CN100496332C

CN100496332C - Washing roller

Info

Publication number: CN100496332C
Application number: CNB2007101111834A
Authority: CN
Inventors: 岛井太; 河田茂
Original assignee: Tokyo Ohka Kogyo Co Ltd
Current assignee: Tokyo Ohka Kogyo Co Ltd
Priority date: 2006-06-19
Filing date: 2007-06-14
Publication date: 2009-06-10
Anticipated expiration: 2027-06-14
Also published as: TWI327897B; TW200800069A; KR100889455B1; CN101091604A; JP2007335796A; JP4805033B2; KR20070120423A

Abstract

The present invention provides a cleaning cylinder on which the contaminated cleaning liquid will not resort on the substrate and the cleaning effect is further improved. The cleaning cylinder of the invention is provided with a cylinder main body (10) and the bristle is arranged at the outer circumference of the cylinder main body. The cylinder main body is provided with an internal space which forms a cleaning liquid flow circuit and the internal space is connected with the cleaning fluid feeding pipe (14) by means of a connector (12b). On the cylinder main body (10) a plurality of injecting holes (16) which are connected with the internal space and inject the cleaning liquid are formed along the axial cord of the cylinder main body spirally.

Description

Washing roll

Technical field

The present invention relates to a kind of washing roll that in the matting on the surface of cleaning various substrates such as glass substrate or semiconductor substrate, uses.

Background technology

After the various processing of liquid crystal having been carried out imaging etc. with glass substrate or semiconductor substrate, use the cleaning fluid of pure water etc. to carry out cleaning treatment.In this matting, use the cleaning brush that plants many bristles, limit jet cleaning liquid lateral dominance is used for cleaning (for example, with reference to patent documentation 1) with the cleaning of bristle.

Patent documentation 1: TOHKEMY 2001-204052 communique

In the described cleaning brush of above-mentioned patent documentation, owing to be arranged in the fluid issuing of jet cleaning liquid circle-shaped, so be trapped on the substrate surface from the cleaning fluid that cleans the brush ejaculation, the polluted cleaning fluid of material of the preparation that generation should be cleaned etc. remains in the unfavorable condition on the substrate surface.In addition, supplied on the substrate by wire ground from cleaning the cleaning fluid that brush ejects, so the unfavorable condition of inequality also can take place the substrate that moves is cleaned.

Summary of the invention

The object of the present invention is to provide and a kind ofly can not make contaminated cleaning fluid be trapped on the substrate washing roll that cleaning performance further is improved.

Washing roll of the present invention has: the roller main body of open circles tubular with inner space of the stream that constitutes cleaning fluid; The bristle that on the outer peripheral face of roller main body, is provided with; With the coupling member that above-mentioned roller main body can be linked to with rotating freely the cleaning solution supplying conduit, it is characterized in that, the inner space of above-mentioned roller main body is connected with above-mentioned cleaning solution supplying conduit, on above-mentioned roller main body, form along the axis helically of roller main body and to be communicated with also a plurality of spray-holes of jet cleaning liquid with above-mentioned inner space.

In washing roll of the present invention, because the spray-hole of jet cleaning liquid is to form helical form along roller axis, so the mode effect that the cleaning fluid that ejects from washing roll ejects to oblique side rather than rear with the contaminated cleaning fluid that will remain on the substrate.Consequently, the contaminated cleaning fluid that remains on the substrate promptly can be removed from substrate surface, and can be eliminated contaminated cleaning fluid and be trapped in unfavorable condition on the substrate.

In addition, owing to be not, but, clean uneven unfavorable condition so also can eliminate to produce to the whole face of substrate jet cleaning liquid equably to substrate wire ground jet cleaning liquid.

The preferred embodiment of washing roll of the present invention is characterised in that, above-mentioned bristle between adjacent spray-hole, is planted curl with the spacing identical with the helix pitch that forms spray-hole.By all forming bristle and spray-hole, make that to eject the effect of contaminated cleaning fluid to the side of substrate more effective with identical helix pitch.

In the washing roll of the present invention,, be trapped in unfavorable condition on the substrate so can eliminate contaminated cleaning fluid because the spray-hole that cleaning is remained in the bristle of the raffinate on the substrate and jet cleaning liquid all forms with helical form.And, because of to the whole face of substrate jet cleaning liquid equably, so can prevent to clean uneven generation.

Description of drawings

Fig. 1 is the line illustration of an example of the expression matting of using washing roll of the present invention.

Fig. 2 is the vertical view of line style of an example of expression washing roll of the present invention.

Fig. 3 is the cutaway view that cuts the line style of expression with the face that comprises roller axis represented among Fig. 2.

Symbol description: 1... glass substrate; 2... carrying roller; 3a～3d... washing roll; 10... roller main body; 11a, 11b... bearing; 12a, 12b... connector; 13... motor; 14... conduit; 15... bristle; 16... spray-hole.

The specific embodiment

Fig. 1 is that expression is used washing roll of the present invention and the line illustration of an example of matting that the glass substrate after the various processing is cleaned.The glass substrate 1 that should clean utilizes carrying roller 2 to carry to the direction of arrow with certain transporting velocity.In the mode of the glass substrate 1 in the clamping carrying, will up and down a pair of washing roll configuration two row.Each

washing roll

3a, 3b, 3c, 3d are installed movably at above-below direction, and control the amount of being pressed into of the relative glass substrate of bristle of each washing roll.In addition, the cleaning direction setting that each is cleaned brush is a clockwise direction, promptly with the carrying side of glass substrate in the opposite direction.The bristle of

washing roll

3a, 3b, 3c, 3d and the surface of substrate 1 are joined, and when utilizing its cleaning power to clean glass substrate, clean the surface of glass substrate to glass substrate jet cleaning liquid from washing roll.So in carrying, glass substrate 1 is utilized the machinery cleaning power of bristle and cleans, the cleaning force of the cleaning fluid that also is ejected simultaneously cleans.

Fig. 2 and Fig. 3 are the figure of an example of expression washing roll of the present invention, and Fig. 2 is that outside drawing and Fig. 3 of line style is the cutaway view that cuts the line style of expression with the face that comprises roller axis.

Washing roll of the present invention has hollow roller main body 10, but and the two ends of roller main body 10 by bearing 11a, 11b free rotary ground supporting.Binding there is the side of bearing 11a link by connector 12a and motor 13.In addition, the opposite side with roller main body can link cleaning solution supplying conduit 14 by connector 12b with rotating freely.In addition, one of roller main body 10 is distolateral by containment member 12 sealings.Cleaning solution supplying conduit 14 is connected with cleaning fluid tank (not shown), and in the inner space of roller main body 10, supplies with cleaning fluid.

On the outer peripheral face of roller main body 10, along axis direction helical form and row shape plant for example bristle 15 of nylon system.By the bristle avenue system is located on the fixture, and this stop mechanism helically is installed on the outer peripheral face of axle, these bristle row can be arranged in the row shape.

On roller main body 10, helically is formed with a plurality of spray-holes 16 that are used for jet cleaning liquid.The helix pitch of spray-hole row is set at the identical spacing of helix pitch with the bristle row, and forms between adjacent bristle row and do not overlap with bristle.

When glass substrate during through brush roll 3a～3d, be subjected to the cleaning action of washing roll from above-below direction, the machinery cleaning effect by utilizing bristle and utilize the cleaning action of the cleaning fluid that from washing roll, ejects just can remove the residual liquid on the surface that remains in glass substrate.Simultaneously, because washing roll rotates along the carrying direction rightabout with glass substrate,, prevent the unfavorable condition that contaminated cleaning fluid is detained on substrate so the contaminated cleaning fluid that remains on the glass substrate is ejected to the oblique side of glass substrate.

Claims

1. a washing roll has: the roller main body with open circles tubular of the inner space that constitutes the cleaning fluid stream; The bristle that on the outer peripheral face of roller main body, is provided with; Coupling member with above-mentioned roller main body being linked to with rotating freely the cleaning solution supplying conduit is characterized in that:

The inner space of above-mentioned roller main body is communicated with above-mentioned cleaning solution supplying conduit,

On above-mentioned roller main body, form along the axis helically of roller main body and to be communicated with also a plurality of spray-holes of jet cleaning liquid with above-mentioned inner space.

2. washing roll as claimed in claim 1 is characterized in that: above-mentioned bristle between the adjacent spray-hole of roller axis direction, is planted curl with the spacing identical with the helix pitch that forms spray-hole.