CN102402133B - Double-workpiece-platform same-phase rotation exchange method based on parallel connection mechanisms, and device thereof - Google Patents
Double-workpiece-platform same-phase rotation exchange method based on parallel connection mechanisms, and device thereof Download PDFInfo
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- CN102402133B CN102402133B CN 201110377373 CN201110377373A CN102402133B CN 102402133 B CN102402133 B CN 102402133B CN 201110377373 CN201110377373 CN 201110377373 CN 201110377373 A CN201110377373 A CN 201110377373A CN 102402133 B CN102402133 B CN 102402133B
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Abstract
The invention relates to a double-workpiece-platform same-phase rotation exchange method based on parallel mechanisms, and a device of the method, belonging to a technology of semiconductor manufacturing equipment. The device comprises two workpiece platforms, a rotary transfer platform and the two parallel anti-rotation mechanisms; in the rotating exchange process of the two workpiece platforms,the two workpiece platforms are caught and blocked by the rotary transfer platform which rotates around the center of a base station, so that the exchange between an exposure station and a pretreatment station can be realized; and the rotation of the two workpiece platforms can be controlled by the parallel anti-rotation mechanisms, so that the two workpiece platforms can be ensured to have the same phase in the exchange process. The invention solves the problems that the existing scheme for exchanging the platforms in a linear way is high in impact torque and more in platform exchange beats,the existing scheme for exchanging the platforms in a rotating way is reverse in phases of the two workpiece platforms, cables are wound, a target of a laser interferometer is lost, and the like; a smaller mass balance system is adopted, so that the balance time is better shortened, the system is simplified, the cost is reduced, the platform exchange beats are reduced, the time for exchanging theplatforms can be reduced, and the yield of a photoetching machine is effectively improved.
Description
Technical field
The invention belongs to semiconductor and make the equipment technology field, relate generally to double-workpiece-table same-phase revolution switching method and device based on parallel institution.
Background technology
Litho machine is one of ultraprecise equipment important during great scale integrated circuit is made.The resolution of litho machine and alignment precision have determined the minimum feature of integrated circuit (IC) chip, the productive rate of litho machine then influences the production cost of integrated circuit (IC) chip greatly simultaneously, and has determined resolution, alignment precision and the productive rate of litho machine to a great extent as the work stage of litho machine key subsystem.
Productive rate is mainly one of pursuing one's goal of litho machine development.Under the condition that satisfies resolution and alignment precision, improving the work stage operational efficiency and then improving the litho machine productive rate is the developing direction of work stage technology.Improving the most direct mode of work stage operational efficiency is exactly to improve acceleration of motion and the speed of work stage, but for guaranteeing original precision, speed and acceleration can not unrestrictedly improve.Initial work stage has only a silicon chip bogey, and litho machine once can only be handled a silicon chip, whole operation serial processing, and production efficiency is low.The someone has proposed the double-workpiece-table technology for this reason, and this also is the mainstream technology means that improve litho machine production efficiency at present.The double-workpiece-table technology is provided with the exposure station in work stage, two stations of pre-service station and two work stage, but parallel processing is adjusted in exposure and measurement, has shortened the time greatly, has improved production efficiency.Present representative products is that Dutch ASML company is the litho machine of double-workpiece-table technology based on the TwinScan technology.
The operational efficiency that improves double-workpiece-table is one of developing goal of present photo-etching machine work-piece platform technology.The double-workpiece-table technology involves the problem that work stage is switched between two stations, changing platform efficient directly influences the operational efficiency of double-workpiece-table and the productive rate of litho machine.How to reduce to change platform under the condition of changing the platform time be the emphasis of research to the interference of other system always shortening as far as possible.In traditional double platform handoff procedure, the same in work stage and exposure and the pretreatment process is linear drives.Among two platform patent US2001/0004105A1 and the WO98/40791, each work stage has the unit of two commutative cooperations to realize the exchange of two platforms, under the prerequisite that does not improve the work stage movement velocity, improved productive rate, but owing to also adopt the mode that is of coupled connections between work stage and the guide rail, work stage of short duration separating can occur with driver element in changing the platform process, to the bearing accuracy generation considerable influence of work stage.Simultaneously moving cell and guide rail are longer, and moving-mass is bigger, all produce harmful effect for the raising of movement velocity and acceleration.Among the patent CN101231471A, adopt H type driver element to dock with friction pulley on the transition catching device, avoiding guide rail merging precision problem, but work stage need wait for when changing platform that driver element and friction pulley are finished and just can change the platform operation after docking, productive rate is brought very big influence.Among the patent CN1828427A, be provided with an X-direction guide rail at the pre-service station, the exposure station is provided with two X-direction guide rails, realize the concurrent working of two stations, but because driver element is fixed on the pedestal, when work stage is moved, have and be delivered to more energetically on the pedestal, integral body is brought harmful effect.
In the such scheme, the motion of guide piece is not to the influence of efficient when all having when changing platform to consider to change platform.Consider all to adopt five beat forms from changing the platform beat, namely in changing the platform process, two work stage need stay for some time and make catching device finish exchange, thereby finish the platform work of changing.The litho machine productive rate is being required under the more and more higher situation, and also can produce very big influence to productive rate the swap time of catching device.Among the patent CN101201555, utilize travelling belt and butt joint slide block to finish and change the platform process, tact of motion is few, therefore Operation and Maintenance is simple, but conveyer mechanism and butt joint slide block be fixed on the base station, in changing the platform process, have bigger masterpiece and be used on the base station, bigger to the overall dynamics performance impact.Among the patent CN1485694, utilize the butt joint of Y-direction linear electric motors and line slideway to finish and change the platform operation, but owing to the excesssive gap in the middle of the base station is introduced bridge-set, make tact of motion increase, increased and changed the platform time, X-direction linear electric motors magnet steel partial fixing is on base station simultaneously, and the athletic meeting of moving component produces bigger reacting force to base station when changing platform, and then influences the dynamic property of total system.Utilize the butt joint of permute unit to finish the platform work of changing among the patent CN101770181, but its guide piece is fixed on the base station, in changing the platform motion, moving component can produce bigger reacting force to base station, and then influences the dynamic property of total system.Therefore present two platform straight lines change the platform scheme and have much room for improvement.
Return the transfer table scheme and change the platform scheme than straight line unique advantage is arranged, the double-workpiece-table technology that adopts the revolution mode to change platform therefore occurred.For example European patent WO98/28665 adopts two work stage switches of expose on the band transmission realization work stage station and pre-service station, has simplified and has changed the platform operation, but be with transmission to be difficult to realize the nanometer positioning precision.Patent CN101071275 adopts the mode of the whole base station of revolution to realize the transposition of double-workpiece-table, has simplified system architecture, and collision safety hidden danger has been avoided in two work stage motion zero lap zones simultaneously.But realize that by turning round whole base station the work stage transposition exists moment of inertia big, high-power turning motor precision positioning difficulty and thermal value cause problems such as system's temperature rise greatly, and the turning radius is big simultaneously, and the litho machine main machine structure is enlarged markedly.Patent CN102141739 adopts electric rotating machine to finish the exchange of silicon chip platform station, avoided the base station rotation of big inertia, save and require high guide rail docking facilities and servicing unit, but this system changes the phase reversal that has caused work stage upper sensor and alignment mark in the platform process, thereby is difficult to realize the double-workpiece-table exchange of coordination phase.Such scheme is all less than the problem of considering back that work stage phase reversal and optical system are difficult to cooperate under the transfer table mode.In photo-etching machine exposal and pretreatment process, optical system need detect each position transducer of work stage and alignment mark, because each position transducer and alignment mark skewness, each alignment mark structure principle is inconsistent, and work stage exists towards problem.After returning transfer table, 180 ° of work stage revolutions cause work stage position transducer and alignment mark reverse, therefore return the transfer table scheme at present and are still waiting to improve.The gyroscopic characteristics of returning the transfer table mode in addition causes the winding of work stage cable and laser interferometer catoptron to turn round problems such as causing track rejection and is still waiting to solve.
Summary of the invention
The present invention is directed to the deficiency that exists in the above-mentioned prior art, design provides a kind of double-workpiece-table same-phase revolution switching method and device based on parallel institution.This device adopts revolution mode to carry out two platforms to switch, and has reduced two platform switching time, has improved the productive rate that changes platform efficient and litho machine.Solved work stage phase reversal simultaneously, problems such as the winding of work stage cable and laser interferometer track rejection.The invention solves existing linearity and change the big problem many with changing the platform beat of platform scheme impact torque, adopt less mass balance system, be conducive to shorten equilibration time, simplify system simultaneously, reduce cost, change the platform beat and reduce to have shortened and change the platform time, effectively improved the litho machine productive rate.
The object of the present invention is achieved like this:
Double-workpiece-table same-phase revolution switching method based on parallel institution, this method is made up of three beats, first beat is: first work stage is finished exposure process, after second work stage is finished pretreatment process, respectively from exposure station and pre-service station to the base station central motion, return the transfer table catching device and adsorb first work stage revolution ring set of first work stage and second work stage revolution ring set of second work stage by electromagnetism, simultaneously, the mechanism for card of grabbing on X-direction first linear motor rotor and X-direction second linear motor rotor unclamps the first work stage switching device of first work stage and the second work stage switching device of second work stage respectively, simultaneously, the first anti-bull stick and the second anti-bull stick elongation, and grab and block first work stage, the 3rd anti-bull stick and the 4th anti-bull stick elongation, and grab and block second work stage, realize two work stage with the revolution through position dock in opposite directions; Second beat is: revolution through position adsorb first work stage and second work stage around the base station central axis along clockwise or 180 ° of turning anticlockwises (revolution exchange next time along counterclockwise or clockwise), while first and link rod and second also link rod are far and near and automatic flexible with the distance of first work stage and Y-direction first static pressure air-float guide rail, prevent the variation of first work stage phase place that gyration brings in changing the platform process; While the 3rd and link rod and the 4th also link rod are far and near and automatic flexible with the distance of second work stage and Y-direction second static pressure air-float guide rail, prevent that second work stage phase place that gyration brings in changing the platform process from changing, realize first work stage and second work stage same-phase in whole time transfer table transmission process; The 3rd beat is: after revolution through position turns round 180 °, return the transfer table catching device and decontrol first work stage revolution ring set of first work stage and second work stage revolution ring set of second work stage; The mechanism for card of grabbing on X-direction first linear motor rotor is grabbed the second work stage switching device that blocks second work stage simultaneously, and move to the exposure station, the mechanism for card of grabbing on X-direction second linear motor rotor is grabbed the first work stage switching device that blocks first work stage, and move to the pre-service station, realize that two work stage are oppositely separated with revolution through position and to station separately; Finish double-workpiece-table same-phase revolution exchange by above-mentioned three beats.
Double-workpiece-table same-phase rotary exchanging device based on parallel institution comprises base station, first work stage, second work stage, Y-direction two ends, the long limit of base station are exposure station and pre-service station, first work stage and second work stage run on exposure station and pre-service station respectively, arrange respectively by Y-direction first linear electric motors along both sides, the long limit of base station correspondence, Y-direction first static pressure air-float guide rail and by Y-direction second linear electric motors, two the long stroke rectilinear motion of Y-direction unit that Y-direction second static pressure air-float guide rail constitutes, the exposure station is provided with by X-direction first linear motor rotor, X-direction first linear motor stator electric, the X-direction first long stroke rectilinear motion unit that X-direction first static pressure air-float guide rail and first carrier bar constitute, the pre-service station is provided with by X-direction second linear motor rotor, X-direction second linear motor stator electric, the X-direction second long stroke rectilinear motion unit that X-direction second static pressure air-float guide rail and second carrier bar constitute is equipped with laser interferometer around base station; First work stage and second work stage are fitted in respectively on the X-direction first long stroke rectilinear motion unit and the X-direction second long stroke rectilinear motion unit, and the X-direction first long stroke rectilinear motion unit becomes the configuration of H type respectively with the X-direction second long stroke rectilinear motion unit with the long stroke rectilinear motion of Y-direction unit; In the equipped revolution through position in position between station and the pre-service station that exposing on the base station, revolution through position comprises turning motor stator, turning motor mover and returns the transfer table catching device, wherein the turning motor stator is packed on the base station following side, the turning motor mover is fitted on the turning motor stator rotationally, installs back the transfer table catching device in turning motor mover upper end; First work stage revolution ring set is set at first work stage middle part, in X-direction side, first work stage bottom first work stage switching device is set; Second work stage revolution ring set is set at second work stage middle part, in X-direction side, second work stage bottom second work stage switching device is set; Between Y-direction first static pressure air-float guide rail and first work stage, connect to arrange by two length telescopic first and link rod and second and first rotation-preventing mechanism in parallel formed of link rod, between Y-direction second static pressure air-float guide rail and second work stage, connect and arrange by two length the telescopic the 3rd and link rod and the 4th second rotation-preventing mechanism in parallel formed of link rod also; First work stage and the second work stage bottom surface are air bearing surface, and first work stage and the second work stage air supporting are on base station; First work stage revolution ring set is static-pressure air bearing with the anchor ring that contacts of first work stage, and cover is done relative gyration with platform when returning transfer table; The surface of contact of second work stage revolution ring set and second work stage is the air supporting anchor ring, and cover is done relative gyration with platform when returning transfer table; In operational process, the light beam that laser interferometer the is sent lateral reflector corresponding with first work stage, second work stage all the time is vertical; Y-direction first linear electric motors, Y-direction second linear electric motors, X-direction first linear motor rotor, X-direction first linear motor stator electric, X-direction second linear motor rotor, X-direction second linear motor stator electric adopt dull and stereotyped motor, or adopt U-shaped slot type motor.
The present invention has following innovative point and outstanding advantage:
1. the double-workpiece-table same-phase revolution switching method based on parallel institution is proposed.Adopt this method to change platform and only need three beats, namely first beat is that two work stage are docked with revolution through position in opposite directions along axis (Z axle O-O); Second beat is that revolution through position takes two work stage wraparound shaft axis and turns round 180 ° (transpositions next time along counterclockwise or 180 ° of clockwise direction revolutions) clockwise or counterclockwise; To be two work stage with revolution through position oppositely separate the 3rd beat and to station separately.This method has solved the too much problem of (five beats) of existing linear channel switching method beat, solved simultaneously time transfer table sensor and marking plate phase reversal, unitary rotation platform mode moment of inertia big, change problems such as the platform time is long.Compare with existing method and apparatus, this method and device have realized that double-workpiece-table changes platform process same-phase and keeps, and have shortened and changed the platform time, significantly improve the product sheet rate of changing platform efficient and litho machine, and this is one of innovative point of the present invention and outstanding advantage.
2. the double-workpiece-table same-phase rotary exchanging device based on parallel institution is proposed.Two work stage with revolution through position in the process of 180 ° of axis (Z axle O-O) revolutions, two work stage are by each self-corresponding parallel institution control spinning motion, remain the phase invariant of two work stage when zero-bit, guarantee the same-phase of double-workpiece-table in changing the platform process.The three big problems that the transfer table mode exists that have now have back been solved, i.e. problems such as work stage phase bit Inverting, the winding of work stage cable and laser interferometer track rejection.Guarantee that the work stage phase place is constant all the time in changing the platform process, cable does not twine and laser interferometer target Continuous Tracking, and this is two of innovative point of the present invention and outstanding advantage.
3. the revolution that proposes a kind of quick and stable drives control method and organization plan.It is steady continuously to return the transfer table process, and torque shock ends is little, and speed is fast; Rotational torque strictness simultaneously acts on the accurate air-bearing shafts axis, does not produce impulsive force, makes balance direction and position and equilibrant accurately controlled.It is excessive to have solved existing linear channel switching method and scheme impulsive force and impact torque, the difficult problem that dynamic balance direction, size and power and equalising torque position can't accurately be predicted and accurate balance is controlled; A series of problems such as solved also that existing integral body is returned transfer table scheme quality and excessive, the required torque of inertia is big, impact torque is big and the required motor volume is big, function and thermal value are big.Have the platform of changing process do not have impulsive force, impact torque little, change platform speed fast and steadily, multiple advantage such as equalising torque is accurate and equilibration time is short, this is three of innovative point of the present invention and outstanding advantage.
4. a kind of platform system that changes is proposed to impulse force counteracting method and organization plan.Two work stage with the revolution through position dock and detachment process in, make the barycenter of two work stage turn round the axle center point-blank with revolution through position, and this straight line overlaps to geometric midline with double-workpiece-table system base station air floating platform y, and the centroid position of overbalance quality framework; Make the impulsive force equal and opposite in direction that changes two work stage in the platform process with the linear butt joint of revolution through position and produce when separating, direction is opposite, and it is zero that the acting force on the balance mass framework is made a concerted effort.Solved that existing linearity is changed the big and balance mass framework quality of platform scheme neutral line impulsive force and bulky and equilibrium rate waits problem slowly, have in the platform of the changing process and do not have impulsive force, it is fast to change platform butt joint and velocity of separation, main machine frame and base station are impacted multiple advantages such as little, and this is four of innovative point of the present invention and outstanding advantage.
Description of drawings
Fig. 1 is general structure synoptic diagram of the present invention.
Fig. 2 is general structure cut-open view of the present invention.
Fig. 3 is revolution through position and work stage, rotation-preventing mechanism assembly structure synoptic diagram in parallel.
Fig. 4 is the first work stage axonometric drawing.
Fig. 5,6,7,8,9,10, the 11st, double-workpiece-table change the platform schematic flow sheet.
Piece number among the figure: 1-base station; The 2-station that exposes; 3-pre-service station; 4a-first work stage; 4b-second work stage; 5-Y is to long stroke rectilinear motion unit; 5a-Y is to first linear electric motors; 5b-Y is to first static pressure air-float guide rail; 5c-Y is to second linear electric motors; 5d-Y is to second static pressure air-float guide rail; 6-X is to the first long stroke rectilinear motion unit; 6a-X is to first linear motor rotor; 6b-X is to first linear motor stator electric; 6c-X is to first static pressure air-float guide rail; 6d-first carrier bar; 7-X is to the second long stroke rectilinear motion unit; 7a-X is to second linear motor rotor; 7b-X is to second linear motor stator electric; 7c-X is to second static pressure air-float guide rail; 7d-second carrier bar; 8a-first and link rod; 8b-second and link rod; 8c-the 3rd and link rod; 8d-the 4th and link rod; 9a, 9b, 9c, 9d, 9e, 9f, 9g, 9h-laser interferometer; 10-turns round through position; 10a-turning motor stator; 10b-turning motor mover; 10c-returns the transfer table catching device; 11a-first work stage revolution ring set; 11b-second work stage revolution ring set; The 12a-first work stage switching device; The 12b-second work stage switching device.
Embodiment
Below in conjunction with accompanying drawing embodiment of the present invention is described in further detail:
Double-workpiece-table same-phase revolution switching method based on parallel institution, this method is made up of three beats, first beat is: first work stage is finished exposure process, after second work stage is finished pretreatment process, respectively from exposure station and pre-service station to the base station central motion, return the transfer table catching device and adsorb first work stage revolution ring set of first work stage and second work stage revolution ring set of second work stage by electromagnetism, simultaneously, the mechanism for card of grabbing on X-direction first linear motor rotor and X-direction second linear motor rotor unclamps the first work stage switching device of first work stage and the second work stage switching device of second work stage respectively, simultaneously, the first also also link rod elongation of link rod and second, and grab and block first work stage, the 3rd also also link rod elongation of link rod and the 4th, and grab and block second work stage, realize two work stage with the revolution through position dock in opposite directions; Second beat is: revolution through position adsorb first work stage and second work stage around the base station central axis along clockwise or 180 ° of turning anticlockwises (revolution exchange next time along counterclockwise or clockwise), while first and link rod and second also link rod are far and near and automatic flexible with the distance of first work stage and Y-direction first static pressure air-float guide rail, prevent the variation of first work stage phase place that gyration brings in changing the platform process; While the 3rd and link rod and the 4th also link rod are far and near and automatic flexible with the distance of second work stage and Y-direction second static pressure air-float guide rail, prevent that second work stage phase place that gyration brings in changing the platform process from changing, realize first work stage and second work stage same-phase in whole time transfer table transmission process; The 3rd beat is: after revolution through position turns round 180 °, return the transfer table catching device and decontrol first work stage revolution ring set of first work stage and second work stage revolution ring set of second work stage; The mechanism for card of grabbing on X-direction first linear motor rotor is grabbed the second work stage switching device that blocks second work stage simultaneously, and move to the exposure station, the mechanism for card of grabbing on X-direction second linear motor rotor is grabbed the first work stage switching device that blocks first work stage, and move to the pre-service station, realize that two work stage are oppositely separated with revolution through position and to station separately; The double-workpiece-table same-phase revolution of finishing based on parallel institution by above-mentioned three beats exchanges.
Double-workpiece-table same-phase rotary exchanging device based on parallel institution, this device comprises base station 1, the first work stage 4a, the second work stage 4b, Y-direction two ends, base station 1 long limit are exposure station 2 and pre-service station 3, the first work stage 4a and the second work stage 4b run on exposure station 2 and pre-service station 3 respectively, arrange respectively by the Y-direction first linear electric motors 5a along both sides, base station 1 long limit correspondence, the Y-direction first static pressure air-float guide rail 5b and by the Y-direction second linear electric motors 5c, two the long stroke rectilinear motion of Y-direction unit 5 that the Y-direction second static pressure air-float guide rail 5d constitutes, exposure station 2 is provided with by the X-direction first linear motor rotor 6a, the X-direction first linear motor stator electric 6b, the X-direction first long stroke rectilinear motion unit 6 that the X-direction first static pressure air-float guide rail 6c and the first carrier bar 6d constitute, pre-service station 3 is provided with by the X-direction second linear motor rotor 7a, the X-direction second linear motor stator electric 7b, the X-direction second long stroke rectilinear motion unit 7 that the X-direction second static pressure air-float guide rail 7c and the second carrier bar 7d constitute is equipped with laser interferometer 9a around base station 1,9b, 9c, 9d, 9e, 9f, 9g, 9h; The first work stage 4a and the second work stage 4b are fitted in respectively on the X-direction first long stroke rectilinear motion unit 6 and the X-direction second long stroke rectilinear motion unit 7, and the X-direction first long stroke rectilinear motion unit 6 disposes with the 5 one-tenth H types in the long stroke rectilinear motion of Y-direction unit respectively with the X-direction second long stroke rectilinear motion unit 7; In the equipped revolution through position 10 in position between station 2 and the pre-service station 3 that exposing on the base station 1, revolution through position 10 comprises turning motor stator 10a, turning motor mover 10b and returns transfer table catching device 10c, wherein turning motor stator 10a is packed on base station 1 following side, turning motor mover 10b is fitted on the turning motor stator 10a rotationally, installs back transfer table catching device 10c in turning motor mover 10b upper end; First work stage revolution ring set 11a is set at first work stage 4a middle part, in X-direction side, first work stage 4a bottom the first work stage switching device 12a is set; Second work stage revolution ring set 11b is set at second work stage 4b middle part, in X-direction side, second work stage 4b bottom the second work stage switching device 12b is set; Between the Y-direction first static pressure air-float guide rail 5b and the first work stage 4a, connect to arrange by two length telescopic first and link rod 8a and second and first rotation-preventing mechanism in parallel formed of link rod 8b, between the Y-direction second static pressure air-float guide rail 5d and the second work stage 4b, connect second rotation-preventing mechanism in parallel formed of link rod 8d also by two length the telescopic the 3rd and link rod 8c and the 4th is set; The first work stage 4a and the second work stage 4b bottom surface are air bearing surface, and the first work stage 4a and the second work stage 4b air supporting are on base station 1; First work stage revolution ring set 11a is static-pressure air bearing with the anchor ring that contacts of the first work stage 4a, and cover is done relative gyration with platform when returning transfer table; The surface of contact of second work stage revolution ring set 11b and the second work stage 4b is the air supporting anchor ring, and cover is done relative gyration with platform when returning transfer table; In operational process, the light beam that laser interferometer 9a, 9b, 9c, 9d, 9e, 9f, 9g, 9h send is vertical with the first work stage 4a, lateral reflector that the second work stage 4b is corresponding all the time; The Y-direction first linear electric motors 5a, the Y-direction second linear electric motors 5c, the X-direction first linear motor rotor 6a, the X-direction first linear motor stator electric 6b, the X-direction second linear motor rotor 7a, the X-direction second linear motor stator electric 7b adopt dull and stereotyped motor, or adopt U-shaped slot type motor.
The double-workpiece-table same-phase rotary exchanging device workflow based on parallel institution that the present invention proposes is as follows:
As shown in Figure 5, the initialization state, the first work stage 4a prealignment that is in exposure station 2 finishes, and the second work stage 4b that is in pre-service station 3 loads new silicon chip and finishes; Next, the first work stage 4a that is in exposure station 2 begins to carry out exposure-processed, and the second work stage 4b that meanwhile is in pre-service station 3 begins to carry out prealignment to be handled.It is inequality that two work stage are finished this station required time, the general exposure-processed time is longer, be in waiting status after the second work stage 4b that is positioned at pre-service station 3 finishes alignment work, after the first work stage 4a that is positioned at exposure station 2 finishes exposure work, prepare to carry out the work stage exchange.
As shown in Figure 6, the first work stage 4a finishes exposure process, after the second work stage 4b finishes pretreatment process, respectively from exposure station 2 and pre-service station 3 to base station 1 central motion, return transfer table catching device 10c and adsorb first work stage revolution ring set 11a of the first work stage 4a and second work stage revolution ring set 11b of the second work stage 4b by electromagnetism, simultaneously, grab the first work stage switching device 12a that mechanism for card unclamps the first work stage 4a respectively and the second work stage switching device 12b of the second work stage 4b on the X-direction first linear motor rotor 6a and the X-direction second linear motor rotor 7a.
As Fig. 7, Fig. 8, Fig. 9, shown in Figure 10, revolution through position 10 adsorbs the first work stage 4a and the second work stage 4b around 180 ° of base station 1 center steerings; While first and link rod 8a and second also link rod 8b are flexible automatically with the change in location of the first work stage 4a, prevent the variation of the first work stage 4a phase place that gyration brings in changing the platform process; While the 3rd and link rod 8c and the 4th also link rod 8d are flexible automatically with the second work stage 4b change in location, prevent that the second work stage 4b phase place that gyration brings in changing the platform process from changing, realize the first work stage 4a and the second work stage 4b same-phase in whole time transfer table transmission process.
As shown in figure 11, after 180 ° of revolution through position 10 revolutions, return transfer table catching device 10c and decontrol first work stage revolution ring set 11a of the first work stage 4a and second work stage revolution ring set 11b of the second work stage 4b, the mechanism for card of grabbing on the X-direction first linear motor rotor 6a is grabbed the second work stage switching device 12b that blocks the second work stage 4b, and move to the exposure station, the mechanism for card of grabbing on the X-direction second linear motor rotor 7a is grabbed the first work stage switching device 12a that blocks the first work stage 4a, and moves to the pre-service station; The double-workpiece-table same-phase revolution of having finished based on parallel institution by above-mentioned three beats exchanges.
Claims (2)
1. the double-workpiece-table same-phase based on parallel institution is turned round switching method, it is characterized in that this method is made up of three beats, first beat is: first work stage is finished exposure process, after second work stage is finished pretreatment process, respectively from exposure station and pre-service station to the base station central motion, return the transfer table catching device and adsorb first work stage revolution ring set and second work stage revolution ring set by electromagnetism, simultaneously, the mechanism for card of grabbing on X-direction first linear motor rotor and X-direction second linear motor rotor unclamps the first work stage switching device and the second work stage switching device respectively, simultaneously, the first also also link rod elongation of link rod and second, and grab and block first work stage, the 3rd also also link rod elongation of link rod and the 4th, and grab and block second work stage, realize two work stage with the revolution through position dock in opposite directions; Second beat is: revolution through position adsorb first work stage and second work stage around the base station central axis along clockwise or 180 ° of turning anticlockwises, simultaneously first and link rod and second and link rod far and near and flexible automatically with the distance of first work stage and Y-direction first static pressure air-float guide rail; Simultaneously the 3rd and link rod and the 4th and link rod far and near and flexible automatically with the distance of second work stage and Y-direction second static pressure air-float guide rail, realize first work stage and second work stage same-phase in whole time transfer table transmission process; The 3rd beat is: after revolution through position turns round 180 °, return the transfer table catching device and decontrol first work stage revolution ring set and second work stage revolution ring set; Simultaneously the mechanism for card of grabbing on X-direction first linear motor rotor is grabbed and is blocked the second work stage switching device, and move to the exposure station, the mechanism for card of grabbing on X-direction second linear motor rotor is grabbed and is blocked the first work stage switching device, and move to the pre-service station, realize that two work stage are oppositely separated with revolution through position and to station separately; The double-workpiece-table same-phase revolution of finishing based on parallel institution by above-mentioned three beats exchanges.
2. double-workpiece-table same-phase rotary exchanging device based on parallel institution, this device comprises base station (1), first work stage (4a), second work stage (4b), Y-direction two ends, the long limit of base station (1) are exposure station (2) and pre-service station (3), first work stage (4a) and second work stage (4b) run on exposure station (2) and pre-service station (3) respectively, arrange respectively by Y-direction first linear electric motors (5a) along both sides, the long limit of base station (1) correspondence, Y-direction first static pressure air-float guide rail (5b) and by Y-direction second linear electric motors (5c), two the long stroke rectilinear motion of Y-direction unit (5) that Y-direction second static pressure air-float guide rail (5d) constitutes, exposure station (2) is provided with by X-direction first linear motor rotor (6a), X-direction first linear motor stator electric (6b), the X-direction first long stroke rectilinear motion unit (6) that X-direction first static pressure air-float guide rail (6c) and first carrier bar (6d) constitute, pre-service station (3) is provided with by X-direction second linear motor rotor (7a), X-direction second linear motor stator electric (7b), the X-direction second long stroke rectilinear motion unit (7) that X-direction second static pressure air-float guide rail (7c) and second carrier bar (7d) constitute is equipped with laser interferometer (9a all around at base station (1), 9b, 9c, 9d, 9e, 9f, 9g, 9h); First work stage (4a) and second work stage (4b) are fitted in respectively on the X-direction first long stroke rectilinear motion unit (6) and the X-direction second long stroke rectilinear motion unit (7), and the X-direction first long stroke rectilinear motion unit (6) becomes the configuration of H type respectively with the X-direction second long stroke rectilinear motion unit (7) with the long stroke rectilinear motion of Y-direction unit (5); It is characterized in that: be positioned at the equipped revolution through position (10) in position between exposure station (2) and the pre-service station (3) at base station (1), revolution through position (10) comprises turning motor stator (10a), turning motor mover (10b) and returns transfer table catching device (10c), wherein turning motor stator (10a) is packed on base station (1) following side, turning motor mover (10b) is fitted on the turning motor stator (10a) rotationally, installs back transfer table catching device (10c) in turning motor mover (10b) upper end; First work stage revolution ring set (11a) is set at first work stage (4a) middle part, in X-direction side, first work stage (4a) bottom the first work stage switching device (12a) is set; Second work stage revolution ring set (11b) is set at second work stage (4b) middle part, in X-direction side, second work stage (4b) bottom the second work stage switching device (12b) is set; Between Y-direction first static pressure air-float guide rail (5b) and first work stage (4a), connect to arrange by two length telescopic first and link rod (8a) and second and first rotation-preventing mechanism in parallel formed of link rod (8b), between Y-direction second static pressure air-float guide rail (5d) and second work stage (4b), connect setting by two length the telescopic the 3rd link rod (8c) and the 4th second rotation-preventing mechanism in parallel of forming of link rod (8d) also also; First work stage (4a) and second work stage (4b) bottom surface are air bearing surface, and first work stage (4a) and second work stage (4b) air supporting are on base station (1); First work stage revolution ring set (11a) is static-pressure air bearing with the anchor ring that contacts of first work stage (4a), and cover is done relative gyration with platform when returning transfer table; Second work stage revolution ring set (11b) is the air supporting anchor ring with the surface of contact of second work stage (4b), and cover is done relative gyration with platform when returning transfer table; In operational process, the light beam that laser interferometer (9a, 9b, 9c, 9d, 9e, 9f, 9g, 9h) the is sent lateral reflector corresponding with first work stage (4a), second work stage (4b) all the time is vertical; Y-direction first linear electric motors (5a), Y-direction second linear electric motors (5c), X-direction first linear motor rotor (6a), X-direction first linear motor stator electric (6b), X-direction second linear motor rotor (7a), X-direction second linear motor stator electric (7b) adopt dull and stereotyped motor, or adopt U-shaped slot type motor.
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| CN 201110377373 CN102402133B (en) | 2011-11-12 | 2011-11-12 | Double-workpiece-platform same-phase rotation exchange method based on parallel connection mechanisms, and device thereof |
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| CN 201110377373 CN102402133B (en) | 2011-11-12 | 2011-11-12 | Double-workpiece-platform same-phase rotation exchange method based on parallel connection mechanisms, and device thereof |
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| CN104375388B (en) * | 2014-10-13 | 2016-09-14 | 江苏影速光电技术有限公司 | A kind of multi-work piece platform direct-write photoetching system |
| CN105005180A (en) * | 2015-08-06 | 2015-10-28 | 哈尔滨工业大学 | Automatic rotation device for dual-workpiece-stage changing based on lifting lever mechanism |
| CN105319868B (en) * | 2015-08-06 | 2018-05-08 | 南京全弗精密机械有限公司 | A kind of double-workpiece-table zapping rotating device and its application method |
| CN105487348B (en) * | 2016-01-14 | 2017-09-22 | 哈尔滨工业大学 | Dynamic magnet steel magnetic based on active balancing quality floats double-workpiece-table vector circular arc channel switching method and device |
| CN106527056B (en) * | 2016-12-20 | 2019-03-12 | 湖北凯昌光电科技有限公司 | A kind of single table surface write-through exposure machine |
| CN108663907B (en) * | 2017-03-31 | 2019-12-24 | 上海微电子装备（集团）股份有限公司 | Substrate table system, lithographic apparatus and lithographic method |
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| EP0634699A1 (en) * | 1993-07-16 | 1995-01-18 | Semiconductor Systems, Inc. | Clustered photolithography system |
| JP3919782B2 (en) * | 2004-10-08 | 2007-05-30 | キヤノン株式会社 | Exposure apparatus and device manufacturing method |
| CN101694560B (en) * | 2009-04-03 | 2011-08-17 | 清华大学 | Silicon wafer stage double-stage exchange system by adopting air-floatation planar motor |
| JP2011018861A (en) * | 2009-07-10 | 2011-01-27 | Canon Inc | Exposure apparatus and exposure method, as well as method of manufacturing device employing the same |
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