CN209783599U - Double-shaft gyroscope - Google Patents

Double-shaft gyroscope Download PDF

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Publication number
CN209783599U
CN209783599U CN201920126484.2U CN201920126484U CN209783599U CN 209783599 U CN209783599 U CN 209783599U CN 201920126484 U CN201920126484 U CN 201920126484U CN 209783599 U CN209783599 U CN 209783599U
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China
Prior art keywords
oscillator
gyroscope
vibrator
circuit board
gyro
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CN201920126484.2U
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Chinese (zh)
Inventor
李桂新
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Wuxi Weitai Sensing Packaging And Testing Technology Ltd Co
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Wuxi Weitai Sensing Packaging And Testing Technology Ltd Co
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Abstract

The utility model belongs to the technical field of the gyroscope, concretely relates to biax gyroscope, be in including base, setting circuit board, setting on the base are in oscillator supporting member and hollow inductor on the circuit board, install gyro oscillator on the oscillator supporting member, hollow inductor's one end electric connection to the gyro oscillator, and other end electric connection to circuit board, the gyro oscillator is discoid, gyro oscillator upper surface is equipped with piezoelectric film drive electrode, signal detection electrode and mode detection electrode, gyro oscillator lower surface is connected with support cylinder and current potential reference electrode, the support cylinder other end is fixed on the carrier. The utility model provides a pair of biax gyroscope adopts MEMS micro-machining technique, and simple structure can realize that the biax detects, and processing technology easily realizes, and the reliability is high, and the low power dissipation, impact resistance is strong, does not need vacuum packaging, worker that can be fine under abominable environment, economic technology safety benefit is showing.

Description

Double-shaft gyroscope
Technical Field
The utility model relates to a biax gyroscope belongs to gyroscope technical field.
Background
The gyroscope is an instrument capable of accurately measuring the rotating angle or angular velocity of a moving object, and is a core component for attitude control and inertial guidance of a space object. With the development of national defense science and technology and the aviation and aerospace industries, the requirements of the inertial navigation system on the gyroscope are also developed in the direction of small volume, multi-axis detection, low power consumption, high reliability, long service life and adaptability to various severe environments.
Through the literature search of the prior art, in the conference of ieee mems2006 held by turkish university in 2006, k.maenaka et al, the university of the mythology of japan, published a paper entitled "novel micro solid gyroscope", which is recorded from page 634 to page 637, first proposed a piezoelectric all-solid-state micro gyroscope, in which a square piezoelectric mass block has a special vibration mode at a certain vibration frequency, and under the vibration mode, each mass point on the piezoelectric mass block moves along the same axial direction, so that the edge of the piezoelectric body makes stretching or compressing motion along the certain axial direction. When the angular velocity in the Y direction is input from the outside, the piezoelectric mass block generates a stretching or compressing motion in the polarization direction (i.e., in the Z-axis direction) due to the coriolis force. Due to the piezoelectric effect of the piezoelectric body, the vibration in the Z direction can generate induced charges or voltages on the surface of the piezoelectric body, which is perpendicular to the Z direction, the magnitude of the induced charges or voltages is in direct proportion to the external input angular velocity, and the magnitude of the external input angular velocity is measured by detecting the charges or voltages amplified by the peripheral circuit.
SUMMERY OF THE UTILITY MODEL
The utility model provides an adopt MEMS micro-machining technique, simple structure can realize that the biax detects, and processing technology easily realizes, and the reliability is high, low power dissipation, and impact resistance is strong, does not need vacuum packaging, and the biax gyroscope of work that can be fine under abominable environment has solved the scheduling problem that exists among the prior art.
In order to solve the technical problem, the utility model discloses a technical scheme does:
A double-shaft gyroscope comprises a base, a circuit board arranged on the base, a vibrator supporting member and an air core inductor which are arranged on the circuit board, and a gyroscope vibrator arranged on the vibrator supporting member, wherein one end of the air core inductor is electrically connected to the gyroscope vibrator, the other end of the air core inductor is electrically connected to the circuit board, the gyroscope vibrator is in a disc shape, a piezoelectric film driving electrode, a signal detection electrode and a mode detection electrode are arranged on the upper surface of the gyroscope vibrator, a supporting cylinder and a potential reference electrode are connected to the lower surface of the gyroscope vibrator, and the other end of the supporting cylinder is fixed on a carrier.
The gyro vibrator is made of piezoelectric materials, and the upper surface and the lower surface of the gyro vibrator are parallel.
The supporting cylinder is made of an elastic structure material and is perpendicular to the lower surface of the gyroscope vibrator.
The piezoelectric film driving electrodes and the signal detection electrodes are metal electrodes, are arc-shaped in structure, are 3 in number, and are uniformly distributed on the upper surface of the gyro vibrator.
The mode detection electrodes are metal electrodes, are flat in structure, 3 in number and are located on the upper surface of the gyroscope vibrator.
The utility model has the following characteristics and beneficial effect:
the utility model relates to a pair of biax gyroscope utilizes discoid top oscillator vibration under special mode as the reference vibration, utilizes piezoelectric material's piezoelectric effect drive discoid top oscillator motion simultaneously, and simple structure can realize the biax and detect, and processing technology easily realizes, and the reliability is high, and the low power dissipation, impact resistance is strong, does not need vacuum encapsulation, work that can be fine under abominable environment.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.
Fig. 1 is a schematic structural diagram of a dual-axis gyroscope of the present invention.
In the figure: 1-a gyroscope vibrator; 2-a support cylinder; 3-a potential reference electrode; a 4-mode detection electrode; 5-a signal detection electrode; 6-piezoelectric thin film driving electrode.
Detailed Description
The following describes the present invention with reference to the accompanying drawings. It should be noted that the description of the embodiments is provided to help understanding of the present invention, but the present invention is not limited thereto. In addition, the technical features related to the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Reference is made to fig. 1 for a schematic structure of a dual-axis gyroscope and a schematic structure of a dual-axis gyroscope. A double-shaft gyroscope comprises a base, a circuit board arranged on the base, a vibrator supporting member and an air core inductor which are arranged on the circuit board, and a gyroscope vibrator 1 arranged on the vibrator supporting member, wherein one end of the air core inductor is electrically connected to the gyroscope vibrator 1, the other end of the air core inductor is electrically connected to the circuit board, the gyroscope vibrator 1 is disc-shaped, a piezoelectric film driving electrode 6, a signal detection electrode 5 and a mode detection electrode 4 are arranged on the upper surface of the gyroscope vibrator 1, a supporting cylinder 2 and a potential reference electrode 3 are connected to the lower surface of the gyroscope vibrator 1, and the other end of the supporting cylinder 2 is fixed on a carrier.
The gyro vibrator 1 is made of piezoelectric materials, and the upper surface and the lower surface of the gyro vibrator 1 are parallel. The supporting cylinder 2 is made of an elastic structure material, and the supporting cylinder 2 is perpendicular to the lower surface of the gyroscope vibrator 1. The piezoelectric film driving electrodes 6 and the signal detection electrodes 5 are metal electrodes, are arc-shaped in structure, are 3 in number, and are uniformly distributed on the upper surface of the gyro vibrator 1. The mode detection electrodes 4 are metal electrodes, are flat in structure, are 3 in number, and are located on the upper surface of the gyro vibrator 1. The gyro vibrator 1 is simple in structural processing, only needs to be punched or cut to form according to a designed shape, does not need to be bent according to a specific shape like the existing umbrella-shaped vibrator, and simplifies the production process and procedures.
The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. It will be apparent to those skilled in the art that various changes, modifications, substitutions and alterations can be made in the embodiments without departing from the principles and spirit of the invention, and the scope of the invention is to be accorded the full scope of the claims.

Claims (5)

1. A dual-axis gyroscope, comprising: including the base, set up circuit board on the base, set up and be in oscillator supporting member and air core inductor on the circuit board, install top oscillator on the oscillator supporting member, air core inductor's one end electric connection to top oscillator, and other end electric connection to the circuit board, top oscillator is discoid, top oscillator upper surface is equipped with piezoelectric film drive electrode, signal detection electrode and mode detection electrode, top oscillator lower surface is connected with support cylinder and electric potential reference electrode, the support cylinder other end is fixed on the carrier.
2. A dual-axis gyroscope, as claimed in claim 1, wherein: the gyro vibrator is made of piezoelectric materials, and the upper surface and the lower surface of the gyro vibrator are parallel.
3. A dual-axis gyroscope, as claimed in claim 1, wherein: the supporting cylinder is made of an elastic structure material and is perpendicular to the lower surface of the gyroscope vibrator.
4. A dual-axis gyroscope, as claimed in claim 1, wherein: the piezoelectric film driving electrodes and the signal detection electrodes are metal electrodes, are arc-shaped in structure, are 3 in number, and are uniformly distributed on the upper surface of the gyro vibrator.
5. A dual-axis gyroscope, as claimed in claim 1, wherein: the mode detection electrodes are metal electrodes, are flat in structure, 3 in number and are located on the upper surface of the gyroscope vibrator.
CN201920126484.2U 2019-01-24 2019-01-24 Double-shaft gyroscope Active CN209783599U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201920126484.2U CN209783599U (en) 2019-01-24 2019-01-24 Double-shaft gyroscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201920126484.2U CN209783599U (en) 2019-01-24 2019-01-24 Double-shaft gyroscope

Publications (1)

Publication Number Publication Date
CN209783599U true CN209783599U (en) 2019-12-13

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Family Applications (1)

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CN201920126484.2U Active CN209783599U (en) 2019-01-24 2019-01-24 Double-shaft gyroscope

Country Status (1)

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CN (1) CN209783599U (en)

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