CN100434866C - High-temperature superconductive and permanent magnet microgyrorotor with stabilized hung - Google Patents
High-temperature superconductive and permanent magnet microgyrorotor with stabilized hung Download PDFInfo
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- CN100434866C CN100434866C CNB2005100279307A CN200510027930A CN100434866C CN 100434866 C CN100434866 C CN 100434866C CN B2005100279307 A CNB2005100279307 A CN B2005100279307A CN 200510027930 A CN200510027930 A CN 200510027930A CN 100434866 C CN100434866 C CN 100434866C
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Abstract
The present invention relates to a high temperature superconductive stable hanging and permanent magnetic rotor micro gyroscope of the field of a micro electromechanical system. A liquid nitrogen dewar cover is arranged on a liquid nitrogen dewar. Liquid nitrogen is arranged in a cavity which is enclosed by the liquid nitrogen dewar cover and the liquid nitrogen dewar. A lower shell body of the gyroscope is arranged on the liquid nitrogen dewar through a gyroscope supporting post. A lower stator and an upper stator of the gyroscope are all composed of high temperature superconductors, silicon nitride insulation materials and stator driving detection torque increasing layers. The high temperature superconductors are arranged on an upper shell body of the gyroscope. The silicon nitride insulation materials are arranged on the high temperature superconductors. The stator driving detection torque increasing layers are arranged on the silicon nitride insulation materials. A gyroscope rotor is composed of two rotor driving detection torque increasing layers, two cylindric silicon nitride insulation materials and a cylindric permanent magnetic material. The two cylindric silicon nitride insulation materials are respectively arranged at both sides of the cylindric permanent magnetic material, and the two rotor driving detection torque increasing layers are arranged on the outer surfaces of the two cylindric silicon nitride insulation materials. The present invention has the advantages of little used liquid nitrogen, convenient realization, small size and low power consumption.
Description
Technical field
What the present invention relates to is a kind of device of micro-electromechanical system field, specifically is a kind of high-temperature superconductive and permanent magnet microgyrorotor with stabilized hung.
Background technology
Suspension rotor micro gyro does not need mechanical support, and the characteristics that the precision of integrated traditional gyro is high and the micro mechanical technology size is little, cost is low, its ultimate principle are to utilize the rigid body of high speed rotating to have gyroscopic inertia realization gyro function.Contactless suspension supporting is the important assurance of suspension rotor micro gyro work, and suspension rotor micro gyro mainly utilizes electromagnetism and electrostatic force to realize suspension support at present.
Find through literature search prior art, Jap.P. JP1193612, this patent has been described the little gyro that utilizes superconduction to constitute, the core texture feature rotor of this gyro adheres to two superconductors, two superconductors place on two supportings of gyro ring magnet, and then play when rotor high-speed rotates, and reduce the block bearing friction, reduce power consumption, improve Gyro Precision.This gyro general structure adopts traditional two framed structures, only be that superconducting structure has been adopted in the bearing supporting, the gyro size of this general structure is big, complex structure, assembling and setting is also comparatively difficult, be difficult to adopt the technology of microfabrication that its size is reduced, and realize mass, cost reduces very difficult.This has greatly limited its range of application, particularly requires the small application scenario of gyro size at little satellite, little aircraft etc.
Summary of the invention
The present invention is directed to the deficiencies in the prior art, propose a kind of high-temperature superconductive and permanent magnet microgyrorotor with stabilized hung, it is floating to achieve the stable magnetic of p-m rotor, does not need complicated control gear can realize self-stabilization, and good cooling results, power consumption is little, realization is convenient, and size is little.
The present invention is achieved by the following technical solutions, the present invention includes: stator, Dewar container for liquefied nitrogen lid, liquid nitrogen, gyro support column, gyro lower house, gyro upper shell under stator, the gyro on Dewar container for liquefied nitrogen, gyrorotor, the gyro.Its connected mode is: the Dewar container for liquefied nitrogen lid is arranged on the Dewar container for liquefied nitrogen, and liquid nitrogen is arranged in the chamber that Dewar container for liquefied nitrogen covers and Dewar container for liquefied nitrogen surrounds.The gyro lower house is arranged on the Dewar container for liquefied nitrogen by the gyro support column.
Under the gyro on stator, the gyro stator structure identical, drive detection by high-temperature superconductor, insulating silicon nitride material, stator and add square layer formation, high-temperature superconductor is arranged on the gyro upper shell, the insulating silicon nitride material is arranged on the high-temperature superconductor, and stator driving detection adds the square layer and is arranged on the insulating silicon nitride material.Under the gyro on stator, the gyro stator installation direction opposite.
Gyrorotor is detected by two-layer rotor driven and adds square layer, two-layer cylinder insulating silicon nitride material, cylinder permanent magnetic material and constitute, two-layer cylinder insulating silicon nitride material is separately positioned on the both sides of cylinder permanent magnetic material, and two-layer rotor driven detection adds the square layer and is arranged on two cylinder insulating silicon nitride outer surface.
Two-layer stator drives and detects the outermost layer that adds the square layer four common detection electrodes are set, four pairs of detection signal feed-ins and to add the square stabilized electrodes right.The common detection arrangement of electrodes two detection signal feed-ins and add the square stabilized electrodes between, common detection arrangement of electrodes drives the center that adds the square layer of detecting at stator, 12 rotation electrodes are arranged that stators drive and are detected the middle anchor ring place that adds the square layer.
Two-layer rotor driven detects and adds the square layer and add square detection ring, rotor rotation salient pole, rotor rotation salient pole gap, rotor center circle by rotor and constitute.Rotor adds the square detection ring, rotor rotates salient pole and rotor rotates the salient pole gap, the rotor center circle is successively set on two-layer rotor driven detection and adds on the square layer from the outer ring to the center.
The insulating silicon nitride material of gyro rotor of the present invention, cylinder insulating silicon nitride material obtain by sputtering technology, and the rotor driven detection adds the square layer, stator driving detection adds the square layer and obtained by electroplating technology, and these all help dwindling of gyro size.
Suspension of the present invention: liquid nitrogen produces low temperature environment, makes high-temperature superconductor be in superconducting state, just has diamagnetism and flux pinning.Interact with the cylinder permanent magnetic material, thereby it utilizing diamagnetism and pinning that a suspending power and a stability force are provided. the magnetic of realizing rotor stability is floating.
Rotation of the present invention: stator drives and detects the rotor rotation salient pole that adds the square layer, and rotor driven detects the rotor rotation salient pole that adds the square layer and constitutes the three-phase electrostatic motor.The rotation salient pole is imported the high speed rotating that three similar ripples can be realized rotor.The rigid body of high speed rotating has gyroscopic inertia, thereby has gyroscopic effect.
Detection of the present invention adds square: the detection signal feed-in and add the square stabilized electrodes on apply the alternating-current detection signal of different frequency, detect the attitude of rotor by common detection electrode output signal, by the detection signal feed-in and add the square stabilized electrodes to realizing FEEDBACK CONTROL.
Gyro general structure of the present invention adopts two gyro stator and a slices that high-temperature superconductor has been installed to contain permanent magnet gyrorotor structure, traditional two framed structures have been avoided, gyro stator and gyrorotor adopt multilayer two-dimension half hitch structure, form is simple, being convenient to microfabrication realizes, assembling and setting is also comparatively convenient, utilizes high-temperature superconductor diamagnetism and pinning that a suspending power and a stability force are provided.Thereby realize that the stable magnetic of p-m rotor is floating, do not need complicated control gear can realize self-stabilization.High-temperature superconductor directly contacts with liquid nitrogen, good cooling results, and it is comparatively convenient that high-temperature superconductor is realized.The rotation of p-m rotor realizes adopting electrostatic principle, and power consumption is little.Considered the feasibility of MEMS process technology in the entire device design, dwindled size of devices greatly, liquid nitrogen uses few, and superconduction is easy to realize from engineering viewpoint.It is steady outstanding that the present invention utilizes superconduction to realize, it is convenient to realize, size is little, and power consumption low energy realizes mass, and cost reduces.Greatly enlarged its range of application, particularly required the small application scenario of gyro size at little satellite, little aircraft etc.
Description of drawings
Fig. 1 general structure synoptic diagram of the present invention
Stator structure synoptic diagram on Fig. 2 gyro of the present invention
Stator structure synoptic diagram under Fig. 3 gyro of the present invention
Fig. 4 gyrorotor structural representation of the present invention
Fig. 5 stator of the present invention drives to detect and adds square layer structural representation
Fig. 6 rotor driven of the present invention detects and adds square layer structural representation
Embodiment
As shown in Figure 1, the present invention includes: stator 34 under stator 33, the gyro, Dewar container for liquefied nitrogen lid 7, liquid nitrogen 8, gyro upper shell 9, gyro lower house 16, gyro support column 17 on Dewar container for liquefied nitrogen 1, gyrorotor 32, the gyro.Its connected mode is: Dewar container for liquefied nitrogen lid 7 is arranged on the Dewar container for liquefied nitrogen 1, and liquid nitrogen 8 is arranged in the chamber that Dewar container for liquefied nitrogen lid 7 and Dewar container for liquefied nitrogen 1 surround.Gyro lower house 16 is arranged on the Dewar container for liquefied nitrogen 1 by gyro support column 17.
As shown in Figure 4, gyrorotor 32 drive to be detected by the first rotor and adds square layer 2, the first cylinder insulating silicon nitride material 3, cylinder permanent magnetic material 4, the second cylinder insulating silicon nitride material 5, second rotor driven and detect and add square layer 6 and constitute, cylinder insulating silicon nitride material 5, the first cylinder insulating silicon nitride material 3 are separately positioned on the both sides of cylinder permanent magnetic material 4, the rotor driven detection adds square layer 6 and is arranged on the cylinder insulating silicon nitride material 5, and the first rotor driving detection adds square layer 2 and is arranged on the first cylinder insulating silicon nitride material 3.
As shown in Figure 2, stator 33 is added square layer 12 and is constituted by first high-temperature superconductor 10, the first insulating silicon nitride material 11, first stator driving detection on the gyro, first high-temperature superconductor 10 is arranged on the gyro upper shell 9, the first insulating silicon nitride material 11 is arranged on first high-temperature superconductor 10, and first stator driving detection adds square layer 12 and is arranged on the first insulating silicon nitride material 11.
As shown in Figure 3, second stator drives to detect and adds stator 34 under square layer 13, the second insulating silicon nitride material 14, second high-temperature superconductor, the 15 formation gyros, second high-temperature superconductor 15 is arranged on the gyro lower house 16, the second insulating silicon nitride material 14 is arranged on second high-temperature superconductor 15, and second stator driving detection adds square layer 13 and is arranged on the second insulating silicon nitride material 14.
As shown in Figure 5, second stator drive to detect the outermost layer that adds square layer 13 the first common detection electrode 19,21,23,25 is set, detection signal feed-in and add the square stabilized electrodes to 18,20,22,24.Common detection electrode 19 is arranged in the detection signal feed-in and adds the square stabilized electrodes between 18,20, common detection electrode 21 is arranged in the detection signal feed-in and adds the square stabilized electrodes between 20,22, common detection electrode 23 is arranged in the detection signal feed-in and adds the square stabilized electrodes between 22,24, and common detection electrode 25 is arranged in the detection signal feed-in and adds the square stabilized electrodes between 24,18.
Add square layer 13 in stator driving detection and also be provided with 26,12 rotation electrodes 27 of the second common detection electrode, the second common detection electrode 26 is arranged in second stator and drives the center that adds square layer 13 of detecting, and 12 rotation electrodes 27 are arranged in second stator and drive the middle anchor ring place that detection adds square layer 13.
As shown in Figure 5, stator drive to detect the outermost layer that adds square layer 12 the 3rd common detection electrode 36,38,40,42 is set, detection signal feed-in and add the square stabilized electrodes to 35,37,39,41.Common detection electrode 36 is arranged in the detection signal feed-in and adds the square stabilized electrodes between 35,37, common detection electrode 38 is arranged in the detection signal feed-in and adds the square stabilized electrodes between 37,39, common detection electrode 40 is arranged in the detection signal feed-in and adds the square stabilized electrodes between 39,41, and common detection electrode 42 is arranged in the detection signal feed-in and adds the square stabilized electrodes between 41,35.
First stator driving detection adds square layer 12 and also is provided with 43,12 rotation electrodes 44 of the 4th common detection electrode, the 4th common detection electrode 43 is arranged in first stator and drives the center that adds square layer 12 of detecting, and 12 rotation electrodes 44 are arranged in first stator and drive the middle anchor ring place that detection adds square layer 12.
As shown in Figure 6, second rotor driven detects and to add square layer 6 and add square detection ring 29, rotor rotation salient pole 30, rotor rotation salient pole gap 28, rotor center circle 31 by rotor and constitute.Rotor adds square detection ring 29, rotor rotation salient pole 30 and rotor rotation salient pole gap 28, rotor center circle 31 and is successively set on the detection of second rotor driven and adds on the square layer 6 from the outer ring to the center.
The first rotor drive to detect and to add square layer 2 and add square detection ring 46, rotor rotation salient pole 47, rotor rotation salient pole gap 45, rotor center circle 48 by rotor and constitute.Rotor adds square detection ring 46, rotor rotates salient pole 47 and rotor rotates salient pole gap 45, rotor center circle 48 is successively set on the first rotor driving detection and adds on the square layer 2 from the outer ring to the center.
Shown in Fig. 2,3,4, the insulating silicon nitride material 14 of stator 34, gyrorotor 32 under stator 33, the gyro on the gyro of the present invention, the first insulating silicon nitride material 11, the second cylinder insulating silicon nitride material 5, the first cylinder insulating silicon nitride material 3 obtain by sputtering technology, second rotor driven detects and to add square layer 6, the first rotor and drive to detect and add square layer 2, second stator and drive to detect and add square layer 13, first stator and drive to detect and add square layer 12 and obtained by electroplating technology, and these all help dwindling of gyro size.
Suspension of the present invention: liquid nitrogen 8 produces low temperature, makes second high-temperature superconductor 15, first high-temperature superconductor 10 be in superconducting state, and first high-temperature superconductor 10 is placed in the environment of the critical temperature that is lower than it, just has diamagnetism and flux pinning.Interact with cylinder permanent magnetic material 4, thereby it utilizing diamagnetism and pinning that a suspending power and a stability force are provided. the magnetic of realizing rotor stability is floating.
Rotation of the present invention: second stator drive to detect the rotation electrode 27 that adds square layer 13 and first stator and drives and detect rotation electrode 44, the second rotor driven that add square layer 12 and detect the rotor rotation salient pole 30 that adds square layer 6 and the first rotor and drive and detect the rotor rotation salient pole 47 that adds square layer 2 and constitute the three-phase electrostatic motors.Rotation electrode 27, rotation electrode 44 inputs three similar ripples can be realized the high speed rotating of rotor.The rigid body of high speed rotating has gyroscopic inertia, thereby has gyroscopic effect.
Detection of the present invention adds square: second stator drives to detect and adds the detection signal feed-in of square layer 13 and add the square stabilized electrodes to 18,20,22,24 and first stator drives to detect and adds the detection signal feed-in of square layer 12 and add the square stabilized electrodes to 35,37,39, apply the alternating-current detection signal of different frequency on 41, drive the first common detection electrode 19 that detection adds square layer 13 by second stator, 21,23,25 and first stator drives and detects the 3rd common detection electrode 36 that adds square layer 12,38,40,42 output signals detect the attitude of rotor, by the detection signal feed-in and add the square stabilized electrodes to 18,20,22,24 and detection signal feed-in and add the square stabilized electrodes to 35,37,39,41 realize FEEDBACK CONTROL.
Claims (7)
1, a kind of high-temperature superconductive and permanent magnet microgyrorotor with stabilized hung, comprise: Dewar container for liquefied nitrogen (1), gyro lower house (16), gyro support column (17), gyrorotor (32), stator on the gyro (33), stator under the gyro (34), it is characterized in that, Dewar container for liquefied nitrogen lid (7) is arranged on the Dewar container for liquefied nitrogen (1), liquid nitrogen (8) is arranged in the chamber that Dewar container for liquefied nitrogen lid (7) and Dewar container for liquefied nitrogen (1) surround, gyro lower house (16) is arranged on the Dewar container for liquefied nitrogen (1) by gyro support column (17), gyrorotor (32) is driven to detect by the first rotor and adds square layer (2), the first cylinder insulating silicon nitride material (3), cylinder permanent magnetic material (4), the second cylinder insulating silicon nitride material (5), second rotor driven detects and adds square layer (6) formation, the second cylinder insulating silicon nitride material (5), the first cylinder insulating silicon nitride material (3) is separately positioned on the both sides of cylinder permanent magnetic material (4), the detection of second rotor driven adds square layer (6) and is arranged on the second cylinder insulating silicon nitride material (5), and the first rotor driving detection adds square layer (2) and is arranged on the first cylinder insulating silicon nitride material (3); Stator on the gyro (33) is driven to detect by first high-temperature superconductor (10), the first insulating silicon nitride material (11), first stator and adds square layer (12) formation, first high-temperature superconductor (10) is arranged on the gyro upper shell (9), the first insulating silicon nitride material (11) is arranged on first high-temperature superconductor (10), and first stator driving detection adds square layer (12) and is arranged on the first insulating silicon nitride material (11); Stator under the gyro (34) is driven to detect by second stator and adds square layer (13), the second insulating silicon nitride material (14), second high-temperature superconductor (15) formation, second high-temperature superconductor (15) is arranged on the gyro lower house (16), the second insulating silicon nitride material (14) is arranged on second high-temperature superconductor (15), and second stator driving detection adds square layer (13) and is arranged on the second insulating silicon nitride material (14).
2, high-temperature superconductive and permanent magnet microgyrorotor with stabilized hung according to claim 1, it is characterized in that, second stator drive to detect the outermost layer that adds square layer (13) and four first common detection electrodes (19,21,23,25), four detection signal feed-ins is set and adds the square stabilized electrodes to (18,20,22,24), wherein each first common detection arrangement of electrodes two detection signal feed-ins that are adjacent and add the square stabilized electrodes between.
3, high-temperature superconductive and permanent magnet microgyrorotor with stabilized hung according to claim 2, it is characterized in that, second stator driving detection adds square layer (13) and also is provided with the second common detection electrode (26), 12 rotation electrodes (27), the second common detection electrode (26) is arranged in second stator and drives the center that adds square layer (13) of detecting, and 12 rotation electrodes (27) arrange that second stator drives the middle anchor ring place that detection adds square layer (13).
4, high-temperature superconductive and permanent magnet microgyrorotor with stabilized hung according to claim 1, it is characterized in that, first stator drive to detect the outermost layer that adds square layer (12) and four the 3rd common detection electrodes (36,38,40,42), four detection signal feed-ins is set and adds the square stabilized electrodes to (35,37,39,41), wherein each the 3rd common detection arrangement of electrodes two detection signal feed-ins that are adjacent and add the square stabilized electrodes between.
5, high-temperature superconductive and permanent magnet microgyrorotor with stabilized hung according to claim 4, it is characterized in that, first stator driving detection adds square layer (12) and also is provided with the 4th common detection electrode (43), 12 rotation electrodes (44), the 4th common detection electrode (43) is arranged in first stator and drives the center that adds square layer (12) of detecting, and 12 rotation electrodes (44) arrange that first stator drives the middle anchor ring place that detection adds square layer (12).
6, high-temperature superconductive and permanent magnet microgyrorotor with stabilized hung according to claim 1, it is characterized in that, second rotor driven detects and to add square layer (6) and add square detection ring (29), rotor rotation salient pole (30), rotor rotation salient pole gap (28), rotor center circle (31) by rotor and constitute, and rotor adds square detection ring (29), rotor rotation salient pole (30) and rotor rotation salient pole gap (28), rotor center circle (31) and is successively set on the detection of second rotor driven adds on the square layer (6) from the outer ring to the center.
7, high-temperature superconductive and permanent magnet microgyrorotor with stabilized hung according to claim 1, it is characterized in that, the first rotor drive to detect and to add square layer (2) and add square detection ring (46), rotor rotation salient pole (47), rotor rotation salient pole gap (45), rotor center circle (48) by rotor and constitute, and rotor adds square detection ring (46), rotor rotation salient pole (47) and rotor rotation salient pole gap (45), rotor center circle (48) and is successively set on the first rotor drives detection and add on the square layer (2) from the outer ring to the center.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100279307A CN100434866C (en) | 2005-07-21 | 2005-07-21 | High-temperature superconductive and permanent magnet microgyrorotor with stabilized hung |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2005100279307A CN100434866C (en) | 2005-07-21 | 2005-07-21 | High-temperature superconductive and permanent magnet microgyrorotor with stabilized hung |
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| Publication Number | Publication Date |
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| CN1712895A CN1712895A (en) | 2005-12-28 |
| CN100434866C true CN100434866C (en) | 2008-11-19 |
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| CNB2005100279307A Expired - Fee Related CN100434866C (en) | 2005-07-21 | 2005-07-21 | High-temperature superconductive and permanent magnet microgyrorotor with stabilized hung |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103225651B (en) * | 2013-04-24 | 2015-05-20 | 中国科学院电工研究所 | Superconducting magnetic levitation and static suspension mixing suspension supporting arrangement |
| CN110595454A (en) * | 2019-09-24 | 2019-12-20 | 上海交通大学 | High-temperature superconducting magnetic flux pinning effect magnetically-driven micro gyroscope |
| CN110608735A (en) * | 2019-09-24 | 2019-12-24 | 上海交通大学 | High-temperature superconducting magnetic flux pinning effect electrostatic driving micro-rotation gyroscope |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1061608A (en) * | 1996-08-26 | 1998-03-06 | Hitachi Constr Mach Co Ltd | Hydraulic driving device |
| JPH1191014A (en) * | 1997-09-18 | 1999-04-06 | Yamagata Gravure:Kk | Method and equipment for manufacturing packaging vessel |
| CN2484547Y (en) * | 2001-06-11 | 2002-04-03 | 北京中科健超导有限责任公司 | Superconducting magnetic suspension gyroscope |
-
2005
- 2005-07-21 CN CNB2005100279307A patent/CN100434866C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1061608A (en) * | 1996-08-26 | 1998-03-06 | Hitachi Constr Mach Co Ltd | Hydraulic driving device |
| JPH1191014A (en) * | 1997-09-18 | 1999-04-06 | Yamagata Gravure:Kk | Method and equipment for manufacturing packaging vessel |
| CN2484547Y (en) * | 2001-06-11 | 2002-04-03 | 北京中科健超导有限责任公司 | Superconducting magnetic suspension gyroscope |
Non-Patent Citations (2)
| Title |
|---|
| 超导陀螺仪. 李淑芳.航空学报，第10卷第6期. 1989 |
| 超导陀螺仪. 李淑芳.航空学报，第10卷第6期. 1989 * |
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