CN100498217C - 位移测量装置以及使用该装置的形状检查装置 - Google Patents

位移测量装置以及使用该装置的形状检查装置 Download PDF

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Publication number
CN100498217C
CN100498217C CNB2006101270889A CN200610127088A CN100498217C CN 100498217 C CN100498217 C CN 100498217C CN B2006101270889 A CNB2006101270889 A CN B2006101270889A CN 200610127088 A CN200610127088 A CN 200610127088A CN 100498217 C CN100498217 C CN 100498217C
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CN
China
Prior art keywords
mentioned
light
measurement point
sensitive
lens
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Expired - Fee Related
Application number
CNB2006101270889A
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English (en)
Chinese (zh)
Other versions
CN1940469A (zh
Inventor
田沼敦郎
中岛将行
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Anritsu Corp
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Anritsu Corp
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Publication date
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Publication of CN1940469A publication Critical patent/CN1940469A/zh
Application granted granted Critical
Publication of CN100498217C publication Critical patent/CN100498217C/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2545—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with one projection direction and several detection directions, e.g. stereo
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
CNB2006101270889A 2005-09-28 2006-09-26 位移测量装置以及使用该装置的形状检查装置 Expired - Fee Related CN100498217C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005282629 2005-09-28
JP2005282629A JP4275661B2 (ja) 2005-09-28 2005-09-28 変位測定装置

Publications (2)

Publication Number Publication Date
CN1940469A CN1940469A (zh) 2007-04-04
CN100498217C true CN100498217C (zh) 2009-06-10

Family

ID=37958860

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2006101270889A Expired - Fee Related CN100498217C (zh) 2005-09-28 2006-09-26 位移测量装置以及使用该装置的形状检查装置

Country Status (4)

Country Link
JP (1) JP4275661B2 (ko)
KR (1) KR100855849B1 (ko)
CN (1) CN100498217C (ko)
TW (1) TWI288226B (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4995041B2 (ja) * 2007-11-01 2012-08-08 アンリツ株式会社 印刷はんだ検査方法、及び印刷はんだ検査装置
JP5033587B2 (ja) * 2007-11-05 2012-09-26 アンリツ株式会社 印刷はんだ検査装置、及び印刷はんだ検査方法
JP2012007942A (ja) * 2010-06-23 2012-01-12 Fuji Xerox Co Ltd 位置測定装置
CN103363951B (zh) * 2012-04-10 2015-11-25 通用电气公司 三角法距离测量系统和方法
KR20150107450A (ko) * 2014-03-14 2015-09-23 주식회사 엔젤 테잎리스 엔코더 일체형 왕복동 실린더

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5812269A (en) * 1996-07-29 1998-09-22 General Scanning, Inc. Triangulation-based 3-D imaging and processing method and system
US5859924A (en) * 1996-07-12 1999-01-12 Robotic Vision Systems, Inc. Method and system for measuring object features
JP2885765B2 (ja) * 1997-06-20 1999-04-26 富山日本電気株式会社 半田量の測定方法
US6618155B2 (en) * 2000-08-23 2003-09-09 Lmi Technologies Inc. Method and apparatus for scanning lumber and other objects

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0763538A (ja) * 1993-08-31 1995-03-10 Matsushita Electric Works Ltd 表面の外観検査装置
JP2002246302A (ja) * 2001-02-21 2002-08-30 Nikon Corp 位置検出装置および露光装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5859924A (en) * 1996-07-12 1999-01-12 Robotic Vision Systems, Inc. Method and system for measuring object features
US5812269A (en) * 1996-07-29 1998-09-22 General Scanning, Inc. Triangulation-based 3-D imaging and processing method and system
JP2885765B2 (ja) * 1997-06-20 1999-04-26 富山日本電気株式会社 半田量の測定方法
US6618155B2 (en) * 2000-08-23 2003-09-09 Lmi Technologies Inc. Method and apparatus for scanning lumber and other objects

Also Published As

Publication number Publication date
JP4275661B2 (ja) 2009-06-10
TW200712437A (en) 2007-04-01
KR20070035964A (ko) 2007-04-02
CN1940469A (zh) 2007-04-04
JP2007093369A (ja) 2007-04-12
TWI288226B (en) 2007-10-11
KR100855849B1 (ko) 2008-09-01

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