CN100468698C - 半导体器件的制造方法 - Google Patents
半导体器件的制造方法 Download PDFInfo
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- CN100468698C CN100468698C CNB2006100287721A CN200610028772A CN100468698C CN 100468698 C CN100468698 C CN 100468698C CN B2006100287721 A CNB2006100287721 A CN B2006100287721A CN 200610028772 A CN200610028772 A CN 200610028772A CN 100468698 C CN100468698 C CN 100468698C
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CNB2006100287721A CN100468698C (zh) | 2006-07-10 | 2006-07-10 | 半导体器件的制造方法 |
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CNB2006100287721A CN100468698C (zh) | 2006-07-10 | 2006-07-10 | 半导体器件的制造方法 |
Publications (2)
Publication Number | Publication Date |
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CN101106106A CN101106106A (zh) | 2008-01-16 |
CN100468698C true CN100468698C (zh) | 2009-03-11 |
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CNB2006100287721A Expired - Fee Related CN100468698C (zh) | 2006-07-10 | 2006-07-10 | 半导体器件的制造方法 |
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Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101740367B (zh) * | 2008-11-27 | 2012-07-11 | 中芯国际集成电路制造(上海)有限公司 | 阶梯式栅氧化层的制造方法及半导体器件 |
CN102044468B (zh) * | 2009-10-23 | 2014-02-05 | 无锡华润上华半导体有限公司 | 一种浅沟槽隔离结构表面的研磨方法 |
CN102487000A (zh) * | 2010-12-03 | 2012-06-06 | 无锡华润上华半导体有限公司 | 栅区刻蚀方法和系统 |
CN102214597B (zh) * | 2011-05-27 | 2015-07-29 | 上海华虹宏力半导体制造有限公司 | 浅沟槽隔离结构及其加工方法和半导体器件制造方法 |
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CN101106106A (zh) | 2008-01-16 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING |
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Effective date of registration: 20111116 Address after: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Co-patentee after: Semiconductor Manufacturing International (Beijing) Corporation Patentee after: Semiconductor Manufacturing International (Shanghai) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090311 Termination date: 20190710 |
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CF01 | Termination of patent right due to non-payment of annual fee |