TW200827078A - Scanner optical system, laser processing apparatus, and scanner optical device - Google Patents

Abstract

This invention provides a scanner optical system which enables a stable optical scanning at high speed by scanning an object with light while the scanning speed is varied. It is a laser processing apparatus 1 for performing a laser-processing by irradiating a surface of a work 98 to be processed with laser light outputted from a laser oscillator 2, the laser processing apparatus 1 has an AOM5 for regulating the intensity of the laser light and a scanner head 7 for vector-scanning with the laser light the surface of the work to be processed at a given scanning speed from zero level. The AOM5 is adapted to regulate the intensity of the laser light in proportion to the vector scanning speed of the laser light from the scanner head 7, or such that the energy density of the laser light is approximately constant.

Description

200827078 IX. Description of the Invention: [Technical Field] The present invention relates to a scanner optical system for deflecting an irradiation position of light emitted from a light source on an object, and laser processing having the optical system of the scanner Device. Further, the present invention relates to a scanner optical device that deflects light emitted from a light source to scan an object, and a laser processing device including the scanner optical device. [Prior Art] ® A laser processing apparatus that performs processing by irradiating laser light onto a workpiece, generally has a scanner optical that deflects the optical path of the laser light to make the irradiation position on the workpiece "variable" System (refer to, for example, Patent Document 1). Further, in recent years, as for the scanner optical system, a galvanometer scanner having a rotatably held around a rotating shaft and capable of positioning the reflecting surface at an arbitrary angle is known. A galvanometer mirror is controlled, and the rotation of the galvanometer mirror is controlled by servo control to change the irradiation position at high speed and with high precision. By using the galvanometer scanner for the laser processing apparatus, the workpiece can be processed at a high speed to shorten the processing time. [Patent Document 1] JP-A-2004-358507 SUMMARY OF INVENTION (Problems to be Solved by the Invention) However, a scanner optical system capable of changing an irradiation position at a high speed using a galvanometer scanner will be used. When the laser scanning speed is variable while the laser scanning speed is variable, the energy density of 5 319 707 2008 270 78 ι / laser light at the irradiation position is not necessarily due to the change of the scanning speed, and the processing quality is lowered. . However, there is a problem that the processing depth is not limited to the laser processing device due to the energy density of the laser scanning: the problem of the second = 'not, * X 丄 49 W 1 is as high-speed as the light is drawn on the drawing surface. In the riding device that rides the material, the problem of the measuring device is checked and measured in the ====:::. The reason why the difference is that the correct measurement result cannot be obtained is that the developer has made the above problem, and the object of the invention is to provide a light scanning that can change the scanning speed at the same speed and scan the object with light. Scanner light m and a laser that can scan a workpiece at a high speed with laser light and can perform high-product f addition: tooling (means for solving the problem), in order to achieve the above object, the present invention is a light source The scanner optical system that scans the object and irradiates the light to the object, and has a light intensity adjusting means for adjusting the intensity of the light; and the deflecting means 2 biases the light toward a predetermined position of the object. At the same time, the light is deflected toward the predetermined scanning speed from the zero level, and the light intensity adjusting means is proportional to the scanning speed of the light caused by the biasing means or the energy density of the light is substantially In a certain way to adjust the intensity of the aforementioned light. Further, in the foregoing scanner optical system, the aforementioned biasing hand 319707 6 200827078 #also has a scanning mirror; a driving motor for driving the scanner mirror; and a controller for driving the motor; The driving motor is provided with an encoder for outputting a digital pulse signal according to the driving amount of the Sweeping &Mirror; and the controller directly counts the digital pulse signal to specify the driving amount, and is executed according to the driving For the feedback control of the aforementioned drive motor output control signal. Further, in the scanner optical system of the present invention, the deflecting means _ has an X-axis deflecting means for deflecting each of the axis and the γ-axis direction which are orthogonal to each other in the plane of the object, and Y Axis • έ "hand, and the biasing by the X-axis biasing means and the biasing by the Y-biasing means simultaneously control the two inventions in the aforementioned scanner optical system by the same controller, The complex has: the method of gathering and tidying, because the treasury is v 乂 以 ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά ά And adjusting the distance between the lenses to adjust the deflection of the light yaw biasing means, and adjusting the distance adjustment by the focus adjustment means by simultaneously controlling the full focus of the lens by the same controller. The scanner optical system is due to! The surface adjustment means is controlled by adjusting the surface of the object to adjust the light. Further, in the above-described scanner optical system calculation means, the present invention is based on the above-mentioned pair, ',, and the object to be scanned and the scanning pattern of the other light, and the calculation is performed by 319707 7 200827078: two bias means. The above-mentioned light bias. The means, according to the above-mentioned orbital operation, and the deviation of the control light deviation, will be: Deviation: D:::,,, and the foregoing: performing feedback control; The orbital means of the orbital movement is composed of individual cPUs, and the pre-measure of the control light is scanned. ::::::Light: In the system, when the switching point is used, the edge is The foregoing switching direction switching::: the scanning direction is changed slowly: the mode of scanning = * controls the aforementioned biasing hand = the scanning direction of the scanning direction is changed and there is ^" in the aforementioned scanner optical system, The light source is the output of the laser power source of the illuminating device, and the Q/the grade adjusts the Q switch to the laser device; the (10) adjusts the door, and the laser device is the second device.音响% optical components adjust the acoustic optics And in the month, any adjustment of the vibration silk spirit weeks, by vibrating the device is based spirit field pulse laser beam emitted J described later, to adjust the intensity of the laser beam. In addition, in order to achieve the above object, the present invention provides a laser processing apparatus that irradiates laser light output from a laser oscillator to a surface of a workpiece to perform laser processing, and has a light intensity adjustment means. Adjusting the intensity of the field light; and biasing means, the laser light is polarized by 319707 200827078 I, and the processing surface of the processed object is scanned by the laser light from the zero level to a predetermined scanning speed. And the light intensity adjusting means is arranged in a manner proportional to the vector scanning speed of the laser light caused by the biasing means or the energy density of the laser light is substantially constant. strength. In addition, in the laser processing apparatus of the present invention, it is also possible to configure a trigger pulse that is triggered by the vibration of the field and the light of the field, while the input of the idle signal is input. The signal is input to the aforementioned laser oscillation state, and the pulsed laser light is input and matched with the trigger pulse signal to shield the pulsed laser light; and after being input to the other gate electrode, the signal is transmitted. The pulse laser light is shielded by the shielding means before the trigger pulse signal of the predetermined number of pulses, and the giant pulse at the initial stage of the oscillation is prevented from being irradiated to the workpiece. * In order to achieve this, the present invention is directed to a scanner optical device having a light that is output from a light source toward a subject toward a core group and the light is polarized by the deflection module Biasing:: the object is scanned, wherein, while the front _^ is being used, the light that is rotated from the light source is used and is used to bias the aforementioned member from the two The hand is first shaped and placed freely before the wheel is placed on the rail member. The present invention is in the aforementioned scanner optical device, and is used for the right angle of the right to the aforementioned focus adjustment unit. , the light intensity adjustment mode (4) W, the lightning intensity of the laser beam 7 is set to the rail member freely disassembled. 319707 9 200827078 In addition, although the laser beam has pulsed laser light and continuous oscillation laser light, it is incident on the aforementioned focus. The laser light of the adjustment unit may be any one. Further, when the focus adjustment unit is disposed on the rail member, if necessary, the optical element that is incident on the laser beam of the focus adjustment unit is required. The optical component is detachably disposed on the rail member together with the focus adjustment unit. Further, in the scanner optical device, the deflecting module supports the deflecting member and the stone platform. In addition, the biasing module may be configured to support the deflecting module by the supporting member and the stone platform. In addition, in the scanner optical device, the light source and the light source from the light source are used. The output light is guided to the stone platform of the scanner optical device and fixed to the stone platform. In addition, in the scanner optical device, the deflection module is supported by the stone platform. In the scanner optical device, the rail member is divided into a plurality of tabs along the longitudinal direction, and the tabs are arranged with a gap therebetween. Alternatively, the rail platform may be used as the base. In addition, the present invention is in the scanner optical device described above, and is attached to each of the aforementioned members. The member has a marking portion that indicates a reference to the mounting position. Further, in order to achieve the above object, the present invention provides a laser processing apparatus comprising: the scanner optical device of any of the above; and 10 319707 200827078 m:: To irradiate the laser light to the scanner optical device; the basin_description_optical skirting deflects the laser light, and the processed surface of the workpiece is processed by scanning the laser light. (Effect of the invention) According to the present invention (4) Sweeping (4) optics (4) and the laser processing device of the scanner, because the intensity of the light is adjusted in proportion to the scanning speed of the light, or the degree of the light is substantially constant, the light can be seen in the side The object is scanned at a high speed, and - : θ of the light at the irradiation position of the object - the field will achieve a stable light scan. The yaw and the degree are maintained to be substantially constant, and in addition, the laser processing device according to the present invention scans the smashing device and the optical device is replaced with a == and has the scanning surface At the same time as the line surface member, the scanner light 3 for adjusting the focus adjustment function can be adjusted by adjusting the "HfJ" method which is rotated from the light source. In addition, since the optical member for outputting the light output from the focus adjustment means and input to the deflection module can freely position the member, even if the focus adjustment means is used, the aforementioned adjustment is required. Between the optical element and the deflecting module, the optical element can be moved while being guided by the rail member, and the optical axis of the optical element 盥& Simply adjust the distance simply. (1) The following describes the embodiments of the present invention with reference to the drawings. 319707 11 200827078 v (First Embodiment) Fig. 1 is a schematic configuration diagram showing a laser processing apparatus 1 to which a scanner optical system of the present invention is applied. As shown in the figure, the laser processing apparatus 1 includes a laser device 4 including a laser oscillator 2, and a laser control device 3 for controlling the laser oscillation of the laser oscillator 2 and having a power source; AOM (Acousto Optical Modulators) 5, as a laser light intensity adjustment means; a dynamic focus lens unit 6 for use as a focus adjustment means; and a scanner head (scanner 10hesd) 7, for As a biasing means, the laser beam irradiation position of the processed surface of the workpiece 18 placed on the table 99 is made variable, and the processed surface is scanned by laser light. Further, the control unit 8 is provided as The control means controls each of the laser device 4, the AOM 5, the dynamic focus lens unit 6, and the scanner head 7. As described above, the AOM 5, the scanner head 7, and the control unit 8 constitute the scanner optical system 20 that adjusts the intensity of the laser light while scanning the processed surface at high speed with laser light. φ For a more detailed description of each component, the laser oscillator 2 is a solid-state laser oscillator, a fiber laser oscillator, a liquid laser oscillator, or a gas laser oscillator, and the output is adapted to the laser medium. Laser light of wavelength. In the present embodiment, a person who continuously oscillates laser light is used as the laser oscillator 2. The AOM 5 is a modulator that adjusts the intensity of the laser light at a predetermined frequency under the control of the control unit 8, and is outputted in the AOM 5 with a condenser lens that is output from the laser oscillator 2 and passes through two pieces. Laser light after being shaped by 9A and 9B. 12 319707 200827078

The V dynamic focus lens unit 6 is controlled by the control unit 8, and the focal length of the laser light passing through the AOM 5 is varied according to the irradiation position of the laser light on the processed surface of the workpiece 98, by which the dynamic focus is The focal length adjustment of the lens unit 6 can maintain the area of the irradiation spot of the workpiece 98 substantially constant. Further, it is of course possible to use a fe lens instead of the dynamic focus lens unit 6. In addition, in the case where the focal length is long and the processing area (the area where the laser light is scanned) is narrow, since the offset of the focus position on the processing surface is small, there is no setting of the focus adjustment of the dynamic focus lens unit 6 or the fe lens. Means the need for the scanner optical system 20. The scanner head 7 is under the control of the control unit 8, and deflects the optical path of the laser beam passing through the dynamic focus lens unit 6, so that the illumination position is opposite to the table 99 in the processing plane of the workpiece. The scanner head is variable, and the scanner head has a scanner mirror 71A that deflects the optical path to the X-axis direction, and an X-axis motor 72A for axially rotating the scanner mirror 71A; The mirror 71B deflects the optical path to the Y-axis direction orthogonal to the X-axis; and the Y-axis motor 72A for axially rotating the scanner mirror 71B; the laser light after passing through the dynamic focus lens unit 6 is condensed light The lens 1 is incident on the scanner mirror 71A, and the optical path of the laser light is deflected in a direction defined by the angles of the respective reflecting surfaces of the scanner mirror 71A and the scanner mirror 71B. Further, the XY plane formed by the X-axis and the Y-axis is defined as a plane substantially parallel to the upper surface of the table 99, and the axis orthogonal to the XY plane is defined as the Z-axis 0 13 319707 200827078 The control unit 8 is connected (built-in) to a computer system 13 having a display 11 as a display device and a keyboard 12 as an input device. In the computer system 13, a processing position (laser irradiation position), a processing depth, and a laser including a ternary shape and material of the workpiece 98 and processing the laser beam by irradiating the workpiece 9 8 are input. The processing data such as marking and trimming, and the processing type of the so-called drilling process, the computer system 13 outputs the drawing condition command signal BCS to the control unit 8 according to the processing data during laser processing, and controls The unit 8 controls the laser device 4, the AOM 5, the dynamic focus lens unit 6, and the scan head 7 in accordance with the ® drawing condition command signal BCS. Fig. 2 is a block diagram showing the configuration of the aforementioned control unit 8. As shown in the figure, the control unit 8 has two DSPs 80A and DSPs 80B as arithmetic processing means. It is also possible to use the CPU instead of the DSP in the arithmetic processing device of the DSP 80A and the DSP 80B. The DSP 80A system function is: the execution path calculation unit 81, based on the shape of the workpiece 98 (for example, CAD data) indicated by the conditional command signal BCS described above, and the scanning pattern of the laser light for the workpiece 98. a moving orbit (ie, a scanning track) of the irradiation position of the laser beam of the workpiece 98 is calculated; and a distortion correcting portion 82 for illuminating the position due to the movement of the irradiation position in the XY plane ( The offset (distortion) of the image point is corrected; the aforementioned DSP mainly performs arithmetic processing based on the drawing condition command signal BCS input from the computer system 13. By the calculations of the execution computing unit 81 and the distortion correcting unit 82, the XY coordinate command value of the laser light irradiation position is output every predetermined time (for example, within several tens of ps), 14 319707 200827078

V The various values of the command value such as the focal length of the XY coordinate value and the laser output command value indicating the intensity of the laser light. The DSP 80B mainly performs control of the laser device 4, variable focus control by the dynamic focus lens unit 6, deflection control of the laser light by the scan head 7, and illumination position, scanning speed, and illumination. The point area corresponds to the laser light intensity control and other parts of the drive control. The DSPs 80A and DSPs 80B are synchronized with each other and perform processing in accordance with clock signals generated by a clock generator (not shown). In addition, the control unit 8 is provided with a shared data memory 83 accessible from each of the two DSPs 80A and 80A. Each of the DSPs 80A and DSP80B shares data through the shared data memory 83. In the common data, there are, for example, an instruction command of the DSP 80A for the instruction of the DSP 80B, a confirmation command from the DSP 80B to the DSP 80A with respect to the instruction command, and the DSP 80B has executed the instruction command for the DSP80A. In addition to various commands such as the end of the notification, such as DSP80A and 80B, there are still XY coordinate command values of the laser light irradiation position that the DSP 80A outputs at predetermined intervals, and a focus command value corresponding to the XY coordinate command value. And various command values for the laser output command value indicating the intensity of the laser light. Then, the various command values output from the DSP 80A to the shared data memory 83 are read by the DSP 80B, and the drive control of each unit is executed based on the command values. As described above, the control unit 8 includes two DSPs 80A and DSPs 80B, and is configured such that the arithmetic operations such as the orbit calculation and the distortion correction are performed, and the drive control processes for driving and controlling the respective units are respectively used. Since the different DSPs 80A and 80 are executed, there is no case where the deflection control of the scanning head 7 and the intensity control of the cymbal 5 are delayed due to the arithmetic processing, and the scanning speed of the laser light can be increased to increase the processing speed. Next, for the detailed description of the driving control by the aforementioned DSP 80B, the DSP 80B controls the laser power by controlling the laser power control signal to the laser control device 3 via the D/A converter 88 according to the laser output command value. At the same time, in order to adjust the intensity of the laser light, the AOM5 output intensity 10 control signal is further controlled. Further, according to the XY coordinate command value and the focus command value, the X-axis motor 72A, the Y-axis motor 72B, and the DF motor 91 are controlled to be controlled by the dynamic focus lens unit. The focal length and the deflection by the scanning head 7 are controlled to control the irradiation position of the laser beam on the processed surface of the workpiece 98. In the present embodiment, in order to realize the high-precision irradiation position control 67, a close loop control system as a control system of the dynamic focus lens unit 6 and the scanning head 7 is constructed, and the following is a description of the structure. As shown in Fig. 2, the X-axis motor 72A and the Y-axis motor 72B of the scanning head 7 are provided with encoders 90A and 90B, and digital pulse signals corresponding to the number of pulses of the scanner mirrors 71A and 71B. SA and SB are output to the control unit 8; and the dynamic focus lens unit 6 is provided with an encoder 90C for DF (Dynamic Focus) motor that drives an optical system (not shown) that varies the focal length. 91 and the number of pulses of the driving quantity of the optical system are output to the control unit 8; in addition, the control unit 8 is provided with: a counter circuit 84, 16 319707 200827078

The V system is input with the digital pulse signals SA to SC which are rotated from the respective encoders 90A to 9〇c, and counts the digital pulse signals SA^ to the DSP 80B. The DSP surface is based on the count values of the respective digital pulse signals SA to SC counted by the counting circuit 84, the rotation amount of the specific scanner mirror 7}, 7]β, and the driving amount of the optical system of the dynamic focus lens unit 6. In turn, the lamp coordinate value of the current laser light irradiation position and the current focal length are specified. The DSP8〇B system has a position comparing unit 85 that acquires a χ coordinate finger = stored in the laser light irradiation position of the shared data memory 83, and a focal length command value corresponding to the χ γ coordinate command value, and The command values are compared with the current values, and the deviation signals are output to the motor control unit 87; and the signal output adjustment unit % obtains the lasers stored in the shared data memory in synchronization with the front coordinate command values and the focus command values. The command value is output and the control signal is output for A0M5 (g should also be opposed to 3). The motor control unit 87 uses a digital control signal for canceling the deviation based on the deviation signal from Dsp_ for the drive circuit 92A of the re-axis motor, the drive circuit 92b of the Y-axis motor 72B, and the π motor 91. Each of the drive circuits 92c outputs a negative feedback (called a ve feedback) controller. Each of the drive circuits 92A to 92 (when the digital control signal is input) outputs a drive current to the X-axis motor 72A, the γ-axis motor 72β, and the df motor, whereby the x-axis motor 72α and the γ-axis motor 72Β, And the Dp motor 91 is driven. As described above, in the control unit 8, the output digital pulse 319707 17 200827078 signal SA to SC 66 sister-a, ,, horse state 90A to 9OC, say ten The circuit 84, the DSP 80B, the motor μ μ & & 、 87, and the drive circuits 92 Α to 92 C constitute a closed loop control system, and drive the 79 ' 'Guy 79 Δ and elbow motors 72 Α, 72 Β, 91 with high precision Compensation is made. Pull + _ ^ ^ — , ^, can realize the motor control with high precision, that is, the encoders 90Α to 90c are configured as the rotation amount detecting means of the motors 72α, 72β, and 9], so that it becomes possible The digits (4) of the boring motor DA, the cymbal horse 72B, and the DF motor 91 are performed, and the detection error can be suppressed to a minimum as compared with the configuration in which the motor rotation amount is controlled based on the analog detection signal corresponding to the rotation amount. , in order to achieve higher precision photos Position control can now be irradiated penetration of high-precision machining of the workpiece surface 98 of the position control system using another Bu Since the use of the output pulse signal to a digital%

Further, since each of the X-axis motor 72A, the γ-axis motor 72β, and the df motor 91 is simultaneously controlled by the DSP 8GB, the deflection of the X-axis direction and the Y-axis direction of the laser light and the pupil distance from the z-axis direction are obtained. By controlling the mutual φ and controlling the shift between the axes while suppressing the rotation between the axes, it is possible to achieve more precise irradiation position control. In the above configuration, when the drawing condition command signal BCS is input from the computer system 13 to the control unit 8, the DSp8A of the control unit 8 calculates the processing of scanning the workpiece θ98 by the laser light according to the drawing command signal BCS. The positional orbit is illuminated while in-plane, and the χ-coordinate value of each illumination position is corrected for distortion. In addition, the DSP80A calculates the laser light intensity according to the processing degree, the material of the workpiece 98, and the type of processing at each irradiation position. At the same time, the line width, the coordinate value and the processing surface of the scanning surface are 319707 18 200827078 | i Concave and manipulate the focal length. In the calculation of the irradiation position, the calculation is performed by scanning the line of the line of the machined surface of the workpiece 79 with a vector scan, or calculating the line of the plurality of machining points that join the machined surface by the vector at the shortest distance. Defend. Further, in the above-described laser light intensity calculation, the DSP 80A calculates the laser light at each focus position so that the energy density of the laser light per unit area of each irradiation position is substantially constant irrespective of the scanning speed of the laser light. strength. ® In detail, when the laser light output and the irradiation spot area of the laser device 4 are constant, as the scanning speed of the laser light becomes faster, the energy density per unit area becomes smaller, and the scanning speed is slower. Between the processed part and the part processed at a fast scanning speed, there is a difference in processing depth and the like, and the processing quality is impaired. Therefore, in the case where the laser light output and the irradiation spot area of the laser device 4 are constant, the DSP 80A increases the intensity of the 10 laser light as the scanning speed of the laser light becomes faster; in addition, the scanning speed or/and the irradiation of the laser light In the case where the point is variable or when the laser light output of the laser device 4 fluctuates, the DSP 80A calculates the intensity of the laser light so that the energy density per unit area at the irradiation point becomes substantially constant. Further, the DSP 80A writes the XY coordinate command value indicating the irradiation position of the processed surface of the workpiece 98, the focus command value at the irradiation position, and the laser light intensity command value to the shared data memory 83, DSP80B, every predetermined time. Then, in synchronization with the writing by the DSP 80A, the AOM 5 is synchronized with the DF motor 91 of the dynamic focus lens unit 6, the X-axis horse 19 319707 200827078 of the scan head 72, and the Y-axis 逵 79Pr transport 2β. Simultaneously, the machined surface 98 is processed by scanning the machined surface 98 with a two-degree smear. Therefore, as shown in the first diagram, DSp8〇B moves the irradiation position of the laser light from the position (the origin position (h_e ps曰ition)) PH which is deviated from the workpiece 98 to the vector scanning start point & Up to the end, and when moving from the inward sweep U point to the next vector scan start, point &, the X-axis = up to 72 Α and the γ-axis motor 72 Β drive pitch is increased, and the irradiation position is idling To the start of the vector scan, in addition, in the vector scan, the driving pitch is made small, and η + + & controls the illuminating light to be correctly irradiated to the predetermined irradiation position. In addition, when the irradiation position of the field light is moved from the origin position to the start point & the Dsp coffee system only adjusts the focal length of the motor 91 by the coarse movement of the motor (91), and the vector scanning start point is straightened to a predetermined value. Yu Xiangjing 捃 士 y 不 不 仕 仕 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The daily Km fretting action causes the beam diameter to become a predetermined value regardless of the shame position on the machined surface. The processing object 98 having the unevenness on the processing surface is scanned by the laser light to make the Dsp8〇B system match the irradiation position to the south of the convexity, so that the dynamic focusing lens unit 6 is added. The motor 91 advances the above-described micro-motion to maintain the beam straightly. In the case where the height difference of the surface unevenness is relatively large, in the vector sweeping, the micro-movement of the motor 91 maintains the beam diameter at a constant value: 319707 20 200827078 l · - Therefore, in this case, the DF motor 91 is coarsely moved in synchronization with the x-axis motor 72A, and the Y-axis motor 7 is driven by the second motor and the second motor. It is also possible to drive the synchronization and to perform the coarse movement and the focus position adjustment in the micro-motion. In addition, the vector scanning is performed, and the irregularities of the processing surface are broken, and the processing of the workpiece 98 is performed, and the / Α - 差 差 差 差 差 差 差 降 降 降 降 降 降 降 降 降 降 降 降 降 降 降 降 降 降^When the data of the one-face shape is not included in the data of the concave and convex, the distance from the distance measured by the processing surface is used, and the time is Mm. (4) The heart is scanned in advance in the vector scan or before the scan. The height difference of the unevenness of the T-processed surface is also described by the laser processing device of the processing object of the workpiece. Figure 3 is a diagram showing the state of the vector scan. The illustrated Dsp8〇B is shown in the figure [in the case of a laser scanning vector, the scanning direction K is - (the L is straight ^ J ^ ^ ^ , # ^ ^ ^ ( ^ ^ (3) While starting the scanning speed, the scanning point is started from the vector scanning start point. The laser scanning is performed when the scanning speed is up to the reading speed reading speed, and scanning is performed on the road in the state of holding the scanning speed. In order to speed up the processing time, this ^•' is as shown in Fig. 3 'When there is a switching point q of the switching scan 2 on the track L', it is generally difficult to institutionalize NVC. The direction of the insertion is discontinuously switched, and the enemy makes the sweep 319707 21 200827078 before the switching point Q, so that the laser scanning is temporarily stopped at the switching point Q, and then the lightning broadcaster is at the switching point Q. VI has just married Zheng Jun, who has been carried out in the past. In other words, the control system that starts scanning starts from the right of the switch L to the switching point Q. Once the scanning is stopped, there will be time required for the railroad households (also That is, the problem of prolonged laser processing time). For τ / : in the form of "perform" When Q is present on the road L, it is controlled. (4) Time extension is performed as follows: #瞀光扫描(The yaw part t is the track of the DSP8〇A as described in Fig. 2 ;: After the operation of the laser light for vector scanning, if there is a switching point Q on the way, it will be corrected as the starting point, and the scan will be set to a previous scan than the switching point Q. The direction switching person $L is set to be at the front of the switching point Q. The road is connected with the easing curve. The DF is used to go to the n-axis. The X-axis motor 72A and the Y-axis are used. When the motor 72B and the laser light scanning control along the track are executed while driving the motor VB, when the sustaining position reaches the scanning direction switching start point Qs, the laser light continues to extend the curve of the Rr. After sweeping Q, the scanning direction K of the laser light will change slowly to the end point of the curve by the switching point = κ, and at the end position of the curve Rr, that is, the switching of the scanning direction κ of the e, and ji beam laser light Carry along

Shooting light. As a result, since it becomes unnecessary to stop at the switching point Q, it is possible to prevent the scanning of the track L from being required, and to realize high-speed laser processing. 319707 22 200827078 - The switching angle between the starting point ❼ and the meeting point Qe is the switching angle of the point of the track L and the predetermined distance iTe from the switching point Q. The incumbent distance m is often a constant θ If the smaller, the curvature of the curved track Rr will be larger. For example, in the figure of the brother 3, 'the switching angle θ3 of the switching point Q3 is smaller than the switching point...the switching angle θ θ ' is smaller than the switching point Q1, so the page is often in a certain situation from the switching point Q1. The curve f of Q2, such as Rr2, is larger at the curve track of the switching point Q3. When the curvature of the stomach curve track Rr becomes larger, the laser beam scanning along the curved track r, that is, the scanning direction κ is required to be changed rapidly, and the X-axis motor 72A, the γ-axis motor 72, and the Μ motor are provided. 9 ' system = difficult. Therefore, in the case where the DSP 8A makes the predetermined distances Ts, h to be one and the scanning direction switching start point (^ and the convergence point Qe), when the switching angle 切换 of the switching point Q is below the predetermined threshold Θ th At this time, the scanning speed before the scanning direction switching start point Qs and the speed start point Qd are set on the track L, and the χγ coordinate command value is generated so that the scanning speed is reduced from the deceleration starting point Qd. The threshold value of 0 is the minimum value of the switching angle of the curvature that can be continuously scanned while maintaining the maximum scanning speed. As described above, since the DSP 80A sets the deceleration start point Qd and will scan from the deceleration start point Qd The speed deceleration method performs the control for generating the χ γ coordinate value. After the laser light irradiation position 319707 23 200827078 reaches the scanning direction switching start point QS, the scanning speed is sufficiently decelerated by the control of the DSP 8 〇 B, and then the scanning speed is sufficiently decelerated. At the scanning speed, the scanning curve is traversing Rr, so that the amount of change in the scanning direction K per unit time can be depressed, and the driving of the y-axis motor 72 Α, the Υ-axis motor 72 Β, and the DF motor 91 can be driven. The irradiation position control by the motion control becomes easy. / - In addition, when the irradiation position of the spot light reaches the convergence point Qe, the DSP 80A accelerates the scanning speed until reaching the predetermined scanning speed (maximum scanning speed), and arrives at the scheduled time. After the scanning speed, the scanning speed is maintained and the laser scanning is continued. When the scanning speed is decelerated and accelerated, in order to enable the density to be constant, the laser light is accelerated or reduced in response to the deceleration and acceleration of the scanning speed. The intensity output mode outputs the laser output command value. In addition, when the switching point Q exists on the way L, Dsp8〇A does not

(4) In order to keep the predetermined distances Ts and Te constantly maintained, the rhyme mode is configured to switch the start point Qs and the convergence point Qe in the scanning direction of the trajectory L Μ; or the curvature of the curved track Rr is often set to -^ According to this configuration, the switching start point Qs and the convergence point 构成 are composed of a plurality of scans. According to this configuration, scanning is performed for taking a large scanning speed: scanning: switching angle θ of switching point Q is maximized as above Explain that, according to the slogan, the DSP surface is used to control the AOM5 and the laser light intensity is increased in proportion to the laser scanning speed of the processed object 98 + 勹枉ff &&& The laser light of the Jing Gengshi's mother's illumination position adjusts the intensity of the laser light in a roughly-determined manner. In the case of the enemy 319707 24 200827078, it can also prevent the processing of two qualities of less. "9: Ben;:::' due to the output of the digital pulse signal _ μ 9 = ^ sp sun, motor control,

The shaft motor m, y-axis motor = 糸 constitutes a closed-loop control system, and the X 庐 ϋ , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , ,

High-quality processing is performed by irradiating the position. In particular, since the code ii 9aAi9ac that outputs the digital pulse balance signal SA to s is used as the stern axis motor 72 Α, the γ axis motor, and the DF motor 91 "rotation amount detecting means" The digital control of the motor 72A, the γ-axis motor 72β, and the df motor 91 controls the rotation amount of the motor in comparison with the analog detection signal in accordance with the amount of rotation of m, and the detection error can be minimized, thereby achieving a higher precision shot position. control. In particular, in an analog detector that outputs an analog signal in response to the amount of rotation of the X-axis motor 72A, the γ-axis motor 72b, and the df motor 91, the signal corresponding to the amount of rotation is nonlinearly nonlinearly as the motor temperature rises. Since the change is made, it is necessary to correct the motor temperature, and the detection error is also increased depending on the correction accuracy. In addition, the analog detector also affects the detection accuracy due to the deterioration of the rotation amount detecting element over the years. In view of the fact that the 'according to the present embodiment' is configured to perform digital control of the X-axis motor 72A, the γ-axis motor mb, and the D]p motor 91 using the encoders 90A to 90C described above, the enemy is less susceptible to the influence of the motor temperature and Inferior to 319707 25 200827078, the high-precision illumination position control can be maintained. Further, according to the present embodiment, since the feedback control is performed on each of the X-axis motor 72A, the Y-axis motor 72B, and the DF motor 91 at the same time, the X-axis direction and the Y-axis of the laser light can be used. The direction deviation and the focal length in the Z-axis direction are synchronized with each other, and the two sides suppress the shift between the axes, whereby the irradiation position is controlled with higher precision, and higher-quality processing can be performed. _ In addition, according to the present embodiment, the control unit 8 has two DSPs 80A and 80B, and the drive control processing such as the obeying operation and the distortion correction, and the drive control processing for driving the respective units are respectively performed by Since the different DSPs 80A and 80B are implemented, the deflection control of the scanning head 7 and the laser light intensity control of the A0M5 are not delayed by the arithmetic processing, and the high-precision irradiation position control can be realized while realizing the prism light. The scanning speed is increased, and the processing of sorghum can be performed in a short time. In addition, according to the present embodiment, since the focus distance of the laser light is adjusted according to the unevenness of the processed surface of the workpiece 98, the processed surface is not limited to the workpiece 98 which is flat, even if the processed surface is curved. The workpiece 98 can also be processed using lasers. According to the present embodiment, when there is a switching point Q τ on the track L, since the scanning of the laser light is controlled, even before the switching point q (the broom direction switching start point QS), even the laser light is After the scanning direction is changed, the scanning direction K changes slowly and scans, and when the scanning direction K of the laser light is switched to the scanning direction after switching, the irradiation position is located in the scanning direction K which should be switched after 319707 26 200827078 switching. The track B should be at the switching point Q. The laser scan temporarily stops at $ 〇 point ^)', so the time required for scanning is not extended, and the high catching mine is realized: the force can be: the stop road has two; f In the first embodiment described above, it is shown that the manufacturing unit 8 has a configuration in which each of the two DSPs 80A and 80B enters the memory 83. The configuration of each control unit 8A for accessing the shared data may also be as shown in FIG. 4, where D is a memory A has a memory 83A, Dsp has a memory T2, and _ is processed by each other. The composition of the information is obtained through overnight. For example, in the above-described first embodiment, although the continuation of the two til (four) snubbers 2 is exemplified, the present invention is not limited to the configuration in which the output pulse is a male yoke. In this configuration, when the intensity of the laser light is to be made to be flexible, for example, if the laser oscillator vibrates the laser for 帛Q_, the timing of the Q switch is made variable, and the laser light is made variable. The intensity is achievable and can be used. In addition, when the laser oscillator has a gutter that shields the laser light, if it has the switching timing (on or off time) of the gate or the intensity modulation of the laser oscillator In the acoustic optical element (AOM), at least one of the acoustic optical elements may be adjusted to make the intensity of the laser light variable. Further, in the above-described first embodiment, the laser light is often subjected to vector scanning during laser processing, but the present invention is not limited thereto, and the drawing is relatively long, and the table is dedicated to the lane L. There is no switching point Q or bending. In the case of the part, it is also possible to perform a raster scan in which the laser light intensity and the scanning speed are constantly maintained to be constant and the laser scanning is performed. _ Tian 319707 27 200827078 In the form of the upper division of the upper division, the scanner optical entanglement does not have the invention of the invention 20 applies to the laser processing equipment (4) This can also be applied to Light from the light source (not to continue to view the 'high-speed broadcast y and receive the second light on the moving light.) The four fans know how to draw the image, and the high-speed sweeping of the laser light is used for inspection. The second unit, the two devices that have to deflect the light at two speeds. In the second embodiment of the present invention, it is conventionally known that the second embodiment of the present invention is configured such that the y叮# silk^ can be held in a rotating light. m Scanner optically mounted at any angle is mounted on the scanner optics as described above, 2004-358507 lacks eight also α - 曰本 4 inch open

+ As shown in the No. 6 report, it is used as a value a surface when the LV laser light is scanned for processing of the workpiece. In the case where the object to be processed is scanned by light, the intensity of the irradiation light, the focus position, etc. are controlled. Scanner optical farmhouse only provides light bias to the hand ^

The user must be prepared separately; #胡敕$A 风一杜, 70 pieces of optical module for position adjustment), and it is necessary to properly arrange the optical modules or optical component disk scanner optical devices And the construction of the magic optical system /, μ well 1 outside the construction of the optical system, you need to make or make the optical module 70 pieces), the optical axis of each of the scanner optics, or = The beam diameter is aligned for each optical element or optical module to be aligned. 319707 28 200827078 The alignment of optical systems is a skilled person and is a very time consuming task for less experienced people. Therefore, in the present embodiment, a scanner optical device that can easily construct an optical system for optical scanning and a preferred laser processing device using the optical device will be described. Fig. 5 is a view showing the configuration of the laser processing apparatus 100 of the present embodiment. The laser processing apparatus 100 includes: a laser oscillator 102; a scanner/optical device 103; and a pair of mirrors 104A belonging to the optical element that guide the laser light emitted from the laser oscillator 102 to the scanner optical device 103 and 104B; and these are placed and fixed on the plate-shaped stone platform 105. In general, the stone platform 105 has a very high plane precision. By placing and fixing the optical elements on the stone platform 105 as described above, it is possible to prevent the optical axis from shifting between the optical elements and to make the optical elements The optical axis alignment becomes easy. Further, in the lenses 104A and 104B, a transmissive optical element such as a prism lens may be used instead of the mirror which is a reflective optical element. Further, when the laser oscillator 102 and the scanner optical device 103 are arranged in a straight line, that is, the laser light emitted from the laser oscillator 102 is not required to be guided to the optical element of the scanner optical device 103. The laser oscillator 102 can be a solid-state laser oscillator, a liquid laser oscillator, a gas laser oscillator, a semiconductor laser oscillator, a fiber laser oscillator, or a free-electron laser oscillator, which is not The laser control device shown is controlled to oscillate the laser light in response to the wavelength of the laser medium. As shown in FIG. 6, the laser oscillator 102 is configured to have an oscillator body 29 319707 200827078 120 in a rectangular parallelepiped shape with a built-in laser resonator, and a laser exit 121 opening to the oscillator body. Front end 120A before 120. Further, an XYZ-axis table 122 is provided on the front end portion 120A side and the rear end portion 120B side of the bottom surface of the oscillator body 120, and the other two-axis table 122 is screwed and fixed to the stone platform 105 by adjusting The XYZ axis table 122 can fine tune the optical axis of the laser oscillator 102. In this manner, in the present embodiment, although the laser oscillator 102 is placed on the stone platform 105, since the thermal conductivity of the stone platform 105 is very small, even if the laser oscillator 102 is heated, the stomach oscillator can be given The thermal effects of other optical components are minimized. Fig. 7 is an enlarged view of the scanner optical device 103. The scanner optical device 103 has an AOM (Audio Optical Modulation Element) 130 for modulating the intensity of the laser light output from the laser oscillator 102, and a dynamic focus lens 131 for adjusting the focus of the laser light. And the scanner head 132 deflects the laser light to the object; and the optical elements are attached to the straight extension 133. Further, at 10, the rail 133 is further provided with a lens 134 disposed between the dynamic focus lens 131 and the scanner head 132 as a shape for inputting the light output from the dynamic focus lens 131 to the scanner head 132. The optical elements; and the two sets of lenses 135A and 135B are optical elements for shaping the laser light incident on the AOM 130, and each of the two sets of lenses 135A and 135B is freely positionable. The scanner head 132 has a scanner mirror 1321A for deflecting the laser light, and a scanner mirror 1321B for deflecting the laser light to a direction at a predetermined angle to the deflecting direction of the scanner mirror 1321A; the motor 1322A, 30 319707 200827078 1322B, which is used to drive the scanning and crying mirrors 1321A and 132ib; and the box-shaped housing 1323, which receives the German <RTI ID=0.0>>> One frame 1323 is attached to the side, and the J-side is formed with an inlet for laser light (not shown). As shown in FIG. 5, the m and m 133 systems have an extended qiu% and a dimming 1340 extending from the crotch portion 105B of the stone platform 105, and the housing of the scanner head 132 is disposed at the elongating portion 1340. 1323's π 士 _ 丄 1 々 々 々 , , 猎 猎 猎 猎 猎 猎 猎 猎 猎 猎 猎 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 Further, the U3 system has an exit port 1324 that emits light deflected by the scanner mirror 21β. Thereafter, in the present embodiment, the deflector module is constituted by the scanner head 132, the lens 134, and the (four) 1324. The dynamic focus lens 131' maintains the irradiation spot diameter of the laser light of the target object and the irradiation position substantially when the laser beam is deflected by the scanner head 132 and the object is scanned by the laser beam. The focus distance of the laser light is variable in a second way. The dynamic focus lens 131 drives the lens system by a motor (not shown) and changes the focal length of the laser light. The motor (not shown) and the motors 1322Α and 1322 of the scanner head 132 are controlled by the control unit shown in FIG. 5, and the control unit 106 is based on the laser light of the woman's surface. The focal length is adjusted in position, and the motor of the dynamic focus lens 131 and the motors 1322A and 1322B of the scanner head 132 are synchronized with each other: instead of the dynamic focus lens 131, a ίθ lens may be used as the focus segment. ..., 咧 于 319707 31 200827078 5 AJ3M 130 is as described above, which is the modulation of the intensity of the oscillating laser light or pulsed laser light output from the laser oscillator 1〇2. The control unit 1〇6 controls the degree of processing of the depth of the field of the scanning surface of the object to be constant, in response to the driving of the motors 1322A and 1322B of the scanner head 132. The laser light intensity is variable due to the scanning speed of the laser light. In other words, when the scanning speed of the laser light is fast, the laser light intensity or the laser light density is increased by 10=the energy per unit area; on the contrary, the scanning speed is slow. At the time, the control for reducing the intensity of the laser light or the laser light density is performed, and the control of the energy per unit area of the laser light scanning day is strictly controlled. Further, the aforementioned laser light density is defined by the number of pulses per unit time of the pulsed laser light, and by making the laser light density variable, the energy of the laser light per unit area can be made variable. As shown in Fig. 7, the A0M 13〇 and the dynamic focus lens ΐ3ι are mounted on the pedestal 137, which is detachably mounted to the rail 133. In addition, each of the lenses 134, 135A, and 135B is held by the lens holder 138, and a mounting portion 139 is attached to the bottom of the lens holder 138. The rail mounting portion 139 is detachably mounted to the holder 133. . Further, a plurality of screw holes 144 are formed in the pedestal 137 and the rail mounting portion 139, and after the adjustment of the mounting position of the AOM 130 or the like, the screws are screwed to the respective screw holes 144 and screwed to the holder 13 3. The mounting portion 139 of the pedestal 137 and the lens holder 138 is provided with a dovetail structure of the dovetail structure as shown in Fig. 8, and an extension is formed on the upper surface of the 319707 32 200827078 Η 133. The groove 1330 is extended in the longitudinal direction. ^ ^ Thus, by fitting the pedestal 137 and the tailing bar 14 of the attaching portion 139 from one end of the rail 133 through the 133 〇, the ampule of the traverse 133 can be performed. At this time, the arrangement of the pedestal 137 and the lens holder 13 in a straight line of 8 is restricted by the tail groove 133 of the 133, so that the AQM 13() lens 131 is completed while being mounted to the 133. The optical axis position of each of the lenses 134, Π5Α, and 135B is a. In particular, by the (four) configuration of the optical element 133, it is possible to suppress the looseness between the 133 and the optical elements, and it is only necessary to mount the 133, so that the light can be accurately matched. The optical axis between. Further, by screwing the screw into the screw hole 144, the pedestal 137 and the attaching portion 139 can be firmly fixed. Further, as shown in the seventh embodiment, the positioning mark 15 is drawn on the upper surface of the rail 133 at the mounting position of each of the dynamic focus lens m and the lenses 134, 135, and Μα. The side of each of the rail mounting portions 139 having the 138: the green has the w-input mark 151, and by aligning the positioning with the label 50 and the bit c (5), the AOM13〇, dynamic focus is completed. Throughout, the brothers 31, and the positioning of the lenses 134, 135A, 135B. The M13G, (4) focusing lens ΐ3ϊ, which is carried by the positioning device optical device 1〇3, by presetting the positioning mark 15〇 and the positional alignment In addition, when the lens and the coffee are removed from the rail 133 and transported 319707 33 200827078, it is easy to perform the alignment when the 133 is attached to the 133. Further, the lens is deteriorated due to years, or lens or optics. When the components are individually adjusted, and the mounting position of each part is to be finely adjusted, it is only necessary to move the parts back and forth along the tail groove 1330 of the I% based on the positioning mark 150 and the position-to-use mark 151. Yes, and there is no benchmark for the installation location. In contrast, the positioning operation becomes much easier. Moreover, the positions of the positioning marks 15〇 and the position pairing marks i5i are of course optical elements that can respond to the dynamic focus lens 131 and the lenses 134, 135a, 135B, and the like. The optical characteristics, in other words, the optical design of the optical housing of the scanner (especially in response to the scanning angle range and the straight position of the laser light), thereby making the positioning marks (9) and position = mouth The private name 151 is configured to be set for several optical design values. By using the scanning optical device 3 with different optical design values, the optical elements can be easily exchanged or positioned. In order to directly mark the position mark 15G and the position pair mark (5), the configuration of each of the holders, the σ seat 137, and the attachment portion 139 is not limited to this, that is, 'these It is sufficient to set the positioning mark 15〇 and the position combination mark 1 5 1, and the mouth of the mouth to be set to the relative distance between the light elements of the track 133, for example, Positioning rod marking The plate of other members may be attached to the rail 133; or the other components may be used for the position-to-use mark 151, and the AOM 130 is built in the laser oscillator 1〇2. At the time of the scanner optical device 103, the above-mentioned AOM may not be required when the laser oscillator is used, or the laser oscillator can be used for the control, or the 319707 34 200827078 quantity control is not required at all. 130, there is a need to remove the AOM 130 from the optical axis (path) of the laser light. Even in this case, since the optical element of the 133 is installed in the present embodiment, the tail groove is used. The configuration makes it easy to remove the AOM 130 and the pedestal 137 carrying the AOM 130 from the rail 133. Contrary to this, when the AOM 130 is mounted on the 133, as described above, the mounting and positioning of the AOM 130 can be easily performed by aligning the positioning mark 150 and the position matching mark 151. Further, when the AOM 130 is mounted on the rail 133, in a state where the AOM 130 is removed from the holder 133, the optical axes of the optical elements mounted on the holder 133 are aligned with each other, and then the AOM 130 is mounted. Thereby, the influence of the AOM 130 at the time of aligning the optical axes of the optical elements with each other can be eliminated. Further, in the case where the scanning angle range determined by the scanner head 132 is relatively narrow, or in the case where the change in the diameter of the irradiation spot of the scanning surface of the object is small, there is no need for the dynamic focus lens i3i. (Of course, there is no need for a fe lens). In this case, other lenses are disposed in front of the lens 134 instead of the dynamic focus lens 131 (or fe lens). And even in this case, the dynamic focus lens 131 can be easily removed as in the AOM 130, and a lens in place of the dynamic focus lens ί31 can be mounted. As described above, in the case where the dynamic focus lens 131 is removed from the rail 133, or when the dynamic focus lens 131 is changed to have a different optical characteristic, the above-described scanner mirrors 1321, 1321 are incident on the scanner head 132. The beam diameter of the laser beam changes, so there is a need to adjust the position of the lens i34 that is disposed in front of the scanner head 132 by 35 319707 200827078. Even in this case, since the lens 134 can be mounted on the straight line 133 1 by the clamp, the lens 134 can be moved back and forth along the dovetail groove and adjusted, so that the optical axis is not biased. Shift adjustment. Next, as shown in FIGS. 7 and 8, the 133 series is divided by a plurality of pieces (10) to (4) along the longitudinal direction, and each of the pieces U3A to | is formed into a substantially same-sized shape. Only the front rail piece 133A is provided with an extension portion for mounting the scanner head 132. The holders 33A to 133E maintain the function of the leader member by being attached to the stone platform work 5, in other words, the stone platform 1G5 functions as a base member for connecting the respective sheets 13 to 133E. . The attachment structure of the stone platform 1〇5 will be described. Each of the attachment pieces 133a to j33E is formed in an L-shape in a side view, and the pair of legs 142 are provided in a position where the end faces 1G5A of the stone platform 1〇5 are in surface contact. That is, along one side of the stone platform 105, the positions of the respective pieces (7) 8 to U3E are fixed to the end faces 142 of the stone platform 1〇5, and the stone platform 105 is used. The end faces 1〇5A are connected to each other in a straight line by the respective pieces 133 to 391. When the respective pieces 133 to USE are fixed to the stone platform 105, they are individually fixed by the interval δ (refer to Fig. 7), so that even if a certain piece 13 causes thermal expansion from 133 to 133, it is caused by ' It is separated from the 133 to 133 轨 of the rails to prevent positional shift (especially the change in relative distance between optical elements). Further, the aforementioned interval § is adjusted, for example, using a gap gauge. 319707 36 200827078 'In the laser processing apparatus 100, the apparatus 103 is configured such that the dynamic focus lens 131 has the scanner light as described above while the end portion of the scanner head is being used. 132 fixed in 133

Removably disposed in the holder 133, and the lens 134. is freely positionable to the holder 13/3. According to this configuration, since the scanner head m and the dynamic focus lens 131 are attached to the 133 and are unitized, when the laser light is deflected by the scanner head 132 and the object is scanned by the laser (four), The optical design value of the scanning optical device 1 〇 3 is easily changed so that the diameter of the irradiation spot of the laser light is always kept constant regardless of the irradiation position and the moving focus lens 13 1 can be changed or removed. Moreover, by changing or removing the dynamic focus lens 131, even when the distance between the lens 134 and the scanner head 132 is adjusted, it is mounted on a straight line in a freely positionable manner. Therefore, the optical axis between the holding lens 134 and the scanner head 132 can be aligned, and the lens 134 can be adjusted in the front and rear of the 133 to make the alignment of the optical design easier. Further, according to the present embodiment, the configuration 〇M 13〇 is detachably attached to the holder 133. With this configuration, it is possible to provide a sweep = 1 〇 3 of the intensity adjustment function of the laser beam in the group when the laser beam is deflected by the scanner head 132 and the object is scanned by the laser light. In addition, in the case where the AOM 130 is built into the laser oscillator 2, or the laser oscillation is pulsing the laser light, the AOM 130 can be detached from the rail 133, and easily aligned. The design of the laser oscillator 1〇2 used with the sweeping device 103. °. To 319707 37 200827078

According to the present embodiment, the IT wire can prevent the offset of the light pumping between the primes and the slabs, and the opticals of each door and # are easy to be used. The optical axis of the elements is replaced by the optical axis. According to the present embodiment, the structure of the laser beam 2: 5 m is placed and fixed together: =^1°3. According to this configuration, it is possible to prevent the shift of the optical axis between the elements placed and removed, and to complete the optical axis alignment between the optical elements! It is placed on the stone platform 105. Because of the stone level 1: even the laser oscillating device 102 can minimize the thermal shock (4) of the laser oscillator 102. ...for other optical elements

In addition, according to the present embodiment, the 133 is cut along the longitudinal direction into a plurality of 133A to 133E, and each of the rails 133A to 1330 is arranged at one side of the slab. On the other hand, the axes (10) of the respective axes are arranged to be 5', and the respective rails are arranged in a space separated by a slit. According to the composition, even if a certain piece of film 133Α to 133Ε causes expansion, its _ piece 13^ to 13 is broken, and the yoke is prevented from being smashed by the stalker ‘ additional 133A to 133E along the plane with high precision. Since the sides of the stone platform 105 are arranged, it is possible to simply and accurately combine the dovetails 1330 of each other. Further, the second embodiment can be arbitrarily modified and applied within the scope of the present invention. 319707 38 200827078 1 In the second embodiment, the extension portion 134A is provided in the plurality of rail pieces 133A to 133E = the head piece 133A, and the scanner head 132 = is placed on the extension portion (10). At the same time, the structure of the scanner head 132 is maintained by the temple plate 136 which is erected on the extension portion 134A. On the other hand, for example, as shown in FIG. 9, while the blade 133A is disposed in front of the end of the stone platform 1G5, the holding piece 136A is disposed at the end 4 1350 of the die 133, and While the scanner head (1) is placed on the stone platform 1〇5, the holding piece 136A is disposed at the end 135 of the front end of the piece 133A, and is configured to hold the scanner head 132 on the stone platform while keeping the #IMA The scanner optical device 103A' having the structure maintained and the laser processing device 101A using the scanner optical device iq3a may be used. According to this configuration, since the scanner head is placed on the side of the stone platform 1〇5, the vibration of the scanner 132 is difficult to be transmitted to other optical components, and the vibration of the scanner head 132 can be prevented. The position of the Guangfeng component is shifted. In the second embodiment, the optical lens 13 <lt; is formed in the subsequent stage of the dynamic focus lens 131 to constitute the scanner optical device 1 〇 3. For this reason, for example, as shown in FIG. 10, the scanner optical device 103B is configured by arranging the lens 134 in front of the dynamic focus lens 丨 31, and the laser processing 101B having the scanner optical device 10B can also be used. . The scanner optical is formed by 135B of the dynamic focus lens 131. Further, in the second embodiment, the AOM 130 and the lens 135A device 103 are provided in the front stage. 319707 39 200827078 e phase, here, for example, as shown in Fig. 11, the optical device 103C is formed by omitting the A 〇 M 13 〇 and the lenses 135A, 135B in the preceding stage of the dynamic focus lens 131, and the optical device having the scanner is used. 1〇3c Industrial device 101C is also possible. In the second embodiment, in the second embodiment, A〇M 130 and lenses 135Α and 135β are provided in the front stage of the dynamic focus lens 131, and a diffuser 134 for collecting light is provided in the subsequent stage of the movable lens 131. 103. In contrast, for example, as shown in Fig. 12, the scanning focus = brain is formed in front of the dynamic focus lens 131, and the optical device is mounted with the scanner::: 101D. In the second embodiment, the laser light output from the laser oscillation 102 is used by the pair of mirrors i Q4A and 丨Q4^ optical device 103. The U-direction and V-direction scanning are relative to this, for example, in Fig. 13, the optical axis of the scanner optical device 1〇3 is coupled to the (4) output of the cooperative laser oscillation 1 102 and the configuration of the optical device 103 is increased. It is also possible to intensively and intensively inject into the scanning v-field processing device 101E. In the configuration in which the laser oscillator 102 is placed on a straight line in alignment with the scanner axis, for example, the light of the scanner 1 is set for the scanner optical device 103, and the image is shown in FIG. The laser processing device can also be used with the =sweeper optical device, for example, as shown in Fig. 15, 319707 40 200827078 using the above-mentioned sweeper optical device 1〇3C

Alternatively, for example, as shown in FIG. 16, the laser processing apparatus 101H may be configured by using Field=Working/Setting 101G 1〇3D. In the second embodiment, the optical rafts are limited to the other ones except for the other ones, and as shown in Fig. 17, as shown in Fig. 17, each of them is required to be 133. The break is the track piece 133Ai133E. As for the measurement and the optical device of the scanner, the outside is shown in Figure 18, so that it can be used to make it into a sweep + Xueshang coffee. In addition, if the light is such that the scanner head 132 is only the end of the rail piece 133A, the mark U0 and the position pairing mark 151 are shown in the 10th to 18th figures. In the case of the positioning guide, the second guide is used for the linear guide shaft bearing, and the green|gt; Further, in the second embodiment, the attachment structure is a dovetail structure, and the optical elements are not above the 133. For example, while the pedestal 137 and the rail extension line or the plurality of ridges are formed, the bottom surface of each of the nq clothes 邛 139 is provided with a concave strip that is engaged with the ridge of the rail 133, and the optical elements are held. Mounted on rail 133 J. : This concave engagement structure is used to mount the optical elements, and is removed from the rail 133.仏 ( ( ( ( 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 于 于 于 于 于 于 于The device 103 is biased toward the wrong straight side and is irradiated to the workpiece. First, the sub-area is not limited thereto. That is, the laser light is arranged on the optical axis (incident side) of the laser light; the scanner head 7 or the scanner optical device (8) is rotated to be set in advance, and when the straight line is defined as the twist, the laser light is made. It is also possible to illuminate at any angle within the range of ςI, for example, within ±90 degrees, or to illuminate the laser light at a horizontal or horizontal angle. The irradiation range of the laser light can be expanded by the configuration of the above-mentioned ? scoop as compared with the configuration in which the scanning thief 7 or the scanner optical device 1 is not rotated. Further, it is configured to additionally set the scanner head 7 or the scanner optical I to :3. The above-mentioned predetermined angle is adjusted to an arbitrary angle of the rotational driving means. [Schematic description of the drawings] Fig. 1 is a view showing the configuration of a laser processing apparatus according to the first embodiment of the present invention. Fig. 2 is a view showing the configuration of a control unit. Fig. 3 is a view for explaining laser scanning including the switching point. Fig. 0 = 4 is a view showing a modification of the control unit shown in Fig. 2. Fig. 5 is a view showing the configuration of a laser processing apparatus according to a second embodiment of the present invention. Fig. 6 is a view showing the laser oscillator of the second embodiment. Fig. 7 is a view showing the configuration of the scanner optical device of the second embodiment 319707 42 200827078. Fig. 8 is a view for explaining the mounting of an optical element to a scanner optical device. Fig. 9 is a view showing the configuration of a laser processing apparatus according to a modification of the second embodiment. Fig. 10 is a view showing the configuration of a laser processing apparatus according to a modification of the second embodiment. Fig. 11 is a view showing the configuration of a laser processing apparatus according to a modification of the second embodiment. Fig. 12 is a view showing the configuration of a laser processing apparatus according to a modification of the second embodiment. Fig. 13 is a view showing the configuration of a laser processing apparatus according to a modification of the second embodiment. Fig. 14 is a view showing the configuration of a laser processing apparatus according to a modification of the second embodiment. Fig. 15 is a view showing the configuration of a laser processing apparatus according to a modification of the second embodiment. Figure 16 is a view showing the configuration of a laser processing apparatus according to a modification of the second embodiment. Fig. 17 is a view showing the configuration of a scanner optical device according to a modification of the second embodiment. Figure 18 is a view showing the configuration of a scanner optical device according to another modification of the second embodiment. [Main component symbol description] 43 319707 200827078 1,100 laser processing device 2, 102 laser oscillator 3 laser control device 4 laser device 5, 130 AOM (light intensity adjustment means) 6 dynamic focus lens unit (focus adjustment Means) 7 Scanner head (biasing means) 8, 8A, 106 Control unit 9A, 9B, 10 Concentrating lens 12 Keyboard 20 Scanner optical system ® 72A X-axis motor 80A, 80B DSP 82 Distortion correction section 84 Counting circuit 86 Signal output adjustment unit 88 D/A converter 91 DF motor • 98 Object (object) 103 Scanner optics 104A, 104B Mirror 120A Front end 121 Laser exit 131 Dynamic focus lens (focus 132 scanner head 11 Display 13 Computer system 71A, 71B Scanner mirror 72B Y-axis motor 81 Execution calculation unit 83 Common tributary memory 85 Position comparison unit 87 Motor control unit 90A to 90C Encoder 92A to 92C Drive circuit 99 Table 105 Stone platform 120 oscillator body 120B rear end 122 XYZ axis table adjustment means) 133, 160, 166 rail (rail member) 133A to 133E rail 134, 135A, 1 35B lens (optical element) 44 319707 200827078 136, 136A holding piece 137 138 lens holder 139 140 dovetail 142 150 positioning mark 151 1321A, 1321B scanner mirror 1322A 1323 frame 1324 1330 force bird tail groove (guide groove) 1340 1350 Front end BCS SA to SC Digital pulse signal Q Qs Scanning direction switching start point Qe Confluence point pedestal mounting position Position pairing foot position pairing mark, 1322B Motor exit port extension part Insertion condition command signal switching point 319707 45

Claims (1)

200827078 X. Patent Application Range: 1. A scanner optical system that scans light emitted from a light source to an object and has a light intensity adjustment means for adjusting the intensity of the light; and a biasing means, While deflecting the light toward a predetermined position of the object, the light is deflected from a zero order to a predetermined scanning speed; and the sodium light intensity adjusting means is caused by the biasing means The intensity of the light is adjusted such that the scanning speed of the light is proportional or the energy density of the light is substantially 疋. 2. The scanner optical system of claim 1 of the patent scope, wherein. The biasing means has a scanner mirror; a driving motor for driving the scanner mirror; and a controller for controlling the driving motor; and the driving motor is provided with a digital pulse for outputting the driving amount corresponding to the scanner mirror The encoder of the signal; and 10w = the controller, which counts the aforementioned digital pulse signal and specifies the aforementioned driver! And the feedback control for the aforementioned motor output control signal is performed in accordance with the driving amount. 3. Such as Shen = patent scope! The scanner optical system, wherein the biasing means has a direction of directing the light toward the surface of the object:::::axis:: each of the deflecting-biasing means and the x The axis deviation means riding the fine, and the "axis of the 319707 46 200827078 means the bias is controlled by the same control. 4. If you apply for patent range 3: ask to control the two axes. There are: First learn the system, in which the recombination ♦ coke 5 weeks of the whole means 'in response to the above-mentioned bias, and the above-mentioned Y-axis biased to the hand two:: means the light is directed toward the target object The aforementioned focal length of the light, and the adjustment of the deviation between the positive and the distance between the mirrors, and the adjustment of the focal length of the mirror are all controlled by the same:: 5. The scanner optical system of the fourth item of the application material, The controller is controlled by the above-mentioned object in the manner of controlling the focal distance of the light in the above-mentioned object, and is adjusted to 6. According to the scanning scope, the optical system of the first item of the patent application, the %, 1 There is a means of obedience calculation, based on the pre-existing loyalty, 〒, 、, and 运 “ “ “ “ “ “ “ “ “ “ “ “ “ “ 二 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据The detected value of the second light and the deviation of the light is subjected to feedback control by the bias of the light by the biasing means; and (5) the means for performing the transfer and the biasing means are constituted by individual CPUs. 7. The scanner optical system of claim 1, wherein when there is a switching point on the predetermined track scanned by the light, the scanning direction of the light of the first 47 319707 200827078 is switched, Before the switching point, the scanning direction of the light is gradually changed in the scanning direction after the switching, and the scanning position of the light is set when the scanning direction of the light is switched to the scanning direction after the switching. The aforementioned biasing means should be controlled in such a manner as to be on the track of the scanning direction after the switching. 8. In the scanner optical system of item 6 or 7 of the patent scope, in the basin: the light source is a laser device with oscillating laser light; the light intensity adjustment means of the month 9 is adjusted as follows At least one of the following: that is, when the Q switch is built in the laser device, the q switch is adjusted, and when the laser device has a door that shields the laser light, the door is adjusted to have intensity modulation in the laser device In the case of the acoustic optical component used, the squeaking optical component is adjusted, and the oscillation period is adjusted in the laser device of the aforementioned laser device to adjust the intensity of the aforementioned laser light. The Μ 力 工 , , , , , , , , , , , , , , , , , , , , , , , , , , , , 工 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷And flattening the hand# again, deflecting the sodium laser light to scan the processed surface of the workpiece with the laser light from the zero order to a predetermined scanning speed; and 1 illuminating the light intensity adjusting means It is proportional to the vector scanning speed of the scooping light emitted by the aforementioned biasing means or the energy of the aforementioned laser light 319707 48 200827078. The first ten kinds of scanner optical devices are arranged in a manner that the amount of density is substantially constant, and the scanner optical device has a deflection module that deflects the two outputs of the light toward the object, and The deflecting module biases the light to scan the object, and in the middle of the straight line, Mr. Masato is detachably mounted on the rail member in the same manner as the linear member of the deflecting module. Further, the optical element output from the focus adjustment means to the optical element of the deflection module can be freely provided: the actuator member. . Also placed in the scanner optical device as in the first application of the scope of the invention, 1: = := laser light incident on the focus adjustment unit is applied to the core member... the degree adjustment module is freely detachable In the scanner optical device of claim 1G, wherein the aforementioned member is fixed to the stone platform. 】 3. If the patent application scope 笫 〗? ^ ^ (4) The 12th scanner optical device, guide Λ Λ 述 述 述 Λ Λ Λ Λ Λ Λ Λ V V V V V V V V V V V V V V V V V V V V V V V V V V V The first component is fixed together in the front. 4. As for the application of the patent, the #μ,,,,,,,,,,,,,,,,,,, ; Taiwan to 319707 49 200827078 to support. 15. If the application is directed to the 1G slave scanning H-optical H, the gantry member is arranged along the longitudinal direction of the rail member, and the respective slabs are arranged with a gap therebetween. _ is a number of actuators. 16. The scanner optical dressing according to the first aspect of the patent application is applied to each member mounted on the rail member;: a marking portion on which the position is mounted. /, private article 17. A type of laser processing device, which has: a scanning H optical device, the scanner optical device!, the output light is biased toward the object, the biasing module is biased toward the above The light is deflected to scan the object, and the focus of the focal length of the light output by the second:=(four) light source that fixes the deflection module to the linear member is set to the rail member, and the above-mentioned =贱 means The output light is shaped and the U (the first) I and the optical components are freely positionably disposed on the foregoing member; and the laser device is used to output the laser light to the scanner optical device; and the aforementioned scanner The optical device deflects the aforementioned laser light and processes the processed surface of the workpiece by scanning with the aforementioned laser light. 319707 50