CN100567556C - The evaporation coating device of evaporation source and this evaporation source of employing - Google Patents
The evaporation coating device of evaporation source and this evaporation source of employing Download PDFInfo
- Publication number
- CN100567556C CN100567556C CNB2005100923737A CN200510092373A CN100567556C CN 100567556 C CN100567556 C CN 100567556C CN B2005100923737 A CNB2005100923737 A CN B2005100923737A CN 200510092373 A CN200510092373 A CN 200510092373A CN 100567556 C CN100567556 C CN 100567556C
- Authority
- CN
- China
- Prior art keywords
- evaporation
- evaporation source
- crucible
- housing
- coating device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000008020 evaporation Effects 0.000 title claims abstract description 160
- 238000001704 evaporation Methods 0.000 title claims abstract description 160
- 238000000576 coating method Methods 0.000 title claims abstract description 20
- 239000011248 coating agent Substances 0.000 title claims abstract description 19
- 239000000463 material Substances 0.000 claims abstract description 69
- 239000007921 spray Substances 0.000 claims abstract description 68
- 238000010438 heat treatment Methods 0.000 claims abstract description 30
- 239000000758 substrate Substances 0.000 claims abstract description 25
- 230000002093 peripheral effect Effects 0.000 claims abstract description 6
- 238000009413 insulation Methods 0.000 claims description 20
- 238000001816 cooling Methods 0.000 claims description 10
- 239000000498 cooling water Substances 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- 229910002804 graphite Inorganic materials 0.000 claims description 8
- 239000010439 graphite Substances 0.000 claims description 8
- 238000012546 transfer Methods 0.000 claims description 8
- 230000005855 radiation Effects 0.000 claims description 5
- 239000012141 concentrate Substances 0.000 claims description 4
- 238000005452 bending Methods 0.000 claims description 3
- 230000005684 electric field Effects 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000033228 biological regulation Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 2
- 229910052863 mullite Inorganic materials 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
Abstract
Description
Claims (22)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050008793A KR100666574B1 (en) | 2005-01-31 | 2005-01-31 | Vapor deposition source |
KR8793/05 | 2005-01-31 | ||
KR31684/05 | 2005-04-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1814854A CN1814854A (en) | 2006-08-09 |
CN100567556C true CN100567556C (en) | 2009-12-09 |
Family
ID=36907208
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005100923737A Active CN100567556C (en) | 2005-01-31 | 2005-08-29 | The evaporation coating device of evaporation source and this evaporation source of employing |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR100666574B1 (en) |
CN (1) | CN100567556C (en) |
Families Citing this family (47)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100748452B1 (en) * | 2006-05-25 | 2007-08-10 | 에이엔 에스 주식회사 | Injection head and menufacturing method thereof |
JP4768584B2 (en) * | 2006-11-16 | 2011-09-07 | 財団法人山形県産業技術振興機構 | Evaporation source and vacuum deposition apparatus using the same |
JP2008204835A (en) * | 2007-02-21 | 2008-09-04 | Matsushita Electric Ind Co Ltd | Pre-processing method and manufacturing method of electrochemical element and its electrode, as well as pre-treatment equipment |
KR100795905B1 (en) * | 2007-02-28 | 2008-01-21 | 세메스 주식회사 | Apparatus for depositing organic film on substrate |
US20100159132A1 (en) * | 2008-12-18 | 2010-06-24 | Veeco Instruments, Inc. | Linear Deposition Source |
EP2199426A1 (en) * | 2008-12-18 | 2010-06-23 | Applied Materials, Inc. | Evaporation source with exchangeable nozzles |
JP5620146B2 (en) | 2009-05-22 | 2014-11-05 | 三星ディスプレイ株式會社Samsung Display Co.,Ltd. | Thin film deposition equipment |
JP5623786B2 (en) | 2009-05-22 | 2014-11-12 | 三星ディスプレイ株式會社Samsung Display Co.,Ltd. | Thin film deposition equipment |
KR20110014442A (en) | 2009-08-05 | 2011-02-11 | 삼성모바일디스플레이주식회사 | Apparatus for thin layer deposition and method for manufacturing of organic light emitting display apparatus using the same |
JP5328726B2 (en) | 2009-08-25 | 2013-10-30 | 三星ディスプレイ株式會社 | Thin film deposition apparatus and organic light emitting display device manufacturing method using the same |
JP5677785B2 (en) | 2009-08-27 | 2015-02-25 | 三星ディスプレイ株式會社Samsung Display Co.,Ltd. | Thin film deposition apparatus and organic light emitting display device manufacturing method using the same |
US8876975B2 (en) | 2009-10-19 | 2014-11-04 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
KR101633112B1 (en) * | 2009-12-03 | 2016-06-24 | 엘지디스플레이 주식회사 | Source for vacuum thermal evaporation of organic thin film |
KR101084184B1 (en) * | 2010-01-11 | 2011-11-17 | 삼성모바일디스플레이주식회사 | Apparatus for thin layer deposition |
KR101174875B1 (en) | 2010-01-14 | 2012-08-17 | 삼성디스플레이 주식회사 | Apparatus for thin layer deposition, method for manufacturing of organic light emitting display apparatus using the same, and organic light emitting display apparatus manufactured by the method |
KR101193186B1 (en) | 2010-02-01 | 2012-10-19 | 삼성디스플레이 주식회사 | Apparatus for thin layer deposition, method for manufacturing of organic light emitting display apparatus using the same, and organic light emitting display apparatus manufactured by the method |
CN102168249A (en) * | 2010-02-26 | 2011-08-31 | 绿阳光电股份有限公司 | Evaporation source device |
CN102168250A (en) * | 2010-02-26 | 2011-08-31 | 绿阳光电股份有限公司 | Evaporation source device |
CN102168251A (en) * | 2010-02-26 | 2011-08-31 | 绿阳光电股份有限公司 | Evaporation source apparatus |
KR101156441B1 (en) | 2010-03-11 | 2012-06-18 | 삼성모바일디스플레이주식회사 | Apparatus for thin layer deposition |
KR101202348B1 (en) | 2010-04-06 | 2012-11-16 | 삼성디스플레이 주식회사 | Apparatus for thin layer deposition and method for manufacturing of organic light emitting display apparatus using the same |
US8894458B2 (en) | 2010-04-28 | 2014-11-25 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
KR101223723B1 (en) | 2010-07-07 | 2013-01-18 | 삼성디스플레이 주식회사 | Apparatus for thin layer deposition, method for manufacturing of organic light emitting display apparatus using the same, and organic light emitting display apparatus manufactured by the method |
KR101738531B1 (en) | 2010-10-22 | 2017-05-23 | 삼성디스플레이 주식회사 | Method for manufacturing of organic light emitting display apparatus, and organic light emitting display apparatus manufactured by the method |
KR101723506B1 (en) | 2010-10-22 | 2017-04-19 | 삼성디스플레이 주식회사 | Apparatus for organic layer deposition and method for manufacturing of organic light emitting display apparatus using the same |
KR20120045865A (en) | 2010-11-01 | 2012-05-09 | 삼성모바일디스플레이주식회사 | Apparatus for organic layer deposition |
KR20120065789A (en) | 2010-12-13 | 2012-06-21 | 삼성모바일디스플레이주식회사 | Apparatus for organic layer deposition |
KR101760897B1 (en) | 2011-01-12 | 2017-07-25 | 삼성디스플레이 주식회사 | Deposition source and apparatus for organic layer deposition having the same |
KR101840654B1 (en) | 2011-05-25 | 2018-03-22 | 삼성디스플레이 주식회사 | Apparatus for organic layer deposition and method for manufacturing of organic light emitting display apparatus using the same |
KR101852517B1 (en) | 2011-05-25 | 2018-04-27 | 삼성디스플레이 주식회사 | Apparatus for organic layer deposition and method for manufacturing of organic light emitting display apparatus using the same |
KR101857249B1 (en) | 2011-05-27 | 2018-05-14 | 삼성디스플레이 주식회사 | Patterning slit sheet assembly, apparatus for organic layer deposition, method for manufacturing organic light emitting display apparatus and organic light emitting display apparatus |
KR20130004830A (en) | 2011-07-04 | 2013-01-14 | 삼성디스플레이 주식회사 | Apparatus for thin layer deposition and method for manufacturing of organic light emitting display apparatus using the same |
KR101826068B1 (en) | 2011-07-04 | 2018-02-07 | 삼성디스플레이 주식회사 | Apparatus for thin layer deposition |
KR101341427B1 (en) * | 2012-02-15 | 2013-12-13 | 주식회사 에스에프에이 | One body type evaporation source and thin layers deposition apparatus for flat panel display having the same |
KR102015872B1 (en) | 2012-06-22 | 2019-10-22 | 삼성디스플레이 주식회사 | Apparatus for organic layer deposition, method for manufacturing of organic light emitting display apparatus using the same, and organic light emitting display apparatus manufactured by the method |
CN102994958B (en) * | 2012-12-14 | 2014-12-24 | 深圳先进技术研究院 | Heat evaporation source of heat evaporation coating equipment |
KR102081284B1 (en) | 2013-04-18 | 2020-02-26 | 삼성디스플레이 주식회사 | Deposition apparatus, method for manufacturing organic light emitting display apparatus using the same, and organic light emitting display apparatus manufactured by the same |
KR102235339B1 (en) * | 2013-09-26 | 2021-04-02 | (주)선익시스템 | A Linear Type Evaporator for Large Area Substrates |
US9290843B2 (en) * | 2014-02-11 | 2016-03-22 | Lam Research Corporation | Ball screw showerhead module adjuster assembly for showerhead module of semiconductor substrate processing apparatus |
KR102080764B1 (en) * | 2014-07-11 | 2020-02-24 | 주식회사 원익아이피에스 | Linear source, and substrate processing apparatus |
CN104178734B (en) | 2014-07-21 | 2016-06-15 | 京东方科技集团股份有限公司 | Evaporation coating device |
CN104294219A (en) * | 2014-08-14 | 2015-01-21 | 京东方科技集团股份有限公司 | Vapor plating wire source |
KR102386658B1 (en) * | 2015-08-03 | 2022-04-14 | 삼성디스플레이 주식회사 | Deposition sorce |
CN107299321B (en) * | 2017-07-28 | 2019-07-26 | 武汉华星光电半导体显示技术有限公司 | Evaporation source and evaporator |
CN107267922B (en) * | 2017-07-31 | 2019-04-09 | 京东方科技集团股份有限公司 | A kind of plane formula evaporation source and evaporation coating device |
CN111748773A (en) * | 2020-06-29 | 2020-10-09 | 合肥维信诺科技有限公司 | Evaporation source and evaporation device |
CN114381714A (en) * | 2021-12-30 | 2022-04-22 | 复旦大学 | Miniature in-situ temperature measurement high-temperature atomic molecule evaporation and emission device |
-
2005
- 2005-01-31 KR KR1020050008793A patent/KR100666574B1/en active IP Right Grant
- 2005-08-29 CN CNB2005100923737A patent/CN100567556C/en active Active
Also Published As
Publication number | Publication date |
---|---|
KR20060087917A (en) | 2006-08-03 |
KR100666574B1 (en) | 2007-01-09 |
CN1814854A (en) | 2006-08-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN100567556C (en) | The evaporation coating device of evaporation source and this evaporation source of employing | |
US7914621B2 (en) | Vapor deposition source and vapor deposition apparatus having the same | |
KR100703427B1 (en) | Vapor deposition source and Vapor deposition apparatus having thereof | |
KR100645689B1 (en) | Linear type deposition source | |
JP4436920B2 (en) | Organic vapor deposition source and method for controlling the heating source | |
KR101121417B1 (en) | Manufacturing apparatus for display device | |
EP2473646B1 (en) | Organic vapor jet printing device with a chiller plate | |
JP4648868B2 (en) | Inorganic vapor deposition source heating source control method | |
US11196030B2 (en) | High efficiency vapor transport sublimation source using baffles coated with source material | |
US11121322B2 (en) | Apparatus and method to deliver organic material via organic vapor-jet printing (OVJP) | |
KR101084333B1 (en) | Deposition source for manufacturing organic electroluminescence display panel and deposition apparatus having the same | |
CN103361610A (en) | Evaporating source and vacuum evaporation device employing the same | |
KR101256193B1 (en) | Thin layers deposition apparatus and linear type evaporator using thereof | |
JP2003027218A (en) | Coating apparatus for substrate with large area | |
KR20180047087A (en) | Inductive Heating Evaporation Deposition Apparatus | |
JP2015067865A (en) | Evaporation source, and vacuum vapor deposition device using the same | |
KR102086313B1 (en) | Vapor deposition source, method for manufacturing organic light emitting display apparatus using the same, and organic light emitting display apparatus | |
CN108926868A (en) | The sublimation unit of time stability with output vapour pressure | |
US20240131535A1 (en) | Linear evaporation source | |
KR200480886Y1 (en) | Evaporation Deposition Apparatus | |
KR20170062265A (en) | Heating Device For Manufacturing Display Device | |
KR100786840B1 (en) | Evaporation source and organic matter sputtering apparatus with the same | |
KR20080079014A (en) | Substrate manufacturing apparatus and gas supply device for the same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20090109 Address after: Gyeonggi Do, South Korea Applicant after: Samsung Mobile Display Co., Ltd. Address before: Gyeonggi Do, South Korea Applicant before: Samsung SDI Co., Ltd. |
|
ASS | Succession or assignment of patent right |
Owner name: SAMSUNG MOBILE DISPLAY CO., LTD. Free format text: FORMER OWNER: SAMSUNG SDI CO., LTD. Effective date: 20090109 |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SAMSUNG MONITOR CO., LTD. Free format text: FORMER OWNER: SAMSUNG MOBILE DISPLAY CO., LTD. Effective date: 20121029 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20121029 Address after: Gyeonggi Do, South Korea Patentee after: Samsung Display Co., Ltd. Address before: Gyeonggi Do, South Korea Patentee before: Samsung Mobile Display Co., Ltd. |