CN101561276B - Suspension motor micro gyro operated by adopting electromagnetism and corona - Google Patents
Suspension motor micro gyro operated by adopting electromagnetism and corona Download PDFInfo
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- CN101561276B CN101561276B CN200910052146XA CN200910052146A CN101561276B CN 101561276 B CN101561276 B CN 101561276B CN 200910052146X A CN200910052146X A CN 200910052146XA CN 200910052146 A CN200910052146 A CN 200910052146A CN 101561276 B CN101561276 B CN 101561276B
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Abstract
The invention relates to a suspension rotor micro gyro operated by adopting electromagnetism and corona. A cage structure consists of upper and lower stators, a micro rotor, a peripheral structure anda tooth-shaped structure. The stators comprise public electrodes, axial suspension and detection electrodes, first suspension stabilization coils and second suspension stabilization coils, and are fixedly connected to a substrate; and under the action of electromagnetic force, the micro rotor suspends between the stators and has an annular shape, the inside of the micro rotor is provided with thetooth-shaped structure which is used as tooth-shaped electrodes, while the outside is distributed with surrounding structure evenly which are mainly used as radial suspension detection electrodes. The suspension rotor micro gyro has simple structure, provides an electromagnetic suspension corona driving rotary structure, realizes the rotation of the rotor at constant high speed, increases the rotary torque, and can realize the self-stable suspension of the rotor by axially arranging inner and outer suspension stabilization coils. The axial and radial suspension detection electrodes can further enhance the suspension rigidity and realize position detection. The suspension rotor micro gyro has the characteristics of small size, light weight, low cost, high precision and low power consumption.
Description
Technical field
What the present invention relates to is little gyro in a kind of micro-electromechanical technology (MEMS) field, and specifically, what relate to is a kind of suspension rotor micro gyro instrument that utilizes electromagnetism and corona effect work.
Background technology
But the MEMS device has the characteristics of microminiaturization, low cost, low energy consumption mass, in recent years, the scholar of various countries, the slip-stick artist attempts design and makes the little gyro of suspension rotor MEMS.In the time of two more than ten years in the past, the micro machining process of domestic and international application silicon or body Micrometer-Nanometer Processing Technology have processed a variety of oscillation gyros, but little for various reasons oscillation gyro is difficult to reach the high precision of traditional gyro.
Find that through literature search China Patent No. is to prior art: 200410018474.5, name is called: electrostatic suspension rotor micro-inertia sensor and manufacture method thereof.This gyro has proposed electrostatic suspension rotor structure and static driven rotational structure.Obtain the axial location of rotor according to stator capacitance detecting up and down,, utilize the electrostatic force between the stator shaft orientation suspension electrode and rotor up and down to realize the axial suspension of rotor by applying voltage on the axial suspension electrode; Simultaneously, rotation is based on the principle work of variable capacitance static micro motor, and control is complicated, needs rotating speed to detect.The electrostatic suspension rotor micro gyro that proposes in this invention, its weak point is: adopt the electrostatic suspension mode, can not surely control certainly, need complicated multichannel decoupling zero control, and rotate driving and adopt power transformation appearance method, need complicated control.
Summary of the invention
The objective of the invention is to overcome deficiency of the prior art, propose a kind of suspension rotor micro gyro that utilizes electromagnetic suspension and the work of corona driven in rotation, surely control certainly, and radially stabilized electrodes is arranged.Utilize the corona effect to make the permanent high-speed rotation of rotor, rotor is inboard only need to be provided with claw pole, thereby can make circularly, simple in structure, does not need rotating speed to detect and can realize permanent high speed rotating, and moment is big, has also made things convenient for processing; By being set, dual suspending stabilized coil realizes suspending from steady; The radial suspension detecting electrode has further strengthened the radially stable suspersion rigidity of little rotor, and the axial suspension detecting electrode has further strengthened the axial stable suspersion rigidity of little rotor.Having solved can not be from surely suspending and controlling complicated deficiency in the background technology.
The present invention is achieved through the following technical solutions, the present invention includes: go up stator, following stator, peripheral structure, little rotor, tooth-shape structure, last stator, following stator upper and lower settings, last stator, last stator links to each other with peripheral structure and constitutes a cage construction, peripheral structure is arranged on little peritrochanteric, little rotor places the centre of this cage construction, tooth-shape structure is distributed on the inboard of ring-shaped rotor, and have between tooth-shape structure and the little rotor at interval, tooth-shape structure is arranged on the lower substrate, last stator comprises first suspending stabilized coil inner ring of stator, first suspending stabilized coil outer ring of last stator, second suspending stabilized coil inner ring of last stator, second suspending stabilized coil of last stator outer ring, last stator shaft orientation suspension detection electrodes and last stator public electrode, last stator from inside to outside, be to go up first suspending stabilized coil inner ring of stator successively, first suspending stabilized coil inner ring of last stator, last stator shaft orientation suspension detection electrodes, last stator public electrode, second suspending stabilized coil inner ring of last stator, second suspending stabilized coil inner ring of last stator, first suspending stabilized coil inner ring of last stator, first suspending stabilized coil outer ring of last stator, second suspending stabilized coil inner ring of last stator, the suspending stabilized coil of the common formation in second suspending stabilized coil of last stator outer ring, and be respectively the circular copper coil of band opening, not connecting each other, is on the circle in the center of circle in above stator center all; It is fan-shaped that each of last stator shaft orientation suspension detection electrodes all becomes, and being evenly distributed in the above stator center of circle is on the circumference in the center of circle, and each interval equates; Last stator public electrode is a continuous conductive ring, the internal diameter of first suspending stabilized coil inner ring of last stator is less than the internal diameter of little rotor, the external diameter of first suspending stabilized coil outer ring of last stator is greater than the internal diameter of little rotor, the internal diameter of second suspending stabilized coil inner ring of last stator is less than the external diameter of little rotor, the external diameter of second suspending stabilized coil of last stator outer ring is greater than the external diameter of little rotor, last stator is identical with the structure of following stator, spatially is vertical corresponding in opposite directions.
Little rotor is a circular ring structure, comprises the supporting construction of rotor surface structure and rotor respectively, and the rotor surface structure is positioned at the inboard of supporting construction.
The supporting construction of rotor adopts the rotor surface structure to adopt the PMMA material, and tooth-shape structure Ni metal.
Peripheral structure is a circle ring, comprises eight radial suspension detecting electrodes, and the ring-shaped rotor center was on the circle in the center of circle when these eight radial electrode plates were evenly distributed in the equilibrium position, and each interval equates.
The present invention not only has can be from steady setting: first suspending stabilized coil inner ring, first suspending stabilized coil outer ring, second suspending stabilized coil inner ring, second suspending stabilized coil outer ring and ring-shaped rotor, and have axial and radially two settings that suspend, a plurality of suspension settings can be replenished mutually, improve whole suspension rigidity of gyro and effect.
Rotor of the present invention suspends: first suspended coil outer ring, first suspended coil inner ring, second suspended coil outer ring, stable suspersion system of second suspended coil inner ring and rotor formation.Produce magnetic field by on four coils, applying specific alternating current simultaneously,, could realize suspending from steady with the ring-shaped rotor reciprocation.Be specially: on first suspending stabilized coil inner ring, add alternating current, add on first suspending stabilized coil outer ring that same frequency, amplitude equate, the alternating current of phase phasic difference 180 degree; Apply alternating current on second suspending stabilized coil inner ring, add same frequency on second suspending stabilized coil inner ring, amplitude equates, the alternating current of phase phasic difference 180 degree realizes that promptly rotor stability suspends.According to Electromagnetic Environmental Effect, the electromagnetic force that induces on little rotor makes that little rotor is suspended.By the radial suspension rigidity that the radial suspension detecting electrode has further strengthened ring-shaped rotor is set, by being set, the axial suspension detecting electrode further strengthens annular little rotor axial suspension rigidity, when rotor generation radial deflection, radial electrode on apply voltage and realize to suspend.
Rotor rotation of the present invention: on claw pole, apply direct current, tip at claw pole can produce the corona discharge phenomenon, at this moment form a high-strength non-uniform electric field between claw pole and the ring-shaped rotor, air between claw pole and the rotor is ionized, and the rotor surface structure is constantly charged.Claw pole and rotor rotate thereby drive rotor high-speed because the effect of Coulomb repulsion power influences each other.The rotation of this gyro does not need rotating speed to detect can realize permanent high speed rotating.
Position probing of the present invention: radial position is to realize by extracting radially the capacitance between the detecting electrode and rotor.It is to realize by the capacitance between stator shaft orientation detecting electrode and the rotor about the extraction that axial location detects.
Compared with prior art, the present invention has following beneficial effect: little gyro structure of utilizing the electromagnetic suspension corona to drive can improve the rotary torque of little rotor, and then improve the rotating speed of little rotor greatly from surely suspending, thereby improves the measuring accuracy of gyro.
Description of drawings
Fig. 1 general structure synoptic diagram of the present invention
Stator structure synoptic diagram in Fig. 2 the present invention
Fig. 3 peripheral structure of the present invention and tooth-shape structure synoptic diagram
Fig. 4 rotor structure synoptic diagram of the present invention
Stator structure synoptic diagram under Fig. 5 the present invention
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are described in detail: present embodiment has provided detailed embodiment and process being to implement under the prerequisite with the technical solution of the present invention, but protection scope of the present invention is not limited to following embodiment.
As Fig. 1, shown in 2, present embodiment comprises: go up stator 1, following stator 4, peripheral structure 2, little rotor 3, tooth-shape structure 26, last stator 1, following stator 4 upper and lower settings, last stator 1, last stator 4 links to each other with peripheral structure 2 and constitutes a cage construction, peripheral structure 2 is arranged on around little rotor 3, little rotor 3 places the centre of this cage construction, tooth-shape structure 26 is distributed on the inboard of ring-shaped rotor 3, and tooth-shape structure 6) and have between little rotor 3 at interval, tooth-shape structure 26 is arranged on the lower substrate, last stator comprises first suspending stabilized coil inner ring 8 of stator, first suspending stabilized coil outer ring 7 of last stator, second suspending stabilized coil inner ring 6 of last stator, second suspending stabilized coil of last stator outer ring 5, last stator shaft orientation suspension detection electrodes and last stator public electrode 9, last stator from inside to outside, be to go up first suspending stabilized coil inner ring 8 of stator successively, first suspending stabilized coil inner ring 7 of last stator, last stator shaft orientation suspension detection electrodes, last stator public electrode 9, second suspending stabilized coil inner ring 6 of last stator, second suspending stabilized coil inner ring 5 of last stator, first suspending stabilized coil inner ring 8 of last stator, first suspending stabilized coil outer ring 7 of last stator, second suspending stabilized coil inner ring 6 of last stator, the suspending stabilized coil of second suspending stabilized coil of last stator outer ring, 5 common formations, and be respectively the circular copper coil of band opening, do not connect each other, be on the circle in the center of circle all in above stator center, it is fan-shaped that each of last stator shaft orientation suspension detection electrodes all becomes, being evenly distributed in the above stator center of circle is on the circumference in the center of circle, and each interval equates that last stator shaft orientation suspension detection electrodes comprises: go up stator first suspension detection electrodes 10, last stator shaft orientation second suspension detection electrodes 11, last stator shaft orientation the 3rd suspension detection electrodes 12, last stator shaft orientation the 4th suspension detection electrodes 13, last stator shaft orientation the 5th suspension detection electrodes 14, last stator shaft orientation the 6th suspension detection electrodes 15, last stator shaft orientation the 7th suspension detection electrodes 16, last stator shaft orientation the 8th suspension detection electrodes 17; Last stator public electrode 9 is continuous conductive rings; The internal diameter of last stator 1 first suspending stabilized coil inner ring 32 is less than the internal diameter of little rotor, the external diameter of first suspending stabilized coil outer ring 31 of last stator is greater than the internal diameter of little rotor 3, the internal diameter of second suspending stabilized coil inner ring 30 of last stator is less than the external diameter of little rotor 3, the external diameter of second suspending stabilized coil of last stator outer ring 29 is greater than the external diameter of little rotor 3, last stator 1 is identical with the structure of following stator 4, spatially is vertical corresponding in opposite directions.
As shown in Figure 5, following stator 4 is by following first suspending stabilized coil inner ring 32 of stator, first suspending stabilized coil outer ring 31 of following stator, second suspending stabilized coil inner ring 30 of following stator, second suspending stabilized coil of following stator outer ring 29, following stator first suspension detection electrodes 34, following stator shaft orientation second suspension detection electrodes 35, following stator shaft orientation the 3rd suspension detection electrodes 36, following stator shaft orientation the 4th suspension detection electrodes 37, following stator shaft orientation the 5th suspension detection electrodes 38, following stator shaft orientation the 6th suspension detection electrodes 39, following stator shaft orientation the 7th suspension detection electrodes 40, following stator shaft orientation the 8th suspension detection electrodes 41 and following stator public electrode 33 constitute.Their annexation is, following stator 4 is from inside to outside successively: first suspending stabilized coil inner ring 32 of following stator, following first suspending stabilized coil inner ring 31 of stator, following stator shaft orientation suspension detection electrodes, following stator public electrode 33, following second suspending stabilized coil inner ring 30 of stator, following second suspending stabilized coil inner ring 29 of stator.First suspending stabilized coil inner ring 32 of following stator, following first suspending stabilized coil outer ring 31 of stator, second suspending stabilized coil inner ring 30 of following stator, the suspending stabilized coil of following second suspending stabilized coil of stator outer ring 5 common formations, and be respectively the circular copper coil of band opening, not connecting each other, is on the circle in the center of circle in following stator center all; It is fan-shaped that each of following stator shaft orientation suspension detection electrodes all becomes, and being evenly distributed in the following stator center of circle is on the circumference in the center of circle, and each interval equates; Following stator public electrode 9 is continuous conductive rings; The internal diameter of following first suspending stabilized coil inner ring 32 of stator is less than the internal diameter of little rotor, and the external diameter of first suspending stabilized coil outer ring 31 of following stator is greater than the internal diameter of little rotor 3; The internal diameter of second suspending stabilized coil inner ring 30 of following stator is less than the external diameter of little rotor 3, and the external diameter of second suspending stabilized coil of following stator outer ring 29 is greater than the external diameter of little rotor 3.
The hypothetical reference coordinate system is as follows: the x axle is parallel to the center line of above stator second axial suspension stabilized electrodes 11 and last stator the 3rd axial suspension stabilized electrodes 12, the y axle is parallel to the center line of suspending stabilized electrode 13 of above stator four-axial and last stator the 5th axial suspension stabilized electrodes 14, the z axle is perpendicular to x and y axle, and initial point is the geometric center point when ring-shaped rotor is positioned at the equilibrium position.
As shown in Figure 3, little rotor 3 is circular ring structures, comprises the supporting construction 28 of rotor surface structure 27 and rotor respectively, and rotor surface structure 27 is positioned at the inboard of supporting construction 28.Little rotor 3 supporting constructions adopt rotor surface structure 27 to adopt the PMMA material, and tooth-shape structure 26 Ni metal, supporting construction 28 adopts metal material to make.
As shown in Figure 4, peripheral structure 2 is circle rings, comprises eight radial suspension detecting electrodes, and ring-shaped rotor 3 centers were on the circle in the center of circle when these eight radial electrode plates were evenly distributed in the equilibrium position, and each interval equates.Eight radial suspension detecting electrodes are: radially first suspension detection electrodes 18, radially second suspension detection electrodes 19, radially the 3rd suspension detection electrodes 20, radially the 4th suspension detection electrodes 21, radially the 5th suspension detection electrodes 22, radially the 6th suspension detection electrodes 23, radially the 7th suspension detection electrodes 24, the 8th suspension detection electrodes 25 radially.Wherein, radially first suspension detection electrodes 18, radially second suspension detection electrodes 19, radially the 3rd suspension detection electrodes 20, radially the 4th suspension detection electrodes 21, radially the 5th suspension detection electrodes 22, radially the 6th suspension detection electrodes 23, radially the 7th suspension detection electrodes 24, the 8th suspension detection electrodes 25 radially, these radial suspension detecting electrodes have further strengthened suspension rigidity radially, have realized capacitance detecting.
From steady suspension technology is gordian technique of the present invention.First suspending stabilized coil inner ring 8 of last stator, go up first suspending stabilized coil outer ring 7 of stator, second suspending stabilized coil inner ring 6 of last stator, go up second suspending stabilized coil of stator outer ring 5 and form stator from steady suspending stabilized coil.During this gyro work, first suspending stabilized coil inner ring 8 of last stator, on first suspending stabilized coil outer ring 7 of stator logical amplitude identical, frequency equates, the alternating current of phase phasic difference 180 degree, simultaneously second suspending stabilized coil inner ring 6 of last stator, on to lead to amplitude on second suspending stabilized coil of stator outer ring 5 identical, frequency equates, the alternating current of phase phasic difference 180 degree; Logical amplitude is identical on following first suspending stabilized coil inner ring 32 of stator, following first suspending stabilized coil outer ring 31 of stator, frequency equates, the alternating current of phase phasic difference 180 degree, logical amplitude is identical on following second suspending stabilized coil inner ring 30 of stator, following second suspending stabilized coil of stator outer ring 29 simultaneously, frequency equates, the alternating current of phase phasic difference 180 degree.According to Theory of Electromagnetic Field, be in the effect that little rotor 3 in the coil can be subjected to induced electricity magnetic force, finally obtain stable suspension.In addition, the axial suspension detecting electrode can further strengthen axial suspension rigidity of the present invention.
Radial suspension is realized by the radial suspension detecting electrode.When rotor generation radial deflection, on corresponding radial electrode, apply DC voltage and can realize Suspension Control, be specially: if ring-shaped rotor moves along x axle forward, promptly when ring-shaped rotor during towards the motion of the 5th radial suspension detecting electrode 22 and the 6th radial suspension detecting electrode 23 directions, then applying amplitude on the first radial suspension detecting electrode 18, the second radial suspension detecting electrode 19 equates, opposite polarity DC voltage can be withdrawn into the equilibrium position to rotor.Rotor is moved along x axle negative sense, can the rest may be inferred; If ring-shaped rotor is moved along y axle forward, promptly when ring-shaped rotor towards the 7th radial suspension detecting electrode 24 and in when enclosing the motion of the 8th radial suspension detecting electrode 25 directions, then applying amplitude on the 3rd radial suspension detecting electrode 20, the 4th radial suspension detecting electrode 21 equates, opposite polarity DC voltage can be withdrawn into the equilibrium position to rotor.Rotor is moved along y axle negative sense, can the rest may be inferred.
The rotation of this gyro realizes by the corona principle.The inboard of ring-shaped rotor 3 is provided with claw pole 26, claw pole 26 has certain interval with the rotor surface structure 27 of ring-shaped rotor 3, when when applying voltage on claw pole 26, the claw pole 26 most advanced and sophisticated corona discharge phenomenons that produce on little rotor 3 form high-strength non-uniform electric field.This electric field will make the air ionizationization between it and rotor, and little rotor 3 surface structures will be recharged owing to the corona discharge effect, and little rotor 3 and claw pole 26 will be driven rotation owing to the effect of Coulomb repulsion.The corona driven in rotation does not need rotating speed to detect can realize permanent high speed rotating, and control is simple.
During the work of this gyro, its position probing is finished like this:
(1) when being used to detect the displacement signal of vertical direction z axle collar shape rotor, the translation if rotor makes progress, give last stator the 8th axial suspension detecting electrode 17, go up the stator first axial suspension detecting electrode 10 and apply the high-frequency alternating current that frequency is f1, and in stator shaft orientation the 8th suspension detection electrodes 41 down, stator shaft orientation first suspension detection electrodes 34 applies the high-frequency ac carrier wave of same frequency, amplitude equal and opposite in direction, phase differential 180 degree down; The last stator second axial suspension detecting electrode 11, last stator the 3rd axial suspension detecting electrode 12 apply the high-frequency alternating current that frequency is f2, and apply the high-frequency ac carrier wave of same frequency, amplitude equal and opposite in direction, phase differential 180 degree in following stator shaft orientation second suspension detection electrodes 35, following stator shaft orientation the 3rd suspension detection electrodes 36; The rest may be inferred, up and down stator four-axial suspension detection electrodes, up and down stator the 5th axial suspension detecting electrode to apply same frequency, amplitude equal and opposite in direction, phase differential 180 degree frequencies be the high frequency carrier of f3, up and down stator the 6th axial suspension detecting electrode, up and down stator the 7th axial suspension detecting electrode to apply same frequency, amplitude equal and opposite in direction, phase differential 180 degree frequencies be the high frequency carrier of f4.Export the differential capacitance signal by stator common electrical pole plate again, nurse one's health the displacement signal on the z axle that can detect the ring-shaped rotor input through oversampling circuit.
(2) when being used to detect ring-shaped rotor around the change in location of y axle, give the last stator second axial suspension detecting electrode 11, go up stator the 3rd axial suspension detecting electrode 12 and apply the high-frequency alternating current that frequency is f2, at the stator second axial suspension detecting electrode 35 down, stator the 3rd axial suspension detecting electrode 36 applies the high-frequency ac carrier wave of same frequency, amplitude equal and opposite in direction, phase differential 180 degree down; Last stator the 6th axial suspension detecting electrode 15, on stator the 7th axial suspension detecting electrode 16 apply the high-frequency alternating current that frequency is f4, and playing stator the 6th axial suspension detecting electrode 39, following stator the 7th axial suspension detecting electrode 40 to apply the high-frequency ac carrier wave of same frequency, amplitude equal and opposite in direction, phase differential 180 degree, by stator common electrical pole plate output differential capacitance signal, can detect the z axis signal of input through the oversampling circuit conditioning.
(3) when being used to detect ring-shaped rotor around the change in location of x axle, give last stator the 8th axial suspension detecting electrode 17, go up the stator first axial suspension detecting electrode 5 and apply the high-frequency alternating current that frequency is f2, at stator the 8th axial suspension detecting electrode 41 down, the stator first axial suspension detecting electrode 34 applies the high-frequency ac carrier wave of same frequency, amplitude equal and opposite in direction, phase differential 180 degree down; Last stator four-axial suspension detection electrodes 13, on stator the 5th axial suspension detecting electrode 14 apply the high-frequency alternating current that frequency is f3, and playing stator four-axial suspension detection electrodes 37, following stator the 5th axial suspension detecting electrode 38 to apply the high-frequency ac carrier wave of same frequency, amplitude equal and opposite in direction, phase differential 180 degree, by stator common electrical pole plate output differential capacitance signal, can detect the z axis signal of input through the oversampling circuit conditioning.
(4) when being used to detect ring-shaped rotor when the x axle is subjected to displacement, apply high-frequency alternating current at the first radial suspension detecting electrode 18, the peripheral second radial suspension detecting electrode 19, and apply the high-frequency ac carrier wave of same frequency, amplitude equal and opposite in direction, phase differential 180 degree at the 5th radial suspension detecting electrode 22, the 6th radial suspension detecting electrode 23; By stator common electrical pole plate output differential capacitance signal, can detect the x axis signal of input through the oversampling circuit conditioning.Rotor is offset along x axle negative sense, and the rest may be inferred.
(5) when being used to detect ring-shaped rotor when the y axle is subjected to displacement, apply high-frequency alternating current at the 3rd radial suspension detecting electrode 20, the 4th radial suspension detecting electrode 21, and apply the high-frequency ac carrier wave of same frequency, amplitude equal and opposite in direction, phase differential 180 degree at the 7th radial suspension detecting electrode 24, the 8th radial suspension detecting electrode 25; By stator common electrical pole plate output differential capacitance signal, can detect the y axis signal of input through the oversampling circuit conditioning.
Gyroscope can responsive two axis angular rates.The rotor of supposing this gyro is ω around z axle rotational angular, moment of inertia is I, this gyro rotates around the y axle with angular velocity v, because the gyroscopic inertia of gyro, rotor will axially be offset at x, corner is v ', be positioned at relevant detection electrode on stator 1 and the following stator 4 by applying corresponding high frequency carrier, will detect the offset of rotor, thereby on corresponding suspension electrode, apply voltage and produce trimming moment Mx again, just can learn the big or small v=Mx/I ω of input y axis angular rate by trimming moment Mx again.The responsive x axis angular rate of gyro all can and the like.
Gyroscope also can responsive three axial line acceleration.When the gyro housing is subjected to as along the linear acceleration ax of x axle forward the time, rotor is because inertia is still static, and then the rotor relative stator has along the displacement of the lines of x axle negative sense.After displacement detecting, the control electronic circuit produces control voltage, and is added on the axial arranged radial stator electrode of x, makes rotor get back to the housing equilibrium position so produce the electrostatic equilibrium power Fx of x axle negative sense.According to electrostatic equilibrium power Fx, can try to achieve the linear acceleration ax=Fm of input, m is the quality of rotor.In like manner, can try to achieve line angle speed ay, the az of other diaxon input respectively by electrostatic equilibrium power Fy, Fz.
Claims (2)
1. an electromagnetic suspension corona drives micro-rotary gyro, comprise: go up stator, following stator, peripheral structure, little rotor and tooth-shape structure, wherein: go up stator and following stator upper and lower settings, it is characterized in that: go up stator, following stator links to each other with peripheral structure and constitutes a cage construction, peripheral structure is arranged on little peritrochanteric, little rotor places the centre of this cage construction, tooth-shape structure is distributed on the inboard of little rotor, and have between tooth-shape structure and the little rotor at interval, tooth-shape structure is arranged on the lower substrate, last stator comprises the stator first suspending stabilized coil inner ring, the last stator first suspending stabilized coil outer ring, the last stator second suspending stabilized coil inner ring, the last stator second suspending stabilized coil outer ring, last stator shaft orientation suspension detection electrodes and last stator public electrode, last stator from inside to outside, be to go up the stator first suspending stabilized coil inner ring successively, the last stator first suspending stabilized coil outer ring, last stator shaft orientation suspension detection electrodes, last stator public electrode, the last stator second suspending stabilized coil inner ring, the last stator second suspending stabilized coil outer ring, the last stator first suspending stabilized coil inner ring, the last stator first suspending stabilized coil outer ring, the last stator second suspending stabilized coil inner ring, the suspending stabilized coil of the common formation in the last stator second suspending stabilized coil outer ring, and be respectively the circular copper coil of band opening, not connecting each other, is on the circle in the center of circle in above stator center all; It is fan-shaped that each of last stator shaft orientation suspension detection electrodes all becomes, being evenly distributed in the above stator center of circle is on the circumference in the center of circle, and each interval equates, last stator public electrode is a continuous conductive ring, the internal diameter of the last stator first suspending stabilized coil inner ring is less than the internal diameter of little rotor, the external diameter of the last stator first suspending stabilized coil outer ring is greater than the internal diameter of little rotor, the internal diameter of the last stator second suspending stabilized coil inner ring is less than the external diameter of little rotor, the external diameter of the last stator second suspending stabilized coil outer ring is greater than the external diameter of little rotor, last stator is identical with the structure of following stator, spatially be vertical corresponding in opposite directions, little rotor is a circular ring structure, the supporting construction that comprises rotor surface structure and rotor respectively, the rotor surface structure is positioned at the inboard of supporting construction, and peripheral structure is a circle ring, comprises eight radial suspension detecting electrodes, little rotor center was on the circle in the center of circle when these eight radial electrode plates were evenly distributed in the equilibrium position, and each interval equates.
2. electromagnetic suspension corona according to claim 1 drives micro-rotary gyro, it is characterized in that tooth-shape structure Ni metal.
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| Application Number | Priority Date | Filing Date | Title |
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| CN200910052146XA CN101561276B (en) | 2009-05-27 | 2009-05-27 | Suspension motor micro gyro operated by adopting electromagnetism and corona |
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| CN200910052146XA CN101561276B (en) | 2009-05-27 | 2009-05-27 | Suspension motor micro gyro operated by adopting electromagnetism and corona |
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| CN1477374A (en) * | 2003-07-10 | 2004-02-25 | 上海交通大学 | Magnetic suspension rotor azimuth microgyro |
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- 2009-05-27 CN CN200910052146XA patent/CN101561276B/en not_active Expired - Fee Related
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| CN1477374A (en) * | 2003-07-10 | 2004-02-25 | 上海交通大学 | Magnetic suspension rotor azimuth microgyro |
| CN1570563A (en) * | 2004-04-29 | 2005-01-26 | 上海交通大学 | Suspended rotor MEMS micro-gyroscope utilizing static and charge relaxation to work |
| CN1877256A (en) * | 2006-07-06 | 2006-12-13 | 上海交通大学 | Static support suspension electromagnetic induction rotation micro-gyro |
| CN1920480A (en) * | 2006-09-21 | 2007-02-28 | 上海交通大学 | Two-rotor statically stable electromagnetic suspension micro-rotary gyro |
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| WO01／20259A1 2001.03.22 |
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