CN100497912C - 流量传感器 - Google Patents
流量传感器 Download PDFInfo
- Publication number
- CN100497912C CN100497912C CNB2005100875911A CN200510087591A CN100497912C CN 100497912 C CN100497912 C CN 100497912C CN B2005100875911 A CNB2005100875911 A CN B2005100875911A CN 200510087591 A CN200510087591 A CN 200510087591A CN 100497912 C CN100497912 C CN 100497912C
- Authority
- CN
- China
- Prior art keywords
- flow transducer
- pattern
- resistor
- temperature sense
- heating resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
- G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
- G01F1/692—Thin-film arrangements
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Abstract
Description
Claims (20)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004280804 | 2004-09-28 | ||
JP2004280804A JP4881554B2 (ja) | 2004-09-28 | 2004-09-28 | 流量センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1755332A CN1755332A (zh) | 2006-04-05 |
CN100497912C true CN100497912C (zh) | 2009-06-10 |
Family
ID=35159960
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005100875911A Expired - Fee Related CN100497912C (zh) | 2004-09-28 | 2005-07-28 | 流量传感器 |
Country Status (4)
Country | Link |
---|---|
US (2) | US7270000B2 (zh) |
EP (1) | EP1643219B1 (zh) |
JP (1) | JP4881554B2 (zh) |
CN (1) | CN100497912C (zh) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4881554B2 (ja) * | 2004-09-28 | 2012-02-22 | 日立オートモティブシステムズ株式会社 | 流量センサ |
JP5210491B2 (ja) | 2006-02-03 | 2013-06-12 | 日立オートモティブシステムズ株式会社 | 熱式流量センサ |
DE102006012993A1 (de) * | 2006-03-22 | 2007-09-27 | Mib Gmbh Messtechnik Und Industrieberatung | Leerrohrerkennung |
JP2008039704A (ja) * | 2006-08-09 | 2008-02-21 | Matsushita Electric Ind Co Ltd | 風速センサ、風量センサ、及び燃料電池システム |
JP2008170382A (ja) * | 2007-01-15 | 2008-07-24 | Hitachi Ltd | 熱式流体流量センサ及びその製造方法 |
JP4836864B2 (ja) * | 2007-05-16 | 2011-12-14 | 日立オートモティブシステムズ株式会社 | 熱式流量計 |
DE102007023823B4 (de) * | 2007-05-21 | 2014-12-18 | Abb Ag | Thermischer Massendurchflussmesser und Verfahren zu seinem Betrieb |
JP2008292361A (ja) | 2007-05-25 | 2008-12-04 | Denso Corp | 流量測定装置 |
DE102008052393B3 (de) * | 2008-10-21 | 2010-02-25 | Continental Automotive Gmbh | Massenstromsensorvorrichtung |
JP5293278B2 (ja) * | 2009-03-05 | 2013-09-18 | 株式会社デンソー | 熱式流量計 |
JP5208099B2 (ja) | 2009-12-11 | 2013-06-12 | 日立オートモティブシステムズ株式会社 | 流量センサとその製造方法、及び流量センサモジュール |
JP5458935B2 (ja) * | 2010-02-16 | 2014-04-02 | 株式会社デンソー | 空気流量測定装置 |
JP5542505B2 (ja) * | 2010-04-01 | 2014-07-09 | 日立オートモティブシステムズ株式会社 | 熱式流量センサ |
JP5315304B2 (ja) * | 2010-07-30 | 2013-10-16 | 日立オートモティブシステムズ株式会社 | 熱式流量計 |
JP5683192B2 (ja) * | 2010-09-30 | 2015-03-11 | 日立オートモティブシステムズ株式会社 | 熱式流量センサ |
JP2013024710A (ja) * | 2011-07-20 | 2013-02-04 | Denso Corp | 空気流量測定装置 |
CN102515087A (zh) * | 2011-12-01 | 2012-06-27 | 上海先进半导体制造股份有限公司 | 流量传感器的制造方法 |
JP5743871B2 (ja) * | 2011-12-07 | 2015-07-01 | 日立オートモティブシステムズ株式会社 | 熱式流量計 |
JP5703390B2 (ja) * | 2011-12-07 | 2015-04-15 | 日立オートモティブシステムズ株式会社 | 空気流量測定装置 |
CN102491260A (zh) * | 2011-12-31 | 2012-06-13 | 上海先进半导体制造股份有限公司 | 采用腐蚀自停止方式制造流量传感器的方法 |
CN102616732A (zh) * | 2012-04-09 | 2012-08-01 | 上海先进半导体制造股份有限公司 | 悬空半导体薄膜结构及传感器单元的制造方法 |
EP2711672A1 (en) * | 2012-09-25 | 2014-03-26 | Honeywell Technologies Sarl | Flow detector |
DE102012219305B3 (de) * | 2012-10-23 | 2014-02-13 | Continental Automotive Gmbh | Luftmassenmesser mit einem Sensorelement |
DE102012219304A1 (de) | 2012-10-23 | 2014-04-24 | Continental Automotive Gmbh | Luftmassenmesser |
CN103453958B (zh) * | 2012-11-09 | 2016-08-03 | 深圳信息职业技术学院 | 温差式流量传感器及其制作方法 |
JP5904959B2 (ja) | 2013-03-08 | 2016-04-20 | 日立オートモティブシステムズ株式会社 | 熱式空気流量計 |
EP2811266B1 (en) | 2013-06-07 | 2016-12-07 | Honeywell Technologies Sarl | Fluid flow sensor |
JP5700085B2 (ja) * | 2013-08-01 | 2015-04-15 | 株式会社デンソー | 空気流量測定装置 |
KR20170033865A (ko) | 2014-07-22 | 2017-03-27 | 브레우어 사이언스 인코포레이션 | 박막형 저항방식 센서 |
JP6438706B2 (ja) * | 2014-08-22 | 2018-12-19 | 日立オートモティブシステムズ株式会社 | センサ装置 |
US10260921B2 (en) * | 2014-09-30 | 2019-04-16 | Hitachi Automotive Systems, Ltd. | Thermal flow meter |
JP6283427B2 (ja) * | 2014-11-28 | 2018-02-21 | 日立オートモティブシステムズ株式会社 | 熱式流量センサ |
CN104482971B (zh) * | 2014-12-05 | 2019-05-24 | 北京控制工程研究所 | 一种基于mems技术的热式流量传感器 |
CN105526983B (zh) * | 2015-12-28 | 2019-01-18 | 上海集成电路研发中心有限公司 | 一种气体流量传感器的结构及其制造方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3638138A1 (de) * | 1986-11-08 | 1988-05-11 | Bosch Gmbh Robert | Vorrichtung zur bestimmung der masse eines stroemenden mediums |
JPH01305329A (ja) * | 1988-06-02 | 1989-12-08 | Mitsubishi Electric Corp | 温度センサ |
JP3436793B2 (ja) * | 1994-03-31 | 2003-08-18 | 株式会社共和電業 | ひずみゲージ |
US5461913A (en) * | 1994-06-23 | 1995-10-31 | Mks Instruments, Inc. | Differential current thermal mass flow transducer |
JPH10185644A (ja) * | 1996-10-31 | 1998-07-14 | Ricoh Co Ltd | 感熱式フローセンサ |
JP3705681B2 (ja) * | 1997-10-09 | 2005-10-12 | 東京瓦斯株式会社 | フローセンサ |
JP3355127B2 (ja) * | 1998-02-23 | 2002-12-09 | 株式会社日立製作所 | 熱式空気流量センサ |
JP3461469B2 (ja) * | 1999-07-27 | 2003-10-27 | 株式会社日立製作所 | 熱式空気流量センサ及び内燃機関制御装置 |
US6626037B1 (en) | 1999-09-03 | 2003-09-30 | Denso Corporation | Thermal flow sensor having improved sensing range |
JP2002048616A (ja) * | 2000-08-07 | 2002-02-15 | Hitachi Ltd | 熱式空気流量センサ及び内燃機関制御装置 |
JP3782669B2 (ja) * | 2001-02-28 | 2006-06-07 | 株式会社日立製作所 | 熱式流量測定装置 |
US7284424B2 (en) | 2001-07-26 | 2007-10-23 | Hitachi, Ltd. | Thermal air flow rate measuring apparatus and its flowmeter and internal combustion engine and thermal air flow rate measuring method using it |
JP3969167B2 (ja) * | 2002-04-22 | 2007-09-05 | 三菱電機株式会社 | 流体流量測定装置 |
JP3718198B2 (ja) | 2003-02-26 | 2005-11-16 | 株式会社日立製作所 | 流量センサ |
DE10324292B4 (de) * | 2003-05-21 | 2018-03-15 | Robert Bosch Gmbh | Messelement für einen Durchflusssensor, insbesondere einen Luftmassensensor für Brennkraftmaschinen |
JP2004361271A (ja) * | 2003-06-05 | 2004-12-24 | Hitachi Ltd | 熱式空気流量計 |
JP4881554B2 (ja) * | 2004-09-28 | 2012-02-22 | 日立オートモティブシステムズ株式会社 | 流量センサ |
-
2004
- 2004-09-28 JP JP2004280804A patent/JP4881554B2/ja not_active Expired - Fee Related
-
2005
- 2005-07-28 CN CNB2005100875911A patent/CN100497912C/zh not_active Expired - Fee Related
- 2005-08-18 EP EP05017967.0A patent/EP1643219B1/en not_active Expired - Fee Related
- 2005-08-19 US US11/206,820 patent/US7270000B2/en not_active Expired - Fee Related
-
2007
- 2007-09-12 US US11/854,130 patent/US7624633B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US7270000B2 (en) | 2007-09-18 |
CN1755332A (zh) | 2006-04-05 |
US20060065049A1 (en) | 2006-03-30 |
EP1643219A3 (en) | 2008-06-18 |
EP1643219B1 (en) | 2016-03-30 |
US7624633B2 (en) | 2009-12-01 |
US20080250855A1 (en) | 2008-10-16 |
EP1643219A2 (en) | 2006-04-05 |
JP4881554B2 (ja) | 2012-02-22 |
JP2006098057A (ja) | 2006-04-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder |
Address after: Tokyo, Japan Patentee after: Hitachi, Ltd. Patentee after: Hitachi Automotive Systems Engineering Co.,Ltd. Address before: Tokyo, Japan Patentee before: Hitachi, Ltd. Patentee before: Hitachi Car Engineering Co.,Ltd. Address after: Hitachinaka County, Japan Patentee after: Hitachi astemo Co.,Ltd. Address before: Hitachinaka County, Japan Patentee before: HITACHI AUTOMOTIVE SYSTEMS, Ltd. |
|
CP01 | Change in the name or title of a patent holder | ||
TR01 | Transfer of patent right |
Effective date of registration: 20211123 Address after: Hitachinaka County, Japan Patentee after: HITACHI AUTOMOTIVE SYSTEMS, Ltd. Address before: Tokyo, Japan Patentee before: Hitachi, Ltd. Patentee before: Hitachi Automotive Systems Engineering Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090610 |
|
CF01 | Termination of patent right due to non-payment of annual fee |