CN110608735A - High-temperature superconducting magnetic flux pinning effect electrostatic driving micro-rotation gyroscope - Google Patents
High-temperature superconducting magnetic flux pinning effect electrostatic driving micro-rotation gyroscope Download PDFInfo
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- CN110608735A CN110608735A CN201910905748.9A CN201910905748A CN110608735A CN 110608735 A CN110608735 A CN 110608735A CN 201910905748 A CN201910905748 A CN 201910905748A CN 110608735 A CN110608735 A CN 110608735A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/02—Rotary gyroscopes
- G01C19/04—Details
- G01C19/06—Rotors
- G01C19/08—Rotors electrically driven
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/02—Rotary gyroscopes
- G01C19/04—Details
- G01C19/16—Suspensions; Bearings
- G01C19/24—Suspensions; Bearings using magnetic or electrostatic fields
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Abstract
The invention provides a high-temperature superconducting magnetic flux pinning effect electrostatic driving micro-rotation gyroscope, which comprises a stator, a gyroscope rotor, a high-temperature superconductor and a stator electrostatic driving electrode, wherein the stator is provided with a plurality of permanent magnets; the stator is arranged above the gyro rotor; the stator electrostatic driving electrode is arranged on the lower surface of the stator and used for generating a stepping electric field; the high-temperature superconductor is arranged below the gyro rotor; the lower surface of the gyro rotor is provided with a permanent magnet which is in an axisymmetric ring shape; the magnetic field generated by the permanent magnet acts on the high-temperature superconductor below, and the gyro rotor is locked and suspended above the high-temperature superconductor through the diamagnetism and the magnetic flux pinning characteristics of the high-temperature superconductor; the upper surface of the gyro rotor is provided with a rotor electrostatic driving electrode, and a stepping electric field generated by the stator electrostatic driving electrode acts on the rotor electrostatic driving electrode to generate a rotating torque so that the gyro rotor rotates at a high speed. The invention realizes stable suspension by adopting the magnetic flux pinning effect of a magnetic field in a high-temperature superconductor, and is a passive suspension technology.
Description
Technical Field
The invention relates to the technical field of micro-electro-mechanical systems, in particular to a high-temperature superconducting magnetic flux pinning effect electrostatic driving micro-rotation gyroscope.
Background
The rotor gyroscope which works based on the fixed axis property of the high-speed rotating rotor is widely applied to the traditional high-precision gyroscope, and the typical examples include a liquid floating rotor, a magnetic suspension rotor, a superconducting suspension rotor and the like. Because the suspension rotor gyroscope has a complex structure, the early MEMS gyroscope adopts a vibrator structure based on the Coriolis effect, and the structure is simple and is easy to manufacture by a micro-processing technology. In recent years, as the development of the MEMS micromachining technology becomes mature, research and development of the rotor-type MEMS micro-gyroscope get attention from scientists at home and abroad.
Surface micromachined angular rate gyroscopes were reported by Satcon Technology, usa, as early as 1992. A polysilicon rotor electrostatic motor with the thickness of 2.2 mu m and the diameter of 200 mu m is manufactured, and the direction of a rotating shaft of the rotor is controlled by adopting an analog closed-loop control circuit. However, at the time of operation, the rotor is stuck due to electric charges to fail. Subsequently, it was reported in 1995 to 1998 at the university of sheffield, uk, that an electromagnetic levitation rotor micro-motor was fabricated using an electromagnetic induction eddy current levitation technology. In 2004, Shanghai university of transportation improved the coil structure on the basis of the technology, and also made an electromagnetic induction eddy current suspension rotor micro motor. Both mechanisms achieve suspension and rotation of the rotor. From 1999 to 2006, Tokimec corporation of Japan reported an electrostatic levitation gyro. The gyroscope adopts an electrostatic suspension support ring-shaped silicon rotor and adopts an anodic bonding technology to manufacture a glass-silicon-glass rotor sealing structure. The maximum rotor speed is 70000 rpm and the scale factor of the gyroscope is 6.5 mV/deg/s. This accuracy is also difficult to surpass existing vibratory gyros for widespread commercial use. In recent years, the Qinghua university has made a great research progress in the aspect of electrostatic levitation inertial sensors. Extensive research work was also carried out by the Harbin Industrial university in the field of super-hydrophobic liquid suspension rotor micro-gyroscopes.
The existing suspension rotor micro gyroscope manufactured based on the MEMS technology has the technical problems to be solved urgently, such as: eddy heating high temperature and eddy damping in electromagnetic induction suspension, small gap in electrostatic suspension, large driving voltage, working stability and the like.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide the high-temperature superconducting magnetic flux pinning effect electrostatic driving micro-rotating gyroscope.
The invention provides a high-temperature superconducting magnetic flux pinning effect electrostatic driving micro-rotation gyroscope, which comprises a stator, a gyroscope rotor, a high-temperature superconductor and a stator electrostatic driving electrode, wherein the stator is provided with a plurality of permanent magnets; wherein the content of the first and second substances,
the stator is arranged above the gyro rotor;
the stator electrostatic driving electrode is arranged on the lower surface of the stator and used for generating a stepping electric field;
a rotor electrostatic driving electrode is arranged on the upper surface of the gyro rotor, and a stepping electric field generated by the stator electrostatic driving electrode acts on the rotor electrostatic driving electrode to generate a rotating torque so that the gyro rotor rotates at a high speed;
the high-temperature superconductor is arranged below the gyro rotor;
the lower surface of the gyro rotor is provided with a permanent magnet, a magnetic field generated by the permanent magnet acts on the high-temperature superconductor below the gyro rotor, and the gyro rotor is locked and suspended above the high-temperature superconductor through the diamagnetic and flux pinning characteristics of the high-temperature superconductor.
Preferably, the permanent magnet is a magnetic flux pinning permanent magnet which is in an axisymmetric annular structure, so that the rotation freedom of the gyro rotor is not limited except along the direction of the rotation central axis, and other five degrees of freedom are all limited by electromagnetic force, and the gyro rotor can rotate around the central axis at a high speed.
Preferably, the device also comprises a rotor chamber, a thin heat insulation layer and a low-temperature chamber, wherein,
the rotor cabin is arranged between the stator and the heat insulation thin layer, the stator is positioned above the rotor cabin, and the heat insulation thin layer is positioned below the rotor cabin; the lower surface of the stator is fixedly connected with the cylindrical rotor cabin wall and the upper surface of the heat insulation thin layer through bonding agents to form a closed space of the rotor cabin;
the gyro rotor is suspended in the rotor cabin;
the stator electrostatic driving electrode is arranged on the lower surface of the stator and is positioned in the rotor cabin;
the low-temperature cabin is arranged below the heat insulation thin layer, and a closed space is formed by fixedly connecting the lower surface of the heat insulation thin layer and a cuboid low-temperature cabin wall with an upper open surface through an adhesive;
the high-temperature superconductor is arranged in the low-temperature cabin and is positioned on the lower surface of the thin heat insulation layer;
and liquid nitrogen injection ports and exhaust ports are arranged on two sides of the low-temperature cabin.
Preferably, the micro gyroscope further comprises an annular electrode and a position detection electrode, wherein the annular electrode is arranged on the upper surface of the gyroscope rotor, and the annular electrode is arranged on the periphery of the rotor electrostatic driving electrode;
the position detection electrode is arranged on the lower surface of the stator, the position detection electrode is arranged on the periphery of the stator electrostatic driving electrode, and the position detection electrode and the annular electrode form a plurality of groups of differential capacitors for detecting the spatial position and the posture of the gyro rotor.
Preferably, the position detection electrode includes a position detection common electrode and a position detection constituent electrode, and the detection common electrode is disposed at a periphery of the position detection constituent electrode.
Preferably, the micro gyroscope further comprises an electrostatic force-bearing electrode and an electrostatic force application electrode, the electrostatic force-bearing electrode is arranged on the lower surface of the gyroscope rotor, and the electrostatic force-bearing electrode is arranged on the periphery of the permanent magnet;
the electrostatic force application electrode is arranged on the upper surface of the heat insulation thin layer and is positioned in the rotor cabin, and electrostatic force is applied to the gyro rotor through the electrostatic force application electrode;
the static force application electrode is applied with voltage, the static force application electrode and the static force-bearing electrode induce static electricity force of static field to apply moment to the gyro rotor for adjusting the space attitude angle of the gyro rotor, and when the gyro rotor precesses due to external rotation input or disturbance, the applied moment can adjust the gyro rotor to return to the central position.
Preferably, the rotor compartment is in a vacuum state.
Preferably, the material of the thermal insulation thin layer adopts a thermal insulation material with magnetic permeability.
Preferably, one or more of the following features:
-the stator electrostatic drive electrodes comprise a plurality of stator electrostatic drive electrode plates, the plurality of stator electrostatic drive electrode plates forming an axisymmetric ring-shaped structure;
-said rotor electrostatic drive electrode comprises a plurality of rotor electrostatic drive electrode plates, constituting an axisymmetric annular structure by a plurality of said rotor electrostatic drive electrode plates;
-the number of rotor electrostatic driving electrode plates and stator electrostatic driving electrode plates is matched to satisfy the electrostatic step driving effect.
Preferably, the substrate of the gyro rotor is a magnetic conduction layer, and the magnetic conduction layer is of a disc structure.
The invention utilizes the magnetic flux pinning effect of the magnetic field of the permanent magnet in the gyro rotor in the high-temperature superconductor to generate the suspension force to the gyro rotor; a stepping electric field generated by a stator electrostatic driving electrode in the stator acts on a rotor electrostatic driving electrode to generate a rotating torque, so that a gyro rotor rotates at a high speed to generate a gyro effect; the precession of the gyro rotor is detected by adopting a variable capacitance between an annular electrode on the gyro rotor and a position detection electrode on the stator, so that the rotation motion of the gyro carrier is obtained. The gyro rotor and the stator are manufactured by adopting a micro-processing technology. The magnetic flux pinning effect of the high-temperature superconductor can obtain a stable suspension effect, and the invention provides a new way for obtaining a high-performance micro-rotor gyroscope.
Compared with the prior art, the invention has at least one of the following beneficial effects:
in the invention, stable suspension is realized by adopting the magnetic flux pinning effect of a magnetic field in the high-temperature superconductor, and compared with suspension technologies such as electromagnetic induction suspension, electrostatic suspension, diamagnetic suspension and the like, the suspension realized by the magnetic flux pinning effect is more stable and is a passive suspension technology; the structure required by suspension realized by the magnetic flux pinning effect is simpler and is easy to realize by adopting a micro-processing technology; in addition, the static rotation driving is adopted, so that the rotation torque is increased to increase the rotation speed of the gyro rotor, and the adverse effects of eddy current induction heat effect or electromagnetic induction interference and the like caused by the driving of a rotating magnetic field are avoided.
The invention leads the gyro rotor to have unlimited rotational freedom degree along the direction of the rotation central axis and limited by other five freedom degrees by electromagnetic force by adopting the axial symmetrical structure of the magnetic flux pinning permanent magnet, so the gyro rotor can rotate around the central axis at high speed.
The invention adopts the ring electrode on the gyro rotor and the variable capacitance between the position detection electrodes on the stator to detect the precession of the gyro rotor by arranging the ring electrode and the position detection electrodes so as to induce the angular motion input by the gyro carrier on the sensitive shaft and obtain the rotary motion of the gyro carrier.
Furthermore, the electrostatic force induced by the electrostatic field between the electrostatic force application electrode and the electrostatic force application electrode can apply torque to the rotor, so that the spatial attitude angle of the gyro rotor is adjusted, and when the gyro rotor generates precession due to external rotation input or disturbance, the applied torque can adjust the gyro rotor to return to the central position.
The invention can improve the measurement resolution of the micro gyroscope, reduce the measurement error of the gyroscope, and improve the long-term working stability, output sensitivity and performance of the micro gyroscope.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a schematic structural diagram of an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a stator according to an embodiment of the present invention;
FIG. 3 is a schematic view of the top surface of a spinning top rotor according to an embodiment of the present invention;
FIG. 4 is a schematic view of the lower surface of a spinning top rotor according to an embodiment of the present invention;
FIG. 5 is a schematic view of the structure of the upper surface of a thermally insulating thin layer according to an embodiment of the present invention;
the scores in the figure are indicated as: 1 is a stator, 2 is a rotor chamber, 3 is a stator electrostatic driving electrode, 4 is a position detection electrode, 5 is a rotor electrostatic driving electrode, 6 is a ring electrode, 7 is a magnetic conduction layer, 8 is a magnetic flux pinning permanent magnet, 9 is a rotor chamber wall, 10 is a heat insulation thin layer, 11 is an exhaust port, 12 is a low-temperature chamber, 13 is a high-temperature superconductor, 14 is a low-temperature chamber wall, 15 is a liquid nitrogen injection port, 16 is an electrostatic force application electrode, 17 is an electrostatic force application electrode, 31 is a first stator electrostatic driving electrode plate, 32 is a second stator electrostatic driving electrode plate, 33 is a third stator electrostatic driving electrode plate, 34 is a fourth stator electrostatic driving electrode plate, 41 is a position detection common electrode, 42 is a first position detection constituent electrode, 43 is a second position detection constituent electrode, 44 is a third position detection constituent electrode, 45 is a fourth position detection constituent electrode, 46 is a fifth position detection constituent electrode, 47 is a sixth position detecting component electrode, 48 is a seventh position detecting component electrode, 49 is an eighth position detecting component electrode, 51 is a first rotor electrostatic driving electrode plate, 52 is a second rotor electrostatic driving electrode plate, 53 is a third rotor electrostatic driving electrode plate, 54 is a fourth rotor electrostatic driving electrode plate, 55 is a fifth rotor electrostatic driving electrode plate, 56 is a sixth rotor electrostatic driving electrode plate, 161 is a first electrostatic force application component electrode, 162 is a second electrostatic force application component electrode, 163 is a third electrostatic force application component electrode, 164 is a fourth electrostatic force application component electrode, 165 is a fifth electrostatic force application component electrode, 166 is a sixth electrostatic force application component electrode, 167 is a seventh electrostatic force application component electrode, and 168 is an eighth electrostatic force application component electrode.
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that variations and modifications can be made by persons skilled in the art without departing from the spirit of the invention. All falling within the scope of the present invention.
Referring to fig. 1-5, which are schematic structural diagrams of an electrostatic driving micro-rotating gyroscope with a high-temperature superconducting magnetic flux pinning effect according to an embodiment of the present invention, referring to fig. 1, the electrostatic driving gyroscope includes a stator 1, a gyroscope rotor, a high-temperature superconductor 13, and a stator electrostatic driving electrode 3; wherein, the stator 1 is arranged above the gyro rotor; in one embodiment, the substrate of the gyro rotor is a magnetic conduction layer 7, and the magnetic conduction layer 7 is a disk structure. The stator electrostatic driving electrode 3 is arranged on the lower surface of the stator 1 and used for generating a stepping electric field; the high-temperature superconductor 13 is disposed below the gyro rotor. The rotor electrostatic driving electrode 5 is arranged at the central position of the upper surface of the gyro rotor, and a stepping electric field generated by the stator electrostatic driving electrode 3 acts on the rotor electrostatic driving electrode 5 to generate a rotating torque so as to enable the gyro rotor to rotate at a high speed.
The central position of the lower surface of the gyro rotor is provided with a permanent magnet, a magnetic flux pinning permanent magnet 8 is adopted in a specific embodiment, and as shown in fig. 4, the magnetic flux pinning permanent magnet 8 is in an axisymmetric annular structure, so that the rotation freedom of the gyro rotor in the direction along the rotation central axis is not limited, and other five freedom degrees are all limited by electromagnetic force, and the gyro rotor can rotate around the central axis at a high speed. The magnetic field generated by the permanent magnet acts on the high-temperature superconductor 13 below, and the gyro rotor is locked and suspended above the high-temperature superconductor 13 through the diamagnetic and flux pinning properties of the high-temperature superconductor 13.
In specific implementation, the stator 1, the stator electrostatic driving electrode 3 arranged on the stator 1, the high-temperature superconductor 13, the gyro rotor, and the rotor electrostatic driving electrode 5 and the permanent magnet arranged on the gyro rotor are coaxially arranged.
In other embodiments, the stator electrostatic driving electrode 3 includes a plurality of stator electrostatic driving electrode plates, and an axisymmetric ring structure is formed by the plurality of stator electrostatic driving electrode plates; in an embodiment, referring to fig. 2, the stator electrostatic driving electrode 3 is formed by annularly distributing a first stator electrostatic driving electrode plate 31, a second stator electrostatic driving electrode plate 32, a third stator electrostatic driving electrode plate 33, and a fourth stator electrostatic driving electrode plate 34 to form an axisymmetric annular structure, and in other embodiments, other numbers of stator electrostatic driving electrode plates may be used.
The rotor electrostatic driving electrode 5 comprises a plurality of rotor electrostatic driving electrode plates, and an axisymmetric annular structure is formed by the plurality of rotor electrostatic driving electrode plates; in a specific embodiment, referring to fig. 3, the rotor electrostatic driving electrode 5 is formed by annularly distributing a first rotor electrostatic driving electrode plate 51, a second rotor electrostatic driving electrode plate 52, a third rotor electrostatic driving electrode plate 53, a fourth rotor electrostatic driving electrode plate 54, a fifth rotor electrostatic driving electrode plate 55, and a sixth rotor electrostatic driving electrode plate 56 to form an axisymmetric annular structure, and in other embodiments, the rotor electrostatic driving electrode plates may be formed in other numbers.
The number of the stator electrostatic driving electrode plates is matched with the number of the rotor electrostatic driving electrode plates so as to meet the electrostatic stepping driving effect.
In another embodiment, referring to fig. 1, a structure of a high-temperature superconducting magnetic flux pinning effect electrostatic driving micro-rotating gyroscope further comprises a rotor chamber 2, a heat insulation thin layer 10 and a low-temperature chamber 12,
the rotor chamber 2 is arranged between the stator 1 and the thermal insulation thin layer 10, the stator 1 is arranged above the rotor chamber 2, and the thermal insulation thin layer 10 is arranged below the rotor chamber 2. The rotor chamber 2 is formed by fixedly connecting the lower surface of the stator 1 with the cylindrical rotor chamber wall 9 and the upper surface of the heat insulating thin layer 10 through an adhesive to form a closed space. Wherein, the gyro rotor is suspended in the rotor cabin 2; the stator electrostatic drive electrodes 3 are located within the rotor chamber 2. The adhesive may be an epoxy resin. The low-temperature chamber 12 is arranged below the heat insulation thin layer 10, and a closed space is formed by fixedly connecting the lower surface of the heat insulation thin layer 10 and a cuboid low-temperature chamber wall 14 with an upper open surface through an adhesive. The high temperature superconductor 13 is disposed in the cryogenic chamber 12 on the lower surface of the thin insulating layer 10. Liquid nitrogen filling openings 15 and exhaust openings 11 are formed in two sides of the low-temperature chamber 12. The low temperature chamber 12 may be filled with cryogenic gas such as liquid nitrogen or liquid helium to maintain ultra-low temperature.
The above embodiment includes a rotor compartment 2 and a cryogenic compartment 12, which are separate (facilitating distance adjustment between the two in zero or fixed field cooling). When in work, the two are fixedly connected through the fixing and connecting adhesive. The material of the thermal barrier thin layer 10 is a thermal insulation material having magnetic permeability.
The high-temperature superconductor 13 can be made of a conventional disc-shaped yttrium barium copper oxide YBCO or other high-temperature superconducting materials, the high-temperature superconductor 13 is fixed above the low-temperature chamber 12, liquid nitrogen inflow and outflow ports are arranged on two sides of the low-temperature chamber 12, the low-temperature chamber wall 14 is made of a thermal insulation material, and in order to prevent the suspension force and the stability from being insufficient due to the overlarge suspension height of the superconductor (which means the distance between the high-temperature superconductor 13 and a suspension rotor), therefore, the upper surface of the low-temperature chamber 12 adopts a thermal insulation ultrathin structure (a heat insulation thin layer 10) with good magnetic penetrability. The rotor chamber 2 is a full-sealed structure, and the lower surface of the rotor chamber 2 is a heat-insulating ultrathin structure (heat-insulating thin layer 10) with good magnetic penetrability. In order to reduce the air damping force applied to the rotor during rotation, the rotor chamber 2 is vacuumized, the rotation speed of the rotor can be improved due to higher vacuum degree, the convective heat transfer can be reduced, the low-temperature maintaining time of the high-temperature superconductor 13 can be prolonged, and the vacuum degree can be determined according to the performance index requirement of the gyroscope. The gyro rotor body, namely the magnetic conductive material is a disc structure and is positioned in the center of the rotor cabin 2, the lower surface of the gyro rotor is provided with a permanent magnet which is in an axisymmetric annular shape, and the generated magnetic field acts on the high-temperature superconductor 13 right below the gyro rotor body. The spinning top rotor is locked suspended above the high temperature superconductor 13 due to the diamagnetic and flux pinning properties of the high temperature superconductor 13. Since the flux-pinning permanent magnet 8 has an axisymmetric structure, the micro-rotor is not limited in the rotational degree of freedom in the direction along its rotational center axis, but is limited in all of the other five degrees of freedom by electromagnetic force, so that the micro-rotor can rotate at high speed around its center axis.
The stator electrostatic driving electrode 3 is manufactured in the central area of the lower surface of the upper cover plate of the rotor cabin 2, the generated stepping electric field interacts with the rotor electrostatic driving electrode 5 on the upper surface of the rotor, and the generated driving torque enables the gyro rotor to rotate at a high speed.
By adopting the structure, high-temperature superconducting self-locking suspension, stepping electric field high-speed rotation driving and gyro rotor rotating shaft pointing of the micro-rotor can be realized. And the detection circuit at the rear end finishes the extraction of the capacitance signal and realizes the detection of the angular motion of the carrier. When the liquid nitrogen storage device works, after liquid nitrogen is injected into the storage cavity, the inlet and the outlet are closed. The whole structure (including the liquid nitrogen cooling device) can be miniaturized.
In other embodiments, the micro gyroscope further comprises a ring electrode 6 and a position detection electrode 4, wherein the ring electrode 6 is arranged on the upper surface of the gyroscope rotor, and the ring electrode 6 is arranged on the periphery of the rotor electrostatic driving electrode 5. The position detection electrode 4 is arranged on the lower surface of the stator, the position detection electrode 4 is arranged on the periphery of the stator electrostatic driving electrode 3, and the position detection electrode 4 and the annular electrode 6 form a plurality of groups of differential capacitors for detecting the spatial position and the posture of the gyro rotor. In specific implementation, the precession of the gyro rotor is detected by adopting a variable capacitance between the annular electrode 6 on the gyro rotor and the position detection electrode 4 on the stator 1 to induce the angular motion input by the gyro carrier on the sensitive shaft, so as to obtain the rotation motion of the gyro carrier. The detection mechanism is a differential capacitance position detection principle.
In another specific embodiment, the position detection electrode 4 includes a position detection common electrode 41 and a position detection constituent electrode, and the detection common electrode is located at the periphery of the position detection constituent electrode. In a specific embodiment, the position detection electrode 4 includes eight position detection constituent electrodes, namely, a first position detection constituent electrode 42, a second position detection constituent electrode 43, a third position detection constituent electrode 44, a fourth position detection constituent electrode 45, a fifth position detection constituent electrode 46, a sixth position detection constituent electrode 47, a seventh position detection constituent electrode 48, and an eighth position detection constituent electrode 49, and the eight position detection constituent electrodes are annularly distributed to form an axisymmetric annular structure. The position detection common electrode 41 is an annular structure and is located on the periphery of the position detection constituent electrode.
In other embodiments, the micro gyroscope further comprises an electrostatic force-bearing electrode 17 and an electrostatic force-applying electrode 16, the electrostatic force-bearing electrode 17 is arranged on the lower surface of the gyroscope rotor, and the electrostatic force-bearing electrode 17 is arranged on the periphery of the permanent magnet; the electrostatic force application electrode 16 is disposed on the upper surface of the thermal insulation thin layer 10 and located in the rotor chamber 2, and applies electrostatic force to the gyro rotor through the electrostatic force application electrode 16.
The electrostatic force application electrode 16 applies voltage, electrostatic force of an electrostatic field induced between the electrostatic force application electrode 16 and the electrostatic force receiving electrode 17 can apply torque to the gyro rotor for adjusting the spatial attitude angle of the gyro rotor, and the applied torque can adjust the gyro rotor to return to the central position when the gyro rotor precesses due to external rotation input or disturbance.
In an embodiment, referring to fig. 5, the electrostatic force application electrodes 16 are formed by a first electrostatic force application component electrode 161, a second electrostatic force application component electrode 162, a third electrostatic force application component electrode 163, a fourth electrostatic force application component electrode 164, a fifth electrostatic force application component electrode 165, a sixth electrostatic force application component electrode 166, a seventh electrostatic force application component electrode 167, and an eighth electrostatic force application component electrode 168, which are distributed in a ring shape to form an axisymmetric ring structure, wherein two adjacent electrostatic force application electrodes 16 are in a group, and form four groups. The voltage is applied to a group of two electrostatic force application composition electrodes, electrostatic force is applied to the gyro rotor, and four groups of electrostatic force application electrodes can apply the electrostatic force at four positions, so that two orthogonal moments in the horizontal direction are generated, and the attitude angle of the spatial position of the gyro rotor is adjusted.
The foregoing description of specific embodiments of the present invention has been presented. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes and modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention.
Claims (10)
1. A high-temperature superconducting magnetic flux pinning effect electrostatic driving micro-rotation gyroscope is characterized by comprising a stator, a gyroscope rotor, a high-temperature superconductor and a stator electrostatic driving electrode; wherein the content of the first and second substances,
the stator is arranged above the gyro rotor;
the stator electrostatic driving electrode is arranged on the lower surface of the stator and used for generating a stepping electric field;
a rotor electrostatic driving electrode is arranged on the upper surface of the gyro rotor, and a stepping electric field generated by the stator electrostatic driving electrode acts on the rotor electrostatic driving electrode to generate a rotating torque so that the gyro rotor rotates at a high speed;
the high-temperature superconductor is arranged below the gyro rotor;
the lower surface of the gyro rotor is provided with a permanent magnet, a magnetic field generated by the permanent magnet acts on the high-temperature superconductor below the gyro rotor, and the gyro rotor is locked and suspended above the high-temperature superconductor through the diamagnetic and flux pinning characteristics of the high-temperature superconductor.
2. The high-temperature superconducting flux pinning effect electrostatic driving micro-rotation gyro as claimed in claim 1, wherein the permanent magnet is a flux pinning permanent magnet, the flux pinning permanent magnet is of an axisymmetric annular structure, so that the gyro rotor is not limited in rotational freedom degree along the direction of the rotation central axis, and all other five degrees of freedom are limited by electromagnetic force, and the gyro rotor can rotate around the central axis at a high speed.
3. The electrostatic driving micro-rotating gyroscope with high temperature superconducting magnetic flux pinning effect as claimed in claim 1, further comprising a rotor chamber, a heat insulation thin layer, a low temperature chamber, wherein,
the rotor cabin is arranged between the stator and the heat insulation thin layer, the stator is positioned above the rotor cabin, and the heat insulation thin layer is positioned below the rotor cabin; the lower surface of the stator, the cylindrical rotor bulkhead and the upper surface of the heat insulation thin layer are fixedly connected through bonding agents to form a closed space of the rotor cabin;
the gyro rotor is suspended in the rotor cabin;
the stator electrostatic driving electrode is arranged on the lower surface of the stator and is positioned in the rotor cabin;
the low-temperature cabin is arranged below the heat insulation thin layer, and a closed space is formed by fixedly connecting the lower surface of the heat insulation thin layer and a cuboid low-temperature cabin wall with an upper open surface through an adhesive;
the high-temperature superconductor is arranged in the low-temperature cabin and is positioned on the lower surface of the thin heat insulation layer;
and liquid nitrogen injection ports and exhaust ports are arranged on two sides of the low-temperature cabin.
4. The high-temperature superconducting magnetic flux pinning effect electrostatic driving micro-rotating gyroscope according to claim 3, further comprising a ring electrode and a position detection electrode, wherein the ring electrode is arranged on the upper surface of the gyroscope rotor, and the ring electrode is arranged on the periphery of the rotor electrostatic driving electrode;
the position detection electrode is arranged on the lower surface of the stator, the position detection electrode is arranged on the periphery of the stator electrostatic driving electrode, and the position detection electrode and the annular electrode form a plurality of groups of differential capacitors for detecting the spatial position and the posture of the gyro rotor.
5. The high-temperature superconducting magnetic flux pinning effect electrostatic driving micro-rotation gyroscope of claim 4, wherein the position detection electrodes comprise a position detection common electrode and a position detection component electrode, and the detection common electrode is arranged at the periphery of the position detection component electrode.
6. The high-temperature superconducting magnetic flux pinning effect electrostatic driving micro-rotating gyroscope according to claim 3, wherein the micro-gyroscope further comprises an electrostatic force-bearing electrode and an electrostatic force-applying electrode, the electrostatic force-bearing electrode is arranged on the lower surface of the gyroscope rotor, and the electrostatic force-bearing electrode is arranged on the periphery of the permanent magnet;
the electrostatic force application electrode is arranged on the upper surface of the heat insulation thin layer and is positioned in the rotor cabin, and electrostatic force is applied to the gyro rotor through the electrostatic force application electrode;
the static force application electrode is applied with voltage, the static force application electrode and the static force-bearing electrode induce static electricity force of static field to apply moment to the gyro rotor for adjusting the space attitude angle of the gyro rotor, and when the gyro rotor precesses due to external rotation input or disturbance, the applied moment can adjust the gyro rotor to return to the central position.
7. The high temperature superconducting magnetic flux pinning effect electrostatically driven micro-spinning top of claim 3, wherein said rotor chamber is in a vacuum state.
8. The high-temperature superconducting magnetic flux pinning effect electrostatic driving micro-rotating gyroscope of claim 3, wherein the thermal insulation thin layer is made of a thermal insulation material with magnetic permeability.
9. A high temperature superconducting magnetic flux pinning effect electrostatically driven micro-spinning gyroscope according to any one of claims 1 to 8, characterised by one or more of the following features:
-the stator electrostatic drive electrodes comprise a plurality of stator electrostatic drive electrode plates, the plurality of stator electrostatic drive electrode plates forming an axisymmetric ring-shaped structure;
-said rotor electrostatic drive electrode comprises a plurality of rotor electrostatic drive electrode plates, constituting an axisymmetric annular structure by a plurality of said rotor electrostatic drive electrode plates;
-the number of rotor electrostatic driving electrode plates and stator electrostatic driving electrode plates is matched to satisfy the electrostatic step driving effect.
10. The high-temperature superconducting magnetic flux pinning effect electrostatically-driven micro-rotating gyroscope of any one of claims 1-8, wherein the substrate of the gyroscope rotor is a magnetically conductive layer, and the magnetically conductive layer is a disk structure.
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