetic effect before the electrostatic voltage is applied, compared with the general electrostatic levitation micro-gyroscope, the starting process and the difficulty of the starting control of the rotor 3 are reduced.

The technique of the present invention adopts the combination of microfabrication technology (MEMS technique) and precision machining, specifically: the upper stator public capacitor plate 10 on the upper stator 1, the upper stator axial detection and feedback electrode 11, and the upper stator rotation drive electrode 19 , and the lower stator common capacitor plate 4 on the lower stator 2, the lower stator axial detection and feedback electrode 5, the lower stator lateral detection and feedback electrode 6, and the lower stator rotation drive electrode 18 are realized by micromachining technology; the capacitor plate Copper with better electrical conductivity is generally used as the material of the electrode and the lateral electrostatic electrode, and the process generally adopts the micromachining technology of photolithography and electroplating; the cylindrical permanent magnet block and ring permanent magnet of the lower stator and the cylindrical permanent magnet and ring permanent magnet of the upper stator can be Cobalt Nickel Manganese Phosphorus (CoNiMnP) and Neodymium Iron Boron (NdFeB) are used, formed by precision machining or micro machining, and magnetized; the rotor 3 is first sputtered Cr on both surfaces of the substrate, that is, the antimagnetic structure layer in the middle of the rotor. /Cu or Cr/Au, and then obtained by micro-EDM, the substrate is made of diamagnetic material, such as pyrolytic graphite.

Claims (9)

1. A circular and multi-ring axially magnetized permanent magnet anti-magnetic rotor electrostatic rotating micro-gyroscope is composed of an upper stator (1), a rotor (3) and a lower stator (2), and the upper stator (1) is upside down on the On the lower stator (2), the rotor (3) is suspended in the cavity formed by the upper stator (1) and the lower stator (2), which is characterized in that: The lower stator (2) includes a lower stator lateral detection and feedback electrode (6), a lower stator common capacitor plate (4), a lower stator axial detection and feedback electrode (5), a lower stator base (7), a lower stator The sub-cylindrical axially magnetized permanent magnet (8), a plurality of lower stator annular axially magnetized permanent magnets (9), and the lower stator rotating drive electrode (18) are arranged on the top surface of the lower stator base (7). The lower stator public capacitor plate (4), the lower stator rotating drive electrode (18), the lower stator axial detection and feedback electrode (5), the lower stator lateral detection and feedback electrode (6) are distributed in the outer order; The bottom surface of the sub-base (7), the lower stator cylindrical axially magnetized permanent magnet (8) is located at the center line of the surface geometry of the lower stator base (7), and the plurality of lower stator annular axially magnetized permanent magnets (9) Then the centerline position of the surface geometric structure of the lower stator base body is the center of the circle and arranged sequentially from the inside to the outside, two adjacent ring-shaped permanent magnets are tightly nested and matched, and the lower stator cylindrical permanent magnet (8) is tightly nested in the ring with the smallest radius inside the ring. Among the permanent magnets, the magnetic polarities of the same end faces of adjacent permanent magnets of the lower stator (2) are different; The upper stator (1) includes an upper stator base (12), an upper stator common capacitor plate (10), an upper stator axial detection and feedback electrode (11), an upper stator cylindrical axially magnetized permanent magnet (14) , the upper stator annular axial magnetization permanent magnet (13), the upper stator rotation drive electrode (19), on the bottom surface of the upper stator base (12), the upper stator cylindrical axial magnetization permanent magnet (14) is located on the upper stator base (12) the centerline position of the surface geometry, and a plurality of upper stator annular axially magnetized permanent magnets (13) are arranged sequentially from the inside to the outside with the centerline position of the surface geometry of the upper stator base (12) as the center of the circle, and the upper stator (1 ) two adjacent annular permanent magnets are tightly nested and fitted, and the upper stator cylindrical axially magnetized permanent magnet (14) is tightly nested in the annular permanent magnet with the smallest inner radius of the ring, and the upper stator (1) adjacent The magnetic polarity of the same end surface of the permanent magnet is different, and the upper stator common capacitor pole plate (10), the upper stator rotating drive electrode (19), and the upper stator shaft are distributed sequentially from the inside to the outside on the top surface of the upper stator base (12). to the detection and feedback electrodes (11); The circumferential edge of the rotor (3) is vertically aligned with the outer arc edges of the lower stator axial detection and feedback electrode (5) and the upper stator axial detection and feedback electrode (11). 2. The circular and multi-ring axially magnetized permanent magnet reverse magnet rotor electrostatic rotating micro-gyroscope according to claim 1 is characterized in that, the upper stator cylindrical axially magnetized permanent magnet of the upper stator (1) (14) and the lower stator cylindrical axially magnetized permanent magnet (8) of the lower stator (2) have the same diameter and height, and the upper stator (1) and the lower stator (2) have a plurality of annular axially charged magnets corresponding from the inside to the outside. The external dimensions of the magnetic permanent magnets are the same. 3. According to claim 1 or 2, the circular and multi-ring axially magnetized permanent magnet anti-magnetic rotor electrostatic rotating micro-gyroscope is characterized in that the corresponding upper stator (1) and lower stator (2) The opposite faces of the axially magnetized permanent magnets form a N-N or S-S one-to-one magnetic pole polarity relationship in the vertical direction. 4. The circular and multi-ring axially magnetized permanent magnet anti-magnetic rotor electrostatic rotating micro-gyroscope according to claim 1, characterized in that, the top surface of the upper stator base (12) and the lower stator base (7) The top surfaces are arranged face to face. 5. The circular and multi-ring axially magnetized permanent magnet anti-magnetic rotor electrostatic rotating micro-gyroscope according to claim 1, characterized in that the lower stator lateral detection and feedback electrodes (6) are distributed on the lower stator base The outermost periphery of the top surface of the lower stator is distributed along the circumference, and the axial detection and feedback electrodes (5) of the lower stator are also distributed along the circumference. 6. The circular and multi-annular axially magnetized permanent magnet anti-magnetic rotor electrostatic rotating micro-gyroscope according to claim 1, characterized in that, the rotor (3) is a disc-shaped structure, including the upper surface layer of the rotor (15), rotor middle diamagnetic structure layer (16), rotor lower surface layer (17), the upper and lower surfaces of rotor middle diamagnetic structure layer (16) are respectively covered with rotor upper surface layer (15) and rotor lower surface layer Surface layer (17). 7. according to claim 1 or 6 described circular and multi-annular axially magnetized permanent magnet anti-magnetic rotor electrostatic rotating micro-gyro, it is characterized in that, described rotor (3) is provided with rotor fan-shaped hole (20 ), the fan-shaped holes (20) of the rotor are evenly distributed on the circumference and embedded in the rotor (3). 8. The circular and multi-annular axially magnetized permanent magnet demagnetization rotor electrostatic rotating micro-gyroscope according to claim 1 or 7, characterized in that the outer diameter of the rotor sector hole (20) of the rotor (3) The outer diameter is equal to the outer diameter of the upper stator rotating driving electrode (19) and the lower stator rotating driving electrode (18). 9. The circular and multi-ring axially magnetized permanent magnet anti-magnetic rotor electrostatic rotating micro-gyroscope according to claim 6, characterized in that, the material of the upper surface layer (15) of the rotor is Cr/Au or Cr/Au Cu, the material of the diamagnetic structure layer (16) in the middle of the rotor is a diamagnetic material, and the material of the rotor lower surface layer (17) is Cr/Au or Cr/Cu.

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