WO2008053915A1

WO2008053915A1 - Scanner optical system, laser processing device, and scanner optical device

Info

Publication number: WO2008053915A1
Application number: PCT/JP2007/071199
Authority: WO
Inventors: Tsuneo Murakami; Isao Kojima; Tatsuo Inubuse; Takakuni Ueno
Original assignee: Nabtesco Corporation; Cmet Inc.
Priority date: 2006-11-02
Filing date: 2007-10-31
Publication date: 2008-05-08
Also published as: TW200827078A; JPWO2008053915A1

Abstract

It is possible to perform high-speed and stable scan by scanning an object by a light while the scan speed is changed. A laser processing device (1) performs laser processing by applying a laser beam outputted from a laser oscillator (2) to a processing surface of an object (98). The laser processing device (1) includes an AOM (5) for adjusting the laser beam intensity and a scanner head (7) for vector-scanning the processing surface of the object with a predetermined scan speed from a zero level by the laser light. The AOM (5) is configured to adjust the laser beam intensity in proportion to the vector scan speed or in such a manner that the laser beam energy density is substantially constant.

Description

Specification

Scanner optical system, laser processing apparatus, and scanner optical apparatus

The present invention relates to a scanner optical system that deflects an irradiation position on an object of light emitted from a light source, and a laser processing apparatus including the scanner optical system. The present invention also relates to a scanner optical device that scans an object by deflecting light emitted from a light source, and a laser processing apparatus including the scanner optical device.

Background art

[0002] A laser processing apparatus that processes a workpiece by irradiating the workpiece with a laser beam generally includes a scanner optical system that deflects the optical path of the laser beam to vary the irradiation position on the workpiece (for example, (See Patent Document 1). In recent years, the scanner optical system has a galvano mirror that is held rotatably around the rotation axis and can position the reflecting surface at an arbitrary angle. In addition, a galvano scanner that can change the irradiation position with high accuracy is known. By using this galvano scanner in a laser processing device, the workpiece can be processed at high speed and the processing time can be shortened.

Patent Document 1: JP 2004-358507 A

Disclosure of the invention

Problems to be solved by the invention

[0003] However, when laser processing is performed while changing the scanning speed of the laser beam using a scanner optical system that changes the irradiation position at high speed, such as a galvano scanner, the energy of the laser beam at the irradiation position due to fluctuations in the scanning speed. Since the density is not constant, there is a problem that the processing depth becomes non-uniform and the processing quality decreases.

Problems due to instability of energy density during laser scanning are not limited to laser processing equipment. For example, drawing images are drawn by scanning light at high speed on the drawing surface. When unevenness occurs and the quality of the drawn image deteriorates, problems occur. For example, a sample is scanned and scanned at high speed to perform inspection and measurement. Errors occur in the detected values due to the equipment, and accurate measurement results cannot be obtained! /, And! /.

The present invention has been made in view of the circumstances described above, and is a scanner optical that enables stable optical scanning while scanning an object with light at high speed while varying the scanning speed. It is an object of the present invention to provide a system and a laser processing apparatus that enables high-quality processing while scanning a workpiece with laser light at high speed.

Means for solving the problem

In order to achieve the above object, the present invention provides a scanner optical system that irradiates and scans an object with light output from a light source, and includes a light intensity adjusting unit that adjusts the intensity of the light. Deflecting the light toward a predetermined position of the object and deflecting the light so that a predetermined scanning speed is achieved from zero level, and the light intensity adjusting means includes the deflecting means. The light intensity is adjusted in proportion to the scanning speed of the light by the means or so that the energy density of the light becomes substantially constant.

[0006] Further, in the scanner optical system according to the present invention, the deflection unit includes a scanner mirror, a drive motor that drives the scanner mirror, and a controller that controls the drive motor. An encoder that outputs a digital pulse signal corresponding to the drive amount of the scanner mirror is provided in the drive motor, and the controller counts the digital pulse signal to identify the drive amount, and based on the drive amount! /, Feedback control for outputting a control signal to the drive motor is performed.

[0007] Further, the present invention provides the above-described scanner optical system, wherein the deflecting unit deflects the light in each of an X-axis direction and a Y-axis direction orthogonal to each other in a plane of the object. Y-axis deflection means is provided, and both the deflection by the X-axis deflection means and the deflection by the Y-axis deflection means are controlled simultaneously by the same controller.

[0008] Further, according to the present invention, in the above-described scanner optical system, according to the irradiation position of the light to the object defined by the deflection by the X-axis deflection unit and the deflection by the Y-axis deflection unit, A force adjustment means for adjusting the focal length of the light by adjusting the distance of the light, further comprising deflection by the X-axis deflection means and by the Y-axis deflection means Along with the deflection, the focal length adjustment by the focus adjustment means is controlled by the same controller at the same time for all axes.

[0009] Further, the present invention is characterized in that, in the above-described scanner optical system, the controller controls the focus adjustment means so that a focal length of the light is adjusted according to a surface unevenness of the object. To do.

In the scanner optical system, the present invention provides a trajectory calculating means for calculating a deflection trajectory of the light by the deflecting means based on the shape of the object and the scanning mode of the light, and the trajectory calculating means. And a deflection control means for feedback-controlling the deflection of the light by the deflecting means based on the deflection trajectory by the optical path, and the trajectory calculating means and the deflection control means, respectively. It is composed of the following CPUs.

[0011] Further, according to the present invention, in the above-described scanner optical system, when there is a switching point at which the scanning direction of the light is switched on the trajectory to be scanned with the light, the light is transmitted from before the switching point. The scanning position of the light when the scanning direction of the light is switched to the scanning direction after the switching while the scanning direction is gradually changed in the scanning direction after the switching is the scanning after the switching. The deflecting means is controlled so as to be positioned on a trajectory to be scanned in a direction.

[0012] Further, in the scanner optical system according to the present invention, the light source includes a laser device that oscillates laser light, the light intensity adjusting unit outputs an output of a laser power source of the laser device, and the laser device is Q The Q switch when the switch is incorporated, the shutter when the laser device has a shutter that shields laser light, the acoustooptic device when the laser device has an acoustooptic device for intensity modulation, In addition, when the laser device force S pulse laser beam is oscillated, at least one of the oscillation periods is adjusted to adjust the intensity of the laser beam.

[0013] In order to achieve the above object, the present invention provides a laser processing apparatus for irradiating a processing surface of a workpiece with a laser beam output from a laser oscillator, Light intensity adjusting means for adjusting the intensity, deflecting the laser beam, and vector scanning the processing surface of the workpiece with the laser beam at a predetermined scanning speed with zero level force Deflection means, and the light intensity adjustment means is proportional to the vector scanning speed of the laser light by the deflection means, or so that the energy density of the laser light is substantially constant. It is characterized by adjusting.

[0014] In the laser processing apparatus according to the present invention, while inputting a gate signal, a trigger noise signal serving as an oscillation trigger of the panelless laser light is input to the laser oscillator, and is matched with the trigger noise signal. A laser oscillation control means for outputting a Norlas laser beam; and a shielding means for shielding the pulse laser light. After the gate signal is inputted, the shielding means until the trigger pulse signal of a predetermined number of pulses is inputted. A configuration may be adopted in which the pulse laser light is shielded to prevent the workpiece from being irradiated with the initial giant pulse.

[0015] In order to achieve the above object, the present invention includes a deflection module that deflects light output from a light source toward an object, and deflects the light by the deflection module. A scanner optical device for scanning, wherein the deflection module is fixed to a linear rail member, and a force adjustment means for adjusting the focal length of the light output from the light source force is detachable from the rail member. And an optical element for shaping the light output from the focus adjusting means and inputting the light to the deflection module, so that the optical element can be positioned on the rail member.

[0016] Further, according to the present invention, in the above-described scanner optical device, a laser beam intensity adjustment module that adjusts the laser beam intensity of the laser beam incident on the focus adjustment unit is detachably provided on the rail member. Features.

The laser beam has a pulse laser beam and a continuous wave laser beam. The laser beam incident on the force adjustment unit may be either.

In addition, when the focus adjustment unit is provided on the rail member, if an optical element for shaping the laser light incident on the focus adjustment unit is required, the optical element is also detachable from the rail together with the focus adjustment unit. Will be provided.

[0017] Further, the invention is characterized in that, in the above-described scanner optical device, the deflection module is supported by the rail member and the stone surface plate. The deflection module The rail member and the stone surface plate may be supported at both ends.

[0018] The present invention is also characterized in that, in the scanner optical device, the light source and an optical element that guides light output from the light source to the scanner optical device are both fixed to the stone surface plate.

[0019] Further, the invention is characterized in that, in the above-described scanner optical device, the deflection module is held on the stone surface plate.

The present invention is also characterized in that, in the above-described scanner optical device, the rail member is divided into a plurality of rail pieces along the longitudinal direction, and the rail pieces are arranged with a gap therebetween.

The rail pieces may be arranged with the stone surface plate as a base member.

[0021] Further, the invention is characterized in that in the above-described scanner optical device, each member that is attached to the rail member has a mark portion that indicates an indication of the attachment position.

In order to achieve the above object, the present invention includes any one of the scanner optical devices described above and a laser device that outputs laser light to the scanner optical device, and the scanner optical device includes the scanner optical device. There is provided a laser processing apparatus characterized in that a laser beam is deflected and a processed surface of a workpiece is scanned with the laser beam for processing.

The invention's effect

[0023] According to the scanner optical system and the laser processing apparatus having the scanner optical system of the present invention, the light intensity is adjusted in proportion to the light scanning speed or so that the light energy density is substantially constant. In order to adjust, while scanning the object at high speed with light, the light energy density at the irradiation position of the object is maintained substantially constant during the optical scanning, and stable optical scanning is realized.

Further, according to the scanner optical device of the present invention and the laser processing apparatus having the scanner optical device, the focus adjustment is performed by fixing the deflection module to the linear rail member and adjusting the focal length of the light output from the light source. Since the means is provided so as to be detachably attached to the rail member, a scanner optical device in which the focus adjustment function is integrated is provided. Further, an optical element for shaping the light output from the focus adjusting means and inputting it to the deflection module is provided on the rail member so as to be freely positionable. Therefore, even when the distance between the optical element and the deflection module needs to be adjusted when the focus adjusting means is removed or replaced, the optical element is attached to the rail member. Since it moves while being guided, it is possible to easily adjust only the distance while keeping the optical axis between the optical element and the polarization module aligned.

Brief Description of Drawings

FIG. 1 is a diagram showing a configuration of a laser processing apparatus according to a first embodiment of the present invention.

FIG. 2 is a diagram showing a configuration of a control unit.

FIG. 3 is a diagram for explaining laser beam scanning of an orbit including a switching point.

4 is a diagram showing a modification of the control unit shown in FIG.

FIG. 5 is a diagram showing a configuration of a laser processing apparatus according to a second embodiment of the present invention.

FIG. 6 is a diagram showing a laser oscillator according to a second embodiment.

FIG. 7 is a diagram showing a configuration of a scanner optical device according to a second embodiment.

FIG. 8 is a view for explaining attachment of an optical element to a scanner optical device.

FIG. 9 is a diagram showing a configuration of a laser processing apparatus according to a modification of the second embodiment.

FIG. 10 is a diagram showing a configuration of a laser processing apparatus according to a modification of the second embodiment.

FIG. 11 is a diagram showing a configuration of a laser processing apparatus according to a modification of the second embodiment.

FIG. 12 is a diagram showing a configuration of a laser processing apparatus according to a modification of the second embodiment.

FIG. 13 is a diagram showing a configuration of a laser processing apparatus according to a modification of the second embodiment.

FIG. 14 is a diagram showing a configuration of a laser processing apparatus according to a modification of the second embodiment.

FIG. 15 is a diagram showing a configuration of a laser processing apparatus according to a modification of the second embodiment.

FIG. 16 is a diagram showing a configuration of a laser processing apparatus according to a modification of the second embodiment.

FIG. 17 is a diagram showing a configuration of a scanner optical device according to a modification of the second embodiment.

FIG. 18 is a diagram showing a configuration of a scanner optical device according to another modification of the second embodiment. Explanation of symbols

[0025] 1, 100 Laser processing equipment

2, 102 Laser oscillator

5 AOM (Light intensity adjustment means) 6 Dynamic focus lens unit (focal length adjustment means)

7 Scanner head (deflection means)

8, 8A control unit

13 Computer system

20 Scanner optical system

72A X-axis motor

72B Y-axis motor

80A, 80B DSP

90A ~ 90C encoder

91 DF motor

92A to 92C driver circuit

98 Workpiece (object)

103 Scanner optical device

131 Dynamic focus lens (Focus adjustment means) 132 Scanner head

133, 166 Lenore (Lenore material)

133A ~ 133E Lenore piece

134, 135A, 135B lenses (optical elements)

136, 136A Holding piece

140 Yes

142 Alignment legs

150 Positioning mark

151 Alignment mark

1330 Dovetail groove (guide groove)

1340 Extension

BCS drawing condition command signal

SA to SC Digital pulse signal

Q Switching point Qs Scanning direction switching start point

Qe Junction

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a diagram showing a schematic configuration of a laser processing apparatus 1 to which a scanner optical system according to the present invention is applied. As shown in this figure, the laser processing apparatus 1 includes a laser apparatus 2 having a laser oscillator 2 and a laser control apparatus 3 having a power source for controlling the laser oscillation of the laser oscillator 2, and a laser beam intensity adjustment. AOM (acousto-optic element) 5 as means, dynamic focus lens unit 6 as focal length adjustment means, and laser beam irradiation position on the work surface of work piece 98 placed on work stage 99 And a scanner head 7 as a deflection means for scanning the processing surface with laser light, and further, as a control means for controlling each of the laser device 4, the AOM 5, the dynamic focus lens unit 6 and the scanner head 7. A control unit 8 is provided. The AOM 5, the scanner head 7 and the control unit 8 constitute a scanner optical system 20 that scans the processed surface with the laser light at high speed while adjusting the intensity of the laser light.

[0027] Each component will be described in more detail. The laser oscillator 2 is a solid-state laser oscillator, a fiber laser oscillator, a liquid laser oscillator, or a gas laser oscillator, and outputs a laser beam having a wavelength corresponding to the laser medium. To do. In the present embodiment, a laser oscillator 2 that continuously oscillates laser light is used as the laser oscillator 2.

The AOM 5 is a laser beam whose intensity is modulated and output at a predetermined frequency under the control of the control unit 8. The AOM 5 is output from the laser oscillator 2 and is supplied with two collecting lenses 9A and 9B. The laser beam shaped through and is input.

The dynamic focus lens unit 6 varies the focal length of the laser beam via the AOM 5 according to the irradiation position of the laser beam on the processed surface of the workpiece 98 under the control of the control unit 8. By adjusting the focal distance of the dynamic focus lens unit 6, the irradiation spot area on the workpiece 98 is maintained substantially constant. It goes without saying that an fΘ lens may be used instead of the dynamic focus lens unit 6.

Furthermore, if the focal length is relatively long and the processing area (laser beam scanning area) is narrow, the focal position deviation on the processing surface is small, so the dynamic force lens unit 6 and fΘ lens, etc. It is not necessary to provide the focal length adjustment means in the scanner optical system 20.

The scanner head 7 deflects the optical path of the laser light that passes through the dynamic focus lens unit 6 under the control of the control unit 8, and the irradiation position with respect to the work stage 99 is set within the processing surface of the workpiece 98. It scans the laser beam with relative change. The scanner mirror 71A deflects the optical path in the X-axis direction, the X-axis motor 72A that rotates the scanner mirror 71A, and the optical path orthogonal to the X-axis. A scanner mirror 71B that deflects in the Y-axis direction, and a Y-axis motor 72B that rotates the scanner mirror 71B, and the laser beam that has passed through the dynamic focus lens unit 6 passes through the condenser lens 10 and the scanner The light is incident on the mirror 71A, and the optical path of the laser beam is deflected in the direction defined by the angle of each reflecting surface of the scanner mirror 71A and the scanner mirror 71B.The XY plane composed of the X axis and the axis is defined as a plane substantially parallel to the upper surface of the work stage 99, and the axis orthogonal to the XY plane is defined as the Z axis.

[0029] The control unit 8 is connected (may be built-in) to a computer system 13 having a display 11 as a display device and a keyboard 12 as an input device. The computer system 13 includes a three-dimensional shape and material of the workpiece 98, a processing position where the workpiece 98 is irradiated with laser light (laser irradiation position), a processing depth, laser marking and trimming, Machining data including drilling and! /, The type of cutting, etc. are input, and the computer system 13 outputs a drawing condition command signal BCS based on the machining data to the control unit 8 during laser machining. The control unit 8 controls the laser device 4, AOM 5, dynamic focus lens unit 6 and scanner head 7 based on the drawing condition command signal BCS.

FIG. 2 is a block diagram schematically showing the configuration of the control unit 8. As shown in this figure, the control unit 8 includes two DSPs 80A and Has DSP80B. Of course, a CPU may be used instead of the DSP for the DSP80A and DSP80B processing units.

The DSP 80A determines the laser beam on the workpiece 98 based on the shape of the workpiece 98 (for example, CAD data) indicated by the drawing condition command signal BCS and the scanning mode of the laser beam on the workpiece 98. A trajectory calculation unit 81 that calculates the movement trajectory (ie, scanning trajectory) of the irradiation position, and a distortion correction unit that corrects the deviation (distortion) of the irradiation position (imaging point) caused by moving the irradiation position in the XY plane. It functions as 82, and mainly performs arithmetic processing based on the drawing condition command signal BCS input from the computer system 13. By the calculation of the trajectory calculation unit 81 and the distortion correction unit 82, the XY coordinate command value of the laser light irradiation position, the focal length command value corresponding to the XY coordinate value, and the like at every predetermined time (for example, within several tens of s) Various command values of the laser output command value for instructing the laser beam intensity are output.

[0031] The DSP 80B controls the laser power for the laser device 4, the focus position variable control by the dynamic focus lens unit 6, the laser beam deflection control by the scanner head 7, and the irradiation position, scanning speed, and irradiation spot area. It mainly performs drive control of each part such as laser light intensity control. The DSP 80A and DSP 80B execute processing in synchronization with each other based on a clock signal generated by a clock generator (not shown).

In addition, the control unit 8 is provided with a shared data memory 83 accessible from each of the two DSPs 80 A and 80 B, and the DSPs 80 A and 80 B share data via the shared data memory 83. In this shared data, for example, the DSP80A notifies the DSP80A that the command command to be commanded to the DSP80B, the DSP80B to the DSP80A confirmation command for the command command, and that the DSP80B has finished executing the command command. In addition to various commands between DSP80A and 80B such as the end command, the XY coordinate command value of the laser beam irradiation position output by DSP8OA every predetermined time, the focal length command value according to this XY coordinate command value, and There are various command values for the laser output command value that indicate the laser beam intensity.

The DSP80B reads various command values output by the DSP80A to the shared data memory 83. On the basis of these command values, drive control of each part is executed.

[0033] In this way, the control unit is equipped with two DSP80A and DSP80B, and has a configuration in which arithmetic processing such as trajectory calculation and distortion correction, and drive control processing for driving and controlling each part are executed by different DSP80A and 80B. Therefore, the arithmetic processing does not cause a delay in the deflection control of the scanner head 7 and the light intensity control of the AOM 5, so that the scanning speed of the laser beam is increased and the processing speed is improved.

[0034] Now, the drive control by the DSP 80B will be described in detail. The DSP 80B outputs a power control signal to the laser control device 3 via the D / A converter 88 based on the laser output command value, and the laser power In order to adjust the laser beam intensity, an intensity control signal is output to the AO M5, and based on the XY coordinate command value and focal length command value, the X-axis motor 72A, Y-axis motor 72B and DF The focal length by the dynamic focus lens unit 6 and the deflection by the scanner head 7 are controlled by controlling the motor 91, and the irradiation position of the laser beam on the processing surface of the workpiece 98 is controlled.

In the present embodiment, a closed loop control system is configured as a control system for the dynamic focus lens unit 6 and the scanner head 7 that realizes highly accurate irradiation position control. This configuration will be described below.

As shown in FIG. 2, the X-axis motor 72A and the Y-axis motor 72B of the scanner head 7 are supplied with digital pulse signals SA and SB having the number of pulses corresponding to the rotation amount of the scanner mirrors 71A and 71B. Encoders 90A and 90B are provided, and the dynamic focus lens unit 6 is provided with a DF (dynamic focus) motor 91 that drives an optical system (not shown) that changes the focal length and the drive amount of the optical system. The encoder 90C outputs the digital pulse signal SC with the same number of pulses to the control unit 8, and the control unit 8 receives the digital pulse signals SA to SC output from the encoders 90A to 90C. A counter circuit 84 that counts the digital pulse signals SA to SC and outputs them to the DSP 80B is provided.

[0036] The DSP 80B determines the amount of rotation of the scanner mirrors 71A and 71B and the amount of drive of the optical system of the dynamic focus lens unit 6 based on the counter values of the digital pulse signals SA to SC counted by the counter circuit 84. X of the current laser beam irradiation position Specify the Y coordinate value and the current focal length.

In addition, the DSP 80B acquires the ΧΥ coordinate command value of the laser beam irradiation position stored in the shared data memory 83 and the focal length command value according to the ΧΥ coordinate command value, and uses these command values and the current value. The position comparison unit 85 that compares and outputs the deviation signal to the motor control unit 87, and the laser output command value stored in the shared data memory 83 in synchronization with the ΧΥ coordinate command value and the focal length command value are acquired. It has a signal output adjustment unit 86 that outputs a control signal to ΑΟΜ5 (the laser control device 3 if necessary).

[0037] Based on the deviation signal from DSP80B, the motor control unit 87 sends a digital control signal for canceling the deviation to the driver circuit 92Α of the X-axis motor 72Α, the driver circuit 92Β of theΥ-axis motor 72Β, and DF This is output to each of the driver circuits 92C of the motor 91 to execute negative feedback control. When a digital control signal is input, each of the driver circuits 92A to 92C outputs a drive current to the X-axis motor 72A, the Y-axis motor 72B, and the DF motor 91, whereby the X-axis motor 72A and the Y-axis are output. Motor 72B and DF motor 91 are driven.

[0038] As described above, the control unit 8 includes the encoders 90A to 90C that output the digital pulse signals SA to SC, the counter circuit 84, the DSP 80B, the motor control unit 87, and the driver circuits 92A to 92C. The drive of each motor 72A, 72B, 91 is compensated with high accuracy. Thereby, high-precision motor control, that is, high-precision irradiation position control on the processing surface of the workpiece 98 is realized.

[0039] Furthermore, since the encoders 90A to 90C that output the digital pulse signals SA to SC are used as means for detecting the rotation amounts of the motors 72A, 72B, and 91, the X axis motor 72A, the Y axis motor 72B, and DF motor 91 can be digitally controlled, and the detection error is minimized compared to a configuration in which the motor rotation amount is controlled based on an analog detection signal corresponding to the rotation amount. Control will be realized.

[0040] Since the DSP 80B simultaneously controls each of the X-axis motor 72A, the Y-axis motor 72B, and the DF motor 91, the laser beam is deflected in the X-axis direction and the Y-axis direction, and the focal point in the Z-axis direction. The distance is synchronized with each other and controlled while suppressing the deviation between the axes, so that more accurate irradiation position control is realized. [0041] Under the above configuration, when the drawing condition command signal BCS is input from the computer system 13 to the control unit 8, the DSP 80A of the control unit 8 determines the workpiece 98 based on the drawing condition command signal BCS. The trajectory of the irradiation position when scanning the machining surface with laser light is calculated, and distortion correction is performed on the XY coordinate values of each irradiation position. In addition, the DSP80A calculates the laser beam intensity according to the processing depth, the material of the workpiece 98, and the type of processing for each irradiation position, as well as the line width, XY coordinate value, and processing surface of the scanning surface. The focal length is calculated according to the unevenness.

In the trajectory calculation of the irradiation position, a trajectory for vector scanning a line drawn on the machining surface of the workpiece 98, or a trajectory for vector scanning a line connecting a plurality of machining points on the machining surface with the shortest distance. Is calculated.

[0042] In the above laser light intensity calculation, the DSP 80A does not depend on the scanning speed of the laser light, and the energy density of the laser light per unit area of the irradiation position is substantially constant at each focal position. The laser light intensity is calculated.

More specifically, when the laser light output of the laser device 4 and the irradiation spot area are constant, the energy density per unit area decreases as the scanning speed of the laser light increases, and processing is performed at a slow scanning speed. Variation in processing depth or the like occurs between the processed part and a part processed at a high scanning speed, and the processing quality is impaired.

Therefore, when the laser beam output of the laser device 4 and the irradiation spot area are constant, the DSP 80A increases the laser beam intensity as the laser beam scanning speed increases, and also scans the laser beam. When the speed or / and the irradiation spot varies, or when the laser beam output of the laser device 4 fluctuates, the laser beam intensity at which the energy density per unit area at the irradiation spot is substantially constant is calculated. .

[0043] The DSP 80A shares the XY coordinate command value indicating the irradiation position on the processing surface of the workpiece 98, the focal length command value at the irradiation position, and the laser light intensity command value at predetermined time intervals. Write to data memory 83, and DSP80B synchronizes each of AOM5, DF motor 91 of dynamic focus lens unit 6, and X-axis motor 72A and Y-axis motor 72B of scanner head 7 in synchronization with writing by DSP80A. At the same time, the workpiece 98 is machined by vector scanning of the machining surface with the laser beam. At this time, the DSP 80B moves the irradiation position of the laser beam from the position (home position) PH deviated from the workpiece 98 to the vector scanning start point St as shown in FIG. When moving from the vector scan end point to the next vector scan start point St, the drive pitch of the X-axis motor 72A and Y-axis motor 72B is increased, and the irradiation position is moved to the solid scan start point at high speed. In addition, during vector scanning, the drive pitch is reduced and control is performed so that the laser beam is accurately irradiated to a predetermined irradiation position.

[0045] In addition, when the laser beam irradiation position is moved from the home position PH to the vector scanning start point St, the DSP 80B is configured only for the DF motor 91 so that the beam diameter at the vector scanning start point St becomes a predetermined value. The X axis motor 72A and Y axis motor 72B are driven so that the beam diameter becomes a predetermined value regardless of the irradiation position on the processing surface during vector scanning. That is, the DF motor 91 is finely operated in synchronization with the laser beam irradiation position.

[0046] Also, when vector scanning is performed with a laser beam on a workpiece 98 having unevenness on the processing surface, the DSP 80B performs dynamic focus lens unit 6 according to the height of the unevenness at the irradiation position. The DF motor 91 is finely moved to maintain the beam diameter constant. At this time, if the height difference in the unevenness of the processed surface is relatively large, it is difficult to keep the beam diameter constant only by fine movement of the DF motor 91 during the vector scan, and in this case, The DF motor 91 is coarsely operated in synchronization with the driving of the X-axis motor 72A and the Y-axis motor 72B.

[0047] Of course, the DF motor 91 may be coarsely and finely operated in synchronization with the driving of the X-axis motor 72A and the Y-axis motor 72B to adjust the focal position during vector scanning. is there.

Further, the difference in level of the unevenness on the processed surface can be determined based on CAD data indicating the shape of the processed surface of the workpiece 98, and the unevenness data is included in the data indicating the shape of the processed surface. If not included, a distance sensor that measures the distance to the machined surface may be used to measure the height difference of the machined surface in real time during vector scanning or before vector scanning. .

[0048] Next, the solidity of the laser beam on the processing surface of the workpiece 98 by the laser processing apparatus 1 A description will be given of the scanning.

FIG. 3 is a diagram showing an aspect of the trajectory L for vector scanning.

In the DSP80B shown in FIG. 2, when vector scanning is performed on the trajectory L with the laser beam, the scanning speed is a predetermined scanning speed (maximum) when the traverse direction K is constant (the trajectory L is a straight line). The laser scanning is started from the vector scanning start point St while accelerating the scanning speed until the scanning speed reaches the scanning speed. After the scanning speed reaches the predetermined scanning speed, the scanning speed is maintained and the trajectory L is maintained. By controlling to scan, the processing time is increased.

At this time, as shown in FIG. 3, when the switching point Q for switching the scanning direction K exists on the trajectory L, it is generally difficult to switch the laser scanning direction K discontinuously. Therefore, the conventional control is to decelerate the scanning speed before the switching point Q so that the laser scanning is temporarily stopped at the switching point Q, and to start scanning by switching the laser scanning direction K at the switching point Q. It is done with force.

[0050] However, if scanning is stopped at the switching point Q, there is a problem that the time required for scanning the track L, that is, the laser processing time is extended.

Therefore, in the present embodiment, when the switching point Q exists on the trajectory L, the following laser beam scanning (deflection) control is performed to prevent the scanning time from extending! . That is, the trajectory calculation unit 81 of the DSP 80A described with reference to FIG. 2 calculates the trajectory L for performing the laser beam solid scan, and then the switching point Q exists on the trajectory as shown in FIG. In this case, the scanning direction switching start point Qs set before the switching point Q on the trajectory L and the merging point Qe set before the switching point Q on the trajectory L are gradually reduced. Correct the trajectory L to be connected by the curved trajectory Rr.

[0051] When the DSP 80B drives the X-axis motor 72A, the Y-axis motor 72B, and the DF motor 91 to execute the laser beam scanning control along the trajectory L, the irradiation position of the laser beam is the scanning direction switching start point. When Qs is reached, the laser beam scanning along the curved trajectory Rr is continued while maintaining the scanning speed. As a result, the scanning direction K of the laser beam gradually changes so that it becomes the running direction K after passing through the switching point Q, and the end point position of the curved path Rr, that is, the confluence point Qe, in the scanning direction K of the laser beam. Switching is completed, and laser beam scanning is performed along the original trajectory L. Done. As a result, it is not necessary to stop the laser scanning at the switching point Q, so that the time required for the trajectory L scan is prevented from being extended, and high-speed laser processing is realized.

[0052] Each of the scanning direction switching start point Qs and the merging point Qe is set to a point separated by a switching point Q force by a predetermined distance Ts, Te along the trajectory L. At this time, the curvature of the curved track Rr depends on the switching angle Θ in the scanning direction K at the switching point Q. When the predetermined distances Ts and Te are always constant, the curvature of the curved track Rr decreases as the switching angle Θ force S decreases. Becomes big. For example, in FIG. 3, since the switching angle Θ 3 at the switching point Q3 is smaller than the switching angles Θ 1 and Θ 2 at the switching points Ql and Q2, the predetermined distances Ts and Te are always constant. The curvature of the curved trajectory Rr3 at the switching point Q3 is larger than that of the curved trajectories Rrl and Rr2 at the switching points Ql and Q2.

[0053] The greater the curvature of the curved track Rr, the more rapid control of the scanning direction K is required when scanning the laser light along the curved track Rr. The X-axis motor 72A, the Y-axis motor 72B, and the DF The motor 91 becomes difficult. Therefore, if the DSP 80A sets the scanning direction switching start point Qs and the merging point Qe while the predetermined distances Ts and Te are always constant, the trajectory when the switching angle Θ of the switching point Q is equal to or smaller than the predetermined threshold Θ th. Set the deceleration start point Qd of the scanning speed on L before the scanning direction switching start point Q s and generate the XY coordinate command value so that the running speed is decelerated from the deceleration start point Qd. The predetermined threshold value Θth is the minimum value of the switching angle at which the curvature capable of scanning can be obtained while maintaining the maximum scanning speed.

[0054] As described above, the DSP 80A sets the deceleration start point Qd and executes the control to generate the XY coordinate command value so that the scanning speed is decelerated from the deceleration start point Qd. Before the light irradiation position reaches the scanning direction switching start point Qs, the scanning speed is sufficiently decelerated, and then the curved trajectory Rr is scanned while maintaining the scanning speed at that time. The amount of change is kept small, and irradiation position control by drive control of the X-axis motor 72A, the Y-axis motor 72B, and the DF motor 91 becomes easy. When the laser beam irradiation position reaches the confluence point Qe, the DSP80A accelerates until the scanning speed reaches a predetermined scanning speed (maximum scanning speed), and after reaching the predetermined scanning speed, the scanning speed Thus, laser beam scanning is continued.

[0055] When the scanning speed is decelerated and accelerated, the DSP 80A reduces the energy density. In order to make it constant, a laser output command value is outputted so that the intensity of the laser beam increases or decreases according to the deceleration and acceleration of the scanning speed.

In addition, when the switching point Q exists on the trajectory L, the scanning direction switching start point Qs and the confluence point Qe are set on the trajectory L so that the DSP 80A always has a predetermined distance Ts and Te. Not limited to this, the scanning direction switching start point Qs and the confluence point Qe may be set so that the curvature of the curved trajectory Rr is always constant. According to this configuration, by setting the curvature of the curved trajectory Rr to a curvature that can be scanned at the maximum scanning speed, it is possible to scan the curved trajectory Rr at the maximum scanning speed regardless of the switching angle Θ of the switching point Q. It becomes.

[0056] As described above, according to this embodiment, the DSP 80B controls the AOM 5 to increase the laser light intensity in proportion to the scanning speed of the laser light on the processed surface of the workpiece 98, or Since the laser beam intensity is adjusted so that the energy density of the laser beam at each irradiation position is substantially constant, even if the scanning speed of the laser beam is high, variations in the processing depth on the processing surface This prevents high-quality processing.

Further, according to the present embodiment, the encoders 90A to 90C that output digital pulse signals, the counter circuit 84, the DSP 80B, the motor control unit 87, and the driver circuits 92A to 92C constitute a closed loop control system. The X-axis motor 72A, Y-axis motor 72B, and DF motor 91 drive can be compensated with high precision, so the irradiation position on the work surface of the workpiece 98 can be controlled with high precision, enabling high-quality machining. It becomes.

[0058] In particular, as the means for detecting the rotation amount of the X-axis motor 72A, the Y-axis motor 72B, and the DF motor 91, the encoder 90A to 90C that outputs the digital pulse signals SA to SC is used. Axis motor 72A, Y-axis motor 72B, and DF motor 91 can be digitally controlled, and the detection error can be minimized compared to a configuration in which the motor rotation amount is controlled based on an analog detection signal corresponding to the rotation amount. Therefore, more accurate irradiation position control is possible.

Especially for analog detectors that output analog signals according to the rotation amount of the X-axis motor 72A, Y-axis motor 72B and DF motor 91! /, Depending on the rotation amount as the motor temperature rises Since the signal changes non-linearly, correction according to the motor temperature is required, and the detection error increases depending on the correction accuracy. In addition, the analog detector rotates The detection accuracy is also affected by the aging of the quantity detection element.

On the other hand, according to the present embodiment, the X-axis motor 72A, the Y-axis motor 72B, and the DF motor 91 are digitally controlled using the encoders 90A to 90C. Therefore, it is possible to maintain high-precision irradiation position control that is hardly affected by aging.

[0059] According to the present embodiment, since the DSP 80B simultaneously controls each of the X-axis motor 72A, the Y-axis motor 72B, and the DF motor 91, the X-axis direction of the laser beam and the Y-axis The deflection of the direction and the focal length in the Z-axis direction are synchronized with each other and can be controlled while suppressing the misalignment between the axes, so that the irradiation position can be controlled with higher accuracy and higher quality machining can be performed. It becomes possible.

[0060] Further, according to the present embodiment, the control unit is equipped with two DSP80A and 80B with 8 forces, and the calculation processing such as trajectory calculation and distortion correction is different from the drive control processing for driving and controlling each part. Since it is configured to be executed by the DSP 80A and 80B, the above-described highly accurate irradiation position control is realized without causing delay in the deflection control of the scanner head 7 and the laser light intensity control of the AOM 5 by the arithmetic processing. The scanning speed of the laser beam can be increased, and high-quality processing can be performed in a short time.

Further, according to the present embodiment, since the focal length of the laser beam is adjusted based on the unevenness of the processed surface of the workpiece 98, the processed surface is not limited to the processed workpiece 98 having a flat processed surface. Laser processing is also possible for the workpiece 98 that draws a curved surface.

Furthermore, according to the present embodiment, when the switching point Q exists on the trajectory L, the laser beam scanning direction K is switched from before the switching point Q (scanning direction switching start point Qs). The scanning position of the laser beam is switched to the scanning direction K after switching, and the irradiation position is on the trajectory L to be scanned in the scanning direction K after switching. Since the laser beam scanning is controlled so that it is located at the (confluence point Qe), it is not necessary to stop the laser scanning at the switching point Q. Processing is realized.

In the first embodiment described above, the configuration in which the control unit 8 includes the shared data memory 83 that can be accessed by the power of each of the two DSPs 80 A and 80 B is exemplified. On the other hand, as shown in Fig. 4, the configuration of the control unit 8A, DSP80A is equipped with memory 83A and DSP80B power S memory 83B, and DSP80A and 80B send and receive data required for mutual processing by communication. It is good also as a structure.

[0064] For example, in the first embodiment described above, the laser oscillator 2 that continuously oscillates laser light has been described as an example. However, the present invention is not limited thereto, and a configuration using a laser oscillator that outputs noise light may be used. When the laser beam intensity is varied in this configuration, for example, if the laser oscillator oscillates using a Q switch, the laser beam intensity can be varied by varying the timing of the Q switch. When the laser oscillator has a shutter that shields the laser beam, the shutter opening / closing timing (open or closed time), the laser oscillator has an acoustooptic device (AOM) for intensity modulation. If it is, the intensity of the laser light may be varied by adjusting at least one of the acousto-optic elements, 1.

In the first embodiment described above, the laser beam is always vector-scanned at the time of laser processing. However, the present invention is not limited to this. If there is no bent portion, raster scanning may be performed in which laser light scanning is performed while the laser light intensity and scanning speed are always maintained constant.

[0066] In the first embodiment described above, the case where the scanner optical system 20 according to the present invention is applied to a laser processing apparatus is illustrated. However, the present invention is not limited to this. For example, light from a light source (laser light) However, it is necessary to deflect light at high speed, such as a drawing device that draws a drawn image by scanning the drawing surface at high speed and a measuring device that scans the sample at high speed to perform inspection measurement. It can be applied to various devices.

Next, a second embodiment of the present invention will be described.

2. Description of the Related Art Conventionally, there is known a scanner optical device configured such that a mirror is rotatably held on a rotation shaft and a reflection surface of the mirror can be adjusted to an arbitrary angle. Such a scanner optical apparatus is widely used in a laser processing apparatus as a deflecting means for scanning a processing surface of a workpiece with a laser beam as disclosed in, for example, Japanese Patent Application Laid-Open No. 2004-358507. ing.

However, when optically scanning an object such as a workpiece, in many cases, the intensity of irradiation light is high. However, since the conventional scanner optical device only provides light deflecting means, the user separately installs an optical module or optical element for intensity adjustment and focal position adjustment. It is necessary to prepare one optical system by arranging these optical modules or optical elements and scanner optical devices as appropriate.

Furthermore, when constructing an optical system, the optical axes of optical modules, optical elements, and scanner optical devices are aligned, and the beam diameter of light is adjusted for each optical element or optical module. Alignment work is required.

The alignment work of the optical system requires skill, and is very labor-intensive for those who are not experienced.

Therefore, in this embodiment, a scanner optical device that can easily construct an optical system for optical scanning, and a laser processing device that is suitable for use with this scanner optical device will be described.

FIG. 5 is a diagram showing a configuration of the laser processing apparatus 100 according to the present embodiment.

The laser processing apparatus 100 includes a laser oscillator 102, a scanner optical apparatus 103, and a pair of mirrors 104A and 104B, which are optical elements that guide the laser light emitted from the laser oscillator 102 to the scanner optical apparatus 103. These are placed and fixed on a plate-like stone surface plate 105. In general, the stone surface plate 105 is designed to mount and fix each optical element on such a stone surface plate 105, which has very high planar accuracy, thereby preventing the optical axis from being shifted between the optical elements. Aligning the optical axis between the optical elements becomes easy. For the mirrors 104A and 104B, a transmissive optical element such as a prism lens may be used instead of the mirror that is a reflective optical element. Further, when the laser oscillator 102 and the scanner optical device 103 are linearly arranged, an optical element that guides the laser light emitted from the laser oscillator 102 to the scanner optical device 103 is not necessary.

The laser oscillator 102 is a solid-state laser oscillator, liquid laser oscillator, gas laser oscillator, semiconductor laser oscillator, fiber laser oscillator, or free electron laser oscillator, and is controlled by a laser control device (not shown) to be used as a laser medium. Oscillates a laser beam with the corresponding wavelength. As shown in FIG. 6, the laser oscillator 102 includes a rectangular parallelepiped oscillator main body 120 having a built-in laser resonator, and a laser output opening at a tip 120A of the oscillator main body 120. Constructed with a mouthpiece 121!

[0071] Further, an XYZ axis stage 122 is provided on the front end 120A side and the rear end 120B side of the bottom surface of the oscillator main body 120, and these XYZ axis stages 122 are fixed to the stone surface plate 105 with screws. By adjusting the XYZ axis stage 122, the optical axis of the laser oscillator 102 can be finely adjusted. As described above, in this embodiment, the laser oscillator 102 is placed on the stone surface plate 105. However, since the stone surface plate 105 has a very low thermal conductivity, even if the laser oscillator 102 generates heat, It is possible to minimize the thermal effect on the optical element.

FIG. 7 is an enlarged view showing the scanner optical device 103.

The scanner optical device 103 includes an AOM (acousto-optic modulator) 130 that modulates the intensity of the laser beam output from the laser oscillator 102, a dynamic focus lens 131 that adjusts the focus of the laser beam, and deflects the laser beam. Thus, the optical element is attached to a rail 133 extending linearly. Further, the rail 133 is provided between the dynamic focus lens 131 and the scanner head 132, and a lens 134 as an optical element that shapes the light output from the dynamic focus lens 131 and inputs the light to the scanner head 132. Each of the two lenses 135A and 135B as optical elements that shape the laser light incident on the AOM 130 is mounted in a freely positionable manner.

[0073] The scanner head 132 includes a scanner mirror 1321A that deflects laser light, a scanner mirror 1321B that deflects laser light in a direction at a predetermined angle with respect to the deflection direction of the scanner mirror 1321A, and these scanner mirrors 1321A. , Motors 1322A and 1322B for driving 1321B, and a box-shaped housing 1323 having an open bottom for housing scanner mirrors 1321A and 1321B.

The housing 1323 has a laser light inlet (not shown) formed on the side surface. As shown in FIG. 5, the rail 133 has an extending portion 1340 extending from the end portion 105B of the stone surface plate 105, and the housing 1323 of the scanner head 132 is disposed on the extending portion 1340. The side surface is held by a holding piece 136 erected on the rail 133, and is held on the rail 133 by a so-called both-end support structure. The rail 133 is provided with an exit port 1324 for emitting the light deflected by the scanner mirrors 1321A and 1321B. And In the present embodiment, the scanner module 132, the lens 134, and the exit port 1324 constitute a deflection module.

When the dynamic focus lens 131 deflects laser light with the scanner head 132 and scans the object with the laser light, the irradiation spot diameter of the laser light on the scanning surface of the object is made substantially constant regardless of the irradiation position. The focal length of the laser beam is varied so as to maintain it. The dynamic focus lens 131 is driven by a motor (not shown) to vary the focal length of the laser beam. This motor (not shown) and the motors 1322A and 1322 of the scanner head 132 are controlled by a control unit 106ί shown in FIG. The control unit 106 controls the motor of the dynamic focus lens 131 that adjusts the focal length based on the irradiation position of the laser beam on the scanning surface and the motors 1322A and 1322B of the scanner head 132 while synchronizing them with each other. In place of the dynamic focus lens 131, an fΘ lens may be used as a focal length adjustment unit.

[0076] As described above, the AOM 130 modulates the intensity of the continuous wave laser beam or pulse laser beam output from the laser oscillator 102, and is controlled by the control unit 106. The control unit 106 Laser beam intensity according to the scanning speed of the laser beam specified by the drive amount of the motor 13 22A and 1322B of the scanner head 132 that always keeps the processing degree such as the laser processing depth on the scanning surface of the object constant Is variable. That is, when the scanning speed of the laser beam is high, the control unit 106 increases the laser beam intensity or the laser beam density because the energy per unit area decreases, and on the contrary, the scanning rate is slow. In some cases, the laser light intensity or laser light density is controlled to be reduced! /, And the energy per unit area during laser light scanning is controlled to be substantially constant.

The laser beam density is defined by the number of pulses per unit time of the laser beam, and the energy of the laser beam per unit area can be varied by varying the laser beam density.

As shown in FIG. 7, the AOM 130 and the dynamic focus lens 131 are mounted on a pedestal 137, and the pedestal 137 is mounted on a rail 133 so as to be freely positioned. It is. Each lens 134, 135 mm, 135 mm is also held by a lens holder 138, and a rail mounting part 139 is provided at the bottom of the lens holder 138, and this rail mounting part 139 is mounted on the rail 133 so as to be freely positioned. . Furthermore, the base 137 and the rail mounting part 139 are provided with a number of screw holes 144. After adjusting the mounting position of the AOM 130, etc., screws are screwed into the screw holes 144 and fixed to the rails 133 by screws. The

[0078] As shown in FIG. 8, the rail mounting portion 139 of the pedestal 137 and the lens holder 138 is provided with a dovetail structure dovetail 140, and the upper surface of the rail 133 extends in the longitudinal direction. A single groove 1330 is formed.

Accordingly, each optical element is attached to the rail 133 by fitting the base 140 with the base 137 and the rail attachment portion 139 from one end of the rail 133 into the groove 1330. At this time, since the linear arrangement of the pedestal 137 and the lens holder 138 is regulated by the groove 133 30 of the rail 133, the AOM 130, the dynamic focus lens 131, and the lenses 134, 135A are simultaneously mounted on the rail 133 The alignment of the 135B linear optical axis is completed. In particular, by adopting a dovetail structure for the mounting structure of each optical element on the rail 133, the backlash between the rail 133 and each optical element can be suppressed. The optical axis can be accurately aligned. Furthermore, the rail 133, the base 137, and the rail mounting portion 139 can be firmly fixed by screwing the screw into the screw 孑 L144.

[0079] Further, as shown in FIG. 7, the positioning mark 150 is drawn on the upper surface of the rail 133 at the mounting positions of the eaves 130, the dynamic focus lens 131, and the lenses 134, 135A, and 135B. In addition, a positioning mark 151 is drawn on each side surface of the rail mounting portion 139 of the base 137 and the lens holder 138. By aligning the positioning mark 150 and the positioning mark 151, ΑΟΜ130, The positioning of the dynamic focus lens 131 and the lenses 134, 135A, 135B is completed.

Thus, by providing the positioning mark 150 and the positioning mark 151 in advance, when transporting the scanner optical device 103, etc., the collar 130, the dynamic focus lens 131, and the lenses 134, 135A, 135B Even when each of these is removed and transported by the Lenole 133 force, alignment when attaching them to the rail 133 becomes easy. Furthermore, when finely adjusting the mounting position of each part due to aging deterioration or individual differences of lenses and optical elements, each part along the groove 1330 of the rail 133 with reference to the positioning mark 150 and the positioning mark 151 Positioning work becomes easier compared to the case where there is no guideline for a good mounting position just by moving back and forth.

Note that the positions of the positioning mark 150 and the positioning mark 151 are the optical characteristics of the optical elements such as the dynamic focus lens 131 and the lenses 134, 135A, and 135B, in other words, the optical design of the scanner optical device 3. Naturally, it can be changed according to the scanning angle range and spot diameter of the laser beam. Therefore, the positioning mark 150 and the positioning mark 151 may be provided for each of several optical design values. As a result, when the user operates the scanner optical device 3 with different optical design values, each optical element can be easily replaced and positioned.

In addition, the force is such that the positioning mark 150 and the positioning mark 151 are directly drawn on each of the rail 133, the base 137, and the rail mounting portion 139. In other words, it is sufficient that the positioning mark 150 and the positioning mark 151 are provided so that the relative distance between the optical elements attached to the rail 133 is defined. It is also possible to mark the mark 150 on a separate member and paste it on the rail 133. Further, the positioning mark 151 may be a separate member.

Here, when the AOM 130 is already built in the laser oscillator 102, when energy control is possible with the laser oscillator 102, or when energy control is not necessary in the first place, the scanner optical device 103 includes the AOM 130 described above. Therefore, it is necessary to remove the AOM130 from the optical axis (path) of the laser beam. Even in such a case, in the present embodiment, since the dovetail structure is adopted for mounting each optical element to the rail 133, the A OM130 and the pedestal 137 for mounting the AOM130 are mounted on the rail. It can be easily removed from 133.

[0084] On the contrary, when AOM 130 is attached to Renore 133, AOM 130 can be easily attached and positioned by aligning positioning mark 150 and positioning mark 151 as described above. It becomes possible. Also, when installing AOM130 on rail 133, attach AOM130 to rail 133 with AOM130 removed from rail133. By aligning the optical axes of the optical elements, and then attaching the AOM 130, the influence of the AOM 130 can be eliminated when aligning the optical axes of the optical elements.

Furthermore, when the scanning angle range by the scanner head 132 is relatively narrow, or when the change in the irradiation spot diameter on the scanning surface of the object is small, the dynamic focus lens 131 (of course, the Θθ lens is also used). May be unnecessary. In such a case, instead of the dynamic focus lens 131 (or fΘ lens), another lens is disposed in front of the lens 134. Even in such a case, similarly to the AOM 130, the dynamic focus lens 131 can be easily removed, and a lens in place of the dynamic focus lens 131 can be attached.

As described above, when the dynamic focus lens 131 is removed from the rail 133 or when the dynamic focus lens 131 is changed to one having different optical characteristics, it enters the scanner mirrors 1321A and 1321B of the scanner head 132. Since the beam diameter of the laser beam to be changed changes, it may be necessary to adjust the position of the lens 134 arranged in front of the scanner head 132. Even in such a case, since the lens 134 is mounted on the linear rail 133 so as to be freely positioned, the optical axis can be adjusted by moving the lens 134 back and forth along the dovetail groove 1330 and adjusting it. It becomes possible to perform positioning adjustment without shifting.

[0087] As shown in FIGS. 7 and 8, the rail 133 is divided into a plurality of rail pieces 133A to 133E along the longitudinal direction. Each of the rail pieces 133A to 133E is formed in a shape having substantially the same dimensions, and an extending portion 1340 for placing the scanner head 132 is provided only on the leading rail piece 133A. These rail pieces 133A to 133E are attached to the stone surface plate 105 to maintain the function of the rail guide member.In other words, the stone surface plate 105 is used for connecting the rail pieces 133A to 133E. It functions as a base material.

[0088] The mounting structure to the stone surface plate 105 will be described. Each rail piece 133A to 133E is formed in an L shape in side view, and has positioning legs 142 that are in surface contact with the end surface 105A of the stone surface plate 105. ing. That is, along each side of the stone surface plate 105, each rail piece 133A-; 133E positioning leg 142 is fixed to the end surface 105A of the stone surface plate 105 while being fixed. Each of the rail pieces 133A to 133E using 105 end faces 105A is linearly aligned and connected. When fixing each rail piece 133A ~; 133E to the stone surface plate 105, each is fixed with a gap δ (see Fig. 7), and one rail piece 133Α ~ 133Ε causes thermal expansion etc. However, the separation from the other rail pieces 133A to 133E prevents the occurrence of positional deviation (particularly, the variation in the relative distance between the optical elements). The interval δ is adjusted using, for example, a gap gauge!

As described above, according to the present embodiment, in the scanner optical device 103 included in the laser processing apparatus 100, the scanner head 132 is fixed to the end of the rail 133, and the dynamic focus lens 131 is attached to the rail 133. In addition to being detachably provided, the lens 134 is provided on the rail 133 so as to be freely positioned. According to this configuration, since the scanner head 132 and the dynamic focus lens 131 are attached to the rail 133 and unitized, the laser beam is deflected by the scanner head 132 and the object is scanned with the laser beam. While making it possible to keep the light irradiation spot diameter constant regardless of the irradiation position, the optical design value of the scanner optical device 103 can be easily changed by changing or removing the dynamic focus lens 131. .

[0090] Furthermore, even when the dynamic focus lens 131 is changed or removed, even when it is necessary to adjust the distance between the lens 1 34 and the scanner head 132, positioning on the linear rail 133 is possible. It is possible to adjust the distance by moving the lens 134 back and forth along the rail 133 while keeping the optical axis between the lens 134 and the scanner head 132 aligned. Easier alignment work when changing

Further, according to the present embodiment, the AOM 130 is configured to be detachably attached to the rail 133. According to this configuration, the scanner optical device 103 in which the function of adjusting the intensity of the laser beam when the laser beam is deflected by the scanner head 132 and the object is scanned with the laser beam is integrated is provided. Furthermore, when the AOM 130 is already built in the laser oscillator 2 or when the laser oscillator 102 oscillates the laser beam, the rail 133 force is also attached to the AOM 130, and the specifications of the laser oscillator 102 used together with the scanner optical device 103 are as follows. Can be easily adapted to. In addition, according to the present embodiment, since the rail 133 is fixed to the stone surface plate 105, the optical axis shift between the optical elements attached to the rail 133 is prevented, and each optical element It becomes easy to align the optical axis.

Furthermore, according to the present embodiment, the stone surface plate 105 is configured such that the laser oscillator 102 and the pair of mirrors 104A and 104B are mounted and fixed together with the scanner optical device 103. According to this configuration, the optical axis shift between the optical elements placed on the stone surface plate 105 is prevented, and the optical axis alignment between the optical elements is facilitated. Even if the laser oscillator 102 is mounted on the stone surface plate 105, the thermal conductivity of the stone surface plate 105 is extremely small, so that the heat effect of the heat generated by the laser oscillator 102 on other optical elements can be minimized. I can do it.

Further, according to the present embodiment, the rail 133 is divided into a plurality of rail pieces 133 A to 133 E along the longitudinal direction, and the rail pieces 133 A to 133 E are arranged along one side of the stone surface plate 105. Thus, the rail pieces 133A to 133E are arranged with a gap δ between them while aligning the axes (the dovetail grooves 1330).

According to this configuration, even if one rail piece 133Α to 133Ε undergoes thermal expansion or the like, it is separated from the other rail pieces 133A to 133E, thereby preventing the occurrence of misalignment. Furthermore, since the plurality of rail pieces 133 to 133 are arranged along one side of the stone surface plate 105 having a high planar accuracy, it is possible to easily and accurately align the dovetail grooves 1330 with each other.

Note that the second embodiment can be arbitrarily modified and applied within the scope of the present invention.

In the second embodiment, an extension portion 1340 is provided on the first rail piece 133A of the plurality of rail pieces 133A to 133E, the scanner head 132 is disposed on the extension portion 1340, and the extension portion 1340 is erected. The scanner head 132 is held by the holding piece 136.

On the other hand, for example, as shown in FIG. 9, the rail piece 133A is arranged in front of the end 105 端 of the stone surface plate 105, and the holding piece 136A is provided at the tip 1350 of the rail piece 133A. The scanner head 132 may be mounted on the stone surface plate 105 and the holding optical element 103A may be held by the holding piece 136A, and a laser processing apparatus 100A using the scanner optical apparatus 103A may be configured. According to the force and the structure, the scanner head 132 is placed on the stone surface plate 105 side, and it is difficult to transmit the vibration of the scanner head 132 to other optical elements. Therefore, it is possible to prevent displacement of the optical element due to vibration of the scanner head 132.

In the second embodiment, the scanner optical device 103 is configured by providing a condensing lens 134 at the subsequent stage of the dynamic focus 131.

On the other hand, as shown in FIG. 10, for example, a scanner optical device 103B in which a lens 134 is provided in front of the dynamic focus 131 may be configured, and a laser processing device 101B provided with the scanner optical device 103B may be used.

In the second embodiment, the AOM 130 and the lens are arranged in front of the dynamic focus 131.

The scanner optical device 103 is configured by providing 135A and 135B.

On the other hand, for example, as shown in FIG.

The scanner optical device 103C may be configured by omitting the M130 and the lenses 135A and 135B, and the laser processing device 101C including the scanner optical device 103C may be used.

135A and 135B are provided, and the lens for condensing the dynamic focus 131 is the rear stage 1

34 is provided to configure the scanner optical device 103.

On the other hand, for example, as shown in FIG.

M130 and lenses 135A and 135B are omitted, and lens 134 is dynamically focused.

A scanner optical device 103D may be provided in front of 131, and a laser processing device 101D including the scanner optical device 103D may be used.

In the second embodiment, the laser light output from the laser oscillator 102 is converted into a pair of mirrors.

The configuration is such that the light is deflected by 104A and 104B and guided to the scanner optical device 103.

On the other hand, for example, as shown in FIG.

3 may be arranged on a straight line with the optical axes aligned, and the laser processing apparatus 101E configured to directly enter the laser light output from the laser oscillator 102 into the scanner optical apparatus 103 may be used.

In the configuration in which the laser oscillator 102 and the scanner optical device 103 are arranged on a straight line with the optical axes aligned, for example, the scanner optical device 103B described above is used instead of the scanner optical device 103 as shown in FIG. The laser processing device 101F can be configured For example, as shown in FIG. 15, the laser processing apparatus 101G may be configured by using the above-described scanner optical apparatus 103C. Also, for example, as shown in FIG. 16, laser processing by using the above-described scanner optical apparatus 103D. The apparatus 101H may be configured.

[0100] In the second embodiment, each of the other rail pieces 133B to 133E except for the leading rail piece 133A has substantially the same size. However, the present invention is not limited to this, as shown in FIG. The scanner optical device 103E may be configured by dividing the rail 133 into rail pieces 133A ′ to 133E ′ for each optical element to be attached.

Further, as shown in FIG. 18, the scanner optical device 103F may be configured by using one rail 160. Further, as shown in FIGS. 17 and 18, the scanner head 132 has a cantilever support structure in which the scanner head 132 is held only by the end of the rail piece 133A ′ or the holding piece 136 erected on the end of the rail 160. Also good.

Note that in FIGS. 10 to 18, the positioning mark 150 and the positioning mark 151 are not shown.

[0102] Further, instead of the rail 133 described above, a linear guide that is generally used as a linear guide shaft bearing may be used.

In the second embodiment, the mounting structure between the rail 133 and each optical element is a groove structure, but the present invention is not limited to this. For example, one or more ridges extending in parallel with each other are provided on the upper surface of the rail 133, and ridges that engage with the ridges of the rail 133 are provided on the bottom surfaces of the base 137 and the rail mounting portion 139. Each optical element may be attached to the lenore 133 by an engaging structure of ridges and ridges. As a result, each optical element can be individually detached from the rail 133 as compared to a structure in which each optical element is mounted by providing a groove in the rail 133.

In the first and second embodiments, the configuration in which the light emitted from the laser oscillators 1 and 102 is deflected vertically downward by the scanner head 7 or the scanner optical device 103 to irradiate the workpiece is exemplified. However, it is not limited to this. That is, if the scanner head 7 or the scanner optical device 103 is rotated by a predetermined angle with the optical axis (incident side) of the laser light as the central axis, and the vertical downward direction is defined as 0 degrees, the horizontal direction is, for example, within ± 90 degrees Irradiate laser light at an arbitrary angle of, or irradiate laser light vertically upward at 180 degrees in the horizontal direction It is good also as composition to do. By adopting such a configuration, the irradiation range of the laser beam can be expanded compared to a configuration in which the scanner head 7 or the scanner optical device 103 is not rotated.

Note that a rotation driving means for adjusting the predetermined angle of the scanner head 7 or the scanner optical device 103 to an arbitrary angle may be provided separately.

Claims

The scope of the claims

[1] A scanner optical system that irradiates and scans an object with light output from a light source, the light intensity adjusting means for adjusting the intensity of the light,

Deflection means for deflecting the light toward a predetermined position of the object and deflecting the light so as to obtain a predetermined scanning speed from a zero level;

The light intensity adjusting means adjusts the light intensity in proportion to the light scanning speed by the deflecting means or so that the energy density of the light becomes substantially constant. system.

[2] The scanner optical system according to claim 1! /,

The deflection means includes a scanner mirror, a drive motor that drives the scanner mirror, and a controller that controls the drive motor,

An encoder for outputting a digital pulse signal corresponding to the drive amount of the scanner mirror is provided in the drive motor;

The controller counts the digital pulse signal to identify the drive amount, and executes feedback control that outputs a control signal to the drive motor based on the drive amount

A scanner optical system.

[3] In the scanner optical system according to claim 1,! /

The deflection means includes

X-axis deflecting means and Y-axis deflecting means for deflecting the light in the X-axis direction and the Y-axis direction orthogonal to each other in the plane of the object,

A scanner optical system, wherein both the deflection by the X-axis deflection means and the deflection by the Y-axis deflection means are simultaneously controlled by the same controller.

[4] The scanner optical system according to claim 3,

A focus that adjusts the focal length of the light by adjusting the distance between the lenses according to the irradiation position of the light on the object defined by the deflection by the X-axis deflection unit and the deflection by the Y-axis deflection unit. An adjustment means; A scanner optical system, wherein all axes are simultaneously controlled by the same controller for the focal length adjustment by the focus adjustment means together with the deflection by the X axis deflection means and the deflection by the Y axis deflection means.

[5] The scanner optical system according to claim 4,

The controller controls the focus adjustment means so that a focal length of the light is adjusted according to surface irregularities of the object.

A scanner optical system.

[6] In the scanner optical system according to claim 1,! /

Based on the shape of the object and the scanning mode of the light, a trajectory calculating means for calculating the deflection trajectory of the light by the deflecting means;

Deflection control means for feedback-controlling the deflection of the light by the deflection means based on the deflection trajectory by the trajectory calculation means and the detected value of the deflection of the light, and the trajectory calculation means and the deflection control means; A scanner optical system characterized by the fact that each is composed of individual CPUs.

[7] In the scanner optical system according to claim 1,! /

When there is a switching point at which the scanning direction of the light is switched on the trajectory to be scanned with the light,

The scanning direction of the light is gradually changed to the scanning direction after the switching from before the switching point, and the scanning direction of the light is switched to the scanning direction after the switching. The deflecting unit is controlled so that the light scanning position is located on the trajectory to be scanned in the scanning direction after the switching.

A scanner optical system.

[8] The scanner optical system according to claim 6 or 7,

The light source has a laser device that oscillates laser light,

The light intensity adjusting means includes the Q switch when the laser device incorporates a Q switch, the shutter when the laser device has a shutter for shielding laser light, and the laser device for intensity modulation. In the case of having an acousto-optic element, the oscillation optical element, and in the case of oscillating the laser device pulsed laser beam, the oscillation frequency A scanner optical system characterized by adjusting at least one of the forces in one period and adjusting the intensity of the laser beam.

A laser processing apparatus for applying a laser by irradiating a processing surface of a workpiece with laser light output from a laser oscillator,

A light intensity adjusting means for adjusting the intensity of the laser light;

Deflecting means for deflecting the laser light, and vector scanning the processed surface of the workpiece with the laser light at a predetermined scanning speed from zero level,

The light intensity adjusting means adjusts the intensity of the laser light in proportion to the vector scanning speed of the laser light by the deflecting means or so that the energy density of the laser light becomes substantially constant. A featured laser processing apparatus.

A scanner optical device having a deflection module for deflecting light output from a light source toward an object, and deflecting the light by the deflection module to scan the object, wherein the deflection is applied to a linear rail member While fixing the module,

A focus adjusting means for adjusting the focal length of the light output from the light source is detachably provided on the rail member,

An optical element that shapes the light output from the focus adjusting means and inputs the light to the deflection module is provided on the rail member so as to be freely positioned.

A scanner optical device.

The scanner optical device according to claim 10,

A scanner optical device, wherein a laser light intensity adjustment module for adjusting a laser light intensity of laser light incident on the focus adjustment unit is detachably provided on the rail member.

The scanner optical device according to claim 10,

A scanner optical device, wherein the rail member is fixed to a stone surface plate.

The scanner optical device according to claim 12,

A scanner optical device, wherein both the light source and an optical element for guiding light output from the light source to the scanner optical device are fixed to the stone surface plate.

The scanner optical device according to claim 12, A scanner optical device, wherein the deflection module is supported by the rail member and the stone surface plate.

[15] The scanner optical apparatus according to claim 10,

A scanner optical device, wherein the rail member is divided into a plurality of rail pieces along a longitudinal direction, and the rail pieces are arranged with a gap therebetween.

[16] The scanner optical apparatus according to claim 10,

A scanner optical device, comprising: a mark portion indicating a guide of an attachment position for each member attached to the rail member.

[17] A scanner optical device that includes a deflection module that deflects light output from a light source toward an object, scans the object by deflecting the light by the deflection module, and includes a linear rail member The deflection module is fixed to the rail member, and a focus adjusting means for adjusting the focal length of the light output from the light source is detachably provided on the rail member, and the light output from the focus adjusting means is shaped to deflect the deflection. A scanner optical device in which an optical element to be input to the module is provided on the rail member so as to be freely positioned; and a laser device that outputs laser light to the scanner optical device,

A laser processing apparatus, wherein the scanner optical device deflects the laser light and scans a processing surface of a workpiece with the laser light.