JP2005007427A - Laser marking method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for performing laser marking on not only a flat work but also a curved work without using any f × θ lens. <P>SOLUTION: In the laser marking method for performing laser marking on a surface of a work W or the inside of a transmissive work by using an X-Y scanner 2, a linear translator 4 is provided between a laser apparatus 1 and the X-Y scanner 2, and a drive signal output device 6 having a correction table according to the shape of the work W is provided between a control device 3 of the X-Y scanner 2 and a drive device 5 of a movable lens C for adjusting the focal point of the linear translator 4. The condensing point of laser beams is changed by moving the movable lens C in the direction of the optical axis by the drive device 5 of the movable lens C according to the output signal. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
The present invention relates to a marking method using laser light.
[0002]
[Prior art]
Japanese Patent Laid-Open No. 3-124486 discloses a method using a condensing lens as a method of condensing laser light inside an object (work) to be marked, but the distance from the lens to the condensing point. Therefore, as shown in FIG. 4, when the workpiece W is a flat surface, when the marking position is changed, the workpiece must be moved in the XY direction.
[0003]
Conventionally, as a means for solving this problem, when laser marking is performed on a flat workpiece, a method of providing an f · θ lens between the XY scanner and the workpiece W has been adopted. There was no way to mark.
[0004]
[Patent Document 1]
Japanese Patent Laid-Open No. 3-124486
[Problems to be solved by the invention]
Accordingly, an object of the present invention is to provide a method for laser marking on a curved surface workpiece as well as a planar workpiece without using an f · θ lens.
[0006]
[Means for Solving the Problems]
The present invention has been made to solve the above-described problems. In a method of laser marking on the surface of a workpiece or the inside of a transparent workpiece using an XY scanner, a linear device is provided between the laser device and the XY scanner. A translator is provided, and a drive signal output device having a correction table corresponding to the shape of the workpiece is provided between the control device of the XY scanner and the drive device of the movable lens for focus adjustment of the linear translator, and according to the output signal. Then, the laser marking method is characterized in that the converging point of the laser beam is changed by moving the movable lens in the optical axis direction by the driving device of the movable lens.
[0007]
That is, in the laser marking method using an XY scanner, the focal point shift occurs at a portion where the scanning angle is large when scanning the X and Y mirrors, and the shift amount is a value obtained by calculation. Then, a correction table for correcting the focal point by moving the movable lens for focus adjustment to the scanning position of the X mirror and the Y mirror by the correction amount in advance is prepared, and the correction signal Δf according to the correction table is sent to the movable lens. The laser marking is performed at a desired laser marking position.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is a schematic diagram of an apparatus for carrying out the present invention. 1 is a laser apparatus, 2 is an XY scanner, 3 is an XY scanner control apparatus, 4 is the laser apparatus 1 and the XY scanner 2. A linear translator composed of fixed lenses A and B and a movable lens C provided between them, 5 is a drive device for the movable lens C, and 6 is a correction signal creation correction table corresponding to the shape (plane, curved surface, etc.) of the workpiece W. This is a corrected drive signal output device.
[0009]
The correction table stored in the correction drive signal output device 6 is a laser marking position and a laser marking position in the Z-axis direction of the workpiece W from the stage at that position. For example, L0 in FIG. 2, L0, L1, L2, L3 in FIG. ... is obtained by calculation or measurement.
[0010]
Accordingly, when laser marking is performed at the position L0 in the planar work W such as glass or transparent plastic plate as shown in FIG. 2 with the embodiment apparatus, if the laser marking position changes, the movable lens C of the linear translator 4 is accordingly changed. Is moved in the optical axis direction to change the distance of the laser light from the fixed lens A to the condensing point, and laser marking is performed without providing an f · θ lens as in the prior art.
[0011]
When laser marking is performed at the position L0 in the curved plate workpiece W ′ as shown in FIG. 3, a correction table corresponding to the shape is stored in the correction drive signal output device 6 so that the laser marking is performed. can do.
[0012]
【The invention's effect】
As described above, according to the present invention, laser marking can be easily performed even when the shape of an object (workpiece) for laser marking is different from a flat shape.
[Brief description of the drawings]
FIG. 1 is a schematic diagram showing the configuration of an apparatus for carrying out the present invention.
FIG. 2 is an explanatory view showing a condensing state of laser light when laser marking is performed on a flat plate by an apparatus according to an embodiment of the present invention.
FIG. 3 is an explanatory diagram showing a condensing state of laser light when laser marking is performed on a curved surface by the embodiment apparatus of the present invention.
FIG. 4 is an explanatory diagram illustrating a laser beam condensing state when laser marking is performed with an XY scanner without using an f · θ lens.
[Explanation of symbols]
W Work 1 Laser device 2 XY scanner 3 XY scanner controller 4 Linear translator 5 Movable lens drive device 6 Correction drive signal output device 7 Stage

Claims (1)

In a method of performing laser marking on the surface of a workpiece or the inside of a transparent workpiece using an XY scanner, a linear translator is provided between the laser device and the XY scanner, and the controller of the XY scanner and the linear translator A correction drive signal output device provided with a correction table corresponding to the shape of the workpiece is provided between the drive devices for the focus adjustment movable lens, and the movable lens is driven by the movable lens drive device according to the output signal. A laser marking method, wherein the laser light condensing point is changed by moving in a direction.

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