CN110595454A - High-temperature superconducting magnetic flux pinning effect magnetically-driven micro gyroscope - Google Patents
High-temperature superconducting magnetic flux pinning effect magnetically-driven micro gyroscope Download PDFInfo
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- CN110595454A CN110595454A CN201910905062.XA CN201910905062A CN110595454A CN 110595454 A CN110595454 A CN 110595454A CN 201910905062 A CN201910905062 A CN 201910905062A CN 110595454 A CN110595454 A CN 110595454A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/02—Rotary gyroscopes
- G01C19/04—Details
- G01C19/06—Rotors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/02—Rotary gyroscopes
- G01C19/04—Details
- G01C19/16—Suspensions; Bearings
- G01C19/24—Suspensions; Bearings using magnetic or electrostatic fields
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Abstract
The invention provides a high-temperature superconducting magnetic flux pinning effect magnetically-driven micro gyroscope, which comprises a stator, a gyroscope rotor, a high-temperature superconductor and a rotating magnetic field coil, wherein the stator is provided with a plurality of magnetic poles; the stator is arranged above the gyro rotor; the rotating magnetic field coil is arranged on the lower surface of the stator and used for generating a rotating magnetic field; the high-temperature superconductor is arranged below the gyro rotor; the lower surface of the gyro rotor is provided with a permanent magnet which is in an axisymmetric ring shape; the magnetic field generated by the permanent magnet acts on the high-temperature superconductor below, and the gyro rotor is locked and suspended above the high-temperature superconductor through the diamagnetism and the magnetic flux pinning characteristics of the high-temperature superconductor; the top surface of the gyro rotor is provided with a rotary driving permanent magnet array, and the rotary driving permanent magnet array and a rotary magnetic field generated by the rotary magnetic field coil interact to generate driving torque so that the gyro rotor rotates around the central axis at high speed. The invention realizes stable suspension by adopting the magnetic flux pinning effect of a magnetic field in a high-temperature superconductor, and is a passive suspension technology.
Description
Technical Field
The invention relates to the technical field of micro-electro-mechanical systems, in particular to a high-temperature superconducting magnetic flux pinning effect magnetically-driven micro-gyroscope.
Background
The rotor gyroscope which works based on the fixed axis property of the high-speed rotating rotor is widely applied to the traditional high-precision gyroscope, and the typical examples include a liquid floating rotor, a magnetic suspension rotor, a superconducting suspension rotor and the like. Because the suspension rotor gyroscope has a complex structure, the early MEMS gyroscope adopts a vibrator structure based on the Coriolis effect, and the structure is simple and is easy to manufacture by a micro-processing technology. In recent years, as the development of the MEMS micromachining technology becomes mature, research and development of the rotor-type MEMS micro-gyroscope get attention from scientists at home and abroad.
A surface micromachined angular rate gyroscope was reported by Satcon Technology, USA, as early as 1992, as a result of a literature search for the prior art. They produced a polysilicon rotor electrostatic motor 2.2 μm thick and 200 μm in diameter, and the direction of the axis of rotation of the rotor was controlled by an analog closed-loop control circuit. However, at the time of operation, the rotor is stuck due to electric charges to fail.
Subsequently, it was reported in 1995 to 1998 at the university of sheffield, uk, that an electromagnetic levitation rotor micro-motor was fabricated using an electromagnetic induction eddy current levitation technology. In 2004, Shanghai university of transportation improved the coil structure on the basis of the technology, and also made an electromagnetic induction eddy current suspension rotor micro motor. Both mechanisms achieve suspension and rotation of the rotor.
From 1999 to 2006, Tokimec corporation of Japan reported an electrostatic levitation gyro. The gyroscope adopts an electrostatic suspension support ring-shaped silicon rotor and adopts an anodic bonding technology to manufacture a glass-silicon-glass rotor sealing structure. The maximum rotor speed is 70000 rpm and the scale factor of the gyroscope is 6.5 mV/deg/s. This accuracy is also difficult to surpass existing vibratory gyros for widespread commercial use. In recent years, the Qinghua university has made a great research progress in the aspect of electrostatic levitation inertial sensors.
Extensive research work was also carried out by the Harbin Industrial university in the field of super-hydrophobic liquid suspension rotor micro-gyroscopes.
The retrieval shows that Chinese patent with application number 200510027930.7 discloses a high-temperature superconducting suspended permanent magnet rotor micro gyroscope, which comprises a liquid nitrogen Dewar, a lower gyroscope shell, a gyroscope support column, a gyroscope rotor, an upper gyroscope stator and a lower gyroscope stator, wherein the liquid nitrogen Dewar cover is arranged on the liquid nitrogen Dewar, the liquid nitrogen is arranged in a cavity enclosed by the liquid nitrogen Dewar cover and the liquid nitrogen Dewar, the lower gyroscope shell is arranged on the liquid nitrogen Dewar through the gyroscope support column, the lower gyroscope stator and the upper gyroscope stator are respectively composed of a high-temperature superconductor, a silicon nitride insulating material and a stator driving detection moment-adding layer, the high-temperature superconductor is arranged on the upper gyroscope shell, the silicon nitride insulating material is arranged on the high-temperature superconductor, and the stator driving detection moment-adding layer is arranged on the silicon nitride insulating material. The gyro rotor is composed of two layers of rotor driving detection moment layers, two layers of cylindrical silicon nitride insulating materials and cylindrical permanent magnet materials, wherein the two layers of cylindrical silicon nitride insulating materials are respectively arranged on two sides of a cylindrical detection material, and the two layers of rotor driving detection moment layers are arranged on the outer surfaces of the two cylindrical silicon nitride insulating materials.
However, the above patents have the following disadvantages: the existing suspension rotor micro gyroscope manufactured based on the MEMS technology has the technical problems to be solved urgently, such as: eddy heating high temperature and eddy damping in electromagnetic induction suspension, small gap in electrostatic suspension, large driving voltage, working stability and the like. The high-temperature superconducting micro gyroscope disclosed in the prior patent does not accurately provide the realization mechanism, the realization structure and the realization method of the high-temperature superconducting magnetic flux pinning effect micro gyroscope.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a high-temperature superconducting magnetic flux pinning effect magnetically-driven micro gyroscope.
The invention provides a high-temperature superconducting magnetic flux pinning effect magnetically-driven micro gyroscope, which comprises a stator, a gyroscope rotor, a high-temperature superconductor and a rotating magnetic field coil, wherein the stator is provided with a plurality of magnetic poles; wherein the content of the first and second substances,
the stator is arranged above the gyro rotor;
the rotating magnetic field coil is arranged on the lower surface of the stator and used for generating a rotating magnetic field;
the top rotor is provided with a rotary driving permanent magnet array on the upper surface, and the rotary driving permanent magnet array interacts with a rotary magnetic field generated by the rotary magnetic field coil to generate driving torque so that the top rotor rotates around the central axis of the top rotor at a high speed;
the high-temperature superconductor is arranged below the gyro rotor;
the lower surface of the gyro rotor is provided with a permanent magnet, a magnetic field generated by the permanent magnet acts on the high-temperature superconductor below the gyro rotor, and the gyro rotor is locked and suspended above the high-temperature superconductor through the diamagnetic and flux pinning characteristics of the high-temperature superconductor.
Preferably, the permanent magnet is a magnetic flux pinning permanent magnet which is in an axisymmetric annular structure, so that the rotation freedom of the gyro rotor is not limited except along the direction of the rotation central axis, and other five degrees of freedom are all limited by electromagnetic force, and the gyro rotor can rotate around the central axis at a high speed.
Preferably, the micro gyroscope also comprises a rotor cabin, a heat insulation thin layer and a low-temperature cabin,
the rotor cabin is arranged between the stator and the heat insulation thin layer, the stator is positioned above the rotor cabin, and the heat insulation thin layer is positioned below the rotor cabin; the rotor chamber is formed by fixedly connecting the lower surface of the stator with the cylindrical rotor chamber wall and the upper surface of the heat insulation thin layer through bonding agents;
the gyro rotor is suspended in the rotor cabin;
the rotating magnetic field coil is arranged on the lower surface of the stator and is positioned in the rotor cabin;
the low-temperature cabin is arranged below the heat insulation thin layer, and a closed space is formed by fixedly connecting the lower surface of the heat insulation thin layer and a cuboid low-temperature cabin wall with an upper open surface through an adhesive;
the high-temperature superconductor is arranged in the low-temperature cabin;
and liquid nitrogen injection ports and exhaust ports are arranged on two sides of the low-temperature cabin.
Preferably, the micro gyroscope further comprises an annular electrode and a position detection electrode, wherein the annular electrode is arranged on the upper surface of the gyroscope rotor and is arranged on the periphery of the rotary induction permanent magnet array;
the position detection electrode is arranged on the lower surface of the stator and located in the rotor cabin, the position detection electrode is arranged on the periphery of the rotating magnetic field coil, and the position detection electrode and the annular electrode form a plurality of groups of differential capacitors for detecting the spatial position and the posture of the gyro rotor.
Preferably, the position detection electrode includes a position detection common electrode and a plurality of position detection constituent electrodes, wherein the plurality of position detection constituent electrodes are annularly distributed, and the detection common electrode is located at the periphery of the position detection constituent electrode.
Preferably, the micro gyroscope further comprises an electrostatic force-bearing electrode and an electrostatic force application electrode, the electrostatic force-bearing electrode is arranged on the lower surface of the gyroscope rotor, and the electrostatic force-bearing electrode is arranged on the periphery of the permanent magnet;
the electrostatic force application electrode is arranged on the upper surface of the heat insulation thin layer and is positioned in the rotor cabin, and electrostatic force is applied to the gyro rotor through electrostatic force of an electric field formed between the electrostatic force application electrode and the electrostatic force receiving electrode, so that the precession motion of the gyro rotor is balanced.
Preferably, the rotor compartment is in a vacuum state.
Preferably, the material of the thin heat insulation layer is a heat insulation material with magnetic permeability.
Preferably, one or more of the following features:
-the array of rotary drive permanent magnets comprises a plurality of cylindrical permanent magnets, the plurality of cylindrical permanent magnets constituting an annular array;
-the rotating magnetic field coil comprises a plurality of rotating component coils, which are distributed annularly;
-the number of said rotating constituent coils is the same as the number of said cylindrical permanent magnets;
preferably, the substrate of the gyro rotor is a magnetic conduction layer, and the magnetic conduction layer is of a disc structure.
The invention utilizes the magnetic flux pinning effect of the magnetic field of the permanent magnet in the gyro rotor in the high-temperature superconductor to generate the suspension force to the gyro rotor; a rotating magnetic field generated by a rotating magnetic field coil in the stator is utilized to generate rotating torque to the gyro rotor, so that the gyro rotor rotates at a high speed to generate a gyro effect; the precession of the gyro rotor is detected by adopting variable capacitance seen by an annular electrode on the gyro rotor and a position detection electrode on the stator, so that the rotation motion of the gyro carrier is obtained. The gyro rotor and the stator are manufactured by adopting a micro-processing technology. The magnetic flux pinning effect of the high-temperature superconductor can obtain a stable suspension effect, and the invention provides a new way for obtaining a high-performance micro-rotor gyroscope.
Compared with the prior art, the invention has at least one of the following beneficial effects:
the invention realizes stable suspension by adopting the magnetic flux pinning effect of the magnetic field in the high-temperature superconductor, compared with suspension technologies such as electromagnetic induction suspension, electrostatic suspension, diamagnetic suspension and the like, the suspension realized by the magnetic flux pinning effect is more stable, and the invention is a passive suspension technology. The passive suspension of the high-temperature superconductor and the magnetic flux pinning effect of the high-temperature superconductor further ensure that the quantum locking suspension system not only has simple structure, but also can obtain extremely reliable self-locking suspension stability.
The invention leads the gyro rotor to have unlimited rotational freedom degree along the direction of the rotation central axis and limited by other five freedom degrees by electromagnetic force by adopting the axial symmetrical structure of the magnetic flux pinning permanent magnet, so the gyro rotor can rotate around the central axis at high speed.
The invention adopts the action of the rotating magnetic field generated by the rotating coil on the stator and the permanent magnet on the rotor to generate rotating torque on the rotor and drive the rotor to rotate at high speed. Compared with the step electric field rotation driving, the circuit of the rotation magnetic field driving is simpler and is easy to realize.
The invention adopts the ring electrode on the gyro rotor and the variable capacitance between the position detection electrodes on the stator to detect the precession of the gyro rotor by arranging the ring electrode and the position detection electrodes so as to induce the angular motion input by the gyro carrier on the sensitive shaft and obtain the rotary motion of the gyro carrier.
Further, electrostatic force of an electric field is formed between the electrostatic force application electrode and the electrostatic force receiving electrode, so that the electrostatic force is applied to the gyro rotor, and the precession motion of the gyro rotor is balanced.
The invention can improve the measurement resolution of the micro gyroscope, reduce the measurement error of the gyroscope, and improve the long-term working stability, output sensitivity and performance of the micro gyroscope.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a schematic structural diagram of an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a stator according to an embodiment of the present invention;
FIG. 3 is a schematic view of the top surface of a spinning top rotor according to an embodiment of the present invention;
FIG. 4 is a schematic view of a lower surface of a spinning top rotor according to an embodiment of the present invention;
FIG. 5 is a schematic view of the structure of the upper surface of the thermal barrier film according to an embodiment of the present invention;
the scores in the figure are indicated as: 1 is a stator, 2 is a rotor chamber, 3 is a rotating field coil, 4 is a position detection electrode, 5 is a rotating induction permanent magnet array, 6 is a ring electrode, 7 is a magnetic conduction layer, 8 is a flux pinning permanent magnet, 9 is a rotor chamber wall, 10 is a heat insulation thin layer, 11 is an exhaust port, 12 is a low-temperature chamber, 13 is a high-temperature superconductor, 14 is a low-temperature chamber wall, 15 is a liquid nitrogen injection port, 16 is an electrostatic force application electrode, 17 is an electrostatic force application electrode, 31 is a first rotating component coil, 32 is a second rotating component coil, 33 is a third rotating component coil, 34 is a fourth rotating component coil, 41 is a position detection common electrode, 42 is a first position detection component electrode, 43 is a second position detection component electrode, 44 is a third position detection component electrode, 45 is a fourth position detection component electrode, 46 is a fifth position detection component electrode, 47 is a sixth position detection component electrode, 48 is a seventh position detection constituent electrode, 49 is an eighth position detection constituent electrode, 51 is a first permanent magnet, 52 is a second permanent magnet, 53 is a third permanent magnet, 54 is a fourth permanent magnet, 161 is a first electrostatic force application constituent electrode, 162 is a second electrostatic force application constituent electrode, 163 is a third electrostatic force application constituent electrode, 164 is a second electrostatic force application constituent electrode, 165 is a third electrostatic force application constituent electrode, 166 is a fourth electrostatic force application constituent electrode, 167 is a fifth electrostatic force application constituent electrode, and 168 is a sixth electrostatic force application constituent electrode.
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that variations and modifications can be made by persons skilled in the art without departing from the spirit of the invention. All falling within the scope of the present invention.
Referring to fig. 1, a schematic diagram of a magnetically driven micro gyroscope with high temperature superconducting magnetic flux pinning effect according to an embodiment of the present invention is shown, where the diagram includes a stator 1, a gyroscope rotor, a high temperature superconductor 13, and a rotating magnetic field coil 3; wherein, the stator 1 is arranged above the gyro rotor. The rotating field coil 3 is provided on the lower surface of the stator 1 and generates a rotating magnetic field. In an embodiment, referring to fig. 2, a four-phase five-wire synchronous motor driving mechanism is adopted, but not limited to the four-phase five-wire driving, and the rotating magnetic field coil 3 is annularly distributed by four rotating component coils, which are respectively a first rotating component coil 31, a second rotating component coil 32, a third rotating component coil 33 and a fourth rotating component coil 34.
The high-temperature superconductor 13 is disposed below the gyro rotor. In one embodiment, the substrate of the gyro rotor is a magnetic conduction layer 7, and the magnetic conduction layer 7 is a disk structure. The central position of the upper surface of the gyro rotor is provided with a rotary driving permanent magnet array, and the rotary driving permanent magnet array and a rotary magnetic field generated by the rotary magnetic field coil 3 interact to generate driving torque so that the gyro rotor rotates around the central axis at high speed. In a specific embodiment, referring to fig. 3, the rotationally driven permanent magnet array is distributed in an annular array by a first permanent magnet 51, a second permanent magnet 52, a third permanent magnet 53, and a fourth permanent magnet 54, and the first permanent magnet 51, the second permanent magnet 52, the third permanent magnet 53, and the fourth permanent magnet 54 adopt a columnar structure. In the specific implementation, the number of the permanent magnets for rotationally driving the permanent magnet array is the same as that of the coils formed by rotation.
The lower surface of the gyro rotor is provided with a permanent magnet, a magnetic field generated by the permanent magnet acts on the high-temperature superconductor 13 below, and the gyro rotor is locked and suspended above the high-temperature superconductor 13 through the diamagnetic and flux pinning characteristics of the high-temperature superconductor 13.
The permanent magnet is a magnetic flux pinning permanent magnet 8, the magnetic flux pinning permanent magnet 8 is in an axisymmetric annular structure, so that the rotation freedom degree of the gyro rotor along the direction of the rotation central axis of the gyro rotor is not limited, and other five freedom degrees are all limited by electromagnetic force, and the gyro rotor can rotate around the central axis of the gyro rotor at a high speed. By adopting the structure, the high-temperature superconducting self-locking suspension, the high-speed rotation driving of the rotating magnetic field and the pointing of the rotating shaft of the gyro rotor can be realized. In specific implementation, the stator 1, the rotating magnetic field coil 3 arranged on the stator 1, the high-temperature superconductor 13, the gyro rotor, and the rotation driving permanent magnet array and the flux pinning permanent magnet 8 arranged on the gyro rotor are coaxially arranged.
In another embodiment, referring to fig. 1, the structure of the magnetic drive micro gyroscope with the high-temperature superconducting magnetic flux pinning effect further comprises a rotor chamber 2, a heat insulation thin layer 10 and a low-temperature chamber 12, wherein the rotor chamber 2 is arranged between a stator 1 and the heat insulation thin layer 10, the stator 1 is positioned above the rotor chamber 2, and the heat insulation thin layer 10 is positioned below the rotor chamber 2. The rotor chamber 2 is formed by fixedly connecting the lower surface of the stator 1 with the cylindrical rotor chamber wall 9 and the upper surface of the heat insulation thin layer 10 through an adhesive to form a closed space, wherein the gyro rotor is suspended in the rotor chamber 2; the rotating field coil 3 is provided on the lower surface of the stator 1 and is located in the rotor compartment 2. The adhesive can be epoxy resin, and other adhesives can also be used. The low-temperature chamber 12 is arranged below the heat insulation thin layer 10, and a closed space is formed by fixedly connecting the lower surface of the heat insulation thin layer 10 and a cuboid low-temperature chamber wall 14 with an upper open surface through an adhesive; wherein the high temperature superconductor 13 is arranged in the cryogenic chamber 12. Liquid nitrogen filling openings 15 and exhaust openings 11 are formed in two sides of the low-temperature chamber 12.
The structure of the embodiment comprises the rotor cabin 2 and the low-temperature cabin 12, and the two cabins are separately arranged, so that the distance between the two cabins can be conveniently adjusted during zero-field cooling or fixed-field cooling. When in work, the two are fixedly connected through the fixing and connecting piece.
The high-temperature superconductor 13 can adopt a common disc-shaped yttrium barium copper oxide YBCO material and can also adopt other high-temperature superconducting materials. The high temperature superconductor 13 is fixed above the low temperature chamber 12, and the two sides of the low temperature chamber 12 are provided with a liquid nitrogen inlet 15 and an exhaust port 11. The rectangular parallelepiped low temperature bulkhead 14 is made of a thermally insulating material. In order to prevent the suspension force and stability from being insufficient due to the excessive suspension height of the high-temperature superconductor 13 (i.e., the distance between the high-temperature superconductor 13 and the suspension rotor), the upper surface of the low-temperature compartment 12 is made of an ultra-thin structure (i.e., the thermal insulation thin layer 10) with good thermo-magnetic permeability and insulation.
Rotor compartment 2 is a full seal structure, and the lower surface of rotor compartment 2 adopts the good thermal-insulated ultra-thin structure of magnetic permeability (thermal-insulated thin layer 10), receives air damping force when reducing the gyro rotor rotation, is taken out rotor compartment 2 into the high vacuum state. In specific implementation, the gyro rotor body is of a disc structure and is positioned in the center of the rotor cabin 2, the lower surface of the gyro rotor is provided with permanent magnets, the permanent magnets are in an axisymmetric ring shape, and a magnetic field generated by the permanent magnets acts on the high-temperature superconductor 13 right below the permanent magnets. The spinning top rotor is locked suspended above the high temperature superconductor 13 due to the diamagnetic and flux pinning properties of the high temperature superconductor 13. Because the suspension magnet is in an axisymmetric structure, the micro rotor is not limited in the rotational freedom degree along the direction of the rotation central axis, and other five degrees of freedom are all limited by electromagnetic force, so that the gyro rotor can rotate around the central axis at high speed. The central area of the lower surface of the upper cover plate of the rotor chamber 2 (referring to the lower surface of the stator 1) is provided with a rotating magnetic field coil 3, the rotating magnetic field generated by the rotating magnetic field coil interacts with the rotating driving permanent magnet on the upper surface of the gyro rotor, and the generated driving torque enables the gyro rotor to rotate at a high speed.
By adopting the structure, the high-temperature superconducting self-locking suspension and the high-speed rotation driving of the rotating magnetic field of the gyro rotor can be realized. In operation, the inlet and outlet are closed after liquid nitrogen is injected into the cryogenic chamber 12. The whole structure (including the liquid nitrogen cooling device) can be miniaturized.
In other embodiments, the micro gyroscope further includes an annular electrode 6 and a position detection electrode 4, the annular electrode 6 is disposed on the upper surface of the gyroscope rotor, and referring to fig. 3, an annular array formed by a plurality of columnar permanent magnets is distributed on the upper surface of the gyroscope rotor from inside to outside. The ring-shaped electrode 6 is disposed at the periphery of the rotation induction permanent magnet array 5.
The position detection electrode 4 is arranged on the lower surface of the stator 1 and is positioned in the rotor cabin 2, the position detection electrode 4 is arranged on the periphery of the rotating magnetic field coil 3, and the position detection electrode 4 and the annular electrode 6 form a plurality of groups of differential capacitors for detecting the spatial position and the posture of the gyro rotor, so that the angular motion input from the outside in the sensitive direction is sensed, and the rotary motion of the gyro carrier is obtained. The detection mechanism is a differential capacitance position detection principle. By providing the ring electrode 6 and the position detection electrode 4, position detection of the gyro rotor can be realized. The extraction of capacitance signals can be further completed through a detection circuit, and the detection of the angular motion of the gyro rotor carrier is realized.
In other embodiments, referring to fig. 2, the position detection electrode 4 includes a position detection common electrode 41 and a plurality of position detection constituent electrodes 42, the plurality of position detection constituent electrodes are distributed in a ring shape and form an axisymmetric structure, and the position detection common electrode 41 is located at the periphery of the position detection constituent electrodes. In one embodiment, the position detection assembly comprises eight position detection assembly electrodes which are distributed in a ring shape. Referring to FIG. 2, there are shown a first position-detecting constituent electrode 42, a second position-detecting constituent electrode 43, a third position-detecting constituent electrode 44, a fourth position-detecting constituent electrode 45, a fifth position-detecting constituent electrode 46, a sixth position-detecting constituent electrode 47, a seventh position-detecting constituent electrode 48, and an eighth position-detecting constituent electrode 49, respectively. Other numbers of position sensing component electrodes may also be employed in other embodiments.
In an embodiment, referring to fig. 2, the rotating magnetic field coil 3 formed by four rotating component coils distributed annularly, the position detection component electrode formed by 8 position detection component electrodes distributed annularly, and the annular position detection common electrode 41 located at the outermost layer are sequentially distributed on the lower surface of the stator 1 from inside to outside.
In other embodiments, the micro gyroscope further comprises an electrostatic force-bearing electrode 17 and an electrostatic force-applying electrode 16, the electrostatic force-bearing electrode 17 is arranged on the lower surface of the gyroscope rotor, and the electrostatic force-bearing electrode 17 is arranged on the periphery of the permanent magnet; referring to fig. 4, in one embodiment, permanent magnets and electrostatic force-bearing electrodes 17 are distributed on the lower surface of the gyro rotor from inside to outside.
The electrostatic force application electrode 16 is arranged on the upper surface of the heat insulation thin layer 10 and is positioned in the rotor chamber 2, and electrostatic force is applied to the gyro rotor through electrostatic force of an electric field formed between the electrostatic force application electrode 16 and the electrostatic force receiving electrode 17, so that precession motion of the gyro rotor is balanced.
In the specific implementation process, the voltage is applied to the electrostatic force application electrode 16, and the precession motion of the gyro rotor is adjusted by the electric field electrostatic force formed between the electrostatic force application electrode 16 and the electrostatic force receiving electrode 17, so that the gyro rotor is always in the central position. Referring to fig. 5, the electrostatic force application electrode 16 is formed in an axially symmetric structure by eight electrostatic force application component electrodes, which are a first electrostatic force application component electrode 161, a second electrostatic force application component electrode 162, a third electrostatic force application component electrode 163, a fourth electrostatic force application component electrode 164, a fifth electrostatic force application component electrode 165, a sixth electrostatic force application component electrode 166, a seventh electrostatic force application component electrode 167, and an eighth electrostatic force application component electrode 168. Other numbers of electrostatically applied component electrodes may be used in other embodiments.
In other embodiments, specific embodiments of the present invention are described above. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes and modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention.
Claims (10)
1. A magnetically driven micro gyroscope with high-temperature superconducting magnetic flux pinning effect is characterized by comprising a stator, a gyroscope rotor, a high-temperature superconductor and a rotating magnetic field coil; wherein the content of the first and second substances,
the stator is arranged above the gyro rotor;
the rotating magnetic field coil is arranged on the lower surface of the stator and used for generating a rotating magnetic field;
the top rotor is provided with a rotary driving permanent magnet array on the upper surface, and the rotary driving permanent magnet array interacts with a rotary magnetic field generated by the rotary magnetic field coil to generate driving torque so that the top rotor rotates around the central axis of the top rotor at a high speed;
the high-temperature superconductor is arranged below the gyro rotor;
the lower surface of the gyro rotor is provided with a permanent magnet, a magnetic field generated by the permanent magnet acts on the high-temperature superconductor below the gyro rotor, and the gyro rotor is locked and suspended above the high-temperature superconductor through the diamagnetic and flux pinning characteristics of the high-temperature superconductor.
2. The magnetically driven gyroscope according to claim 1, wherein the permanent magnet is a flux-pinned permanent magnet, and the flux-pinned permanent magnet is an axisymmetric ring structure, so that the gyroscope rotor is not limited in rotational freedom along the direction of the central axis of rotation, and all five other degrees of freedom are limited by electromagnetic force, thereby realizing that the gyroscope rotor can rotate around the central axis at high speed.
3. The magnetically-driven gyroscope of claim 1, further comprising a rotor chamber, a thermal barrier film, and a cryogenic chamber,
the rotor cabin is arranged between the stator and the heat insulation thin layer, the stator is positioned above the rotor cabin, and the heat insulation thin layer is positioned below the rotor cabin; the rotor chamber is formed by fixedly connecting the lower surface of the stator with the cylindrical rotor chamber wall and the upper surface of the heat insulation thin layer through bonding agents;
the gyro rotor is suspended in the rotor cabin;
the rotating magnetic field coil is arranged on the lower surface of the stator and is positioned in the rotor cabin;
the low-temperature cabin is arranged below the heat insulation thin layer, and a closed space is formed by fixedly connecting the lower surface of the heat insulation thin layer and a cuboid low-temperature cabin wall with an upper open surface through an adhesive;
the high-temperature superconductor is arranged in the low-temperature cabin;
and liquid nitrogen injection ports and exhaust ports are arranged on two sides of the low-temperature cabin.
4. The magnetically-driven micro-gyroscope with the high-temperature superconducting magnetic flux pinning effect according to claim 3, further comprising a ring electrode and a position detection electrode, wherein the ring electrode is arranged on the upper surface of the gyroscope rotor, and the ring electrode is arranged on the periphery of the rotary induction permanent magnet array;
the position detection electrode is arranged on the lower surface of the stator and located in the rotor cabin, the position detection electrode is arranged on the periphery of the rotating magnetic field coil, and the position detection electrode and the annular electrode form a plurality of groups of differential capacitors for detecting the spatial position and the posture of the gyro rotor.
5. The magnetically-driven gyroscope according to claim 4, wherein the position detection electrodes comprise a position detection common electrode and a plurality of position detection component electrodes, wherein the plurality of position detection component electrodes are distributed annularly, and the detection common electrode is located at the periphery of the position detection component electrodes.
6. The magnetically-driven micro-gyroscope with the high-temperature superconducting magnetic flux pinning effect according to claim 3, wherein the micro-gyroscope further comprises an electrostatic force-bearing electrode and an electrostatic force-applying electrode, the electrostatic force-bearing electrode is arranged on the lower surface of the gyroscope rotor, and the electrostatic force-bearing electrode is arranged on the periphery of the permanent magnet;
the electrostatic force application electrode is arranged on the upper surface of the heat insulation thin layer and is positioned in the rotor cabin, and electrostatic force is applied to the gyro rotor through electrostatic force of an electric field formed between the electrostatic force application electrode and the electrostatic force receiving electrode, so that the precession motion of the gyro rotor is balanced.
7. The high temperature superconducting magnetic flux pinning effect magnetically driven micro-gyroscope of claim 3, wherein the rotor chamber is in a vacuum state.
8. The high-temperature superconducting magnetic flux pinning effect magnetically driven micro-gyroscope of claim 3, wherein the material of the thermal isolation thin layer is a thermally insulating material with magnetic permeability.
9. A high temperature superconducting magnetic flux pinning effect magnetically driven micro-gyroscope according to any one of claims 1 to 8, characterised by one or more of the following features:
-the array of rotary drive permanent magnets comprises a plurality of cylindrical permanent magnets, the plurality of cylindrical permanent magnets constituting an annular array;
-the rotating magnetic field coil comprises a plurality of rotating component coils, which are distributed annularly;
-the number of rotating component coils is the same as the number of cylindrical permanent magnets.
10. A high temperature superconducting magnetic flux pinning effect magnetically driven micro-gyroscope according to any one of claims 1 to 8, wherein: the base body of the gyro rotor is a magnetic conduction layer, and the magnetic conduction layer is of a disc structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910905062.XA CN110595454A (en) | 2019-09-24 | 2019-09-24 | High-temperature superconducting magnetic flux pinning effect magnetically-driven micro gyroscope |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910905062.XA CN110595454A (en) | 2019-09-24 | 2019-09-24 | High-temperature superconducting magnetic flux pinning effect magnetically-driven micro gyroscope |
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