CN1710384A - Soft magnetic suction suspension high-speed rotation rigid-body micro-gyroscope - Google Patents
Soft magnetic suction suspension high-speed rotation rigid-body micro-gyroscope Download PDFInfo
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- CN1710384A CN1710384A CN 200510027336 CN200510027336A CN1710384A CN 1710384 A CN1710384 A CN 1710384A CN 200510027336 CN200510027336 CN 200510027336 CN 200510027336 A CN200510027336 A CN 200510027336A CN 1710384 A CN1710384 A CN 1710384A
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Abstract
A rigid microgyroscope consists of top stator structure layer including axial suction - suspension electromagnet pair and axial suction - suspension inductive detecting element on the same circle of stator baseplate surface , coil and high magnetoconductivity material component with salient pole ; soft magnetic rotor with high magnetoconductivity ; and bottom stator structure layer including radial suction - suspension electromagnet pair and axial suction - suspension inductive detecting element on the same circle , coil and high magnetoconductivity material component with salient pole at central part of bottom stator .
Description
Technical field
The present invention relates to a kind of suspension rotor micro gyro, particularly a kind of soft magnetic suction suspension high-speed rotation rigid-body micro-gyroscope is used for the MEMS (micro electro mechanical system) field.
Background technology
MEMS (MEMS (micro electro mechanical system)) technology combines with the gyro technology and urgees to have given birth to the generation of the little gyro of many novelties, and the little gyro volume of this novelty is little, and power consumption is little, and cost is low, has own unique advantage.At present, using little gyro of MEMS technology manufacturing mainly to concentrate on decline gyro and suspension rotor of vibration declines on the gyro.The vibration gyro that declines detects quality system and is associated on the matrix, utilizes Coriolis acceleration, realizes the measurement of input angular velocity to external world by driving mode to the energy conversion that detects mode.The little gyro of this kind is because mode and coupling error problem, the influence of manufacturing defect, the influence of changes in material etc. improve relatively difficulty of its measuring accuracy.The rigid body that utilizes high speed rotating of suspension rotor micro gyro has gyroscopic inertia and realizes the gyro function, and it detects rigid body and suspends and high speed rotating, does not need mechanical support, can obtain higher precision.Suspension rotor micro gyro mainly utilizes electromagnetic suspension and electrostatic suspension at present.And the present invention utilizes the electromagnetic suspension principle.
Find through literature search prior art, U.S. Patent number is US 5955800, name is called: the system that mentions in the United States Patent (USP) of suspension system (Leivitation Systems) is by high conductivity body disk, electromagnetic induction eddy current suspending power generation device, the electromagnetic induction eddy current rotor turning gear constitutes, this patent is mentioned this levitation device and can be used in the gyro, constitute the little gyro of magnetic suspension rotor, this is a kind of little gyro that utilizes the electromagnetic suspension principle, the high-frequency electromagnetic eddy current produces suspension effect, its major defect is that eddy-current heating is serious, power consumption is big, the acquisition complexity of high-frequency current is a little less than the rotor radial stability.
Summary of the invention
The present invention is directed to the deficiencies in the prior art and defective, a kind of soft magnetic suction suspension high-speed rotation rigid-body micro-gyroscope is provided, make it utilize the suction of electromagnetism iron phase, inductance detection and FEEDBACK CONTROL to realize the stable suspersion of soft magnetism rotor jointly, utilize the magnetic resistance minimum principle, utilize stator and rotor biconvex pole axis to move towards the trend of magnetic resistance minimum to magnetic circuit, realize the high speed rotating of soft magnetism rotor, the soft magnetism rotor of high speed rotating has gyroscopic inertia, thereby can realize gyroscopic effect.Detect the soft magnetism rotor-position by inductance, by feedback moment again equilibrium principle realize the measurement of input angular velocity to external world.
The present invention is a specific implementation by the following technical programs, and the present invention is set to thriple decker sandwich's structure, is respectively stator structure layer, stator structure layer, high magnetic permeability soft magnetism rotor down.Last stator structure layer and following stator structure layer are assembled together, and form a cavity, and the high magnetic permeability rotor is arranged in this cavity.
The stator structure layer comprises under the present invention: following stator substrate, and four radially the outstanding electromagnet of suction is right, radially inhales outstanding inductance detecting element for four, and the outstanding assembly of axial suction, axial magnetic circuit become magnetic resistance rotatable stator salient pole coil block.Its annexation is: being provided with four at following stator substrate, radially to inhale outstanding electromagnet right, each radially inhale outstanding electromagnet between be provided with and radially inhale outstanding inductance detecting element.Radially inhale outstanding electromagnet to radially inhale outstanding inductance detecting element and be arranged on the circumference.In this inside circumference, the outstanding assembly of axial suction is set, axially inhale outstanding assembly by four axially inhale outstanding electromagnet to four axially inhale outstanding inductance detecting elements and constitute, four axially inhale outstanding electromagnet to four axially inhale outstanding inductance detecting elements and be arranged on the circumference.Axial magnetic circuit becomes magnetic resistance rotatable stator salient pole coil block and is arranged on down on the central area of stator substrate.Axial magnetic circuit becomes magnetic resistance rotatable stator salient pole coil block and is made of the high magnetic conductance material structure of 14 coils with the band salient pole.Coil is a planar structure.The high magnetic conductance material structure of band salient pole is arranged on the high magnetic permeability annulus by 14 salient poles and forms.Radially inhale for four and hang electromagnet radially the center of circle, four axial suctions of the outstanding inductance detecting element place of suction circumference are hanged electromagnet to overlapping with the center of circle of high magnetic permeability annulus with four axial centers of circle that hang inductance detecting element place circumference of inhaling with four.Four radially inhale outstanding electromagnet to four radially inhale outstanding inductance detecting element and constitute by U type high-permeability material structure and square spiral coil.Axially inhaling outstanding electromagnet for four is made of U type high-permeability material structure and square spiral coil forming with four axial parts of inhaling outstanding inductance detecting element.
The stator structure layer of going up of the present invention comprises: four axially to inhale outstanding electromagnet right, axially inhales outstanding inductance detecting elements for four, last stator substrate, and coil is with the high magnetic conductance material structures of salient pole.Its annexation is: four axially inhale outstanding electromagnet to four axially inhale on the same circumference on surface that outstanding inductance detecting elements are arranged in stator substrate.14 coils are arranged on the surface of stator substrate with the high magnetic conductance material structure of being with salient pole.The high magnetic conductance material structure of band salient pole is arranged on the high magnetic permeability annulus by 14 salient poles and forms.Axially inhale outstanding electromagnet to overlapping with the center of circle of high magnetic permeability annulus for four with four outstanding circumference centers of circle, inductance detecting element place of axial suction.Axially inhale outstanding electromagnet to constituting by U type high-permeability material structure and square spiral coil for four with four parts of axially inhaling outstanding inductance detecting element.
High magnetic permeability soft magnetism rotor of the present invention from inside to outside sets gradually small column, becomes magnetic resistance rotor salient pole, becomes magnetic resistance rotor salient pole gap, axially inhales the pendant face, radially inhales outstanding periphery.
When the little gyro of the present invention is worked, radially inhale outstanding electromagnet to energising for four, radially inhale by four and hang the radial displacement that the inductance detecting element constantly detects high magnetic permeability soft magnetism rotor, realize the radially stable of high magnetic permeability soft magnetism rotor by FEEDBACK CONTROL; Four outstanding electromagnet of axial suction hang the axial displacement that the inductance detecting elements constantly detect high magnetic permeability soft magnetism rotor to energising by four axial suctions, realize axially stablizing of high magnetic permeability soft magnetism rotor.
14 outer coils of 14 salient poles in last stator layers structure and the following stator structure layer constitute four phase transformation magnetic resistance micromotors with the high magnetic permeability soft magnetism rotors that contain 12 change magnetic resistance rotor salient poles, utilize the work of magnetic resistance minimum principle, make the stable rotation of high magnetic permeability soft magnetism rotor high-speed.Thereby has gyroscopic effect.
When extraneous input angular velocity, axially inhale outstanding inductance detecting element and detect displacement information, by FEEDBACK CONTROL, apply feedback moment for little gyro, the rotor precession is to the position parallel with housing.By moment again equilibrium principle realize the measurement of input quantity to external world.
Considered the requirement of microfabrication during of the present invention the design.Also comprise in the following stator structure layer: the insulation propping material, radially inhale outstanding electromagnet to radially inhale outstanding inductance detecting element installation region, coil and salient pole and high magnetic permeability annulus installation region, axially inhale outstanding electromagnet to the outstanding inductance detecting element installation region of axial suction, shrinkage pool chamber.The insulation propping material is arranged on down on the stator substrate, and the insulation propping material is the concave character type structure, and the shrinkage pool chamber is arranged on the upper surface center of insulation propping material.Radially the outstanding electromagnet of suction is to hanging inductance detecting element installation region, the outstanding electromagnet of axial suction to being arranged in the propping material that insulate with the outstanding inductance detecting element installation region of axial suction, coil and salient pole and high magnetic permeability annulus installation region with radially inhaling.The following stator structure layer of this structure is fit to the processing of multilayer fine process.
Also comprise in the last stator structure layer: insulation propping material, the axial suction are hanged electromagnet to hanging inductance detecting element installation region, coil and salient pole and high magnetic permeability annulus installation region with axial suction.The insulation propping material is arranged on the stator substrate, and the insulation propping material is the rectangle structure.Axially inhale outstanding electromagnet to being arranged in the insulation propping material with the outstanding inductance detecting element installation region of axial suction, coil and salient pole and high magnetic permeability annulus installation region.
The present invention utilizes the electromagnetism iron phase to inhale and realizes stable suspersion, and the directly logical direct current of magnet coil is compared with the existing electromagnetic suspension mode of eddy current of utilizing, and power supply obtains comparatively convenient.By the radial suspension electromagnet is set, make that radial suspension rigidity is adjustable, and can keep bigger value, overcome the little and nonadjustable shortcoming of conventional magnetic levitation rotor micro gyro radial rigidity.Realize position probing and FEEDBACK CONTROL by inductance, compare with the existing mode of the position of little capacitance detecting of utilizing, do not have phenomenons such as electric breakdown, it is big to detect range.Utilize the change magnetic resistance driven in rotation mode of magnetic resistance minimum principle, utilize the high frequency rotary electromagnetic field to produce eddy current and realize that the mode of rotating compares, the rotor thermal losses is little.The characteristics of microfabrication have been considered in design of the present invention, are particularly suitable for the multilayer fine process, and it is little to have size, and power consumption is little, realize the characteristics that are easy to.
Description of drawings
Fig. 1 general structure synoptic diagram of the present invention
Stator structure layer synoptic diagram under Fig. 2 the present invention
Stator shaft orientation is inhaled outstanding and detection architecture synoptic diagram under Fig. 3 the present invention
Stator structure layer synoptic diagram in Fig. 4 the present invention
Fig. 5 rotor structure layer of the present invention synoptic diagram
Fig. 6 stator rotation of the present invention salient-pole structure layer synoptic diagram
Fig. 7 the present invention radially inhale outstanding electromagnet to, radially inhale outstanding inductance detecting element structural representation
Fig. 8 the present invention axially inhale outstanding electromagnet to, axially inhale outstanding inductance detecting element structural representation
Stator structure schematic cross-section under Fig. 9 the present invention
Stator structure schematic cross-section in Figure 10 the present invention
Embodiment
As shown in Figure 1, the present invention is thriple decker sandwich's structure, is respectively stator structure layer 1, following stator structure layer 3, high magnetic permeability soft magnetism rotor 2.Last stator structure layer 1 and following stator structure layer 3 are assembled together, and form a cavity, and high magnetic permeability rotor 2 is arranged in this cavity.
Shown in Fig. 2,3,6, stator structure layer 3 comprises under the present invention: following stator substrate 4, radially inhale outstanding electromagnet to 5,7,9,11, radially inhale outstanding inductance detecting element 6,8,10,12, axially inhale outstanding assembly 13, coil 45, the high magnetic conductance material structure 14 of band salient pole.Its annexation is: be provided with at following stator substrate 4 and radially inhale outstanding electromagnet 7,9,5,11, each radially inhale outstanding electromagnet between be provided with and radially inhale outstanding inductance detecting element 12,8,10,6.Radially inhale outstanding electromagnet to 7,9,5,11 with radially inhale outstanding inductance detecting element 12,8,10,6 and be arranged on the circumference.In this inside circumference, the outstanding assembly 13 of axial suction is set.Axially inhale outstanding assembly 13 by the outstanding electromagnet of axial suction to 48,50,52,54 with axially inhale outstanding inductance detecting element 49,51,53,55 and constitute, axially inhale outstanding electromagnet to 48,50,52,54 with axially inhale outstanding inductance detecting element 49,51,53,55 and be arranged on the circumference.The high magnetic conductance material structure 14 of coil 45 and band salient pole is arranged on down on the central area of stator substrate 4.14 coils 45 are arranged on the high magnetic conductance material structure 14 of band salient pole.Coil 45 is planar structures.The high magnetic conductance material structure 14 of band salient pole is arranged on the high magnetic permeability annulus 47 by 14 salient poles 46 and forms.Radially inhale outstanding electromagnet to 7,9,5,11 and radially inhale the center of circle of outstanding inductance detecting element 12,8,10,6 place circumference, axially inhale outstanding electromagnet to 48,50,52,54 and the center of circle of axially inhaling outstanding inductance detecting element 49,51,53,55 place circumference overlap with the center of circle of high magnetic permeability annulus 47.
Shown in Fig. 4,6, stator structure layer 1 comprises in the present invention: axially inhale outstanding electromagnet to 16,20,18,22, axially inhale outstanding inductance detecting element 17,21,19,23, last stator substrate 15, coil 24, the high magnetic conductance material structure 25 of band salient pole.Its annexation is: axially inhale outstanding electromagnet to 16,20,18,22 with axially inhale on the same circumference on surface that outstanding inductance detecting element 17,21,19,23 is arranged in stator substrate 15.14 coils 24 are arranged on the surface of stator substrate 15 with the high magnetic conductance material structure 25 of being with salient pole.The high magnetic conductance material structure 25 of band salient pole is arranged on the high magnetic permeability annulus 31 by 14 salient poles 30 and forms.Axially inhale outstanding electromagnet to 16,20,18,22 with axially inhale the outstanding circumference center of circle, inductance detecting element 17,21,19,23 place and overlap with the center of circle of high magnetic permeability annulus 31.
As shown in Figure 7, radially inhale outstanding electromagnet to 7,9,5,11 with radially inhale outstanding inductance detecting element 12,8,10,6, constitute by U type high-permeability material structure 33 and square spiral coil 34.Square spiral coil 34 is wrapped on the U type high-permeability material structure 33.
As shown in Figure 8, axially inhale outstanding electromagnet to 16,20,18,22 with axially inhale outstanding inductance detecting element 17,21,19,23, axially inhale outstanding electromagnet to 48,50,52,54 with axially inhale outstanding inductance detecting element 49,51,53,55, constitute by U type high-permeability material structure 35 and square spiral coil 36.Square spiral coil 36 is wrapped on the U type high-permeability material structure 35.
As shown in Figure 5, high magnetic permeability soft magnetism rotor 2 of the present invention from inside to outside sets gradually small column 32, becomes magnetic resistance rotor salient pole 26, becomes magnetic resistance rotor salient pole gap 28, axially inhales pendant face 27, radially inhales outstanding periphery 29.High magnetic permeability soft magnetism rotor 2 contains 12 and becomes magnetic resistance rotor salient pole 26.
When the little gyro of the present invention is worked, radially inhale outstanding electromagnet to 7,9,5,11 energisings, by radially inhaling the constantly radial displacement of detection high magnetic permeability soft magnetism rotor 2 of outstanding inductance detecting element 12,8,10,6, realize the radially stable of high magnetic permeability soft magnetism rotor 2 by FEEDBACK CONTROL; Axially the outstanding electromagnet of suction reaches axially to inhale to 16,20,18,22 and hangs electromagnet to 48,50,52,54 energisings, hang the axial displacement that inductance detecting element 49,51,53,55 constantly detects high magnetic permeability soft magnetism rotor 2 by outstanding inductance detecting element 17,21,19,23 of axial suction and axial suction, axial the stablizing of realization high magnetic permeability soft magnetism rotor 2.
When extraneous input angular velocity, axially inhale outstanding inductance detecting element 17,21,19,23 and axially inhale outstanding inductance detecting element 49,51,53,55 and detect displacement information, by FEEDBACK CONTROL, apply feedback moment for little gyro, the rotor precession is to the position parallel with housing.By moment again equilibrium principle realize the measurement of input quantity to external world.
As shown in Figure 9, also comprise in the following stator structure layer 3: insulation propping material 37, radially inhale outstanding electromagnet to radially inhale outstanding inductance detecting element installation region 38, coil and salient pole and high magnetic permeability annulus installation region 39, axially inhale outstanding electromagnet to the outstanding inductance detecting element installation region 40 of axial suction, shrinkage pool chamber 44.Insulation propping material 37 is arranged on down on the stator substrate 4, and insulation propping material 37 is the concave character type structure, and shrinkage pool chamber 44 is arranged on the upper surface center of insulation propping material 37.Radially the outstanding electromagnet of suction is to hanging inductance detecting element installation region 38, the outstanding electromagnet of axial suction to being arranged in the propping material 37 that insulate with the outstanding inductance detecting element installation region 40 of axial suction, coil and salient pole and high magnetic permeability annulus installation region 39 with radially inhaling.The following stator structure layer 3 of this structure is fit to the processing of multilayer fine process.
As shown in figure 10, also comprise in the last stator structure layer 1: insulation propping material 41, the axial suction are hanged electromagnet to hanging inductance detecting element installation region 42, coil and salient pole and high magnetic permeability annulus installation region 43 with axial suction.Insulation propping material 41 is arranged on the stator substrate 15, and insulation propping material 41 is the rectangle structure.Axially inhale outstanding electromagnet to being arranged in the insulation propping material 41 with the outstanding inductance detecting element installation region 42 of axial suction, coil and salient pole and high magnetic permeability annulus installation region 43.The last stator structure layer 1 of this structure is fit to the processing of multilayer fine process.
Claims (9)
1, a kind of soft magnetic suction suspension high-speed rotation rigid-body micro-gyroscope, comprise: go up stator structure layer (1), high magnetic permeability soft magnetism rotor (2), following stator structure layer (3), last stator structure layer (1) and following stator structure layer (3) link together, form a cavity, high magnetic permeability rotor (2) is arranged in this cavity, it is characterized in that, last stator structure layer (1) comprising: axially inhale outstanding electromagnet to (16,20,18,22), axially inhale outstanding inductance detecting element (17,21,19,23), last stator substrate (15), coil (24), the high magnetic conductance material structure (25) of band salient pole, axially inhale outstanding electromagnet to (16,20,18,22) and axially inhale outstanding inductance detecting element (17,21,19,23) be arranged on the same circumference on surface of stator substrate (15), the high magnetic conductance material structure (25) of 14 coils (24) and band salient pole is arranged on the surface of stator substrate (15); Following stator structure layer (3) comprising: following stator substrate (4), radially inhale outstanding electromagnet to (5,7,9,11), radially inhale outstanding inductance detecting element (6,8,10,12), axially inhale outstanding assembly (13), the high magnetic conductance material structure (14) of band salient pole, coil (45), the outstanding electromagnet of radially suction is set to (7 at following stator substrate (4), 9,5,11), each radially inhale outstanding electromagnet between be provided with and radially inhale outstanding inductance detecting element (12,8,10,6), radially inhale outstanding electromagnet to (7,9,5,11) and radially inhale outstanding inductance detecting element (12,8,10,6) be arranged on the circumference, in this inside circumference, the outstanding assembly (13) of axial suction is set, the high magnetic conductance material structure (14) of coil (45) and band salient pole is arranged on down on the central area of stator substrate (4), and 14 coils (45) are arranged on the high magnetic conductance material structure (14) of band salient pole.
2, soft magnetic suction suspension high-speed rotation rigid-body micro-gyroscope according to claim 1, it is characterized in that, axially suction is hanged assembly (13) and by the outstanding electromagnet of axial suction (48,50,52,54) and axial the suction is hanged inductance detecting element (49,51,53,55) formation, and axially the outstanding electromagnet of suction is arranged on the circumference (48,50,52,54) and the outstanding inductance detecting element (49,51,53,55) of axial suction.
3, soft magnetic suction suspension high-speed rotation rigid-body micro-gyroscope according to claim 1, it is characterized in that, the high magnetic conductance material structure (25) of band salient pole is arranged on the high magnetic permeability annulus (31) by 14 salient poles (30) and forms, and axially inhales outstanding electromagnet to (16,20,18,22) with axially inhale and hang inductance detecting element (17,21,19,23) the circumference center of circle, place and overlap with the center of circle of high magnetic permeability annulus (31).
4, soft magnetic suction suspension high-speed rotation rigid-body micro-gyroscope according to claim 1, it is characterized in that, the high magnetic conductance material structure (14) of band salient pole is arranged on the high magnetic permeability annulus (47) by 14 salient poles (46) and forms, radially inhale outstanding electromagnet to (7,9,5,11) and radially inhale the center of circle of outstanding inductance detecting element (12,8,10,6) place circumference, axially inhale outstanding electromagnet to (48,50,52,54) and axially the suction center of circle that hangs inductance detecting element (49,51,53,55) place circumference overlap with the center of circle of high magnetic permeability annulus (47).
5, soft magnetic suction suspension high-speed rotation rigid-body micro-gyroscope according to claim 1, it is characterized in that, radially inhale outstanding electromagnet to (7,9,5,11) with radially inhale and hang inductance detecting element (12,8,10,6), be made of U type high-permeability material structure (33) and square spiral coil (34), square spiral coil (34) is wrapped on the U type high-permeability material structure (33).
6, soft magnetic suction suspension high-speed rotation rigid-body micro-gyroscope according to claim 1, it is characterized in that, axially inhale outstanding electromagnet to (16,20,18,22) and the outstanding inductance detecting element (17,21,19,23) of axial suction, axially inhale outstanding electromagnet to (48,50,52,54) and the outstanding inductance detecting element (49,51,53,55) of axial suction, constitute by U type high-permeability material structure (35) and square spiral coil (36).Square spiral coil (36) is wrapped on the U type high-permeability material structure (35).
7, soft magnetic suction suspension high-speed rotation rigid-body micro-gyroscope according to claim 1, it is characterized in that, high magnetic permeability soft magnetism rotor (2) from inside to outside sets gradually small column (32), becomes magnetic resistance rotor salient pole (26), becomes magnetic resistance rotor salient pole gap (28), axially inhales pendant face (27), radially inhales outstanding periphery (29), and high magnetic permeability soft magnetism rotor (2) contains 12 and becomes magnetic resistance rotor salient pole (26).
8, soft magnetic suction suspension high-speed rotation rigid-body micro-gyroscope according to claim 1, it is characterized in that, also comprise in the following stator structure layer (3): insulation propping material (37), radially inhale outstanding electromagnet to hanging inductance detecting element installation region (38) with radially inhaling, coil and salient pole and high magnetic permeability annulus installation region (39), axially inhale outstanding electromagnet to hanging inductance detecting element installation region (40) with axial suction, shrinkage pool chamber (44), insulation propping material (37) is arranged on down on the stator substrate (4), insulation propping material (37) is the concave character type structure, shrinkage pool chamber (44) is arranged on the upper surface center of insulation propping material (37), radially inhales outstanding electromagnet to hanging inductance detecting element installation region (38) with radially inhaling, axially inhale outstanding electromagnet to hanging inductance detecting element installation region (40) with axial suction, coil and salient pole and high magnetic permeability annulus installation region (39) are arranged in the insulation propping material (37).
9, soft magnetic suction suspension high-speed rotation rigid-body micro-gyroscope according to claim 1, it is characterized in that, also comprise in the last stator structure layer (1): insulation propping material (41), axially inhale outstanding electromagnet to hanging inductance detecting element installation region (42) with axial suction, coil and salient pole and high magnetic permeability annulus installation region (43), insulation propping material (41) is arranged on the stator substrate (15), insulation propping material (41) is the rectangle structure, axially inhales outstanding electromagnet to hanging inductance detecting element installation region (42) with axial suction, coil and salient pole and high magnetic permeability annulus installation region (43) are arranged in the insulation propping material (41).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100273368A CN100392354C (en) | 2005-06-30 | 2005-06-30 | Soft magnetic suction suspension high-speed rotation rigid-body micro-gyroscope |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100273368A CN100392354C (en) | 2005-06-30 | 2005-06-30 | Soft magnetic suction suspension high-speed rotation rigid-body micro-gyroscope |
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| Publication Number | Publication Date |
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| CN1710384A true CN1710384A (en) | 2005-12-21 |
| CN100392354C CN100392354C (en) | 2008-06-04 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2005100273368A Expired - Fee Related CN100392354C (en) | 2005-06-30 | 2005-06-30 | Soft magnetic suction suspension high-speed rotation rigid-body micro-gyroscope |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102494050A (en) * | 2010-12-07 | 2012-06-13 | 龙口中宇机械有限公司 | Flexible connection device, and manufacturing method thereof and automobile electromagnetic fan clutch |
| CN105391270A (en) * | 2015-12-23 | 2016-03-09 | 苏州市凯业金属制品有限公司 | Self-adaptive magnetic damper |
| CN106936337A (en) * | 2015-12-30 | 2017-07-07 | 上海微电子装备有限公司 | Magnetic-floating plane electric rotating machine and lithographic equipment |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2426830A1 (en) * | 1978-05-22 | 1979-12-21 | Org Europeene De Rech | MAGNETIC SUSPENSION INERTIA MOMENT DEVICE |
| WO1996031941A1 (en) * | 1995-04-06 | 1996-10-10 | The University Of Sheffield | Improvements in or relating to levitation systems |
| RU2158902C1 (en) * | 1999-09-13 | 2000-11-10 | Саратовский государственный технический университет | Dynamically tuned gyroscope |
| JP4583538B2 (en) * | 2000-02-23 | 2010-11-17 | 東京計器株式会社 | Gyro device |
| CN1238694C (en) * | 2003-07-10 | 2006-01-25 | 上海交通大学 | Magnetic suspension rotor azimuth microgyro |
| CN100350215C (en) * | 2004-04-29 | 2007-11-21 | 上海交通大学 | Suspended rotor MEMS micro-gyroscope utilizing static and charge relaxation to work |
-
2005
- 2005-06-30 CN CNB2005100273368A patent/CN100392354C/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102494050A (en) * | 2010-12-07 | 2012-06-13 | 龙口中宇机械有限公司 | Flexible connection device, and manufacturing method thereof and automobile electromagnetic fan clutch |
| CN102494050B (en) * | 2010-12-07 | 2014-11-05 | 龙口中宇机械有限公司 | Flexible connection device, and manufacturing method thereof and automobile electromagnetic fan clutch |
| CN105391270A (en) * | 2015-12-23 | 2016-03-09 | 苏州市凯业金属制品有限公司 | Self-adaptive magnetic damper |
| CN106936337A (en) * | 2015-12-30 | 2017-07-07 | 上海微电子装备有限公司 | Magnetic-floating plane electric rotating machine and lithographic equipment |
| CN106936337B (en) * | 2015-12-30 | 2019-02-01 | 上海微电子装备（集团）股份有限公司 | Magnetic-floating plane rotating electric machine and lithographic equipment |
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| Publication number | Publication date |
|---|---|
| CN100392354C (en) | 2008-06-04 |
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