CN105005180A - Automatic rotation device for dual-workpiece-stage changing based on lifting lever mechanism - Google Patents
Automatic rotation device for dual-workpiece-stage changing based on lifting lever mechanism Download PDFInfo
- Publication number
- CN105005180A CN105005180A CN201510475149.XA CN201510475149A CN105005180A CN 105005180 A CN105005180 A CN 105005180A CN 201510475149 A CN201510475149 A CN 201510475149A CN 105005180 A CN105005180 A CN 105005180A
- Authority
- CN
- China
- Prior art keywords
- linear
- guide rod
- servo
- mounting plate
- linear slide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Machine Tool Units (AREA)
Abstract
The invention discloses an automatic rotation device for dual-workpiece-stage changing based on a lifting lever mechanism, and belongs to the technical field of semiconductor manufacturing equipment. A first catching mechanism is caught on a first annular base. A second catching mechanism is caught on a second annular base. A first linear sliding bearing is installed on the lower end face of a first upper platform. A second linear sliding bearing is installed on the lower end face of a second upper platform. One end of a first linear guide rod is perpendicularly installed on a first servo guide rod driver. One end of a second linear guide rod is perpendicularly installed on a second servo guide rod driver. The other end of the first linear guide rod is embedded into the first linear sliding bearing in a sliding mode. The other end of the second linear guide rod is embedded into the second linear sliding bearing in a sliding mode. The automatic rotation motion of workpiece stages is converted into linear motion of the lifting lever driver, and the design difficulty of a control system can be reduced; the problem that a silicon wafer stage is difficultly matched with an optical system due to phase reversal according to an existing rotation stage changing scheme is solved.
Description
Technical field
The invention belongs to the technical field of semiconductor manufacturing equipment.
Background technology
Integrated circuit is developed so far, and every sheet chip can realize the scale of integrated more than 1,000,000,000 devices.Under this historical background, the manufacture of integrated circuit has just become a national most important thing.Therefore, as manufacturing the visual plant of integrated circuit, the level of litho machine has just had conclusive effect for a national development.A high-end litho machine, not only will have high precision, also need high yield.The work of workpiece table system primarily of: by silicon chip upper slice to be processed, aim at and exposure, by this silicon chip bottom sheet these several operations compositions.Traditional single workpiece table system, these several operations complete successively, the double-workpiece-table system that new development produces is then whole operation be separated into aim at and exposure, fluctuating plate and silicon chip surface pattern measurement two parts, completes respectively in two work stage, in two regions.This just needs middle zapping step, and its zapping efficiency directly affects the production capacity of litho machine.
Through examination pertinent literature, Chinese Patent Application No.: 201110069546.9, patent name: step scan photo-etching machine double-platform exchange system.This Patent design is a kind of is split as two-section by X direction guiding rail, the rotation coordinating the X of work stage to realize in zapping to motion by the Y-direction motion of left and right two-part guide rail, to ensure that between worktable coordinate system and basic framework coordinate system without spin.But the method complicated in mechanical structure, and in the process exposed and measure, the guide rail of whole section also needs to follow work stage and together moves, and needs heavy-duty motor to realize, and there is thermal value and causes greatly the problems such as system temperature rise.
Chinese Patent Application No.: 201110377824.7, patent name: a kind of double-workpiece-table revolution switching method and device based on measuring position rotation tuning.This Patent design installs free-wheeling system in work stage, is realized the spinning motion of work stage by electric rotating machine.The method moment of inertia is little, and physical construction is relatively simple, but requires high to control method, and needs extra Circular gratings angularly measuring sensor, improves cost.
Summary of the invention
The object of this invention is to provide a kind of double-workpiece-table zapping rotating device based on lever body, to solve number of patent application: 201110069546.9, there is complicated in mechanical structure in the technical scheme of patent, and in the process exposed and measure, the guide rail of whole section also needs to follow work stage and together moves, heavy-duty motor is needed to realize, there is the problem that thermal value causes greatly system temperature rise, and number of patent application: 201110377824.7, the technical scheme of patent exists control method requirement high, and need extra Circular gratings angularly measuring sensor, improve the problem of cost.
Described object is realized by following scheme: described a kind of double-workpiece-table zapping rotating device based on lever body, and it comprises framework 1, the servo-actuated guide rod driver 10 of revoluting motor 2, first worktable assembly 3, second worktable assembly 4, first linear slide bearing 5, second linear slide bearing 6, first linear guide 7, second linear guide the 8, first servo-actuated guide rod driver 9, second;
First worktable assembly 3 is made up of the first upper mounting plate 3-1 and the first annular seating 3-2; First annular seating 3-2 is connected in the lower end rotating shaft of the first upper mounting plate 3-1 by air-bearing turning set; Second worktable assembly 4 is made up of the second upper mounting plate 4-1 and the second annular seating 4-2; Second annular seating 4-2 is connected in the lower end rotating shaft of the second upper mounting plate 4-1 by air-bearing turning set; Revoluting motor 2 is arranged on the center of framework 1, first of revoluting motor 2 is grabbed mechanism for card 2-1 and is grabbed and be stuck on the first annular seating 3-2 of the first worktable assembly 3, second of revoluting motor 2 is grabbed mechanism for card 2-2 and is grabbed and be stuck on the second annular seating 4-2 of the second worktable assembly 4, first linear slide bearing 5 is arranged on the first upper mounting plate 3-1 lower surface, second linear slide bearing 6 is arranged on the second upper mounting plate 4-1 lower surface, first servo-actuated guide rod driver 9 is slidably arranged on framework 1, and the second servo-actuated guide rod driver 10 is slidably arranged on framework 1; One end of first linear guide 7 is vertically mounted on the first servo-actuated guide rod driver 9, and one end of the second linear guide 8 is vertically mounted on the second servo-actuated guide rod driver 10; The other end of the first linear guide 7 slides and is embedded in the first linear slide bearing 5, the other end of the second linear guide 8 slides and is embedded in the second linear slide bearing 6, time in the cyclic process of revoluting motor 2 dextrorotation turnback again after being rotated counterclockwise 180 degree, first linear guide 7 can do linear slide in the first linear slide bearing 5, the rotational angle that can limit the first upper mounting plate 3-1 of the first worktable assembly 3 is that reciprocating linear sliding action that the zero, first servo-actuated guide rod driver 9 can follow the first linear guide 7 does reciprocating linear and slides on framework 1; Second linear guide 8 can do linear slide in the second linear slide bearing 6, the rotational angle that can limit the second upper mounting plate 4-1 of the second worktable assembly 4 is that reciprocating linear sliding action that the zero, second servo-actuated guide rod driver 10 can follow the second linear guide 8 does reciprocating linear and slides on framework 1.
The present invention has the following advantages:
1, the problem in the past rotating zapping scheme silicon wafer stage phase reversal and the supporting difficulty of optical system is solved.
2, by the convert rotational motion of work stage rotation be the rectilinear motion of driving lever driver, the design difficulty of control system can be reduced.
3, make the measurement mechanism (as grating scale) on servo-actuated guide rod driver and the shared Y-direction guide rail of other linear electric motors (as Y-direction motor), avoid the use (as Circular gratings) that rotary actuation realizes the measuring mechanism of rotation, reduce cost.
Accompanying drawing explanation
Fig. 1 is one-piece construction schematic diagram of the present invention.
Embodiment
Embodiment one: shown in composition graphs 1, it comprises framework 1, the servo-actuated guide rod driver 10 of revoluting motor 2, first worktable assembly 3, second worktable assembly 4, first linear slide bearing 5, second linear slide bearing 6, first linear guide 7, second linear guide the 8, first servo-actuated guide rod driver 9, second;
First worktable assembly 3 is made up of the first upper mounting plate 3-1 and the first annular seating 3-2; First annular seating 3-2 is connected in the lower end rotating shaft of the first upper mounting plate 3-1 by air-bearing turning set; Second worktable assembly 4 is made up of the second upper mounting plate 4-1 and the second annular seating 4-2; Second annular seating 4-2 is connected in the lower end rotating shaft of the second upper mounting plate 4-1 by air-bearing turning set; Revoluting motor 2 is arranged on the center of framework 1, first of revoluting motor 2 is grabbed mechanism for card 2-1 and is grabbed and be stuck on the first annular seating 3-2 of the first worktable assembly 3, second of revoluting motor 2 is grabbed mechanism for card 2-2 and is grabbed and be stuck on the second annular seating 4-2 of the second worktable assembly 4, first linear slide bearing 5 is arranged on the first upper mounting plate 3-1 lower surface, second linear slide bearing 6 is arranged on the second upper mounting plate 4-1 lower surface, first servo-actuated guide rod driver 9 is slidably arranged on framework 1, and the second servo-actuated guide rod driver 10 is slidably arranged on framework 1; One end of first linear guide 7 is vertically mounted on the first servo-actuated guide rod driver 9, and one end of the second linear guide 8 is vertically mounted on the second servo-actuated guide rod driver 10; The other end of the first linear guide 7 slides and is embedded in the first linear slide bearing 5, the other end of the second linear guide 8 slides and is embedded in the second linear slide bearing 6, time in the cyclic process of revoluting motor 2 dextrorotation turnback again after being rotated counterclockwise 180 degree, first linear guide 7 can do linear slide in the first linear slide bearing 5, the rotational angle that can limit the first upper mounting plate 3-1 of the first worktable assembly 3 is that reciprocating linear sliding action that the zero, first servo-actuated guide rod driver 9 can follow the first linear guide 7 does reciprocating linear and slides on framework 1; Second linear guide 8 can do linear slide in the second linear slide bearing 6, the rotational angle that can limit the second upper mounting plate 4-1 of the second worktable assembly 4 is that reciprocating linear sliding action that the zero, second servo-actuated guide rod driver 10 can follow the second linear guide 8 does reciprocating linear and slides on framework 1.
Described first linear slide bearing 5 and the second linear slide bearing 6 can be replaced with air-flotation type linear slide bearing, and frictional resistance can be reduced to minimum; First servo-actuated guide rod driver 9 and the second servo-actuated guide rod driver 10 device are built formed by linear electric motors, gas foot units.
Principle of work: during work, first of revoluting motor 2 is grabbed mechanism for card 2-1 and is grabbed and be stuck on the first annular seating 3-2 of the first worktable assembly 3, and second of revoluting motor 2 is grabbed mechanism for card 2-2 and grabbed and be stuck on the second annular seating 4-2 of the second worktable assembly 4; When revoluting motor 2 is rotated counterclockwise 180 degree, first linear guide 7 can do linear slide in the first linear slide bearing 5, the rotational angle that can limit the first upper mounting plate 3-1 of the first worktable assembly 3 is that the linear slide action that the zero, first servo-actuated guide rod driver 9 can follow the first linear guide 7 under the driving of its linear electric motors does linear slide on framework 1; Second linear guide 8 can do linear slide in the second linear slide bearing 6, the rotational angle that can limit the second upper mounting plate 4-1 of the second worktable assembly 4 is that the linear slide action that the zero, second servo-actuated guide rod driver 10 can follow the second linear guide 8 under the driving of its linear electric motors does linear slide on framework 1; When revoluting motor 2 dextrorotation turnback again, first linear guide 7 can do linear slide in the first linear slide bearing 5, the rotational angle that can limit the first upper mounting plate 3-1 of the first worktable assembly 3 is that the linear slide action that the zero, first servo-actuated guide rod driver 9 can follow the first linear guide 7 under the driving of its linear electric motors does linear slide on framework 1; Second linear guide 8 can do linear slide in the second linear slide bearing 6, the rotational angle that can limit the second upper mounting plate 4-1 of the second worktable assembly 4 is that the linear slide action that the zero, second servo-actuated guide rod driver 10 can follow the second linear guide 8 under the driving of its linear electric motors does linear slide on framework 1.Complete a work period.
Claims (1)
1., based on the double-workpiece-table zapping rotating device of lever body, it is characterized in that it comprises framework (1), revoluting motor (2), the first worktable assembly (3), the second worktable assembly (4), the first linear slide bearing (5), the second linear slide bearing (6), the first linear guide (7), the second linear guide (8), the first servo-actuated guide rod driver (9), the second servo-actuated guide rod driver (10);
First worktable assembly (3) is made up of the first upper mounting plate (3-1) and the first annular seating (3-2), first annular seating (3-2) is connected in the lower end rotating shaft of the first upper mounting plate (3-1) by air-bearing turning set, second worktable assembly (4) is made up of the second upper mounting plate (4-1) and the second annular seating (4-2), second annular seating (4-2) is connected in the lower end rotating shaft of the second upper mounting plate (4-1) by air-bearing turning set, revoluting motor (2) is arranged on the center of framework (1), first of revoluting motor (2) grab mechanism for card (2-1) grab be stuck in the first worktable assembly (3) the first annular seating (3-2) on, second of revoluting motor (2) grab mechanism for card (2-2) grab be stuck in the second worktable assembly (4) the second annular seating (4-2) on, first linear slide bearing (5) is arranged on the first upper mounting plate (3-1) lower surface, second linear slide bearing (6) is arranged on the second upper mounting plate (4-1) lower surface, first servo-actuated guide rod driver (9) is slidably arranged on framework (1), second servo-actuated guide rod driver (10) is slidably arranged on framework (1), one end of first linear guide (7) is vertically mounted on the first servo-actuated guide rod driver (9), and one end of the second linear guide (8) is vertically mounted on the second servo-actuated guide rod driver (10), the other end of the first linear guide (7) slides and is embedded in the first linear slide bearing (5), the other end of the second linear guide (8) slides and is embedded in the second linear slide bearing (6), time in the cyclic process of revoluting motor (2) dextrorotation turnback again after being rotated counterclockwise 180 degree, first linear guide (7) can do linear slide in the first linear slide bearing (5), the rotational angle that can limit first upper mounting plate (3-1) of the first worktable assembly (3) is zero, the reciprocating linear sliding action that first servo-actuated guide rod driver (9) can follow the first linear guide (7) does reciprocating linear slip on framework (1), second linear guide (8) can do linear slide in the second linear slide bearing (6), the rotational angle that can limit second upper mounting plate (4-1) of the second worktable assembly (4) is that reciprocating linear sliding action that the zero, second servo-actuated guide rod driver (10) can follow the second linear guide (8) does reciprocating linear and slides on framework (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510475149.XA CN105005180A (en) | 2015-08-06 | 2015-08-06 | Automatic rotation device for dual-workpiece-stage changing based on lifting lever mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510475149.XA CN105005180A (en) | 2015-08-06 | 2015-08-06 | Automatic rotation device for dual-workpiece-stage changing based on lifting lever mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105005180A true CN105005180A (en) | 2015-10-28 |
Family
ID=54377900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510475149.XA Pending CN105005180A (en) | 2015-08-06 | 2015-08-06 | Automatic rotation device for dual-workpiece-stage changing based on lifting lever mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105005180A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106933052A (en) * | 2015-12-31 | 2017-07-07 | 上海微电子装备有限公司 | A kind of litho machine sports platform system and litho machine |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080124662A1 (en) * | 2006-11-28 | 2008-05-29 | Samsung Electronics Co., Ltd. | Wafer stage module of twin scan exposure system and method of controlling the same |
| CN102402133A (en) * | 2011-11-12 | 2012-04-04 | 哈尔滨工业大学 | Double-workpiece-platform same-phase rotation exchange method based on parallel connection mechanisms, and device thereof |
| CN102495528A (en) * | 2011-11-12 | 2012-06-13 | 哈尔滨工业大学 | Double-workpiece-table same-phase rotation exchange method and device based on follow-up rotation-resisting mechanisms |
| CN102508414A (en) * | 2011-11-12 | 2012-06-20 | 哈尔滨工业大学 | Rotary exchanging method and rotary exchanging device for double workpiece platforms based on synchronous steering of turntable gear |
| CN102520587A (en) * | 2011-11-12 | 2012-06-27 | 哈尔滨工业大学 | Two-workpiece-platform rotary exchange method and device based on cable-box anti-rotation mechanisms |
-
2015
- 2015-08-06 CN CN201510475149.XA patent/CN105005180A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080124662A1 (en) * | 2006-11-28 | 2008-05-29 | Samsung Electronics Co., Ltd. | Wafer stage module of twin scan exposure system and method of controlling the same |
| CN102402133A (en) * | 2011-11-12 | 2012-04-04 | 哈尔滨工业大学 | Double-workpiece-platform same-phase rotation exchange method based on parallel connection mechanisms, and device thereof |
| CN102495528A (en) * | 2011-11-12 | 2012-06-13 | 哈尔滨工业大学 | Double-workpiece-table same-phase rotation exchange method and device based on follow-up rotation-resisting mechanisms |
| CN102508414A (en) * | 2011-11-12 | 2012-06-20 | 哈尔滨工业大学 | Rotary exchanging method and rotary exchanging device for double workpiece platforms based on synchronous steering of turntable gear |
| CN102520587A (en) * | 2011-11-12 | 2012-06-27 | 哈尔滨工业大学 | Two-workpiece-platform rotary exchange method and device based on cable-box anti-rotation mechanisms |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106933052A (en) * | 2015-12-31 | 2017-07-07 | 上海微电子装备有限公司 | A kind of litho machine sports platform system and litho machine |
| CN106933052B (en) * | 2015-12-31 | 2019-08-23 | 上海微电子装备（集团）股份有限公司 | A kind of litho machine sports platform system and litho machine |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6154368B2 (en) | Mechanical device that improves the resolution and measurement accuracy of angle encoders | |
| CN103309176B (en) | Six-freedom-degree micropositioner with lifting vacuum claw | |
| CN102681363B (en) | Multi-stage exchange system and exchange method for multi-station silicon wafer stage | |
| CN103884614B (en) | Motor load measurement mechanism of Rockwell hardness tester | |
| CN103353302B (en) | A kind of indexing mechanism of fiber gyro north seeker | |
| CN110223948A (en) | A kind of semiconductor manipulator | |
| CN101905433B (en) | Grinding head adjusting mechanism of wafer back grinding machine | |
| CN102200698B (en) | Cable stage of silicon wafer stage of photo-etching machine | |
| CN202331009U (en) | Two-dimensional movement device for workpiece table dense ball bearing | |
| CN105005180A (en) | Automatic rotation device for dual-workpiece-stage changing based on lifting lever mechanism | |
| CN102353539B (en) | Photoelectric measuring machine for precision transmission chain | |
| CN105629673A (en) | Vector arc rotary stage switching method and device for double interferometer measurement-based gas-magnetic-combined air floatation workpiece stage | |
| WO2020155829A1 (en) | Displacement device based on hall effect sensors and on planar motor | |
| CN105319868A (en) | Double-workpiece-stage exchanging and rotating device and application method thereof | |
| CN103769997A (en) | Rectangular array synchronous swing mechanism and multi-shaft linkage processing lathe based on same | |
| CN102109765A (en) | Rotating platform | |
| CN103487183A (en) | Torque loading device of automatic torque testing system | |
| CN100570496C (en) | A kind of photo-etching machine silicon slice bench double-bench switching system that adopts cross guide rail | |
| CN206445556U (en) | A kind of location equipment processed for automobile die | |
| CN203365913U (en) | Six-DOF (degree of freedom) micropositioner with vacuum grabbing and lifting mechanism | |
| CN203365914U (en) | Six-DOF (degree of freedom) micropositioner with automatic grabbing and lifting mechanism | |
| CN106933052B (en) | A kind of litho machine sports platform system and litho machine | |
| CN205402122U (en) | Precise displacement platform of XY axle direction | |
| CN102801354A (en) | Integrated micro-step rotating device using flexible hinge | |
| CN103528529A (en) | Detection device of stroke deviation and stroke variation of nut-driven ball screw pair |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20151028 |
|
| WD01 | Invention patent application deemed withdrawn after publication |