CN100464401C - Object table device - Google Patents
Object table device Download PDFInfo
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- CN100464401C CN100464401C CNB2005100728630A CN200510072863A CN100464401C CN 100464401 C CN100464401 C CN 100464401C CN B2005100728630 A CNB2005100728630 A CN B2005100728630A CN 200510072863 A CN200510072863 A CN 200510072863A CN 100464401 C CN100464401 C CN 100464401C
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- objective table
- support
- linear motor
- reaction force
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70975—Assembly, maintenance, transport or storage of apparatus
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Public Health (AREA)
- Health & Medical Sciences (AREA)
- Epidemiology (AREA)
- Environmental & Geological Engineering (AREA)
- Machine Tool Units (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A stage device 10 includes: a stationary base 14 fixed to a base 12; a substrate table 16 supported on the stationary base 14; a movable stage 18 transversely constructed so as to straddle the substrate table 16; a pair of linear motors 20A and 20B for driving both the end parts of the movable stage 18 with respect to the Y-direction; and a controller 23 for translationally driving the linear motors 20A and 20B. Slide mechanisms 35A and 35B are provided between the stationary base 14 and the lower ends of strut parts 34A2 and 34B2 of motor support parts 34A and 34B. When the linear motors 20A and 20B drive the movable stage 18 with respect to the Y-direction, the motor support parts 34A and 34B are moved with respect to the direction opposite to the traveling direction of the movable stage 18. Accordingly, there is no effect of the reaction force from the linear motors 20A and 20B, and the driving control of the movable stage 18 can be performed at high accuracy.
Description
Technical field
The present invention relates to objective table device, particularly about being configured the objective table device that operation precision that the reaction force that produces can eliminate because of moving stage the time makes objective table descends.
Background technology
For example, be called as objective table device (ス テ-ジ dress
) device, be constituted as the Y objective table that makes a type and move (for example, with reference to patent documentation 1) at a predetermined velocity in the substrate top that is adsorbed on the workbench (テ-Block Le).
And, above-mentioned Y objective table is gone up extension in the direction (directions X) vertical with moving direction (Y direction), strides across substrate and is supported movably by a pair of guide mechanism at both ends, and, detect the shift position by a pair of linear movement pick-up (リ ニ ア ス ケ-Le) (position detector).And the two ends of Y objective table are driven to moving direction by a pair of linear motor (driving mechanism).The support part supports that is fixed on the fixed pedestal a pair of linear motor.
Therefore, above-mentioned objective table device is constituted as, and during by the drive force Y objective table of linear motor, its reaction force passes to the support of supporting linear motor, is discharged into fixed pedestal by support.
Yet, in objective table device in the past,, when moving the Y objective table, need bigger actuating force, and its reaction force increasing also with more speed along with substrate maximizes, the maximization of Y objective table, support is according to reaction force and deflection ground moves.Its result needs the time to restrain the vibration of supporting mass, and, can produce and the opposed problem that goes up the relative position skew of lower yoke of the above-below direction of linear motor coil.
Summary of the invention
The purpose of this invention is to provide a kind of objective table device that solves above-mentioned problem.
As technical scheme 1 described objective table device of the present invention, it is characterized in that having: be fixed on the fixed pedestal on the ground; The objective table that relative this fixed pedestal is set up movably; Comprise above-mentioned objective table is applied the coil of actuating force and the linear motor of yoke; Be provided with and support the horizontal part of above-mentioned yoke abreast with above-mentioned yoke; Extend below to above-mentioned horizontal part, and support many column sections of above-mentioned horizontal part; Control above-mentioned linear motor so that the controlling organization that above-mentioned objective table moves at a predetermined velocity, above-mentioned column sections is supported by the slide mechanism that is mounted slidably in said fixing pedestal or above-mentioned ground, and absorbs owing to above-mentioned slide mechanism moves the reaction force that produces to the opposite direction of above-mentioned objective table.
As technical scheme 2 described objective table devices of the present invention, it is characterized in that above-mentioned slide mechanism has the guidance part of the moving direction of guiding above-mentioned support and rollably is set at the rolling member of above-mentioned guidance part.
As technical scheme 3 described objective table devices of the present invention, it is characterized in that above-mentioned guidance part has the resetting device that after above-mentioned support moves above-mentioned support is resetted.
According to the present invention, because reaction force absorbing mechanism is set between support lower end and fixed pedestal, reaction force when being used to absorb actuating force by driving mechanism objective table being moved, even produce at driving mechanism under the situation of bigger actuating force, also can absorb the reaction force of actuating force, can prevent the reaction force disturbance.Therefore, can prevent to make the support deflection by the reaction force of actuating force, and, even under the situation of high-speed driving objective table, also can not be subjected to the influence of reaction force, control accurately.
And, because support according to the reaction force from driving mechanism, slides to the direction opposite with objective table, the quality of the enough support integral body of energy absorbs reaction force, even under the situation of high-speed driving objective table, also can not influenced by reaction force, control accurately.
Description of drawings
Fig. 1 is the stereogram of the objective table device that is suitable for of an embodiment of expression movable body position control device of the present invention
Fig. 2 is the front view of objective table device shown in Figure 1
Fig. 3 is the front elevation that the structure of linear motor 20B and guidance part 30B is amplified in expression
Fig. 4 is the plane graph that the structure of linear motor 20B and guidance part 30B is amplified in expression
Fig. 5 is the sectional arrangement drawing of the formation of expression slide mechanism 35A, 35B
Fig. 6 is the stereogram of the formation of expression slide mechanism 35A, 35B
Fig. 7 is the stereogram of the embodiment 2 of expression objective table device of the present invention
Fig. 8 is the front view of objective table device shown in Figure 7
Embodiment
Below, with reference to accompanying drawing one embodiment of the present of invention are described.
Fig. 1 is the stereogram of the embodiment 1 of expression objective table device of the present invention.Fig. 2 is the front view of objective table device shown in Figure 1.Fig. 3 is the front elevation that the structure of linear motor 20B and guidance part 30B is amplified in expression.Fig. 4 is the plane graph that the structure of linear motor 20B and guidance part 30B is amplified in expression.
As shown in Figures 1 to 4, objective table device 10 is gantry (ガ Application ト リ) mobile model objective tables, has: be fixed on the fixed pedestal 14 on the ground 12 of concrete system; Be bearing in the substrate stage 16 on the fixed pedestal 14; Across substrate stage 16 tops and by the movable objective table 18 of crossbearer; Drive a pair of linear motor (driving mechanism) 20A, the 20B at the both ends of movable objective table 18 along the Y direction; Detect linear movement pick-up 22A, the 22B of shift position at the both ends of movable objective table 18; Based on linear movement pick-up 22A, the position detection signal of 22B makes linear motor 20A, the control device 23 that 20B goes forward side by side and drives.In addition, in Fig. 3, Fig. 4, do not illustrate linear movement pick-up 22A, but because and linear movement pick-up 22B be same structure, so omitted explanation to linear movement pick-up 22A.
Fixed pedestal 14 be with the steelframe clathrate the strong structure that combines, and ground 12 relatively is fixed by a plurality of fixed components (not shown).And, on fixed pedestal 14, being provided with the unit 26 that shakes that removes that absorbs vibration, stone platform 28 is supported in the top of removing the unit 26 that shakes.These stone platform 28 usefulness are made than thermal expansion metal rates such as iron stone material little and that intensity is high, form than substrate stage 16 in directions X and the big size of Y direction size.
Erect the 32A of guide support portion, the 32B of supporting guidance part 30A, 30B in the left and right sides of stone platform 28.And guidance part 30A, 30B are installed on the moving direction Y direction of movable objective table 18 and extend, and have the pressure-feed air bearing by air pressure both ends of the movable objective table 18 of guiding under low Frotteurism.
And then, erect motor support 34A, the 34B that supports linear motor 20A, 20B in the outside of the 32A of guide support portion, 32B.This motor support 34A, 34B are the horizontal part 34A1, the 34B1 that are extended to form abreast by the yoke with linear motor 20A, 20B and constitute from many column sections 34A2,34B2 that horizontal part 34A1,34B1 extend downwards.
Between the lower end of column sections 34A2, the 34B2 of motor support 34A, 34B and fixed pedestal 14, be provided with slide mechanism (reaction force absorbing mechanism) 35A, the 35B that absorbs reaction force, the reaction force when being used to absorb actuating force by linear motor 20A, 20B movable objective table 18 being moved.This slide mechanism 35A, 35B support movably, so that motor support 34A, 34B be according to from the reaction force of linear motor 20A, 20B, can slide to the direction opposite with movable objective table 18.
And, between the 32A of guide support portion, 32B and motor support 34A, 34B, be provided with cable bearing (ケ-Block Le ベ ア) 36A, 36B, be used to guide the deflection situation that is connected a plurality of cables on linear motor 20A, 20B and linear movement pick-up 22A, the 22B.Be provided with this cable bearing 36A, 36B are set as mounting on the cable support 37A, the 37B that extend along the Y direction, follow movable objective table 18, and carry out guide cable and make it not move and twine with flexed portion the moving of Y direction.
Movable objective table 18 is seen the so-called door type that forms from the front, it has slide block (movable part) 18A, the 18B that is driven by linear motor 20A, 20B and connects between slide block 18A, the 18B and be erected at crossbeam 18C on the directions X vertical with moving direction.On the front end of crossbeam 18C or rear end, member (tool) is installed, for example to the surface that is adsorbed in the substrate (not shown) on the substrate stage 16 apply equably soup coating nozzle (not shown), check the transducer (not shown) of substrate surface etc.
And, above slide block 18A, 18B, be provided with and make lifting drive division 38A, the 38B of crossbeam 18C along the lifting of Z direction.
The structure of linear motor 20A, 20B and guidance part 30A, 30B is described with reference to Fig. 3 here.And because the structure of linear motor 20A, 20B and guidance part 30A, 30B, its left side and right side are configured to left-right symmetric respectively, and are identical structures, therefore, the following describes linear motor 20B and guidance part 30B about being configured in the right side.
As shown in Figures 3 and 4, linear motor 20B has: give prominence to coil supports arm 40B from movable part 18B to the side; Be installed in the moving coil 42B of coil supports arm 40B top and bottom; Be bearing in the yoke 44B of motor support 34B upper end; The permanent magnet 46B that is fixed in the yoke 44B inboard that forms コ word shape.Moving coil 42B and permanent magnet 46B practise physiognomy and are being configured over the ground, by applying driving voltage, to the electromagnetic force (actuating force) of permanent magnet 46B generation to the Y direction.
Thus, the structure of linear motor 20B is: by producing electromagnetic repulsion force or gravitation by the relative permanent magnet 46B of moving coil 42B, the actuating force of Y direction is put on movable objective table 18, to the voltage that moving coil 42B applies, can produce the actuating force that movable objective table 18 is advanced at a predetermined velocity along the Y direction by control.
Detect movable objective table 18 the shift position linear movement pick-up 22B by the right flank 50B-2 that is set at guide rail 50B and along the Y direction extend to form by position probing plate 22a and detect and to be constituted by the transducer 22b of the slit number of position probing plate 22a.Because transducer 22b is installed on the slide block 18B, therefore counts corresponding umber of pulse as detection signal, and the amount of movement of movable objective table 18 is exported according to the slit (ス リ Star ト) that is configured to row with predetermined space.
Fig. 5 is the sectional arrangement drawing of the structure of expression slide mechanism 35A, 35B.Fig. 6 is the stereogram of the structure of expression slide mechanism 35A, 35B.
As Fig. 5 and shown in Figure 6, slide mechanism 35A, the 35B of present embodiment has the linear guide portion 60 of the moving direction of guiding motor support 34A, 34B and is arranged on the rolling member 62 that can roll in the linear guide portion 60.And the spherical a plurality of steel balls that form that rolling member 62 is made by stainless steel material are formed, and can bear the load of motor support 34A, 34B.
Linear guide portion 60 has: the guide rail 64 that extends to form along the Y direction; Be used for guide rail 64 is fixed on fixed component 66 on the fixed pedestal 14; Sliding unit 70 with the chimeric recess 70a that is entrenched on the guide rail 64 with low friction slip.Sliding unit 70 is bonded to the lower end of each column sections 34A2,34B2, and motor support 34A, 34B are supported slidably.
And,, be provided with the leaf spring (resetting device) 76 that the sliding unit 70 that guide rail 64 is slided is reset to the position before moving in the end of linear guidance part 60.This leaf spring 76, its underpart is cemented on the end face of fixed component 66 by fixed member 78, and its top is cemented on the end face of motor support 34A, 34B by fixed member 80.And the resetting device as the sliding unit 70 that makes after moving resets also can use the method that sliding unit 70 is resetted by helical spring spring force, and perhaps the repulsion by magnet makes method that sliding unit 70 resets etc.
Thereby, linear motor 20A, 20B with movable objective table 18 when the Y direction drives, to motor support 34A, 34B effect reaction force, and sliding unit 70 moves along guide rail 64, and motor support 34A, 34B move to the direction opposite with movable objective table 18 moving directions.Thus, the reaction force of linear motor 20A, 20B is absorbed as the actuating force that the all-mass that makes motor support 34A, 34B and each sliding unit 70 moves.And the all-mass of motor support 34A, 34B and each sliding unit 70 is also enough big compared with the quality of the movable objective table 18 that linear motor 20A, 20B drive, and therefore, the amount of movement of motor support 34A, 34B is very little.
Like this, motor support 34A, 34B and 70 actions of each sliding unit are to absorb reaction force, can reduce the deflection that motor support 34A, 34B produce because of reaction force, and the time that reaches till the vibration that restrains motor support 34A, 34B shortens significantly, and can suppress to be fixed on the skew (ず れ) of the permanent magnet of the yoke 44B inboard on linear motor 20A, the 20B.
Thus, when the Y direction drives movable objective table 18, can not be subjected to the influence of the reaction force of linear motor 20A, 20B, carry out the drive controlling of movable objective table 18 accurately.
And, by reaction force motor support 34A, 34B and each sliding unit 70 slided from linear motor 20A, 20B after, the spring force by leaf spring 76 makes the position before sliding unit 70 reset movement.
Fig. 7 is the stereogram of the embodiment 2 of expression objective table device of the present invention.Fig. 8 is the front view of objective table device shown in Figure 7.And, in Fig. 7 and Fig. 8, marked the prosign in the same part with the foregoing description 1, the explanation of having omitted it.
As shown in Figures 7 and 8, objective table device 90 is between the lower end and ground 12 of column sections 94A2, the 94B2 of motor support 94A, 94B, be provided with slide mechanism (reaction force absorbing mechanism) 95A, 95B, the reaction force when being used to absorb actuating force by linear motor 20A, 20B movable objective table 18 being moved.This slide mechanism 95A, 95B are so that motor support 94A, 94B are according to sliding to the direction opposite with movable objective table 18 from the reaction force of linear motor 20A, 20B.
Thereby, in objective table device 90, when linear motor 20A, 20B drive movable objective table 18 to the Y direction, to motor support 94A, 94B effect reaction force, and sliding unit 70 moves along guide rail 64, and motor support 94A, 94B move to the direction opposite with the moving direction of movable objective table 18.Thus, with the reaction force of linear motor 20A, 20B, the actuating force that moves as the all-mass that is used to make motor support 94A, 94B and each sliding unit 70 is absorbed.
Among this embodiment 2, because support 94A, 94B are the structures of sliding along the guide rail 64 that is fixed on the ground 12, compare with embodiment 1 such on fixed pedestal 14, sliding, the length of column sections 94A2,94B2 is longer, the quality of column sections 94A2,94B2 is bigger, can more effectively absorb the reaction force from linear motor 20A, 20B.
Workability on the industry
In addition, in the foregoing description, enumerated the situation that makes movable objective table 18 go forward side by side and drive by a pair of linear motor 20A, 20B as an example, be not limited thereto, the quantity that drives the driving mechanism of movable objective table 18 also is not limited only to a pair of certainly.
And, the structure as the use linear motor of the driving mechanism of the foregoing description has been described, can certainly use driving mechanism beyond the linear motor (for example, with the mode of motor driven ball screw etc.).
The explanation of symbol
10,90 objective table devices
12 grounds
14 fixed pedestals
16 substrate stages
18 movable objective tables
20A, 20B linear motor
22A, 22B linear movement pick-up
28 stone platforms
30A, 30B guidance part
32A, 32B guide support portion
34A, 34B, 94A, 94B motor support
35A, 35B, 95A, 95B slide mechanism
34A2,34B2,94A2,94B2 column sections
40A, 40B coil supports arm
42A, 42B moving coil
44A, 44B yoke
46A, 46B permanent magnet
60 linear guide portions, 62 rolling members
64 guide rails, 66 fixed components
70 sliding units, 76 leaf springs
Claims (3)
1. objective table device is characterized in that having:
Be fixed on the fixed pedestal on the ground; The objective table that relative this fixed pedestal is set up movably; Comprise above-mentioned objective table is applied the coil of actuating force and the linear motor of yoke; Be provided with and support the horizontal part of above-mentioned yoke abreast with above-mentioned yoke; Extend below to above-mentioned horizontal part, and support many column sections of above-mentioned horizontal part; Control above-mentioned linear motor so that the controlling organization that above-mentioned objective table moves at a predetermined velocity,
Above-mentioned column sections is supported by the slide mechanism that is mounted slidably in said fixing pedestal or above-mentioned ground, and moves to the opposite direction of above-mentioned objective table by above-mentioned slide mechanism and to absorb reaction force.
2. objective table device as claimed in claim 1 is characterized in that,
Above-mentioned slide mechanism has the guidance part of the moving direction of guiding above-mentioned support and rollably is set at the rolling member of above-mentioned guidance part.
3. objective table device as claimed in claim 2 is characterized in that,
Above-mentioned guidance part has the resetting device that after above-mentioned support moves above-mentioned support is resetted.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004150711A JP2005331402A (en) | 2004-05-20 | 2004-05-20 | Stage device |
| JP150711/2004 | 2004-05-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1700438A CN1700438A (en) | 2005-11-23 |
| CN100464401C true CN100464401C (en) | 2009-02-25 |
Family
ID=35476389
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100728630A Expired - Fee Related CN100464401C (en) | 2004-05-20 | 2005-05-20 | Object table device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2005331402A (en) |
| KR (1) | KR100591939B1 (en) |
| CN (1) | CN100464401C (en) |
| TW (1) | TWI267090B (en) |
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| JP6631745B1 (en) * | 2018-12-14 | 2020-01-15 | 日立金属株式会社 | Control method and control device for linear motor stage |
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| JP2024036288A (en) | 2022-09-05 | 2024-03-15 | 住友化学株式会社 | Polarizing plate |
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| US6844635B2 (en) * | 2002-05-24 | 2005-01-18 | Dover Instrument Corporation | Reaction force transfer system |
-
2004
- 2004-05-20 JP JP2004150711A patent/JP2005331402A/en active Pending
-
2005
- 2005-04-08 TW TW094111230A patent/TWI267090B/en not_active IP Right Cessation
- 2005-05-18 KR KR1020050041430A patent/KR100591939B1/en not_active IP Right Cessation
- 2005-05-20 CN CNB2005100728630A patent/CN100464401C/en not_active Expired - Fee Related
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| US5864389A (en) * | 1996-02-13 | 1999-01-26 | Canon Kabushiki Kaisha | Stage apparatus and exposure apparatus and device producing method using the same |
| US6002465A (en) * | 1996-10-15 | 1999-12-14 | Canon Kabushiki Kaisha | Stage device, exposure apparatus using the same, and device production method |
| JPH11168064A (en) * | 1997-09-22 | 1999-06-22 | Nikon Corp | Stage driving method, stage equipment, and aligner |
| CN1373900A (en) * | 1999-10-07 | 2002-10-09 | 株式会社尼康 | Substrate, stage device, method of driving stage, exposure system and exposure method |
| JP2003243279A (en) * | 2002-02-13 | 2003-08-29 | Nikon Corp | Drive device, stage device, exposure method and aligner |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI616269B (en) * | 2016-08-01 | 2018-03-01 | Reaction force elimination platform device | |
| TWI839602B (en) * | 2020-03-31 | 2024-04-21 | 日商住友重機械工業股份有限公司 | Stage device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1700438A (en) | 2005-11-23 |
| JP2005331402A (en) | 2005-12-02 |
| KR100591939B1 (en) | 2006-06-20 |
| KR20060047978A (en) | 2006-05-18 |
| TW200600437A (en) | 2006-01-01 |
| TWI267090B (en) | 2006-11-21 |
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