CN100588971C - Circle and multi-ring shaped axial magnetizing permanent magnetism antimagnetic sensitive mass micro-accelerometer - Google Patents
Circle and multi-ring shaped axial magnetizing permanent magnetism antimagnetic sensitive mass micro-accelerometer Download PDFInfo
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- CN100588971C CN100588971C CN 200810032470 CN200810032470A CN100588971C CN 100588971 C CN100588971 C CN 100588971C CN 200810032470 CN200810032470 CN 200810032470 CN 200810032470 A CN200810032470 A CN 200810032470A CN 100588971 C CN100588971 C CN 100588971C
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Abstract
The circle in a kind of MEMS (micro electro mechanical system) field and multi-ring shaped axial magnetizing permanent magnetism antimagnetic sensitive mass micro-accelerometer, by last stator, rotor and following stator constitute, in the dependence, cylindrical and multi-ring shaped axial magnetizing permanent magnetism body in the following stator provides suspending power and lateral stability power to antimagnetic rotor, realizing not having control suspends from steady, on utilizing again simultaneously, the axial detection of following stator and feedback electrode and following stator side electrostatic force between detection and feedback electrode and rotor improves the axial rigidity of micro-acceleration gauge, lateral rigidity and impact resistance, strengthen the stable suspersion performance, reduced playing a process and playing a control difficulty of rotor, do not need complicated control gear can realize self-stabilization, power consumption is little, it is convenient to realize, size is little, can detect simultaneously to comprise along X, Y, three axis accelerometers of Z axle and around X, Y-axis two shaft angle acceleration.
Description
Technical field
What the present invention relates to is a kind of micro accelerometer of field of micro electromechanical technology, specifically is circle and multi-ring shaped axial magnetizing permanent magnetism antimagnetic sensitive mass micro-accelerometer.
Background technology
Inertial navigation system is a kind of self-aid navigation technology, directly calculates the navigational parameters such as position, course and attitude of carrier according to newton law of inertia.In the course of the work, neither to extraneous emitted energy, do not obtain information from the outside yet, have interference-free, can use anywhere, distinct advantages such as dynamic property is good, navigation output information is abundant, obtained using widely in fields such as Aeronautics and Astronautics and navigations, the appearance of MEMS (Micro-electromechanical Systems, MEMS (micro electro mechanical system)) technology impels inertial navigation system to develop to direction low-cost, microminiaturized, low-power consumption.The suspension rotor micro gyro that utilizes the MEMS technical design to make does not have the machinery friction, both had high-precision advantage, have again that size is little, mass, characteristics that cost is low, on the military and civilian equipment in modern and future, be with a wide range of applications, can satisfy the demand of the portable autonomous navigation of microminiature platform especially.
Since the nineties in 20th century, suspension rotor formula inertia device causes the extensive concern of industry member, academia, and some research institutions of states such as English, U.S., day have carried out the research of the little inertia device of a large amount of suspension rotors, and have obtained certain achievement in research.Domestic also have unit to carry out this respect tracking exploration.
Find through literature search prior art, the R Houlihan of Britain University of Southampton in 2002 and MKraft are at J.Micromech.Microeng. (the little engineering magazine of micromechanics, 2002 12 phase 495-503 pages or leaves, Britain's periodical) the disk type rotor electrostatic suspension micro-acceleration gauge that Modelling of an accelerometer based ona levitated proof mass (based on the modeling of the accelerometer that suspend to detect quality) proposes of publishing an article, such micro-acceleration gauge is realized suspension owing to need utilize electrostatic force to overcome gravity, can realize when needing gap between rotor and the stator very little, thereby it is very high to technological requirement, they all need the close-loop feedback control circuit can operate as normal in addition, rotor suspends and need control effectively to a plurality of degree of freedom, rotor rise and stable suspersion all needs complicated circuit control, difficulty is bigger.This has greatly limited its application.
Summary of the invention
The present invention is directed to the deficiencies in the prior art, propose a kind of circle and multi-ring shaped axial magnetizing permanent magnetism antimagnetic sensitive mass micro-accelerometer, achieve the stable suspension of diamagnetic sensitive mass, do not need complicated control gear can realize self-stabilization, power consumption is little, realization is convenient, and size is little.The present invention relies on the cylindrical and multi-ring shaped axial magnetizing permanent magnetism body in the upper and lower stator to provide suspending power and lateral stability power to antimagnetic rotor, realizing not having control suspends from steady, utilize simultaneously the axial detection of upper and lower stator and feedback electrode and following stator side electrostatic force between detection and feedback electrode and rotor to improve axial rigidity, lateral rigidity and the impact resistance of micro-acceleration gauge, enhancing stable suspersion performance again.
The present invention is achieved through the following technical solutions, and the present invention is made of last stator, rotor and following stator three parts, and last stator tips upside down on down on the stator, make two end faces of stator and following stator relative, finish assembling, thereby form cavity, rotor then is suspended in this cavity.When assembling, the face over against rotor in the last stator structure all is referred to as end face, and corresponding another side then is referred to as the bottom surface, and same, the face over against rotor in the following stator structure also all is referred to as end face, and corresponding another side then is referred to as the bottom surface.
Described down stator comprise down stator side to detection and feedback electrode, down stator public capacitance pole plate, stator shaft orientation detects and FEEDBACK CONTROL electrode, stator matrix, the cylindrical axial charging permanent magnet of stator, a plurality of stator ring axial charging permanent magnet down down down down; On the cylindrical axial charging permanent magnet structure of following stator is columniform, and following stator ring axial charging permanent magnet is annular, and these two kinds of permanent magnets all are axial chargings; On the end face of following stator matrix, distributing stator public capacitance pole plate, following stator shaft orientation detection and feedback electrode, following stator side to axial detection and feedback electrode from inside to outside successively, following stator side is to detecting and feedback electrode is distributed in down the outermost of the end face of stator matrix, and circumferentially; Bottom surface at following stator matrix, the cylindrical axial charging permanent magnet of following stator is positioned at the midline position of stator matrix surface geometry down, the midline position of the then following stator matrix surface of other annular permanent magnet geometry is that the center of circle is from inside to outside arranged successively, the tight nested cooperation of adjacent two annular permanent magnets, cylindrical permanent magnet closely is nested in the annular permanent magnet of annulus inside radius minimum, the magnetic polarity of the same end face of adjacent permanent magnet is different (to be N, the S arranged alternate), described axial charging is meant that the pole orientation of cylindrical and annular permanent magnet is along how much cylindrical or annular axis (also being rotation) directions.
Described go up stator comprise the stator matrix, go up stator public capacitance pole plate and last stator shaft orientation detection and feedback electrode, go up the cylindrical axial charging permanent magnet of stator, a plurality of on the stator ring axial charging permanent magnet; On the cylindrical axial charging permanent magnet structure of last stator is columniform, and last stator ring axial charging permanent magnet is annular, and these two kinds of permanent magnets all are axial chargings; Bottom surface at last stator matrix, the cylindrical axial charging permanent magnet of last stator is positioned at the midline position of stator matrix surface geometry, the midline position of the then above stator matrix surface of other annular permanent magnet geometry is that the center of circle is from inside to outside arranged successively, the tight nested cooperation of adjacent two annular permanent magnets, cylindrical permanent magnet closely is nested in the annular permanent magnet of annulus inside radius minimum, the magnetic polarity of the same end face of adjacent permanent magnet is different (to be N, the S arranged alternate), described axial charging is meant that the pole orientation of cylindrical and annular permanent magnet is along how much cylindrical or annular axis (also being rotation) directions.Last stator public capacitance pole plate and last stator shaft orientation detect and the annexation of feedback electrode is stator public capacitance pole plate on distributing successively from inside to outside on the end face of last stator matrix and detection of last stator shaft orientation and feedback electrode.
Described rotor is a disc-shaped structure, comprises rotor upper surface layer (material is Cr/Au or Cr/Cu), the middle anti-magnetic structure layer of rotor, rotor undersurface layer (material is Cr/Au or Cr/Cu).The upper and lower surface of anti-magnetic structure layer is covered with rotor upper surface layer and rotor undersurface layer respectively in the middle of rotor.
Among the present invention, cylindrical axial charging permanent magnet of last stator and the cylindrical axial charging permanent magnet of following stator, last stator ring axial charging permanent magnet wants consistent with following stator ring axial charging permanent magnet size from inside to outside, promptly go up the diameter of stator circular permanent magnet and height with the diameter of following stator circular permanent magnet with highly equate, for stator up and down, from circular permanent magnet, annular permanent magnet from inside to outside is called first annular permanent magnet successively, second annular permanent magnet, by that analogy, then go up the ring interior diameter of first annular permanent magnet of stator, ring overall diameter and height should with the ring interior diameter of first annular permanent magnet of following stator, ring overall diameter and highly equal, the ring interior diameter of second annular permanent magnet of last stator, ring overall diameter and height should with the ring interior diameter of second annular permanent magnet of following stator, ring overall diameter and highly equal, and the like.
When last stator tips upside down on down on the stator, the opposite face of need to make going up stator and the corresponding permanent magnet of play stator vertical direction form N-N or S-S one to one pole polarity concern; The end face of last stator matrix needs face-to-face positioned opposite with the end face of following stator matrix, the end face of last stator matrix is distributed with stator and detects and feedback electrode, the end face of following stator matrix is distributed with down stator and detects and feedback electrode, and stator side is right to electrostatic attraction electrode under being distributed with on the end face outmost turns circumference of following stator matrix.
Typical technology feature of the present invention be anti-magnetic structure layer in the middle of the rotor upper and lower surface respectively material-covered be rotor upper surface layer and the rotor undersurface layer of Cr/Au or Cr/Cu; The cylindrical axial charging permanent magnet of following stator, a plurality of stator ring axial charging permanent magnet down are axial chargings, the midline position of following stator matrix surface geometry be the center of circle from inside to outside successively cloth deposit the cylindrical axial charging permanent magnet of stator, a plurality of down stator ring axial charging permanent magnets, the adjacent permanent magnet magnetizing direction is different; The cylindrical axial charging permanent magnet of last stator, last stator ring axial charging permanent magnet are axial chargings, the midline position of above stator matrix surface geometry is that the center of circle is from inside to outside arranged the upward cylindrical axial charging permanent magnet of stator, a plurality of stator ring axial charging permanent magnet of going up successively, and the adjacent permanent magnet magnetizing direction is different; Following stator public capacitance pole plate is circular, following stator shaft orientation detects and feedback electrode has a plurality of, stator public capacitance pole plate is circumference under centering on, and following stator side also is circumference to detection and feedback electrode, is positioned at outside stator shaft orientation detection down and the feedback electrode; Last stator public capacitance pole plate is circular, and stator shaft orientation detects and feedback electrode has a plurality ofly on the last stator, around last stator public capacitance pole plate, is circumference.
Stable suspersion is the gordian technique that floated accelerometer is realized, the invention solves the deficiencies in the prior art, adopt cylindrical permanent magnet and many annular permanent magnets of axial charging to arrange, be highly susceptible to processing and magnetizing, and form needed static magnetic field gradient and distribution easily, and can form no change static magnetic field on the circumferencial direction in theory, like this on any horizontal radial direction, because Distribution of Magnetic Field is the same, therefore the sensitivity to acceleration also is the same, made things convenient for the measurement of horizontal direction acceleration, be the useful thinking and the scheme of a kind of magnet arrangement and the design of magnetizing, simultaneously, the rotor that is provided with diamagnetic substance like this is very easy in this static magnetic field realize that stable support suspends, and makes things convenient for to such an extent that realize stable suspersion to support the technology important document that this suspension rotor accelerometer is wanted operate as normal.
The present invention's cylindrical and multi-ring shaped axial magnetizing permanent magnetism body of stator up and down provides suspending power and lateral stability power to antimagnetic rotor, realizing not having control suspends from steady, utilize simultaneously the axial detection of upper and lower stator and feedback electrode and following stator side electrostatic force between detection and feedback electrode and rotor to improve axial rigidity, lateral rigidity and the impact resistance of micro-acceleration gauge, enhancing stable suspersion performance again.The present invention is before applying electrostatic potential, and rotor has been suspended in the equilibrium position because of diamagnetic effect, so compare general electrostatic suspension micro-acceleration gauge, has reduced playing a process and playing a control difficulty of rotor.And the present invention can detect simultaneously and comprise along three axis accelerometers of X, Y, Z axle and around X, Y-axis two shaft angle acceleration.
Description of drawings
Fig. 1 is a general structure synoptic diagram of the present invention
Fig. 2 is stator structure end face synoptic diagram under the present invention
Fig. 3 is stator structure schematic bottom view under the present invention
Fig. 4 is stator structure end face synoptic diagram in the present invention
Fig. 5 is stator structure schematic bottom view in the present invention
Fig. 6 is a rotor structure synoptic diagram of the present invention
Fig. 7 is stator permanent magnet structural representation under the present invention
Fig. 8 is stator permanent magnet structural representation in the present invention
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment has provided detailed embodiment and process being to implement under the prerequisite with the technical solution of the present invention, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, what present embodiment adopted is three-decker, is made of last stator 1, rotor 3 and following stator 2 three parts, last stator 1 tips upside down on down on the stator 2, makes 2 two end faces of stator 1 and following stator relative, finishes assembling, thereby the formation cavity, 3 of rotors are suspended in this cavity.When assembling, the face over against rotor 3 in last stator 1 structure all is referred to as end face, and corresponding another side then is referred to as the bottom surface, and same, the face over against rotor 3 in following stator 2 structures also all is referred to as end face, and corresponding another side then is referred to as the bottom surface.
As Fig. 2, Fig. 3, shown in Figure 7, described stator 2 down comprises that stator side (in the present embodiment is four groups to detection and feedback electrode 6 down, every group comprises two pole plates), down stator public capacitance pole plate 4, stator shaft orientation detects and FEEDBACK CONTROL electrode 5 (in the present embodiment be four groups, every group comprises two pole plates), stator matrix 7, the cylindrical axial charging permanent magnet 8 of stator, a plurality of stator ring axial charging permanent magnet 9 down down down down; On the end face of following stator matrix 7, distributing stator public capacitance pole plate 4, following stator shaft orientation detection and feedback electrode 5, following stator side to detecting and feedback electrode 6 from inside to outside successively, following stator side is distributed in down the outermost of the end face of stator matrix to detection and feedback electrode 6, and circumferentially, following stator shaft orientation detect and feedback electrode 5 also circumferentially; Bottom surface at following stator matrix 7, the cylindrical axial charging permanent magnet 8 of following stator is positioned at the midline position of stator matrix 7 surface geometries down, the midline position of other the then following stator matrix surface of following stator ring axial charging permanent magnet 9 geometry is that the center of circle is from inside to outside arranged successively, the tight nested cooperation of adjacent two annular permanent magnets, following stator cylindrical permanent magnet 8 closely is nested in the annular permanent magnet of annulus inside radius minimum, the magnetic polarity of the same end face of permanent magnet that following stator 2 is adjacent is different (to be N, the S arranged alternate), described axial charging is meant that the pole orientation of cylindrical and annular permanent magnet is along how much cylindrical or annular axis (also being rotation) directions.
As Fig. 4, Fig. 5, shown in Figure 8, described stator 1 primary structure of going up comprises stator matrix 12, goes up stator public capacitance pole plate 10 and detection of last stator shaft orientation and feedback electrode 11 (in the present embodiment be four groups, every group comprises two pole plates), goes up the cylindrical axial charging permanent magnet 14 of stator, goes up stator ring axial charging permanent magnet 13; Bottom surface at last stator matrix 12, the cylindrical axial charging permanent magnet 14 of last stator is positioned at the midline position of stator matrix 12 surface geometries, the midline position of other then above stator matrix 12 surface geometries of last stator ring axial charging permanent magnet 13 is that the center of circle is from inside to outside arranged successively, the tight nested cooperation of two annular permanent magnets that last stator 1 is adjacent, the cylindrical axial charging permanent magnet 14 of last stator closely is nested in the annular permanent magnet of annulus inside radius minimum, the magnetic polarity of the same end face of permanent magnet that last stator 1 is adjacent is different (to be N, the S arranged alternate), described axial charging is meant that the pole orientation of cylindrical and annular permanent magnet is along how much cylindrical or annular axis (also being rotation) directions.Last stator public capacitance pole plate 10 and last stator shaft orientation detect and the annexation of feedback electrode 11 is stator public capacitance pole plate on distributing successively from inside to outside on the end face of last stator matrix 12 10 and detection of last stator shaft orientation and feedback electrode 11.
Described rotor 3 is disc-shaped structures, comprises rotor upper surface layer 15 (material is Cr/Au or Cr/Cu), the middle anti-magnetic structure layer 16 of rotor, rotor undersurface layer 17 (material is Cr/Au or Cr/Cu).The upper and lower surface of anti-magnetic structure layer 16 is covered with rotor upper surface layer 15 and rotor undersurface layer 17 respectively in the middle of rotor.The circumferential edges of rotor 3 detects with following stator shaft orientation and the external arc edge in the vertical direction of feedback electrode 5 and detection of last stator shaft orientation and feedback electrode 11 aligns.
The physical dimension of the circular axial charging permanent magnet of last stator 1 and following stator 2 should be consistent, last stator 1 wants consistent with the from inside to outside corresponding a plurality of ring shaped axial magnetizing permanent magnetism body profile sizes of following stator 2, promptly play the diameter of stator circular axial charging permanent magnet 8 and height with the diameter of last stator circular axial charging permanent magnet 14 with highly equate, for last stator 1, from last stator circular axial charging permanent magnet 14, a plurality of stator ring axial charging permanent magnets of going up from inside to outside are called the stator first ring shaped axial magnetizing permanent magnetism body successively, the last stator second ring shaped axial magnetizing permanent magnetism body, by that analogy, for following stator 2, from following stator circular axial charging permanent magnet 8, a plurality of stator ring axial charging permanent magnets down from inside to outside are called the stator first ring shaped axial magnetizing permanent magnetism body down successively, the following stator second ring shaped axial magnetizing permanent magnetism body, by that analogy, then go up the ring interior diameter of the stator first ring shaped axial magnetizing permanent magnetism body, the ring overall diameter and the height should with the ring interior diameter of the following stator first ring shaped axial magnetizing permanent magnetism body, ring overall diameter and highly equal, the ring interior diameter of the second ring shaped axial magnetizing permanent magnetism body of last stator, ring overall diameter and height should with the ring interior diameter of the second ring shaped axial magnetizing permanent magnetism body of following stator, ring overall diameter and highly equal, and the like.
When last stator 1 tips upside down on down on the stator 2, the end face of last stator matrix 12 needs face-to-face positioned opposite with the end face of following stator matrix 7, need make simultaneously stator 1 and play stator 2 corresponding axial charging the permanent magnet opposite face vertical direction form N-N or S-S one to one pole polarity concern, promptly going up cylindrical axial charging permanent magnet 14 of stator and the cylindrical axial charging permanent magnet 8 of following stator is that axial charging and magnetizing direction are opposite, the last stator first ring shaped axial magnetizing permanent magnetism body is that axial charging and magnetizing direction are opposite with the following stator first ring shaped axial magnetizing permanent magnetism body, the last stator second ring shaped axial magnetizing permanent magnetism body is that axial charging and magnetizing direction are opposite with the following stator second ring shaped axial magnetizing permanent magnetism body, by that analogy.
As Fig. 2-8, during present embodiment work, comprise following three aspects:
(1) when being used to detect the acceleration signal of vertical direction z axle input, apply same frequency for last stator shaft orientation detection and feedback electrode 11 and the detection of following stator shaft orientation and feedback electrode 5, the amplitude equal and opposite in direction, the high-frequency ac carrier wave of phase differential 180 degree, by last stator public capacitance pole plate 10 and following stator public capacitance pole plate 4 output differential capacitance signals, can detect the z axle acceleration of input through the circuit aftertreatment, simultaneously by detect for last stator shaft orientation and feedback electrode plate group 11 and following stator shaft orientation detects and feedback electrode 5 to apply amplitude equal, opposite polarity DC feedback voltage is withdrawn into the equilibrium position to rotor 3;
(2) when being used for the acceleration signal of detection level direction x axle input, under giving upper left one group stator side to detect and one group of two capacitor plates of feedback electrode 6 and lower-left under stator detect and two capacitor plates of feedback electrode plate 6, apply same frequency respectively, the amplitude equal and opposite in direction, the high-frequency ac carrier wave of phase differential 180 degree, by last stator public capacitance pole plate 10 and following stator public capacitance pole plate 4 output differential capacitance signals, can detect the x axle acceleration of input through the circuit aftertreatment, simultaneously under upper left one group stator side to detect and one group of two capacitor plates of feedback electrode 6 and lower-left under stator detect and two capacitor plates of feedback electrode plate 6, apply amplitude and equate, opposite polarity DC feedback voltage is withdrawn into the equilibrium position to rotor 3;
(3) when being used to detect the acceleration signal of vertical direction y axle input, under giving upper right one group stator side to detect and one group of two capacitor plates of feedback electrode 6 and bottom right under stator detect and two capacitor plates of feedback electrode plate 6, apply same frequency respectively, the amplitude equal and opposite in direction, the high-frequency ac carrier wave of phase differential 180 degree, by last stator public capacitance pole plate 10 and following stator public capacitance pole plate 4 output differential capacitance signals, can detect the y axle acceleration of input through the circuit aftertreatment, simultaneously under upper right one group stator side to detect and one group of two capacitor plates of feedback electrode 6 and bottom right under stator detect and two capacitor plates of feedback electrode plate 6, apply amplitude and equate, opposite polarity DC feedback voltage is withdrawn into the equilibrium position to rotor 3;
The course of work of the present invention is as follows: because the bottom surface of last stator 1 and following stator 2 all is stained with the permanent magnetism sheet, and rotor 3 itself is a diamagnetic body, will form interaction force between rotor 3 and last stator 1 and the following stator 2 is that coercive force provides Z to (axially) suspending power for the suspension antimagnetic rotor, simultaneously also for rotor 3 provides lateral stability power along X, Y direction, and then rotor 3 has been realized that self-stabilization 2 of last stator 1 and play stators rises and has been propped up suspension; Simultaneously, by detecting for down stator shaft orientation and feedback electrode 5 and last stator shaft orientation detects and feedback electrode 11 applies voltage, following stator 2 and rotor 3, go up the electrostatic force of generation between stator 1 and the rotor 3, strengthened the axial rigidity of rotor 3; By applying FEEDBACK CONTROL voltage in the peripheral following stator side that distributes of stator on detection and feedback electrode 6, following stator side produces electrostatic force to electrostatic attraction electrode 6 and rotor 3, has strengthened the lateral rigidity of rotor 3.Last stator shaft orientation detect and feedback electrode 11, down stator shaft orientation detect and feedback electrode 5, down stator side to detect and feedback electrode 6 on apply carrier wave, when having axial and lateral deviation, by the signal that generates on last stator public capacitance pole plate 10 and the following stator public capacitance pole plate 4 is picked up, processing such as amplification, modulation, and judge, apply DC voltage on corresponding capacitance pole plate group or side direction electrostatic attraction electrode, the electrostatic force of generation is withdrawn into the equilibrium position with little rotor.Can improve like this be in inverse magnetic suspension state lower rotor part axially and lateral rigidity, improve the impact resistance of micro-acceleration gauge, ensure that rotor 3 is at 2 of last stator 1 and following stators stable suspersion more.Simultaneously, because before applying electrostatic potential, rotor 3 is compared general electrostatic suspension micro-acceleration gauge because diamagnetic effect has been suspended in the equilibrium position, reduced playing a process and playing a control difficulty of rotor 3.
Process using Micrometer-Nanometer Processing Technology of the present invention (MEMS technology) combines with Precision Machining, specifically: upward the last stator public capacitance pole plate 10 on the stator 1, upward stator shaft orientation detection and feedback electrode 11, and the following stator public capacitance pole plate 4 on the following stator 2, following stator shaft orientation detection and feedback electrode 5, following stator side are to detection and feedback electrode 6 employing Micrometer-Nanometer Processing Technologies realizations; Capacitor plate and side direction electrostatic attraction electrode material generally adopt electric conductivity to be preferably copper, the Micrometer-Nanometer Processing Technology that technology generally adopts photoetching to electroplate; Following stator cylindrical magnet piece and annular permanent magnet and last stator cylindrical permanent magnet and annular permanent magnet can adopt cobalt nickel manganese phosphorus (CoNiMnP), neodymium iron boron (NdFeB), by Precision Machining or little machine-shaping, and magnetize and obtain; 3 of rotors are to be earlier two surface sputtering Cr/Cu or Cr/Au of the middle anti-magnetic structure layer of rotor at substrate, obtain through fine electric spark processing then, and what substrate adopted is diamagnetic material, as pyrolytic graphite.
Claims (7)
1. circle and multi-ring shaped axial magnetizing permanent magnetism antimagnetic sensitive mass micro-accelerometer, constitute by last stator (1), following stator (2) and rotor (3), last stator (1) tips upside down on down on the stator (2), rotor (3) then is suspended in the cavity of stator (1) and following stator (2) formation, it is characterized in that:
Described down stator (2) comprise down stator side to detect and feedback electrode (6), down stator public capacitance pole plate (4), stator shaft orientation detects and FEEDBACK CONTROL electrode (5), stator matrix (7), the cylindrical axial charging permanent magnet of stator (8), a plurality of stator ring axial charging permanent magnet (9) down down down down, is distributing play stator public capacitance pole plate (4) from inside to outside successively on the end face of stator matrix (7) down, stator shaft orientation detects and feedback electrode (5), stator side is to detection and feedback electrode (6) down down; Bottom surface at following stator matrix (7), the cylindrical axial charging permanent magnet of following stator (8) is positioned at the midline position of stator matrix (7) surface geometry down, the midline position of the then following stator matrix surface of following stator ring axial charging permanent magnet (9) geometry is that the center of circle is from inside to outside arranged successively, the tight nested cooperation of adjacent two ring shaped axial magnetizing permanent magnetism bodies, the cylindrical axial charging permanent magnet of following stator (8) closely is nested in the ring shaped axial magnetizing permanent magnetism body of annulus inside radius minimum, and the magnetic polarity of the same end face of following stator (2) adjacent permanent magnet is different;
The described stator (1) of going up comprises stator matrix (12), last stator public capacitance pole plate (10) and last stator shaft orientation detect and feedback electrode (11), the cylindrical axial charging permanent magnet of last stator (14), last stator ring axial charging permanent magnet (13), bottom surface at last stator matrix (12), the cylindrical axial charging permanent magnet of last stator (14) is positioned at the midline position of stator matrix (12) surface geometry, a plurality of midline positions of going up the then above stator matrix of stator ring axial charging permanent magnet (13) (12) surface geometry are that the center of circle is from inside to outside arranged successively, the tight nested cooperation of adjacent two ring shaped axial magnetizing permanent magnetism bodies, the cylindrical axial charging permanent magnet of last stator (14) closely is nested in the ring shaped axial magnetizing permanent magnetism body of annulus inside radius minimum, the magnetic polarity of the same end face of permanent magnet that last stator (1) is adjacent is different, on the end face of last stator matrix (12), distributing successively from inside to outside and going up stator public capacitance pole plate (10) and detection of last stator shaft orientation and feedback electrode (11), the face-to-face positioned opposite of end face of the end face of last stator matrix (12) and following stator matrix (7);
Described rotor (3) circumferential edges detects with following stator shaft orientation and the external arc edge in the vertical direction of feedback electrode (5) and detection of last stator shaft orientation and feedback electrode (11) aligns, this rotor (3) is a disc-shaped structure, comprise rotor upper surface layer (15), the middle anti-magnetic structure layer (16) of rotor, rotor undersurface layer (17), the upper and lower surface of anti-magnetic structure layer (16) is covered with rotor upper surface layer (15) and rotor undersurface layer (17) respectively in the middle of rotor.
2. circle according to claim 1 and multi-ring shaped axial magnetizing permanent magnetism antimagnetic sensitive mass micro-accelerometer, it is characterized in that, described cylindrical axial charging permanent magnet of stator (14) and following stator cylindrical axial charging permanent magnet (8) diameter and highly equal gone up, the from inside to outside corresponding a plurality of ring shaped axial magnetizing permanent magnetism body profile of last stator (1) and following stator (2) are measure-alike.
3. circle according to claim 1 and multi-ring shaped axial magnetizing permanent magnetism antimagnetic sensitive mass micro-accelerometer, it is characterized in that, the described corresponding axial charging permanent magnet opposite face of going up stator (1) and play stator (2) vertical direction formation N-N or S-S one to one pole polarity concern.
4. circle according to claim 1 and multi-ring shaped axial magnetizing permanent magnetism antimagnetic sensitive mass micro-accelerometer, it is characterized in that, described stator side down is distributed in down the outermost of the end face of stator matrix (7) to detection and feedback electrode (6), and circumferentially, following stator shaft orientation detect and feedback electrode (5) also circumferentially.
5. circle according to claim 1 and multi-ring shaped axial magnetizing permanent magnetism antimagnetic sensitive mass micro-accelerometer is characterized in that, the material of described rotor upper surface layer (15) is Cr/Au or Cr/Cu.
6. circle according to claim 1 and multi-ring shaped axial magnetizing permanent magnetism antimagnetic sensitive mass micro-accelerometer is characterized in that, the material of anti-magnetic structure layer (16) is a diamagnetic material in the middle of the described rotor.
7. circle according to claim 1 and multi-ring shaped axial magnetizing permanent magnetism antimagnetic sensitive mass micro-accelerometer is characterized in that, described rotor undersurface layer (17) material is Cr/Au or Cr/Cu.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200810032470 CN100588971C (en) | 2008-01-10 | 2008-01-10 | Circle and multi-ring shaped axial magnetizing permanent magnetism antimagnetic sensitive mass micro-accelerometer |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 200810032470 CN100588971C (en) | 2008-01-10 | 2008-01-10 | Circle and multi-ring shaped axial magnetizing permanent magnetism antimagnetic sensitive mass micro-accelerometer |
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| CN101216499A CN101216499A (en) | 2008-07-09 |
| CN100588971C true CN100588971C (en) | 2010-02-10 |
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| DE102008042358B4 (en) * | 2008-09-25 | 2021-03-18 | Robert Bosch Gmbh | Accelerometer with electrode bridge |
| CN103713159B (en) * | 2013-12-27 | 2015-09-16 | 浙江大学 | A kind of closed loop micro-mechanical accelerometer feedback method |
| US9784759B2 (en) * | 2015-11-16 | 2017-10-10 | Raytheon Company | Thermally insensitive open-loop hung mass accelerometer with differential Eddy current sensing |
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