JP4545580B2 - 面内方向変位計 - Google Patents
面内方向変位計 Download PDFInfo
- Publication number
- JP4545580B2 JP4545580B2 JP2004376744A JP2004376744A JP4545580B2 JP 4545580 B2 JP4545580 B2 JP 4545580B2 JP 2004376744 A JP2004376744 A JP 2004376744A JP 2004376744 A JP2004376744 A JP 2004376744A JP 4545580 B2 JP4545580 B2 JP 4545580B2
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- JP
- Japan
- Prior art keywords
- light
- plane direction
- measurement
- displacement meter
- height
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
11…測定対象面
20…レーザ
22…コリメートレンズ
24…投光ビーム
26…正反射ビーム
30…レンズ
32…ピンホール
34…固体撮像素子
34A…面内方向測定用受光領域
34B…高さ検出用受光領域
34C…デッドゾーン
36…衝立
40…ミラー
Claims (4)
- 光ビームを測定対象に投光し、測定対象面からの反射光を撮像素子で受光して、面内方向の変位を測定する面内方向変位計において、
測定対象面に光ビームを投光する投光手段と、
該投光ビームの正反射位置に配設され、測定対象面からの正反射ビームを、前記撮像素子の面内方向測定用受光領域以外に設定された高さ検出用受光領域に導く反射手段とを備え、
該高さ検出用受光領域で受光された光量の重心を求めることにより、測定対象面の高さ方向位置を検出するようにされていることを特徴とする面内方向変位計。 - 前記投光手段が、面内方向測定用投光手段と兼用されていることを特徴とする請求項1に記載の面内方向変位計。
- 前記面内方向測定用反射光と、高さ方向位置検出用正反射光の干渉を防止するようにされていることを特徴とする請求項1に記載の面内方向変位計。
- 前記高さ検出用受光領域の有効面積が可変とされていることを特徴とする請求項1に記載の面内方向変位計。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004376744A JP4545580B2 (ja) | 2004-12-27 | 2004-12-27 | 面内方向変位計 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004376744A JP4545580B2 (ja) | 2004-12-27 | 2004-12-27 | 面内方向変位計 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006184091A JP2006184091A (ja) | 2006-07-13 |
JP4545580B2 true JP4545580B2 (ja) | 2010-09-15 |
Family
ID=36737325
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2004376744A Expired - Fee Related JP4545580B2 (ja) | 2004-12-27 | 2004-12-27 | 面内方向変位計 |
Country Status (1)
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JP (1) | JP4545580B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9983531B2 (en) | 2012-08-07 | 2018-05-29 | Ricoh Company, Limited | Moving-member detecting device and image forming apparatus |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008039535A (ja) * | 2006-08-04 | 2008-02-21 | Mitsutoyo Corp | 画像相関変位計 |
JP2010181112A (ja) | 2009-02-06 | 2010-08-19 | Sharp Corp | 引出し型加熱調理器 |
CN105917441A (zh) | 2014-01-16 | 2016-08-31 | 株式会社尼康 | 曝光装置及曝光方法、以及器件制造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07294537A (ja) * | 1994-04-21 | 1995-11-10 | Konica Corp | 速度及び距離の検出装置 |
JPH09178425A (ja) * | 1995-12-25 | 1997-07-11 | Okuma Mach Works Ltd | 計測装置 |
JP2004333498A (ja) * | 2003-05-02 | 2004-11-25 | Mitsutoyo Corp | 2次元絶対位置検出装置及び2次元絶対位置検出方法 |
-
2004
- 2004-12-27 JP JP2004376744A patent/JP4545580B2/ja not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07294537A (ja) * | 1994-04-21 | 1995-11-10 | Konica Corp | 速度及び距離の検出装置 |
JPH09178425A (ja) * | 1995-12-25 | 1997-07-11 | Okuma Mach Works Ltd | 計測装置 |
JP2004333498A (ja) * | 2003-05-02 | 2004-11-25 | Mitsutoyo Corp | 2次元絶対位置検出装置及び2次元絶対位置検出方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9983531B2 (en) | 2012-08-07 | 2018-05-29 | Ricoh Company, Limited | Moving-member detecting device and image forming apparatus |
Also Published As
Publication number | Publication date |
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JP2006184091A (ja) | 2006-07-13 |
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