CN104765160B - A kind of light beam bearing calibration system and calibration method - Google Patents
A kind of light beam bearing calibration system and calibration method Download PDFInfo
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Abstract
本发明公开了一种光束方位校准系统,包括第一光学镜、第二光学镜、第三光学镜、第四光学镜和光楔,光束先后经过第一光学镜和第二光学镜的反射后,从第四光学镜上方或下方经过,并经由第三光学镜与第四光学镜反射后从第三光学镜下方或上方射至光楔,所述光楔的两个反射表面倾斜于入射光束方向;包括两个光接收装置,用于接收经光楔的两个反射表面反射后的光束;所述第二光学镜和第四光学镜为可调光学镜。本发明还公开了上述校准系统的校准方法。本发明的光束校准系统和校准方法具有光束方位自动实时校准功能,可作为各种激光精密应用系统的前置系统使用。应用本系统能够记录正常工作光路的状态,实现快速精确的光路恢复。
The invention discloses a light beam orientation calibration system, which includes a first optical mirror, a second optical mirror, a third optical mirror, a fourth optical mirror and an optical wedge. After the light beam is reflected by the first optical mirror and the second optical mirror successively, Pass above or below the fourth optical mirror, and after being reflected by the third optical mirror and the fourth optical mirror, shoot from below or above the third optical mirror to the optical wedge, and the two reflective surfaces of the optical wedge are inclined to the direction of the incident light beam ; including two light receiving devices for receiving light beams reflected by the two reflective surfaces of the optical wedge; the second optical mirror and the fourth optical mirror are adjustable optical mirrors. The invention also discloses a calibration method of the calibration system. The beam calibration system and calibration method of the present invention have the function of automatic real-time calibration of the beam orientation, and can be used as a front-end system of various laser precision application systems. The application of this system can record the state of the normal working optical path and realize fast and accurate optical path recovery.
Description
技术领域technical field
本发明属于光电技术领域,具体涉及一种光束的方位校准系统及其校准方法。The invention belongs to the field of optoelectronic technology, and in particular relates to a beam orientation calibration system and a calibration method thereof.
背景技术Background technique
在激光技术应用领域,如自由空间光通信、激光精密测量、激光生物医学等应用领域中,对激光束的方向、方位稳定性都有较高的要求。In the application field of laser technology, such as free space optical communication, laser precision measurement, laser biomedicine and other application fields, there are high requirements for the direction and orientation stability of the laser beam.
对于精密的激光应用,由于激光器谐振腔存在温度形变、传输路径上光学元件的不稳定性以及各种环境扰动因素的影响,激光束始终会出现微量的方位偏移,包括角度偏移和平行偏移。当偏移量较大时,会严重影响后续系统的工作稳定性。For precise laser applications, due to the temperature deformation of the laser resonator, the instability of optical components on the transmission path, and the influence of various environmental disturbances, the laser beam will always have a small amount of azimuth deviation, including angular deviation and parallel deviation. shift. When the offset is large, it will seriously affect the working stability of the subsequent system.
此外,在实际工作中常常需要在改换的工作环境中重新恢复光学系统的光路,对大型光学系统而言,精确的光路恢复工作非常耗时耗力。In addition, in actual work, it is often necessary to restore the optical path of the optical system in a changed working environment. For a large optical system, accurate optical path restoration is very time-consuming and labor-intensive.
如何有效的对光学系统进行方便、快速、精确地校准,一直是激光技术应用领域或光机电技术领域研究的重点和热点。在现有的光束方位校准的技术方案中,精准和便捷往往不能同时兼备,复杂的光学系统虽然精准,但通常不能做到快速、方便地进行光路的校准或恢复,且一般成本高昂;简单的光学系统虽然顾及了后者,但又往往不够精准,现有的方案大大制约了激光在具有精密指向要求的领域中的应用。How to effectively calibrate the optical system conveniently, quickly and accurately has always been the focus and focus of research in the field of laser technology application or opto-mechanical technology. In the existing technical solutions for beam orientation calibration, precision and convenience cannot be achieved at the same time. Although complex optical systems are accurate, they usually cannot quickly and easily calibrate or restore the optical path, and the cost is generally high; simple Although the optical system takes the latter into account, it is often not precise enough. Existing solutions greatly restrict the application of lasers in fields with precise pointing requirements.
发明内容Contents of the invention
本发明目的在于解决上述问题,提供一种新的光束校准系统及校准方法。The purpose of the present invention is to solve the above problems and provide a new beam calibration system and calibration method.
为实现本发明的目的所采用的技术方案之一为:一种光束方位校准系统,包括第一光学镜、第二光学镜、第三光学镜、第四光学镜和光楔,光束先后经过第一光学镜和第二光学镜的反射后,从第四光学镜上方或下方经过,并经由第三光学镜与第四光学镜反射后从第三光学镜下方或上方射至光楔,所述光楔的两个反射表面倾斜于入射光束方向;包括两个光接收装置,分别用于接收经光楔的两个反射表面反射后的光束;所述第二光学镜为可调光学镜,可沿入射第二光学镜的光束的方向做往复平移,并可在水平面内转动;所述第四光学镜为可调光学镜,可沿出射第四光学镜的光束的方向做往复平移,并可在竖直平面内转动。One of the technical solutions adopted to achieve the purpose of the present invention is: a beam orientation calibration system, including a first optical mirror, a second optical mirror, a third optical mirror, a fourth optical mirror and an optical wedge, and the beam successively passes through the first After being reflected by the optical mirror and the second optical mirror, it passes above or below the fourth optical mirror, and after being reflected by the third optical mirror and the fourth optical mirror, shoots to the optical wedge from below or above the third optical mirror. The two reflective surfaces of the wedge are inclined to the direction of the incident light beam; two light receiving devices are respectively used to receive the light beam reflected by the two reflective surfaces of the optical wedge; the second optical mirror is an adjustable optical mirror, which can be adjusted along the The direction of the light beam incident on the second optical mirror is reciprocatingly translated, and can rotate in the horizontal plane; the fourth optical mirror is an adjustable optical mirror, which can be reciprocally translated along the direction of the light beam exiting the fourth optical mirror, and can rotation in the vertical plane.
针对本发明所述的“方位”校准,其意义为,假设透射光需经过光阑D1、D2并最终进入后续的工作系统,光阑D1、D2所确定的直线便是我们需要校正的特定目标的方向,区别于现有技术中无位置要求的一般几何方向定义。For the "orientation" calibration described in the present invention, it means that assuming that the transmitted light needs to pass through the diaphragms D1 and D2 and finally enter the subsequent working system, the straight line determined by the diaphragms D1 and D2 is the specific target we need to calibrate The direction of is different from the general geometric direction definition without position requirement in the prior art.
进一步改进的,还包括控制器,用于分别控制第二光学镜和第四光学镜的运动;第二光学镜和第四光学镜均各自连接有转动电机和电控平移台,控制器通过驱动转动电机和电控平移台来控制第二反射镜和第四反射镜的运动。Further improved, it also includes a controller, which is used to control the movement of the second optical mirror and the fourth optical mirror respectively; the second optical mirror and the fourth optical mirror are respectively connected with a rotating motor and an electronically controlled translation platform, and the controller drives Rotate the motor and the electronically controlled translation platform to control the movement of the second reflector and the fourth reflector.
进一步改进的,控制器与两个光接收装置连接,光接收装置用于监测光楔两个反射表面所反射光束的光斑中心偏移信息并传输给控制器,控制器根据光斑中心偏移信息自动调节第二光学镜和第四光学镜,以校准光束的出射方位。Further improved, the controller is connected with two light receiving devices, the light receiving devices are used to monitor the offset information of the spot center of the light beam reflected by the two reflective surfaces of the optical wedge and transmit it to the controller, and the controller automatically Adjust the second optical mirror and the fourth optical mirror to calibrate the exit orientation of the light beam.
进一步改进的,所述第一、第二、第三、第四光学镜为反射镜,其他类似可改变光学传播方向的光学镜装置亦可。As a further improvement, the first, second, third, and fourth optical mirrors are reflective mirrors, and other similar optical mirror devices that can change the direction of optical propagation are also available.
进一步改进的,所述第一和第三光学镜为固定设置。As a further improvement, the first and third optical mirrors are fixed.
进一步改进的,所述从本校准系统出射的光束方向平行于入射本校准系统的光束方向。As a further improvement, the direction of the light beam emitted from the calibration system is parallel to the direction of the light beam incident on the calibration system.
进一步改进的,所述光接收装置为挡光屏、面阵光电探测器、四象限探测器或具有光信号接收端的显示器。As a further improvement, the light receiving device is a light blocking screen, an area array photodetector, a four-quadrant detector or a display with an optical signal receiving end.
进一步改进的,所述光接收装置为挡光屏、面阵光电探测器或具有光信号接收端的显示器,如CMOS相机。所述光接收装置上具有划分成正交坐标系4个象限的接收区,其坐标系原点位置为中心坐标位置。不同光接收装置可用于不同的校准场合。As a further improvement, the light receiving device is a light blocking screen, an area array photodetector or a display with an optical signal receiving end, such as a CMOS camera. The light receiving device has a receiving area divided into four quadrants of an orthogonal coordinate system, and the origin of the coordinate system is the central coordinate position. Different light receiving devices can be used for different calibration occasions.
进一步改进的,第二光学镜和第三光学镜位于同一操作平面上,第四光学镜的高度低于第二和第三光学镜。As a further improvement, the second optical mirror and the third optical mirror are located on the same operating plane, and the height of the fourth optical mirror is lower than that of the second and third optical mirrors.
进一步改进的,所述平移台为高精度电控平移台;所述转动电机为高精度步进电机。As a further improvement, the translation platform is a high-precision electronically controlled translation platform; the rotating motor is a high-precision stepping motor.
进一步改进的,还包括上位机,如PC电脑等,上位机与控制器连接,用于可视化通讯控制、界面操作或辅助进行光斑图像去噪及偏移量计算。A further improvement also includes a host computer, such as a PC computer, etc., which is connected to the controller for visual communication control, interface operation, or auxiliary facula image denoising and offset calculation.
为实现本发明的目的所采用的技术方案之二为:一种光束方位校准方法,包括第一光学镜、第二光学镜、第三光学镜、第四光学镜、光楔、光接收装置和控制器,该方法包括以下步骤:The second technical solution adopted to realize the object of the present invention is: a beam orientation calibration method, comprising a first optical mirror, a second optical mirror, a third optical mirror, a fourth optical mirror, an optical wedge, a light receiving device and controller, the method includes the following steps:
A、首先人工调整第二光学镜、第四光学镜使光束准确通过两光阑,此时由光接收装置检测的光楔反射光的光斑中心位置为初始光斑中心位置;A. First, manually adjust the second optical mirror and the fourth optical mirror so that the light beam accurately passes through the two apertures. At this time, the central position of the light spot of the reflected light of the optical wedge detected by the light receiving device is the initial central position of the light spot;
B、将光束先后经过第一光学镜和第二光学镜的反射后,从第四光学镜上方或下方经过,并经由第三光学镜与第四光学镜反射后从第三光学镜下方或上方射至光楔,光楔两个反射表面所反射的光束均用光接收装置接收;B. After the light beam is reflected by the first optical mirror and the second optical mirror, it passes above or below the fourth optical mirror, and after being reflected by the third optical mirror and the fourth optical mirror, it passes below or above the third optical mirror The light beams reflected by the two reflective surfaces of the light wedge are received by the light receiving device;
C、光接收装置实时检测所接收光束的光斑中心的偏移信息,并将偏移信息传输给控制器;C. The light receiving device detects the offset information of the spot center of the received light beam in real time, and transmits the offset information to the controller;
D、控制器根据偏移信息控制第二光学镜和第四光学镜做平移或转动,以改变光楔两个反射表面所反射光束的光斑中心偏移位置;D. The controller controls the second optical mirror and the fourth optical mirror to translate or rotate according to the offset information, so as to change the offset position of the spot center of the light beam reflected by the two reflective surfaces of the optical wedge;
所述光接收装置具有两个,分别用于检测光楔两个反射表面所反射光束的光斑中心的偏移信息,两个光接收装置与光楔反射点距离不同。There are two light receiving devices, which are respectively used to detect the offset information of the spot center of the light beam reflected by the two reflecting surfaces of the optical wedge, and the distances between the two light receiving devices and the reflection point of the optical wedge are different.
进一步改进的,控制第二光学镜和第四光学镜做转动,使两个光接收装置各自检测的偏移信息趋向于相同,并减少所述光斑中心的偏移量;控制第二光学镜做平移,可改变所述光斑中心在水平方向上的偏移位置;控制第四光学镜做平移,可改变所述光斑中心在竖直方向上的偏移位置。As a further improvement, control the rotation of the second optical mirror and the fourth optical mirror, so that the offset information detected by the two light receiving devices tends to be the same, and reduce the offset of the center of the light spot; control the second optical mirror to do Translating can change the offset position of the center of the light spot in the horizontal direction; controlling the fourth optical mirror to perform translation can change the offset position of the center of the light spot in the vertical direction.
进一步改进的,所述光接收装置为面阵光电探测器,控制器根据光接收装置检测到的光斑光强分布信息计算所述光斑中心的偏移量大小,并根据偏移量大小自动控制第二光学镜和第四光学镜以校准光束的出射方位。As a further improvement, the light receiving device is an area array photodetector, and the controller calculates the offset of the center of the light spot according to the light intensity distribution information of the light spot detected by the light receiving device, and automatically controls the first The second optical mirror and the fourth optical mirror are used to calibrate the outgoing orientation of the light beam.
进一步改进的,所述偏移量大小的计算方法包括以下两种计算方法之一或全部:As a further improvement, the calculation method of the offset size includes one or both of the following two calculation methods:
计算方法一、快速定位算法:Calculation method 1. Fast positioning algorithm:
其中,Δx、Δy为所述光斑中心在X和Y坐标上的偏移量,SⅠ、SⅡ、SⅢ、SⅣ分别为所述光斑中心落在对探测器感光面所划分的四个象限上的面积,可通过对四个象限分别进行强度值求和得到;k为常系数;Among them, Δx and Δy are the offsets of the center of the light spot on the X and Y coordinates, and S Ⅰ , S Ⅱ , S Ⅲ , and S Ⅳ are respectively the center of the light spot falling on the four areas divided by the photosensitive surface of the detector. The area on the quadrant can be obtained by summing the intensity values of the four quadrants respectively; k is a constant coefficient;
计算方法二、精确定位算法:Calculation method two, precise positioning algorithm:
其中,即为计算得到的光斑中心坐标值,I(xi,yi)为探测器感光面上第i个像素元获得的光强,xi、yi为第i个像素元的坐标值;in, That is, the calculated center coordinate value of the spot, I( xi , y i ) is the light intensity obtained by the i-th pixel on the photosensitive surface of the detector, and x i and y i are the coordinate values of the i-th pixel;
当共同包括快速定位算法和精确定位算法时,该两种计算方法可自由切换使用。When the fast positioning algorithm and the precise positioning algorithm are included together, the two calculation methods can be freely switched and used.
进一步改进的,在所述精确定位算法在计算偏移量之前,先对光接收装置检测到的光斑图像信息进行去噪处理。As a further improvement, before the precise positioning algorithm calculates the offset, it first performs denoising processing on the light spot image information detected by the light receiving device.
为实现本发明的目的所采用的技术方案之三为:一种用于上述校准系统的校准方法,包括以下步骤:The third technical solution adopted to achieve the purpose of the present invention is: a calibration method for the above-mentioned calibration system, comprising the following steps:
a、两个光接收装置分别实时监测光楔两个反射表面所反射光束的光斑偏移信息,光斑偏移信息由光斑中心坐标与初始中心坐标计算得到,利用所述光斑偏移信息以及两个光接收装置的光程差实时计算光束在水平及竖直方向的角度偏移量;a. The two light receiving devices respectively monitor the spot offset information of the light beams reflected by the two reflective surfaces of the optical wedge in real time. The spot offset information is calculated from the center coordinates of the spot and the initial center coordinates. Using the spot offset information and the two The optical path difference of the light receiving device calculates the angular offset of the beam in the horizontal and vertical directions in real time;
b、控制第二光学镜和/或第四光学镜转动,减少所述光束的角度偏移量;b. controlling the rotation of the second optical mirror and/or the fourth optical mirror to reduce the angular offset of the light beam;
c、循环步骤a、b,使所述角度偏移量不断减小至最小或低于误差容限;c. Repeat steps a and b to continuously reduce the angular offset to a minimum or lower than the error tolerance;
d、利用所述光斑中心坐标和初始中心坐标,实时计算光束在水平方向上的横向偏移量以及光束在垂直方向上的竖向偏移量;d. Using the center coordinates of the spot and the initial center coordinates, calculate the lateral offset of the beam in the horizontal direction and the vertical offset of the beam in the vertical direction in real time;
e、调节第二光学镜和/或第四光学镜平移,减小光束的横向及竖向偏移量;e. Adjust the translation of the second optical mirror and/or the fourth optical mirror to reduce the lateral and vertical offset of the light beam;
f、循环步骤d、e,使所述横向及竖向偏移量减至最小或低于误差容限。f. Repeating steps d and e, reducing the horizontal and vertical offsets to a minimum or lower than the error tolerance.
本发明相对于现有技术的有益效果有:The beneficial effect of the present invention with respect to prior art has:
1、本发明提供了一种新的光路校准方案,区别于现有的其他光束方向校正或对准(单靶)技术,我们采用基于转镜平移法的双靶校准光路。1. The present invention provides a new optical path calibration scheme. Different from other existing beam direction correction or alignment (single target) technologies, we adopt a dual-target optical path calibration based on the rotating mirror translation method.
2、由于将敏感的角度偏转量转化为不敏感的平移量,使用同等器件前提下,调节精度比之只利用转镜的方法将得到显著提高。故而本系统校准光路简洁,对于单靶对准应用可做到非常高的精确度,对于方位偏移校正(双靶)应用,平移法也可一定程度上弥补普通转动电机角度调节精度的不足。2. Since the sensitive angular deflection is converted into an insensitive translation, under the premise of using the same device, the adjustment accuracy will be significantly improved compared with the method of only using the rotating mirror. Therefore, the calibration optical path of this system is simple, and it can achieve very high accuracy for single-target alignment applications. For azimuth offset correction (double-target) applications, the translation method can also make up for the lack of angle adjustment accuracy of ordinary rotating motors to a certain extent.
3、将光楔引入到光束校准的思路中,对于由初始确定的光束方位,两个光接收装置所记录的光楔两个反光表面所反射光的光斑中心位置可唯一反映光束的方位(两点确定一条直线)。若入射光束方位发生偏移,两探测器上的光斑中心也发生相应的偏移。3. Introduce the optical wedge into the idea of beam calibration. For the beam orientation determined initially, the center position of the spot center of the light reflected by the two reflective surfaces of the optical wedge recorded by the two light receiving devices can uniquely reflect the orientation of the beam (two point to determine a straight line). If the azimuth of the incident beam is shifted, the centers of the light spots on the two detectors will also shift accordingly.
4、本发明具有光束方位自动实时校准功能,可作为各种激光精密应用系统的前置系统使用。应用本系统能够记录正常工作光路的状态,实现快速精确的光路恢复。4. The present invention has the function of automatic real-time calibration of beam orientation, and can be used as a pre-system of various laser precision application systems. The application of this system can record the state of the normal working optical path and realize fast and accurate optical path restoration.
5、本发明具有多种光束校正算法,即快速定位算法和精确定位算法,前者快速但精准不如后者,后者精准但校准速度不如前者,可根据不同的场合需求方便切换使用。5. The present invention has a variety of beam calibration algorithms, namely fast positioning algorithm and precise positioning algorithm. The former is fast but not as accurate as the latter, and the latter is accurate but not as fast as the former. It can be conveniently switched and used according to the needs of different occasions.
附图说明Description of drawings
图1为本发明光束方位校准系统的一种实施例的结构连接俯视示图Fig. 1 is a structural connection top view diagram of an embodiment of the beam orientation calibration system of the present invention
图2为本发明实施例中光学镜相互位置关系的侧视图Fig. 2 is a side view of the mutual positional relationship of the optical mirrors in the embodiment of the present invention
图3为本发明实施例中光接收装置所接收光斑的一种举例图像Fig. 3 is an example image of the light spot received by the light receiving device in the embodiment of the present invention
图4为本发明实施例中光接收装置所接收光斑的另一种举例图像Fig. 4 is another example image of the light spot received by the light receiving device in the embodiment of the present invention
具体实施方式detailed description
下面结合附图对本发明的具体实施方式作进一步说明:The specific embodiment of the present invention will be further described below in conjunction with accompanying drawing:
实施例一:Embodiment one:
本实施例的一种光束方位校准系统,包括第一光学镜、第二光学镜、第三光学镜、第四光学镜和光楔,光束先后经过第一光学镜和第二光学镜的反射后,从第四光学镜上方或下方经过,并经由第三光学镜与第四光学镜反射后从第三光学镜下方或上方射至光楔,所述光楔的两个反射表面倾斜于入射光束方向;包括两个光接收装置,分别用于接收经光楔的两个反射表面反射后的光束;所述第二光学镜为可调光学镜,可沿入射第二光学镜的光束的一侧做往复平移,并可在水平面内转动;所述第四光学镜为可调光学镜,可沿出射第四光学镜的光束的一侧做往复平移,并可在竖直平面内转动。所述第一、第二、第三、第四光学镜为反射镜,所述第一和第三光学镜为固定设置。所述光接收装置为显示器的接收端,显示器将接收到的光斑显示在屏幕上,屏幕上具有划分成正交坐标系4个象限,其坐标系原点位置为中心坐标位置。A beam orientation calibration system in this embodiment includes a first optical mirror, a second optical mirror, a third optical mirror, a fourth optical mirror and an optical wedge. After the beam is reflected by the first optical mirror and the second optical mirror, Pass above or below the fourth optical mirror, and after being reflected by the third optical mirror and the fourth optical mirror, shoot from below or above the third optical mirror to the optical wedge, and the two reflective surfaces of the optical wedge are inclined to the direction of the incident light beam ; including two light receiving devices, respectively used to receive the light beams reflected by the two reflective surfaces of the optical wedge; the second optical mirror is an adjustable optical mirror, which can be configured along one side of the light beam incident on the second optical mirror reciprocating translation, and can rotate in the horizontal plane; the fourth optical mirror is an adjustable optical mirror, which can do reciprocating translation along one side of the light beam exiting the fourth optical mirror, and can rotate in the vertical plane. The first, second, third and fourth optical mirrors are reflecting mirrors, and the first and third optical mirrors are fixed. The light receiving device is the receiving end of the display, and the display displays the received light spots on the screen, which is divided into four quadrants of an orthogonal coordinate system, and the origin of the coordinate system is the central coordinate position.
本实施例是一种简单的应用方案,通过观察光斑在屏幕上的光斑偏移情况来手动调节第二、第四光学镜的平移或转动,使屏幕上的光斑恢复中心坐标位置,起到校准的作用。本实施例属于初级的应用,并可用于后续改进的实施例方案中。This embodiment is a simple application scheme. Manually adjust the translation or rotation of the second and fourth optical mirrors by observing the deviation of the light spot on the screen to restore the center coordinate position of the light spot on the screen to achieve calibration. role. This embodiment belongs to primary application, and can be used in subsequent improved embodiment schemes.
实施例二:Embodiment two:
如图1和图2所示,本实施例的一种光束方位校准系统,所述光学镜采用反射镜,包括第一反射镜M1、第二反射镜M2、第三反射镜M3、第四反射镜M4,采用光楔W作为分光元件,所述两个光接收装置采用两个CMOS探测器C1、C2,分别用于接收经光楔的两个反射表面反射后的光束。光楔W的反射光路中选择性放置衰减片F,以控制进入探测器C1和C2的光强,避免出现接收饱和。As shown in Figure 1 and Figure 2, a kind of beam azimuth calibration system of the present embodiment, described optical mirror adopts reflector, comprises first reflector M1, second reflector M2, third reflector M3, fourth reflector The mirror M4 uses an optical wedge W as a light splitting element, and the two light receiving devices use two CMOS detectors C1 and C2 to respectively receive light beams reflected by the two reflective surfaces of the optical wedge. An attenuation sheet F is selectively placed in the reflected optical path of the optical wedge W to control the light intensity entering the detectors C1 and C2 and avoid receiving saturation.
第一反射镜M1和第三反射镜M3为固定反射镜,第二反射镜M2、第四反射镜M4为可调反射镜,其中第二反射镜M2可在XY平面内旋转,可沿Y方向平移,第四反射镜M4可在XZ平面旋转,可沿X方向平移。图中D1、D2为定位光阑。还包括控制器10和计算机20。The first reflector M1 and the third reflector M3 are fixed reflectors, the second reflector M2 and the fourth reflector M4 are adjustable reflectors, wherein the second reflector M2 can rotate in the XY plane and can be rotated along the Y direction For translation, the fourth mirror M4 can rotate on the XZ plane and can translate along the X direction. In the figure, D1 and D2 are positioning apertures. A controller 10 and a computer 20 are also included.
激光(Laser)进入系统,先后经过第一反射镜M1、第二反射镜M2、第三反射镜M3、第四反射镜M4的反射后,入射光楔W,其中大部分光能透射光楔W,小部分光能被光楔W的两个反射面反射并被两个不同位置的CMOS探测器C1,C2。Laser (Laser) enters the system, after being reflected by the first reflector M1, the second reflector M2, the third reflector M3, and the fourth reflector M4, it is incident on the optical wedge W, and most of the light energy is transmitted through the optical wedge W , a small part of the light energy is reflected by the two reflective surfaces of the optical wedge W and is reflected by two CMOS detectors C1 and C2 at different positions.
透射光经过光阑D1、D2并最终进入后续的工作系统,光阑D1、D2所确定的直线便是我们需要校正的特定目标方向,为区别于无位置要求的一般几何方向定义,此处称之为光束方位校准。The transmitted light passes through the diaphragms D1 and D2 and finally enters the subsequent working system. The straight line determined by the diaphragms D1 and D2 is the specific target direction that we need to correct, which is different from the general geometric direction definition without position requirements. It is called here It is beam azimuth calibration.
系统首次工作前,首先人工调整第二反射镜M2、第四反射镜M4使光束准确通过两光阑,此时由CMOS探测器C1,C2所记录的光楔反射光的光斑中心位置为初始光斑中心位置,此时即唯一反映了光阑D1、D2的位置(两点确定一条直线)。若入射光束方位发生偏移,两探测器上的光斑中心也相应发生偏移。Before the system works for the first time, manually adjust the second mirror M2 and the fourth mirror M4 to make the light beam pass through the two apertures accurately. At this time, the center position of the beam spot of the wedge reflected light recorded by the CMOS detectors C1 and C2 is the initial spot The center position, at this time, uniquely reflects the positions of the diaphragms D1 and D2 (the two points determine a straight line). If the azimuth of the incident beam is shifted, the centers of the light spots on the two detectors will also shift accordingly.
系统工作时,CMOS探测器C1和C2上实时测得的光强分布信息输入到基于单片机开发的控制器10,控制器10通过光斑中心偏移量信息实时反馈控制第二反射镜M2和第四反射镜M4的偏转或平移,使出射光束能实时自动校准恢复原方位。When the system is working, the real-time measured light intensity distribution information on the CMOS detectors C1 and C2 is input to the controller 10 developed based on the single-chip microcomputer, and the controller 10 controls the second reflector M2 and the fourth reflector M2 and the fourth reflector M2 in real time through real-time feedback information on the center offset of the light spot. The deflection or translation of the mirror M4 enables the outgoing beam to be automatically calibrated and restored to its original orientation in real time.
在图1中,在光束准确通过光阑D1、D2时,探测器C1、C2记录的光斑中心位置即反映了D1、D2(双靶)所确定的光束方位。当光束发生偏移时,便可由上述获得的偏移量信息反馈控制可调反射镜调节光束方位,当C1、C2上的光斑中心回到初始记录的位置,光束也就恢复到D1、D2确定的原方位。In Fig. 1, when the light beam passes through the apertures D1 and D2 accurately, the central positions of the light spots recorded by the detectors C1 and C2 reflect the beam azimuth determined by D1 and D2 (double targets). When the beam is offset, the offset information obtained above can be used to control the adjustable mirror to adjust the beam orientation. When the center of the spot on C1 and C2 returns to the original recorded position, the beam will return to D1 and D2 to determine the original location.
区别于已见公开或报道的其他光束方向校正或对准(单靶)技术,本实施例采用基于转镜平移法的双靶校准光路。图1中第二反射镜M2和第四反射镜M4都分别由步进电机和电控平移台驱动(在其他实施例中,可采用例如压电陶瓷振镜和纳米平移台等较昂贵的器件,可获得更高的调节精度,但成本相对较高),其中第二反射镜M2可控制在XY平面水平偏转,并可沿光束方向(Y方向)平移;第四反射镜M4则可控制在XZ平面竖直偏转,并可沿光束方向(X方向)平移。Different from other beam direction correction or alignment (single target) technologies that have been published or reported, this embodiment adopts a dual-target calibration optical path based on the rotating mirror translation method. In Fig. 1, the second reflector M2 and the fourth reflector M4 are all driven by stepper motors and electric control translation stages respectively (in other embodiments, more expensive devices such as piezoelectric ceramic oscillating mirrors and nano-translation stages can be used , higher adjustment accuracy can be obtained, but the cost is relatively high), in which the second mirror M2 can be controlled to deflect horizontally in the XY plane, and can be translated along the beam direction (Y direction); the fourth mirror M4 can be controlled in The XZ plane deflects vertically and can translate along the beam direction (X direction).
在XY平面上(图1)光束与第二反射镜M2呈约90度反射,第四反射镜M4比第二反射镜M2和第三反射镜M3的位置略低,如图2所示。On the XY plane ( FIG. 1 ), the light beam is reflected at about 90 degrees by the second mirror M2, and the fourth mirror M4 is slightly lower than the second mirror M2 and the third mirror M3, as shown in FIG. 2 .
第二反射镜M2的平移可使光束产生水平方向平行位移。另一方面,在XY平面上(图1)光束于第四反射镜M4基本沿原路返回,故第四反射镜M4的平移只会使光束产生竖直方向的平行位移。The translation of the second mirror M2 can cause the light beam to generate parallel displacement in the horizontal direction. On the other hand, on the XY plane ( FIG. 1 ), the light beam returns to the fourth mirror M4 basically along the original path, so the translation of the fourth mirror M4 will only cause a vertical parallel displacement of the light beam.
第二反射镜M2的平移在校正光束的水平方向平移量的同时,第四反射镜M4的平移对竖直方向的平移量有调节作用,水平与竖直两个方向的平移量可以分别独立校准,因此基于上述校准流程可以对水平和竖直方向的角度、平行偏移量进行准确校正。While the translation of the second mirror M2 is correcting the horizontal translation of the light beam, the translation of the fourth mirror M4 can adjust the translation of the vertical direction, and the translation of the horizontal and vertical directions can be independently calibrated , so the angle and parallel offset in the horizontal and vertical directions can be accurately corrected based on the above calibration process.
实施例三:Embodiment three:
本实施例三为一种光束方位的校准方法,实施例二可结合本实施例三成为更优选的实施方案。The third embodiment is a method for calibrating the beam orientation, and the second embodiment can be combined with the third embodiment to become a more preferred implementation.
本实施例三的光束方位的校准方法,包括第一光学镜、第二光学镜、第三光学镜、第四光学镜、光楔、光接收装置和控制器,该方法包括以下步骤:The beam orientation calibration method of the third embodiment includes a first optical mirror, a second optical mirror, a third optical mirror, a fourth optical mirror, an optical wedge, a light receiving device and a controller, and the method includes the following steps:
A、首先人工调整第二光学镜、第四光学镜使光束准确通过两光阑,此时由光接收装置检测的光楔反射光的光斑中心位置为初始光斑中心位置;A. First, manually adjust the second optical mirror and the fourth optical mirror so that the light beam accurately passes through the two apertures. At this time, the central position of the light spot of the reflected light of the optical wedge detected by the light receiving device is the initial central position of the light spot;
B、将光束先后经过第一光学镜和第二光学镜的反射后,从第四光学镜上方或下方经过,并经由第三光学镜与第四光学镜反射后从第三光学镜下方或上方射至光楔,光楔两个反射表面所反射的光束均用光接收装置接收;B. After the light beam is reflected by the first optical mirror and the second optical mirror, it passes above or below the fourth optical mirror, and after being reflected by the third optical mirror and the fourth optical mirror, it passes below or above the third optical mirror The light beams reflected by the two reflective surfaces of the light wedge are received by the light receiving device;
C、光接收装置实时检测所接收光束的光斑中心的偏移信息,并将偏移信息传输给控制器;C. The light receiving device detects the offset information of the spot center of the received light beam in real time, and transmits the offset information to the controller;
D、控制器根据偏移信息控制第二光学镜和第四光学镜做平移或转动,以改变光楔两个反射表面所反射光束的光斑中心偏移位置;D. The controller controls the second optical mirror and the fourth optical mirror to translate or rotate according to the offset information, so as to change the offset position of the spot center of the light beam reflected by the two reflective surfaces of the optical wedge;
对于上述步骤所述的方案,所述光接收装置具有两个,分别用于检测光楔两个反射表面所反射光束的光斑中心的偏移信息,两个光接收装置与光楔反射点距离不同。For the scheme described in the above steps, the light receiving device has two, which are respectively used to detect the offset information of the spot center of the light beam reflected by the two reflective surfaces of the optical wedge, and the distance between the two light receiving devices and the reflection point of the optical wedge is different. .
控制第二光学镜和第四光学镜做转动,使两个光接收装置各自检测的偏移信息趋向于相同,并减少所述光斑中心的偏移量;控制第二光学镜做平移,可改变所述光斑中心在水平方向上的偏移位置;控制第四光学镜做平移,可改变所述光斑中心在竖直方向上的偏移位置。重复控制第二光学镜平移和第四光学镜平移,以减少所述光斑中心的偏移量。Control the second optical mirror and the fourth optical mirror to rotate, so that the offset information detected by the two light receiving devices tends to be the same, and reduce the offset of the spot center; control the second optical mirror to translate, which can change The shift position of the center of the light spot in the horizontal direction; the shift position of the center of the light spot in the vertical direction can be changed by controlling the translation of the fourth optical mirror. Repeatedly control the translation of the second optical mirror and the translation of the fourth optical mirror to reduce the offset of the center of the light spot.
所述光接收装置为面阵光电探测器,控制器根据光接收装置检测到的光斑光强分布信息计算所述光斑中心的偏移量大小,并根据偏移量大小自动控制第二光学镜和第四光学镜以校准光束的出射方位。The light receiving device is an area array photodetector, and the controller calculates the offset of the spot center according to the light intensity distribution information detected by the light receiving device, and automatically controls the second optical mirror and the second optical mirror according to the offset. The fourth optical mirror is used to calibrate the outgoing orientation of the light beam.
要对光束(激光束)实现实时的方位校准,首先要对其进行定位。参考图1所示的光路原理可知,对激光束定位实际上是要确定两个探测器上的光斑中心坐标。我们采用CMOS作为探测器,可以获得绝对位置信息以及全面的光强横向分布信息。To achieve real-time azimuth calibration of the beam (laser beam), it must first be positioned. Referring to the principle of the optical path shown in Figure 1, it can be seen that the positioning of the laser beam is actually to determine the center coordinates of the light spots on the two detectors. We use CMOS as the detector, which can obtain absolute position information and comprehensive lateral distribution information of light intensity.
另外,考虑到不同的应用需求,系统中采用两套不同的定位算法,使用中两套算法可自由切换。In addition, considering different application requirements, two different positioning algorithms are used in the system, and the two sets of algorithms can be switched freely during use.
(1)第一套算法为快速定位算法,由基于单片机的控制器进行运算,用于精度要求不高但实时速度要求高的场合。此处将CMOS像面看作四象限探测器的像面进行运算处理。(1) The first set of algorithms is a fast positioning algorithm, which is operated by a controller based on a single-chip microcomputer, and is used in occasions where the accuracy is not high but the real-time speed is high. Here, the CMOS image plane is regarded as the image plane of a four-quadrant detector for calculation and processing.
如图3所示,把CMOS像素阵列分为四个象限,落在其上的光斑也被分为四部分,其面积分别标为SⅠ、SⅡ、SⅢ、SⅣ。这四部分光斑面积的大小反映了光斑中心对于感光面中心(四个象限的原点)偏移量的信息。对四个象限分别进行像素灰度值求和,得到的值分别正比于四部分光斑面积,而光斑中心偏移量Δx和Δy则可表示为以下计算公式:As shown in Figure 3, the CMOS pixel array is divided into four quadrants, and the light spots falling on it are also divided into four parts, and their areas are respectively marked as S Ⅰ , S Ⅱ , S Ⅲ , and S Ⅳ . The size of the four parts of the light spot area reflects the information of the offset of the center of the light spot relative to the center of the photosensitive surface (the origin of the four quadrants). The pixel gray values of the four quadrants are summed separately, and the obtained values are respectively proportional to the areas of the four spots, and the spot center offsets Δx and Δy can be expressed as the following calculation formulas:
式中k为常系数(对于确定的光源,该系数是确定的,对不同的光源需要校准系数k)。此算法计算速度较快,采用间隔取点的方式可进一步提高处理速度。In the formula, k is a constant coefficient (for a certain light source, the coefficient is determined, and the calibration coefficient k is required for different light sources). This algorithm has a fast calculation speed, and the method of taking points at intervals can further improve the processing speed.
(2)第二套算法为精确定位算法,用于精度要求高但实时速度要求不高的场合。优选由上位机(如图1所示的计算机20)进行运算,上位机与控制器通讯连接。计算公式为:(2) The second set of algorithms is an accurate positioning algorithm, which is used in occasions that require high precision but low real-time speed. Preferably, the calculation is performed by a host computer (computer 20 shown in FIG. 1 ), and the host computer communicates with the controller. The calculation formula is:
其中,即为计算得到的光斑中心坐标值,I(xi,yi)为探测器感光面上第i个像素元获得的光强,xi、yi为第i个像素元的坐标值。in, That is, the calculated center coordinates of the spot, I( xi , y i ) is the light intensity obtained by the i-th pixel on the photosensitive surface of the detector, and x i and y i are the coordinates of the i-th pixel.
上述(2)式的一阶矩计算方法适合单模及多模分布的情形。此方法能够充分利用CMOS传感器获得的光强分布信息,对光斑落在感光面上的任意情形均可获得精确的光斑中心坐标信息。如对于图4所示情形,第一套定位法无法获得光斑中心坐标,而此方法则不受限制,这是此方法的优点之一。The first-order moment calculation method of the above formula (2) is suitable for single-mode and multi-mode distributions. This method can make full use of the light intensity distribution information obtained by the CMOS sensor, and can obtain accurate center coordinate information of the light spot for any situation where the light spot falls on the photosensitive surface. For the situation shown in Figure 4, the first positioning method cannot obtain the center coordinates of the spot, but this method is not limited, which is one of the advantages of this method.
第二套算法的优选方案是,由于探测器检测到的实际光斑强度分布图像中通常存在噪声,对光斑分析有一定影响。故在定位计算前,可先利用空间域稀疏约束算法进行去噪处理。具体而言,先对光斑图像进行稀疏主成分分析,得到小波滤波器组,借助其将图像变换到小波域,并进行阈值化处理,最后再进行逆小波变换。对不同的光源只需在更换光源初始进行一次稀疏主成分分析即可。去噪处理后的光斑图像质量将得到明显改善,但不会改变原光斑特征。随后,再采用(2)式所示的一阶矩计算光斑中心坐标偏移量。The optimal scheme of the second set of algorithms is that noise usually exists in the actual spot intensity distribution image detected by the detector, which has a certain influence on the spot analysis. Therefore, before the positioning calculation, the spatial domain sparse constraint algorithm can be used for denoising processing. Specifically, the sparse principal component analysis is performed on the spot image first to obtain the wavelet filter bank, which is used to transform the image into the wavelet domain and perform thresholding processing, and finally the inverse wavelet transform is performed. For different light sources, it is only necessary to perform a sparse principal component analysis at the beginning of changing the light source. The quality of the spot image after denoising will be significantly improved, but the original features of the spot will not be changed. Subsequently, the first-order moment shown in formula (2) is used to calculate the center coordinate offset of the spot.
实施例四:Embodiment four:
本实施例四为一种应用于上述实施例的校准方法,本实施例四可结合之前的实施例二或实施例三形成更优的实施方案。The fourth embodiment is a calibration method applied to the above embodiments, and the fourth embodiment can be combined with the previous embodiment two or three to form a better implementation solution.
本实施例一种光束方位的校准方法,包括以下步骤:In this embodiment, a method for calibrating beam orientation includes the following steps:
a、两个光接收装置分别实时监测光楔两个反射表面所反射光束的光斑偏移信息,光斑偏移信息由光斑中心坐标与初始中心坐标计算得到,利用所述光斑偏移信息以及两个光接收装置的光程差实时计算光束在水平及竖直方向的角度偏移量;a. The two light receiving devices respectively monitor the spot offset information of the light beams reflected by the two reflective surfaces of the optical wedge in real time. The spot offset information is calculated from the center coordinates of the spot and the initial center coordinates. Using the spot offset information and the two The optical path difference of the light receiving device calculates the angular offset of the beam in the horizontal and vertical directions in real time;
b、控制第二光学镜和/或第四光学镜转动,减少所述光束的角度偏移量;b. controlling the rotation of the second optical mirror and/or the fourth optical mirror to reduce the angular offset of the light beam;
c、循环步骤a、b,使所述角度偏移量不断减小至最小或低于误差容限;c. Repeat steps a and b to continuously reduce the angular offset to a minimum or lower than the error tolerance;
d、利用所述光斑中心坐标和初始中心坐标,实时计算光束在水平方向上的横向偏移量以及光束在垂直方向上的竖向偏移量;d. Using the center coordinates of the spot and the initial center coordinates, calculate the lateral offset of the beam in the horizontal direction and the vertical offset of the beam in the vertical direction in real time;
e、调节第二光学镜和/或第四光学镜平移,减小光束的横向及竖向偏移量;e. Adjust the translation of the second optical mirror and/or the fourth optical mirror to reduce the lateral and vertical offset of the light beam;
f、循环步骤d、e,使所述横向及竖向偏移量减至最小或低于误差容限。f. Repeating steps d and e, reducing the horizontal and vertical offsets to a minimum or lower than the error tolerance.
对于只需单靶对准的应用场合,只需循环执行上述步骤d-f即可实现精确的对准。且由于将敏感的角度偏转量转化为不敏感的平移量,使用同等器件前提下,调节精度比之只利用转镜的方法将得到显著提高。本系统校准光路简洁,对于单靶对准应用可做到非常高的精确度,对于方位偏移校正(双靶)应用,平移法也可在较大程度上弥补了普通步进电机角度调节精度的不足。For applications that only require single-target alignment, the precise alignment can be achieved by performing the above steps d-f cyclically. And because the sensitive angular deflection is converted into an insensitive translation, under the premise of using the same device, the adjustment accuracy will be significantly improved compared with the method of only using the rotating mirror. The calibration optical path of this system is simple, and it can achieve very high accuracy for single-target alignment applications. For azimuth offset correction (double-target) applications, the translation method can also make up for the angle adjustment accuracy of ordinary stepping motors to a large extent. lack of.
根据上述说明书的揭示和教导,本发明所属领域的技术人员还可以对上述实施方式进行变更和修改。因此,本发明并不局限于上面揭示和描述的具体实施方式,对本发明的一些修改和变更也应当落入本发明的权利要求的保护范围内。此外,尽管本说明书中使用了一些特定的术语,但这些术语只是为了方便说明,并不对本发明构成任何限制。According to the disclosure and teaching of the above-mentioned specification, those skilled in the art to which the present invention belongs can also make changes and modifications to the above-mentioned embodiment. Therefore, the present invention is not limited to the specific embodiments disclosed and described above, and some modifications and changes to the present invention should also fall within the protection scope of the claims of the present invention. In addition, although some specific terms are used in this specification, these terms are only for convenience of description and do not constitute any limitation to the present invention.
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