CN100470194C - Laser automatic collimation system - Google Patents
Laser automatic collimation system Download PDFInfo
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- CN100470194C CN100470194C CN 200710041062 CN200710041062A CN100470194C CN 100470194 C CN100470194 C CN 100470194C CN 200710041062 CN200710041062 CN 200710041062 CN 200710041062 A CN200710041062 A CN 200710041062A CN 100470194 C CN100470194 C CN 100470194C
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- microscope base
- piezoelectric ceramics
- catoptron
- piezoelectric ceramic
- band
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- 239000000919 ceramic Substances 0.000 claims abstract description 99
- 238000005070 sampling Methods 0.000 claims abstract description 22
- 239000000523 sample Substances 0.000 claims abstract description 14
- 239000000758 substrate Substances 0.000 claims description 20
- 230000003287 optical effect Effects 0.000 claims description 17
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 description 16
- 238000010009 beating Methods 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 4
- 238000009795 derivation Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 3
- 230000009897 systematic effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000011514 reflex Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000011002 quantification Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The automatic laser collimating system includes incident light source, first piezoelectric ceramic lens seat with first reflector, second piezoelectric ceramic lens seat with second reflector, fixed reflector, sampling reflector and converging lens, as well as CCD probe, computer and feedback control circuit. The CCD is used for detecting the deviation condition of the light path, and after the data processing of the computer, the lens base with the piezoelectric ceramics is driven and controlled to enable the light path to return to the standard, thereby achieving the purpose of automatic control. The scheme of the invention strictly ensures the applicability of the principle that two points are in space and only one straight line is in space, and simultaneously, the engineering is easier and more accurate to realize. In addition, only one point is sampled in the scheme, so that ideal collimated light beam output can be obtained, the light energy loss and the system error are reduced, and the system cost is reduced.
Description
Technical field
The present invention relates to optical control device, particularly a kind of laser automatic-aligning system.
Background technology
Present laser automatic-aligning system (A.Stalmashonak, N.Zhavoronkov, I.V.Hertel, S.Vetrov and K.Schmid, " Spatial control offemtosecond laser system output with submicroradianaccuracy; " Applied Optics 45,1271-1274 (2006)) structure as shown in Figure 1, mainly comprise charge-coupled image sensor (charged coupled device is to call CCD in the following text) probe 7, computing machine 8, feedback control circuit 9, the first band piezoelectric ceramics microscope base 2, the second band piezoelectric ceramics microscope base 3, first stationary mirror 41, second stationary mirror 42, the first sampling catoptron 51, the second sampling catoptron 52, first convergent lens 61, second convergent lens 62.Its measuring principle is: the space crosses at 2 and has only straight line.Its course of work is: whole optical path obtains two reference points of the facula position data of two sampled points (light is beaten the point on two sampling catoptrons) as the light path adjustment through after calibrating.Incident ray reflexes on the described first sampling catoptron 51 through the described first band piezoelectric ceramics microscope base 2, focuses on the CCD probe 7 through first convergent lens 61, obtains the facula deviation information of first sampled point; The light that sees through the first sampling catoptron 51 through 41 dozens of the second band piezoelectric ceramics microscope base 3 and first stationary mirrors on the second sampling catoptron 52, also focus on the CCD probe 7 through second stationary mirror 42 and second convergent lens 62, obtain the facula deviation information of second sampled point; These offset informations pass to computing machine 8, the control information of utilizing calculation procedure to calculate passes to feedback control circuit 9, and it is flexible to trigger piezoelectric ceramics, drive the first band piezoelectric ceramics microscope base 2 and 3 rotations of the second band piezoelectric ceramics microscope base, guarantee that light is by first sampled point and second sampled point.Wherein, the accurate quantification adjustment of the corresponding respectively first band piezoelectric ceramics microscope base 2 of the facula deviation information of first sampled point and second sampled point and the second band piezoelectric ceramics microscope base 3.But in this device, the second band piezoelectric ceramics microscope base 3 is between described two sampled points, because its rotation, though can make light by first sampled point and second sampled point, direction can not guarantee certain and datum coincidence; If guarantee certain and datum coincidence, the second band piezoelectric ceramics microscope base 3 will be limited the reference point of beating thereon around datum ray by strictness and rotate so, and this is very difficult on Project Realization.Simultaneously, its sampled point has 2, has increased luminous energy loss and systematic error, the difficulty of having programmed when also having increased computer control.
Summary of the invention
The objective of the invention is provides a kind of laser automatic-aligning system in order to overcome the shortcoming that above-mentioned prior art exists on design concept and Project Realization, to be applicable to the intensity laser system and beam stability to be had the experimental system of strict demand.
Collimation principle of the present invention is: the space crosses at 2 and has only straight line.Imitate the process of regulating the mirror holder collimated light path manually, consider the design feature of mirror holder itself, adopt the method for geometrical optics ray tracing, at first on mathematics, derive inclined to one side incident ray and return the strict system of equations that reference light path need satisfy, as follows:
a
1(x
1-x
01)+b
1(y
1-y
01)+c
1(z
1-z
01)＝0
a
2(x
2-x
02)+b
2(y
2-y
02)+c
2(z
2-z
02)＝0
a
1(y
1z
2-y
2z
1)+b
1(x
2z
1+x
0z
2-x
0z
1-x
1z
2)+c
1(x
0y
1-x
2y
1-x
0y
2+x
1y
2)＝0
Wherein, (x
0, 0,0) and be the light source point coordinate, (0, y
0, 0) beat second for datum ray and to wear the coordinate of putting on the piezoelectric ceramics microscope base, Δ y, Δ z are respectively the bias that light that CCD detects makes progress at level and hard Nogata, and f is the focal length of convergent lens, (x
01, y
01, z
01), (x
02, y
02, z
02) be respectively the first, two and wear fixed point coordinate on the piezoelectric ceramics microscope base, more than each amount be known quantity; (x
1, y
1, z
1), (x
2, y
2, z
2) be respectively first and second and wear the piezoelectric ceramics microscope base and accurately adjust back light and beat the coordinate of point thereon, (a
1, b
1, c
1), (a
2, b
2, c
2) be respectively first and second and wear the piezoelectric ceramics microscope base and accurately adjust the per unit system of back minute surface and vow that these 12 amounts are unknown quantity; For above-mentioned system of equations, its analytic solution are difficult to obtain, so adopt numerical solution: unit disappears earlier, substitution latter two equation becomes the equation with two unknowns group, estimate between accurate amount location according to the bias that detects, utilize the computer numerical solution at last, loop computation is up to finding error less than 10
-12Separate, and further calculate stretching, contract and distance of every block of piezoelectric ceramics in view of the above; By feedback controller, it is flexible to trigger piezoelectric ceramics, drives mirror holder and rotates, and light path is accurately returned.
Based on collimation principle of the present invention, for achieving the above object, technical scheme of the present invention is:
A kind of laser automatic-aligning system, comprise incident light source, CCD probe, computing machine, feedback control circuit, be characterized in: on the main optical path of described incident light source, place successively: have first of first catoptron to be with the piezoelectric ceramics microscope base, have second of second catoptron to be with piezoelectric ceramics microscope base, stationary mirror, sampling catoptron, convergent lens.
Described first band piezoelectric ceramics microscope base and the parallel placement of the second band piezoelectric ceramics microscope base, not during making alive, the incident angle that the light that is sent by incident light source incides second catoptron of first catoptron of the first band piezoelectric ceramics microscope base and the second band piezoelectric ceramics microscope base is 45 degree; Described stationary mirror and the parallel placement of sampling catoptron, the incident angle that is incided described stationary mirror by the light of second mirror reflects of the described second band piezoelectric ceramics microscope base is 45 degree, and the incident angle that is incided described sampling catoptron by the light of described fixation reflex mirror reflection is 45 degree.
Described convergent lens is perpendicular to the reflection ray of described sampling catoptron and make the photocentre of light beam by convergent lens, the light-sensitive surface of described CCD probe overlaps with the focal plane of described convergent lens, the output terminal of described CCD probe links to each other with described input end and computer, the output terminal of described computing machine links to each other with the input end of described feedback control circuit, two output terminals of described feedback control circuit link to each other with two piezoelectric ceramic actuators of the described first band piezoelectric ceramics microscope base respectively, two other output terminal of this feedback control circuit links to each other with two piezoelectric ceramic actuators of the described second band piezoelectric ceramics microscope base respectively, and whole optical path keeps light in same surface level.
The described first band piezoelectric ceramics microscope base is identical with the formation of the second band piezoelectric ceramics microscope base: comprise a substrate, first piezoelectric ceramic actuator, the second piezoelectric ceramic actuator symmetry is placed on two corner positions of this substrate, first adjusting knob on described first piezoelectric ceramic actuator is positioned on the corner position of described substrate, also be provided with the first Piezoelectric Ceramic lead on described first piezoelectric ceramic actuator, second adjusting knob on described second piezoelectric ceramic actuator, the second Piezoelectric Ceramic lead and described first adjusting knob, the first Piezoelectric Ceramic lead is symmetrical arranged with respect to the diagonal line of described substrate, also be provided with the 3rd adjusting knob on the 3rd drift angle of described substrate, the contact point of described the 3rd adjusting knob and substrate is a fixed point.
Compared with prior art, beneficial effect of the present invention is as follows:
1) two points as benchmark are respectively point and the sampled point of beating on the main optical path on stationary mirror, and no any optical component between these two reference points, have so just guaranteed the applicability of 2 definite straight line principles.
2) owing to sampling catoptron and stationary mirror arranged parallel, 2 offset informations that reflected that make light beat thereon only are the multiple relation; Again because sampled point is longer to the light path of light source than the point on the stationary mirror, so can be a bit with two reference point simmer down to sampled points.Like this, reduce eyeglass quantity on the light path, reduced the optical energy loss on the main optical path and the systematic error of native system, also reduced system cost.
3) in the mathematical derivation process, fully taken into account the design feature of mirror holder and the feasibility of Project Realization, by the interlock of two band piezoelectric ceramics microscope bases, the process that makes light path accurately return benchmark settles at one go.Second adjusting knob of band piezoelectric ceramics microscope base remains constant in the mirror holder adjustment process.When mathematical derivation, fully taken into account this constraint, avoided in the existing scheme having to that for the applicability that guarantees the collimation principle strictness of band piezoelectric ceramics microscope base is defined in the reference point of beating thereon around datum ray and rotated this engineering roadblock, Project Realization is become easily, also improved the precision of adjusting simultaneously.
4) mentality of designing of calculation procedure is simple.
5) this device mentality of designing is clear, simple in structure, precision is high, easy and simple to handle, portable good, practicality is very strong, and the excellent popularization meaning is arranged.
Description of drawings
Fig. 1 is the laser automatic-aligning system structural representation of known technology.
Fig. 2 is the structural representation of laser automatic-aligning system of the present invention.
Fig. 3 is the structural representation of band piezoelectric ceramics microscope base of the present invention.
Fig. 4 is the process flow diagram of calculation procedure of the present invention.
Embodiment
The invention will be further described below in conjunction with drawings and Examples, but should not limit protection scope of the present invention with this.
See also Fig. 2, Fig. 2 is the structural representation of laser automatic-aligning system of the present invention.This laser automatic-aligning system, comprise incident light source 1, place successively on the main optical path of this incident light source 1: have first of first catoptron 21 to be with piezoelectric ceramics microscope base 2, have second of second catoptron 31 to be with piezoelectric ceramics microscope base 3, stationary mirror 4, sampling catoptron 5, convergent lens 6, this system also comprises CCD probe 7, computing machine 8, feedback control circuit 9.During installation, with beam stability laser level incident preferably as datum ray, described first band piezoelectric ceramics microscope base 2 and the 3 parallel placements of the second band piezoelectric ceramics microscope base, not during making alive, the incident angle that the light that is sent by incident light source 1 incides second catoptron 31 of first catoptron 21 of the first band piezoelectric ceramics microscope base 2 and the second band piezoelectric ceramics microscope base 3 is 45 degree; Described stationary mirror 4 and the 5 parallel placements of sampling catoptron, the incident angle that is incided described stationary mirror 4 by the light of second catoptron, 31 reflections of the described second band piezoelectric ceramics microscope base 3 is 45 degree, and the incident angle that is incided described sampling catoptron 5 by the light of described stationary mirror 4 reflections is 45 degree.Described convergent lens 6 is perpendicular to the reflection ray of described sampling catoptron 5 and make light beam pass through the photocentre of convergent lens 6, the light-sensitive surface of described CCD probe 7 overlaps with the focal plane of described convergent lens 6, the data line output terminal of described CCD probe 7 links to each other with the serial input terminal of described computing machine 8, the serial output terminal of described computing machine 8 links to each other with the input end of described feedback control circuit 9, two output terminals of described feedback control circuit 9 link to each other with two piezoelectric ceramic actuators of the described first band piezoelectric ceramics microscope base 2 respectively, two other output terminal of this feedback control circuit 9 links to each other with two piezoelectric ceramic actuators of the described second band piezoelectric ceramics microscope base 3 respectively, whole optical path keeps light in same surface level, to obtain datum ray.Installation mainly is in order to reduce the difficulty of factorization like this.
After the installation, the light that sends from incident light source 1 incides stationary mirror 4 and penetrates through the first band piezoelectric ceramics microscope base 2, the second band piezoelectric ceramics microscope base 3, and this part light path is called main optical path.Sampling catoptron 5 is installed on the emitting light path of main optical path, and it is parallel with stationary mirror 4, emergent ray offset distance and offset direction information are projected on the CCD probe 7 through convergent lens 6, these information pass to computing machine 8 again, the correction data result who calculates sends feedback control circuit 9 to, trigger the interlock of two band piezoelectric ceramics microscope bases, make light return the benchmark main optical path.
Fig. 3 is the structural representation of band piezoelectric ceramics microscope base of the present invention.See also Fig. 3.The described first band piezoelectric ceramics microscope base 2 is identical with the formation of the second band piezoelectric ceramics microscope base 3: comprise a substrate 14, first piezoelectric ceramic actuator 101, second piezoelectric ceramic actuator, 102 symmetries are placed on two corner positions of this substrate 14, first adjusting knob 111 on described first piezoelectric ceramic actuator 101 is positioned on the corner position of described substrate 14, also be provided with the first Piezoelectric Ceramic lead 121 on described first piezoelectric ceramic actuator 101, second adjusting knob 112 on described second piezoelectric ceramic actuator 102, the second Piezoelectric Ceramic lead 122 and described first adjusting knob 111, the first Piezoelectric Ceramic lead 121 is symmetrical arranged with respect to the diagonal line of described substrate 14, the contact point that also is provided with the 3rd adjusting knob 13, the three adjusting knobs 13 and substrate 14 on the 3rd drift angle of described substrate 14 is a fixed point.
In the mathematical derivation process, fully taken into account the design feature of mirror holder and the feasibility of Project Realization, by the interlock of two band piezoelectric ceramics microscope bases, the process that makes light path accurately return benchmark settles at one go.The device of mirror holder as shown in Figure 3.In the process that mirror holder is adjusted, the flexible meeting of piezoelectric ceramic actuator causes the adjusting knob on it and the contact point of substrate 14 to change; The 3rd adjusting knob 13 in the lower left corner remains constantly in the mirror holder adjustment process, thereby the contact point of the 3rd adjusting knob 13 and substrate 14 is to certainly exist in the mirror holder adjustment process and unique fixed point.When mathematical derivation, fully taken into account this constraint, avoided in the prior art having to that for the applicability that guarantees the collimation principle the first band piezoelectric ceramics microscope base 2,3 strictnesses of the second band piezoelectric ceramics microscope base are defined in the reference point of beating thereon around datum ray and rotated this engineering roadblock, Project Realization is become easily, also improved the precision of adjusting simultaneously.
Fig. 4 is the process flow diagram of calculation procedure of the present invention.At first, be written into the reference data of sampled point, survey runout information; If this runout information is identical with reference data, then continue to survey runout information, if this runout information is different with reference data, then calculate every piezoelectric ceramics stroke; Export this piezoelectric ceramics stroke to feedback control circuit from serial ports of computers; Confirm whether finish at last, if, EOP (end of program) then, if not, the reference data that then is written into sampled point is again calibrated.
Laser automatic-aligning system of the present invention is a kind of autocollimation control device that is used for laser optical path, surveys light path skew situation by CCD, after machine data is handled as calculated, drive and control band piezoelectric ceramics microscope base, make light path return benchmark, reach the purpose of controlling automatically.2 applicabilities that have and have only the straight line principle are crossed in the present invention program's strict guarantee space, make Project Realization easier, accurate simultaneously.And, only to a point sampling, can obtain desirable collimated light beam output in the scheme, reduced optical energy loss and systematic error, reduced system cost simultaneously.
Claims (2)
1, a kind of laser automatic-aligning system, comprise incident light source (1), CCD probe (7), computing machine (8), feedback control circuit (9), it is characterized in that: on the main optical path of described incident light source (1), place successively: have first of first catoptron (21) to be with piezoelectric ceramics microscope base (2), have second of second catoptron (31) to be with piezoelectric ceramics microscope base (3), stationary mirror (4), sampling catoptron (5), convergent lens (6);
Described first band piezoelectric ceramics microscope base (2) and the parallel placement of the second band piezoelectric ceramics microscope base (3), not during making alive, the incident angle that the light that is sent by incident light source (1) incides first catoptron (21) of the first band piezoelectric ceramics microscope base (2) is 45 degree, and the incident angle that incides second catoptron (31) of the second band piezoelectric ceramics microscope base (3) by the light of first catoptron (21) reflection of the described first band piezoelectric ceramics microscope base (2) is 45 degree again; Described stationary mirror (4) and the parallel placement of sampling catoptron (5), the incident angle that is incided described stationary mirror (4) by the light of second catoptron (31) reflection of the described second band piezoelectric ceramics microscope base (3) is 45 degree, and the incident angle that is incided described sampling catoptron (5) by the light of described stationary mirror (4) reflection is 45 degree;
Described convergent lens (6) is perpendicular to the reflection ray of described sampling catoptron (5) and make light beam pass through the photocentre of this convergent lens (6), the light-sensitive surface of described CCD probe (7) overlaps with the focal plane of described convergent lens (6), the output terminal of described CCD probe (7) links to each other with the input end of described computing machine (8), the output terminal of described computing machine (8) links to each other with the input end of described feedback control circuit (9), two output terminals of described feedback control circuit (9) link to each other with two piezoelectric ceramic actuators of the described first band piezoelectric ceramics microscope base (2) respectively, two other output terminal of this feedback control circuit (9) links to each other with two piezoelectric ceramic actuators of the described second band piezoelectric ceramics microscope base (3) respectively, and whole optical path keeps light in same surface level.
2, laser automatic-aligning system according to claim 1, it is characterized in that the described first band piezoelectric ceramics microscope base (2) is identical with the formation of the second band piezoelectric ceramics microscope base (3): comprise a substrate (14), first piezoelectric ceramic actuator (101) and second piezoelectric ceramic actuator (102) symmetry are placed on two corner positions of this substrate (14), first adjusting knob (111) on described first piezoelectric ceramic actuator (101) is positioned on the corner position of described substrate (14), also be provided with the first Piezoelectric Ceramic lead (121) on described first piezoelectric ceramic actuator (101), second adjusting knob (112) on described second piezoelectric ceramic actuator (102), the second Piezoelectric Ceramic lead (122) and described first adjusting knob (111), the first Piezoelectric Ceramic lead (121) is symmetrical arranged with respect to the diagonal line of described substrate (14), also be provided with the 3rd adjusting knob (13) on the 3rd drift angle of described substrate (14), described the 3rd adjusting knob (13) is a fixed point with the contact point of substrate (14).
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|---|---|---|---|
| CN 200710041062 CN100470194C (en) | 2007-05-23 | 2007-05-23 | Laser automatic collimation system |
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|---|---|---|---|
| CN 200710041062 CN100470194C (en) | 2007-05-23 | 2007-05-23 | Laser automatic collimation system |
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| CN101059334A CN101059334A (en) | 2007-10-24 |
| CN100470194C true CN100470194C (en) | 2009-03-18 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009113484A1 (en) * | 2008-03-11 | 2009-09-17 | 株式会社ニコン | Reference sphere detecting device, reference sphere position detecting device, and three-dimensional coordinate measuring device |
| CN101561500B (en) * | 2008-04-15 | 2011-08-10 | 中国科学院安徽光学精密机械研究所 | Automatic laser radar collimating system |
| CN101674424B (en) * | 2009-09-27 | 2011-04-06 | 北京航空航天大学 | Virtually expanding imaging device and method |
| CN102354051B (en) | 2011-09-28 | 2013-01-02 | 哈尔滨工业大学 | Light beam deflection control device with superhigh frequency response and high sensitivity based on reflecting mirror translation |
| JP5931537B2 (en) * | 2012-03-28 | 2016-06-08 | 東レエンジニアリング株式会社 | Laser optical axis alignment method and laser processing apparatus using the same |
| CN108714845A (en) * | 2018-06-14 | 2018-10-30 | 贵州大学 | A kind of angle grinder cutting flattening device |
| CN110836869B (en) * | 2018-08-17 | 2021-03-19 | 中国科学院西安光学精密机械研究所 | All-fiber high-speed optical coherence tomography scanning device |
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| US5517016A (en) * | 1994-03-31 | 1996-05-14 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Lasercom system architecture with reduced complexity |
| CN1534329A (en) * | 2004-04-12 | 2004-10-06 | 哈尔滨工业大学 | Optical beam drifting amount fast feedback controlling type high precision laser aligning method and device |
| CN1719193A (en) * | 2005-08-09 | 2006-01-11 | 哈尔滨工业大学 | Long distance bidimension photoelectric self collimating device for drift amount target feedback control and its method |
| CN201043886Y (en) * | 2007-05-23 | 2008-04-02 | 中国科学院上海光学精密机械研究所 | Laser automatic collimation system |
-
2007
- 2007-05-23 CN CN 200710041062 patent/CN100470194C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5517016A (en) * | 1994-03-31 | 1996-05-14 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Lasercom system architecture with reduced complexity |
| CN1534329A (en) * | 2004-04-12 | 2004-10-06 | 哈尔滨工业大学 | Optical beam drifting amount fast feedback controlling type high precision laser aligning method and device |
| CN1719193A (en) * | 2005-08-09 | 2006-01-11 | 哈尔滨工业大学 | Long distance bidimension photoelectric self collimating device for drift amount target feedback control and its method |
| CN201043886Y (en) * | 2007-05-23 | 2008-04-02 | 中国科学院上海光学精密机械研究所 | Laser automatic collimation system |
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