CN100467941C - 光照射装置 - Google Patents
光照射装置 Download PDFInfo
- Publication number
- CN100467941C CN100467941C CNB038213176A CN03821317A CN100467941C CN 100467941 C CN100467941 C CN 100467941C CN B038213176 A CNB038213176 A CN B038213176A CN 03821317 A CN03821317 A CN 03821317A CN 100467941 C CN100467941 C CN 100467941C
- Authority
- CN
- China
- Prior art keywords
- lamp
- embedding
- mouthpiece
- discharge
- interface components
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 abstract description 27
- 239000011521 glass Substances 0.000 abstract description 18
- 238000004140 cleaning Methods 0.000 abstract 1
- 230000005855 radiation Effects 0.000 description 8
- 238000011010 flushing procedure Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000009434 installation Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 230000009977 dual effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
- H01J5/54—Means forming part of the tube or lamps for the purpose of providing electrical connection to it supported by a separate part, e.g. base
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V19/00—Fastening of light sources or lamp holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Plasma & Fusion (AREA)
- General Engineering & Computer Science (AREA)
- Cleaning In General (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
- Liquid Crystal (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002265317A JP4578051B2 (ja) | 2002-09-11 | 2002-09-11 | 紫外線照射装置 |
JP265317/2002 | 2002-09-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1682074A CN1682074A (zh) | 2005-10-12 |
CN100467941C true CN100467941C (zh) | 2009-03-11 |
Family
ID=31986571
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB038213176A Expired - Lifetime CN100467941C (zh) | 2002-09-11 | 2003-09-10 | 光照射装置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP4578051B2 (ja) |
KR (1) | KR101017309B1 (ja) |
CN (1) | CN100467941C (ja) |
TW (1) | TWI282998B (ja) |
WO (1) | WO2004025175A1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5146808B2 (ja) * | 2007-10-05 | 2013-02-20 | ウシオ電機株式会社 | 紫外線照射装置 |
JP5146061B2 (ja) * | 2008-04-10 | 2013-02-20 | ウシオ電機株式会社 | エキシマランプおよびこれを備えたランプユニット |
TWI437609B (zh) | 2008-05-30 | 2014-05-11 | Gs Yuasa Int Ltd | 外部電極型放電燈以及使用該放電燈之紫外線照射裝置 |
KR101204729B1 (ko) * | 2008-09-22 | 2012-11-27 | 가부시키가이샤 지에스 유아사 | 엑시머 램프 및 엑시머 램프 유닛 및 자외선 조사 장치 |
JP5233551B2 (ja) * | 2008-09-27 | 2013-07-10 | ウシオ電機株式会社 | エキシマランプ装置 |
WO2012002077A1 (ja) * | 2010-07-02 | 2012-01-05 | シャープ株式会社 | 照明装置、表示装置、及びテレビ受信装置 |
JP6545964B2 (ja) * | 2015-01-26 | 2019-07-17 | 株式会社オーク製作所 | エキシマランプ装置 |
CN109100890B (zh) * | 2017-06-20 | 2021-04-16 | 上海微电子装备(集团)股份有限公司 | 一种光配向设备及其运动和旋转方法 |
JP6896919B1 (ja) * | 2020-08-03 | 2021-06-30 | 株式会社クォークテクノロジー | 殺菌ランプ |
KR102585542B1 (ko) * | 2021-06-07 | 2023-10-06 | 유니램 주식회사 | 광 조사 장치 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60112435U (ja) * | 1984-01-08 | 1985-07-30 | 五味 滋 | 空気流通パイプ付缶 |
JPH054684Y2 (ja) * | 1986-02-19 | 1993-02-05 | ||
JP2000260396A (ja) * | 1999-03-05 | 2000-09-22 | Quark Systems Co Ltd | エキシマランプ、エキシマ照射装置および有機化合物の分解方法 |
JP3282804B2 (ja) * | 1999-05-19 | 2002-05-20 | クォークシステムズ株式会社 | エキシマ照射装置 |
-
2002
- 2002-09-11 JP JP2002265317A patent/JP4578051B2/ja not_active Expired - Lifetime
-
2003
- 2003-09-05 TW TW092124562A patent/TWI282998B/zh not_active IP Right Cessation
- 2003-09-10 CN CNB038213176A patent/CN100467941C/zh not_active Expired - Lifetime
- 2003-09-10 WO PCT/JP2003/011596 patent/WO2004025175A1/ja active Application Filing
- 2003-09-10 KR KR1020057003848A patent/KR101017309B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
KR20050042174A (ko) | 2005-05-04 |
TWI282998B (en) | 2007-06-21 |
JP2004103458A (ja) | 2004-04-02 |
CN1682074A (zh) | 2005-10-12 |
KR101017309B1 (ko) | 2011-02-28 |
JP4578051B2 (ja) | 2010-11-10 |
TW200407934A (en) | 2004-05-16 |
WO2004025175A1 (ja) | 2004-03-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN100467941C (zh) | 光照射装置 | |
JP7263443B2 (ja) | コンパクトなモードロックレーザモジュール | |
US8522802B2 (en) | Optical irradiation equipment and optical irradiation method | |
JP2011053399A (ja) | 液晶パネルの製造方法および製造装置 | |
CN211263170U (zh) | 一种自清洁式双光束分光光度计 | |
JP5637974B2 (ja) | 基板洗浄装置及び基板洗浄方法 | |
US8449351B2 (en) | Lower unit for glass polishing system and glass polishing method using the same | |
US20120223631A1 (en) | Emitting apparatus for washing light nanoimprint template and method for the same | |
CN1713336B (zh) | 受激准分子灯 | |
US4976002A (en) | Tube particle vacuum cleaner | |
JP6314682B2 (ja) | エキシマ光照射装置 | |
CN104620367A (zh) | 用于辐射基片的装置 | |
KR101224578B1 (ko) | 패널 지지체 | |
CN109073988B (zh) | 用于曝光基板的装置 | |
CN104948946A (zh) | 照射装置 | |
JP2005222905A (ja) | エキシマランプ | |
JP2005019701A (ja) | 基板処理装置 | |
JP5504896B2 (ja) | ランプユニット | |
KR100792224B1 (ko) | 내부에 반사용 알루미늄이 코팅된 전등 및 그 제조방법 | |
KR100856081B1 (ko) | 세정장치 | |
CN112478391B (zh) | 一种轻量化硅基片储存装置 | |
JP4273028B2 (ja) | 放電ランプ装置 | |
JP4983829B2 (ja) | 紫外線照射装置 | |
EP3941155A1 (en) | Radio frequency screen for an ultraviolet lamp system | |
KR101253730B1 (ko) | 핀타입 패널 지지체 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: GS YUASA CORP Free format text: FORMER OWNER: NIPPON STORAGE BATTERY CO., LTD. Effective date: 20051216 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20051216 Address after: Kyoto Prefecture Applicant after: GS YUASA Corp. Address before: Kyoto Prefecture Applicant before: Japan Storage Battery Co.,Ltd. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: GS YUASA CORPORATION Free format text: FORMER OWNER: YUASA BATTERY CO LTD Effective date: 20101112 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20101112 Address after: Kyoto Prefecture Patentee after: GS YUASA INTERNATIONAL Ltd. Address before: Kyoto Prefecture Patentee before: GS YUASA Corp. |
|
CX01 | Expiry of patent term |
Granted publication date: 20090311 |
|
CX01 | Expiry of patent term |