CN1238694C - Magnetic suspension rotor azimuth microgyro - Google Patents
Magnetic suspension rotor azimuth microgyro Download PDFInfo
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- CN1238694C CN1238694C CN 03141542 CN03141542A CN1238694C CN 1238694 C CN1238694 C CN 1238694C CN 03141542 CN03141542 CN 03141542 CN 03141542 A CN03141542 A CN 03141542A CN 1238694 C CN1238694 C CN 1238694C
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Abstract
The present invention relates to a magnetic suspension rotor azimuth microgyro, which belongs to the field of a micro-electromechanical technology. The present invention comprises a right base body, two-side stator windings and sensing electrodes, magnetic substrates, a left base body, an anti-cohesive column, a rotor supporting column and a micro-rotor, wherein the stator windings. The sensing electrodes and the micro-rotor are sealed in a cavity body which is composed of the left base body and the right base body; the magnetic substrates are deposited on the left base body and the right base body; the stator windings and the sensing electrodes are plated on the magnetic substrates and the anti-cohesive column and the rotor supporting column are deposited on the magnetic substrates; the micro-rotor is arranged on the rotor supporting column through a small central hole. The present invention popularizes the application range of the magnetic suspension rotor azimuth microgyro, is a suspension system which can be vertically arranged and adopts the rotor supporting column and a two-side stator sandwich type structure. Thus, the present invention is suitable for being manufactured and realized by a micro-machining method and enlarges the application range on azimuth gyroes.
Description
Technical field
What the present invention relates to is the little gyro in a kind of floating type orientation, and the little gyro in particularly a kind of magnetic suspension rotor orientation belongs to field of micro electromechanical technology.
Background technology
In the time of two more than ten years in the past, the micro machining process of domestic and international application silicon or body Micrometer-Nanometer Processing Technology have processed a variety of little oscillation gyros, but little for various reasons oscillation gyro is difficult to reach the high precision of traditional gyro.The nineties in last century, people such as Shearwood have proposed the little gyro of a kind of magnetic suspension rotor, the little gyro of magnetic suspension rotor is made up of major parts such as planar coil, induction electrode and little rotors, and wherein planar coil is divided into three kinds of suspended coil, revolving coil and ballast coils again according to its function difference.The little gyro of magnetic suspension rotor relies on electromagnetic induction principle and electromagnetic force theory to be suspended and rotates, the planar coil top is placed with little rotor, suspended coil is positioned at the position at close center, near suspended coil is revolving coil, revolving coil can be divided into heterogeneous, little rotor is in the rotating magnetic field, and what be in the stator coil outermost is ballast coil, and also distributing between the stator coil has the sensing capacitance electrode.The angular velocity that except the angular velocity that will detect horizontal direction, also needs the detection of vertical direction as the gyro of angular-rate sensor, yet horizontal suspension structure can only horizontal positioned, it can not be used for the angular velocity of detection of vertical direction, and this has limited its utilization on traverse gyro.
Find that by literature search U.S. Patent number is: 5955800, name is called: suspension system (LeivitationSystems).Mentioning this system in this patent literary composition is that following components is formed: a) maximum gauge is the high conductivity body of 1500 μ m; B) suspending power generation device; C) micro device that rotor is rotated.Also mentioning this levitation device in this patent can also be used in the gyro.The structural design of this device only is applicable to horizontal suspension structure.The angular velocity that except the angular velocity that will detect horizontal direction, also needs the detection of vertical direction as the gyro of angular-rate sensor, yet horizontal suspension structure can only horizontal positioned, it can not be used for the angular velocity of detection of vertical direction, and this has limited its utilization on traverse gyro.
Summary of the invention
The objective of the invention is to overcome deficiency of the prior art, provide a kind of magnetic suspension rotor orientation little gyro, it can vertically be placed, thereby solved disadvantages of background technology.
The present invention is achieved by the following technical solutions, the present invention includes: the stator coil on both sides and sensing electrode, magnetic substrates, left matrix, right matrix, anti-stick post, rotor supports post and little rotor, its connected mode is: stator coil, sensing electrode and little rotor are sealed in the cavity of left and right sides matrix formation, on the matrix of the left and right sides, deposit certain thickness magnetic substrates, on magnetic substrates, electroplate stator coil, sensing electrode, deposition anti-stick post and rotor supports post, little rotor is arranged on the rotor supports post by its central aperture.
Have four phase revolving coils, four phase ballast coils and four capacitor plates in the stator on left matrix, right matrix, stator coil is arranged on above the magnetic substrates to shorten the length of field circuit, the reduction power consumption by plating; In order to prevent that little rotor and planar coil from coming in contact and colliding, on magnetic substrates, be provided with four duckpins.
The present invention has adopted the structure of sandwich style stator coil folder rotor, both sides are stator coil and sensing electrode, in the middle of little rotor is sandwiched in, stator coil comprises ballast coil and revolving coil, ballast coil is evenly distributed on the periphery of stator coil, and little rotor and adjust little rotor-position mainly plays a part to have suspended.The revolving coil of bilateral heterogeneous and single-phase multi-turn, wherein each is applied with the high-frequency current that differs a phase bit successively in mutually, produces rotary electromagnetic field in the space, makes little rotor rotation.Bilateral polylith capacitor plate detects electric capacity and can be used to determine the position of little rotor in cavity.
Little rotor is middle circular metal plate with holes.Little rotor is suspended by the electromagnetic force that suspended coil produces in the little gyro of horizontal magnetic suspension rotor, because the electromagnetic force that suspended coil produces is made a concerted effort to be along the axis direction of coil, so no longer generation effect of suspended coil in the vertical suspension system of placing of rotor, the present invention produces component upwards and overcomes gravity by apply asymmetric electric current in ballast coil.In single ballast coil, have only a part of area of its inboard just relative with little rotor, thus the electromagnetic force that its electromagnetic field produces in little rotor be oblique in.When being added with the electric current of identical size in four monolateral coils, little epitrochanterian electromagnetic force cross component force has been cancelled each other.By in the ballast coil of downside, applying bigger electric current, apply less current in the ballast coil of upside, will produce making a concerted effort of making progress on little rotor, should make a concerted effort and the suffered counteract gravity forces of little rotor, little rotor is suspended.
Little rotor could have high noise immunity after having only high speed rotating when producing gyroscopic effect.In the little gyro in magnetic suspension rotor orientation, have four phase revolving coils on the monolateral stator, every phase coil is connected with the alternating current that phase place differs 90 degree successively, will produce rotary electromagnetic field in space, little rotor place, conductor in the rotary electromagnetic field can be subjected to turning moment, makes little rotor produce rotation.
The stability of little rotor refers to the central authorities that little rotor can stably be rotated in cavity, and its center must be on the center line of stator coil, and when not having extraneous angular velocity input, rotor plane should with the stator plane parallel.The present invention determines the position of little rotor by the distance of measuring between little rotor and the capacitor plate, and then adjusts the electric current that applies in each coil, to control the position of little rotor.
At every side of little rotor four capacitor plates that all evenly distributed, by the combination between these capacitor plates can detect little rotor in the space residing position.Capacitor C
1, C
2, C
3, C
4Can measure the lateral shift of little rotor.Capacitor C
5, C
6, C
7, C
8Can measure the rotational angle of little rotor.Can detect the displacement that little rotor moves up and down by the electric capacity that forms between the pole plate in addition.
The little traverse gyro of magnetic suspension rotor comes processing and manufacturing by fine machining method, comprise that suspended coil, revolving coil, ballast coil, capacitor plate, support column etc. all adopt micro fabrication manufacturings such as photoetching, electroforming, little rotor adopts the processes of evaporation of aluminum.
The present invention has substantive distinguishing features and marked improvement, the present invention has promoted the utilization scope of the little gyro of magnetic suspension rotor, be can vertically disposed suspension system, adopt the rotor supports post, the sandwiched type structure of double-sided stator, make the little gyro of this kind be suitable for fine machining method more and make and realize, enlarged the utilization scope on traverse gyro.
Description of drawings
Fig. 1 structural representation of the present invention
Stator coil structure synoptic diagram on the monolateral matrix of Fig. 2 the present invention
The little rotor structure synoptic diagram of Fig. 3 the present invention
Fig. 4 capacitor plate of the present invention is coupled to each other the mode synoptic diagram
Embodiment
As Fig. 1, Fig. 2, Fig. 3 and shown in Figure 4, the present invention includes: right matrix 1, the stator coil on both sides and sensing electrode 2,4,8,10,11,13,15,17, magnetic substrates 6,14, left side matrix 18, anti-stick post 3,9,12,16, rotor supports post 5 and little rotor 7, its connected mode is: stator coil and sensing electrode 2,4,8,10,11,13,15,17 and little rotor be sealed in left matrix 18, in the cavity that right matrix 1 forms, at left matrix 18, deposit magnetic substrates 6 on the right matrix 1,14, on magnetic substrates, electroplate stator coil and sensing electrode, deposition anti-stick post 3,9,12,16 and rotor supports post 5, little rotor 7 is arranged on the rotor supports post 5 by its central aperture.
Stator on left side matrix 18, the right matrix 1 is provided with 19,24,28,35 and four capacitor plates 20,25,29,34 of four phase revolving coils, 22,26,33,37, four phase ballast coils.
The present invention has adopted the structure of sandwich style stator coil folder rotor, both sides are stator coil and sensing electrode 2,4,8,10,11,13,15,17, in the middle of little rotor 7 is sandwiched in, the stator coil on every limit comprises four phase revolving coils 22,26,33,37, four phase ballast coils 19,24,28,35, ballast coil 219,24,28,35 is evenly distributed on the periphery of stator coil, and the revolving coil 22,26,33,37 of bilateral heterogeneous and single-phase multi-turn is arranged between each piece capacitor plate.
Claims (4)
1, the little gyro in a kind of magnetic suspension rotor orientation, comprise: right matrix (1), the stator coil on both sides and sensing electrode (2), (4), (8), (10), (11), (13), (15), (17), magnetic substrates (6), (14), left side matrix (18), anti-stick post (3), (9), (12), (16), rotor supports post (5) and little rotor (7), it is characterized in that, connected mode is: stator coil and sensing electrode (2), (4), (8), (10), (11), (13), (15), (17) and little rotor (7) be sealed in left matrix (18), in the cavity that right matrix (1) forms, in left matrix (18), deposit magnetic substrates (6) on the right matrix (1), (14), on magnetic substrates, electroplate stator coil and sensing electrode (2), (4), (8), (10), (11), (13), (15), (17), deposition anti-stick post (3), (9), (12), (16) and rotor supports post (5), little rotor (7) is arranged on the rotor supports post (5) by its central aperture.
2, the little gyro in magnetic suspension rotor orientation according to claim 1, it is characterized in that, stator on left side matrix (18), the right matrix (1) is provided with four phase revolving coils (22), (26), (33), (37), four phase ballast coils (19), (24), (28), (35) and four capacitor plates (20), (25), (29), (34).
3, the little gyro in magnetic suspension rotor orientation according to claim 1 and 2 is characterized in that, little rotor (7) circular metal plate with holes in the middle of being is in every side of little rotor (7) all evenly distributed four capacitor plates (20), (25), (29), (34).
4, the little gyro in magnetic suspension rotor according to claim 1 orientation, it is characterized in that, adopted the structure of sandwich style stator coil folder rotor, both sides are stator coil and sensing electrode (2), (4), (8), (10), (11), (13), (15), (17), in the middle of little rotor (7) is sandwiched in, the stator coil on each limit comprises four phase revolving coils (22), (26), (33), (37), four phase ballast coils (19), (24), (28), (35), ballast coil (19), (24), (28), (35) be evenly distributed on the periphery of stator coil, the revolving coil (22) of bilateral heterogeneous and single-phase multi-turn, (26), (33), (37) be arranged between each piece capacitor plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03141542 CN1238694C (en) | 2003-07-10 | 2003-07-10 | Magnetic suspension rotor azimuth microgyro |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03141542 CN1238694C (en) | 2003-07-10 | 2003-07-10 | Magnetic suspension rotor azimuth microgyro |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1477374A CN1477374A (en) | 2004-02-25 |
| CN1238694C true CN1238694C (en) | 2006-01-25 |
Family
ID=34155342
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 03141542 Expired - Fee Related CN1238694C (en) | 2003-07-10 | 2003-07-10 | Magnetic suspension rotor azimuth microgyro |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1238694C (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100350215C (en) * | 2004-04-29 | 2007-11-21 | 上海交通大学 | Suspended rotor MEMS micro-gyroscope utilizing static and charge relaxation to work |
| CN100392354C (en) * | 2005-06-30 | 2008-06-04 | 上海交通大学 | Soft magnetic suction suspension high-speed rotation rigid-body micro-gyroscope |
| CN100451547C (en) * | 2006-03-09 | 2009-01-14 | 上海交通大学 | Micro-rotation top with double-stator electromagnetic suspension rotor |
| CN100458366C (en) * | 2006-06-08 | 2009-02-04 | 上海交通大学 | Active suspension permanent magnet ring rotor acynchronous induction micro machinery gyroscope gyroscope |
| CN100401071C (en) * | 2006-08-03 | 2008-07-09 | 上海交通大学 | Flexible vertical column seesaw type double-layer structural micro-accelerometer |
| CN101298987B (en) * | 2008-06-13 | 2011-09-14 | 同济大学 | Robustness tuning fork vibrating type micromechanical gyroscope |
| CN101561276B (en) * | 2009-05-27 | 2011-06-01 | 上海交通大学 | Suspension motor micro gyro operated by adopting electromagnetism and corona |
| CN103557852B (en) * | 2013-11-14 | 2016-05-04 | 哈尔滨工业大学 | A kind of ball dish rotator type micromechanical gyro |
-
2003
- 2003-07-10 CN CN 03141542 patent/CN1238694C/en not_active Expired - Fee Related
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| Publication number | Publication date |
|---|---|
| CN1477374A (en) | 2004-02-25 |
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Granted publication date: 20060125 Termination date: 20100710 |