CN203365914U - Six-DOF (degree of freedom) micropositioner with automatic grabbing and lifting mechanism - Google Patents

Six-DOF (degree of freedom) micropositioner with automatic grabbing and lifting mechanism Download PDF

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Publication number
CN203365914U
CN203365914U CN2013203465938U CN201320346593U CN203365914U CN 203365914 U CN203365914 U CN 203365914U CN 2013203465938 U CN2013203465938 U CN 2013203465938U CN 201320346593 U CN201320346593 U CN 201320346593U CN 203365914 U CN203365914 U CN 203365914U
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China
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watt
permanent magnet
micropositioner
type permanent
driver module
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CN2013203465938U
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Inventor
成荣
朱煜
张鸣
刘召
杨开明
徐登峰
田丽
张利
秦慧超
叶伟楠
张金
穆海华
尹文生
胡金春
赵彦坡
胡清平
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Tsinghua University
U Precision Tech Co Ltd
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Tsinghua University
U Precision Tech Co Ltd
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Abstract

A six-DOF (degree of freedom) micropositioner with an automatic grabbing and lifting mechanism is mainly applied to semiconductor photoetching equipment. The six-DOF micropositioner with the automatic grabbing and lifting mechanism is formed by additionally arranging an automatic grabbing and lifting mechanism on the existing six-DOF micropositioner; the automatic grabbing and lifting mechanism comprises a driving module, a guiding module and a measuring module; the driving module is a moving-coil type Lorentz motor; the guiding module is formed by three cylindrical ball guide sleeves; the measuring module is a linear grating scale sensor component. Compared with the existing six-DOF micropositioner in structure, the six-DOF micropositioner with the automatic grabbing and lifting mechanism has the advantages as follows: as the automatic grabbing and lifting mechanism is additionally arranged, the micropositioner has the single-DOF lifting and grabbing function with large stroke in the vertical direction, and the requirement of a photoetching machine for lifting and grabbing of a silicon slice is met.

Description

A kind of 6-freedom micro-motion platform with the automatic capturing lifting mechanism
Technical field
The utility model relates to a kind of micro displacement workbench, relates in particular to a kind of 6-freedom micro-motion platform with the automatic capturing lifting mechanism, is mainly used in semiconductor lithography equipment, belongs to ultraprecise processing and checkout equipment technical field.
Background technology
Micro displacement workbench with high precision and response fast has extremely important status in Modern Manufacturing Technology, is regarded as the important symbol of a national hi-tech development level.In ultra-precision machine tool, ultra-precise micro displacement workbench, for feed system is carried out to error compensation, is realized ultraprecise processing; In large scale integrated circuit is manufactured, ultra-precise micro displacement workbench carries out microposition and micro-feeding for lithographic equipment; In scanning probe microscopy, ultra-precise micro displacement workbench, for measuring sample surface morphology, carries out nanoprocessing; Aspect bioengineering, ultra-precise micro displacement workbench has been used for the operation to cell, realizes biological operation through engineering approaches; Aspect medical science, ultra-precise micro displacement workbench, for microsurgery, in order to alleviate doctor's burden, shortens operating time, improves success ratio.Ultra-precise micro displacement workbench also is widely used in fiber alignment, the processing of MEMS system, encapsulation and assembling, and in the galvanochemistry processing and other fields.
In semiconductor lithography equipment, photo-etching machine silicon chip platform and mask platform adopt thick smart rhythmo structure mostly, comprise a ultra-precise micro displacement workbench.This micropositioner is superimposed on the coarse motion platform, for the coarse motion platform is carried out to accuracy compensation.The micro displacement workbench positioning precision has determined the exposure accuracy of litho machine, and movement velocity has determined the production efficiency of litho machine.Therefore, the developed countries such as the U.S., Japan, Europe all are considered as one of litho machine core technology to the ultra-precise micro displacement workbench technology, and China's Related product is carried out to strict restriction of import.
Summarize at present domestic and international nanoscale micro displacement workbench present Research, ultra-precision stage has three classes usually, servomotor supports micro displacement workbench by ball-screw-transmission/line slideway, Piezoelectric Ceramic/flexible hinge support guide micro displacement workbench, and voice coil motor or variable reluctance motor driving/air supporting or magnetic over draft support micro displacement workbench.
The first two micropositioner is due to the factors such as the frictional damping of support system is non-linear impact, all can't meet that lithographic equipment is high-speed, the requirement of heavy load, high dynamic perfromance.The micropositioner that adopts voice coil motor/air supporting to support can meet the requirement of lithographic equipment, but exists structural integrity poor, and stage body is thicker, the high deficiency of barycenter, and its performance is subject to certain limitation.
The utility model content
The utility model aims to provide a kind of 6-freedom micro-motion platform with the automatic capturing lifting mechanism, make this 6-freedom micro-motion platform there is the single-degree-of-freedom lifting of a large stroke vertically and capture function, to meet litho machine for the lifting of silicon chip and the requirement of crawl.
The technical solution of the utility model is as follows:
A kind of 6-freedom micro-motion platform with the automatic capturing lifting mechanism, contain realize micro displacement workbench in surface level along directions X, Y-direction and rotate the first electromagnetic force driver module of three degree of freedom motion and realize that micro displacement workbench is along the Z direction around Z axis, the second electromagnetic force driver module of the motion of the three degree of freedom that rotates and rotate around Y-axis around X-axis, also contain vacuum cup, micropositioner upper cover and pedestal, described vacuum cup is arranged in the groove of micropositioner upper cover upper surface, described the first electromagnetic force driver module and the second electromagnetic force drive module setting are between micropositioner upper cover and pedestal, the motor coil of described the first electromagnetic force driver module and the second electromagnetic force driver module is partly the stationary part of driver module, all magnetic steel of motor of described the first electromagnetic force driver module and the second electromagnetic force driver module and iron yoke are partly the mover part of driver module, the mover that vacuum cup is arranged on micropositioner upper cover and driver module partly links together, it is characterized in that: described 6-freedom micro-motion platform also contains an automatic capturing lifting mechanism, described automatic capturing lifting mechanism is arranged in the below of micropositioner upper cover, this automatic capturing lifting mechanism comprises driver module, oriented module and measurement module.
Described driver module is a moving-coil type Lorentz motor, this Lorentz motor is captured post and is formed by first watt of type permanent magnet, second watt of type permanent magnet, cylindrical coil, motor casing, coil rack and vacuum, described motor casing is the open circles column type, be provided with a ring type deep trough between the inside and outside wall of hollow cylinder, the outer ring surface of ring type deep trough is evenly equipped with six first watt of type permanent magnets, interior ring surface along the motor casing ring type deep trough is evenly equipped with six second watt of type permanent magnets, and corresponding one by one; Cylindrical coil and motor casing are coaxially placed, and be arranged in first watt of type permanent magnet and second watt of magnetic field that the type permanent magnet forms of ring type deep trough, along the circumferential direction be evenly equipped with three vacuum and capture post on coil rack, three vacuum capture post and penetrate respectively in vacuum cup and corresponding three holes of micropositioner upper cover; Along the circumferential direction by three vertical slot, be equally divided into three sections on the outer wall of motor casing, described three vacuum capture post vertically motion in three vertical slot respectively; The permanent magnet of Lorentz motor and motor casing and pedestal link together.
Described oriented module is comprised of three cylinder ball bearing guide bushings, the axle sleeve of described ball bearing guide bushing is separately fixed in three circular holes that are the equilateral triangle distribution at coil rack middle part, the guide pole of described ball bearing guide bushing is separately fixed at the motor casing bottom, and penetrates respectively in the axle sleeve of corresponding ball bearing guide bushing.
Described measurement module adopts a linear grid ruler sensor module, and this linear grid ruler sensor module is comprised of linear grid ruler, linear grid ruler mount pad, grating reading head and grating reading head mount pad; Linear grid ruler is arranged in the groove vertically of coil rack middle part by the linear grid ruler mount pad; Grating reading head is arranged on position corresponding with the linear grid ruler mount pad in motor casing by the grating reading head mount pad, and makes grating reading head and linear grid ruler positioned opposite, guarantees to have certain interval between the two simultaneously.
In technique scheme, the axis of described first watt of type permanent magnet and second watt of type permanent magnet is coaxially arranged along Z-direction, and first watt of type permanent magnet is identical with second watt of type permanent magnet magnetizing direction, radially and by the annulus outside surface points to the center of circle; Cylindrical coil is between first watt of type permanent magnet and second watt of type permanent magnet, and coaxially arranged with first watt of type permanent magnet and second watt of type permanent magnet.
The advantage of micro displacement workbench described in the utility model is: a kind of 6-freedom micro-motion platform with the automatic capturing lifting mechanism, this 6-freedom micro-motion platform is except can realizing in certain limit that high-precision six-freedom degree moves, owing to having increased a band lifting vacuum pawl structure, made this 6-freedom micro-motion platform have a large stroke vertically the single-degree-of-freedom lifting with capture function, met litho machine for the lifting of silicon chip and the requirement of crawl.
The accompanying drawing explanation
Fig. 1 is tomograph of the present utility model.
The tomograph that Fig. 2 is the automatic capturing lifting mechanism.
The driver module structural representation that Fig. 3 is the automatic capturing lifting mechanism.
In figure: the 1-pedestal; 3-micropositioner upper cover; The 4-vacuum cup; 5-automatic capturing lifting mechanism; First watt of type permanent magnet of 11-; Second watt of type permanent magnet of 12-; The 13-cylindrical coil; The 14-motor casing; The 15-coil rack; The 16-vacuum captures post; The axle sleeve of 21-ball bearing guide bushing; The guide pole of 22-ball bearing guide bushing; The 31-linear grid ruler; 32-linear grid ruler mount pad; The 33-grating reading head; 34-grating reading head mount pad.
Embodiment
The tomograph of a kind of 6-freedom micro-motion platform with the automatic capturing lifting mechanism that Fig. 1 provides for the utility model.A kind of 6-freedom micro-motion platform with the automatic capturing lifting mechanism, contain realize micro displacement workbench in surface level along directions X, Y-direction and rotate the first electromagnetic force driver module of three degree of freedom motion and realize that micro displacement workbench is along the Z direction around Z axis, the second electromagnetic force driver module of the motion of the three degree of freedom that rotates and rotate around Y-axis around X-axis, also contain vacuum cup 4, micropositioner upper cover 3 and pedestal 1, described vacuum cup 4 is arranged in the groove of micropositioner upper cover 3 upper surfaces, described the first electromagnetic force driver module and the second electromagnetic force drive module setting are between micropositioner upper cover 3 and pedestal 1, the motor coil of described the first electromagnetic force driver module and the second electromagnetic force driver module is partly the stationary part of driver module, all magnetic steel of motor of described the first electromagnetic force driver module and the second electromagnetic force driver module and iron yoke are partly the mover part of driver module, vacuum cup 4 is arranged on micropositioner upper cover 3 and partly links together with the mover of driver module.This 6-freedom micro-motion platform also contains an automatic capturing lifting mechanism 5, and described automatic capturing lifting mechanism 5 is arranged in the below of micropositioner upper cover 3, and this automatic capturing lifting mechanism 5 comprises driver module, oriented module and measurement module.
The tomograph of the automatic capturing lifting mechanism that Fig. 2 provides for the utility model.The driver module of this automatic capturing lifting mechanism 5 is moving-coil type Lorentz motors, and this Lorentz motor is captured post 16 and formed by first watt of type permanent magnet 11, second watt of type permanent magnet 12, cylindrical coil 13, motor casing 14, coil rack 15 and vacuum; Described motor casing 14 is the open circles column type, be provided with a ring type deep trough between the inside and outside wall of hollow cylinder, the outer ring surface of ring type deep trough is evenly equipped with six first watt of type permanent magnets 11, along the interior ring surface of motor casing 14 ring type deep troughs, is evenly equipped with six second watt of type permanent magnets 12, and corresponding one by one; Cylindrical coil 13 is coaxially placed with motor casing 14, and be arranged in first watt of type permanent magnet 11 and second watt of magnetic field that type permanent magnet 12 forms of ring type deep trough, along the circumferential direction being evenly equipped with 16, three vacuum crawl posts 16 of three vacuum crawl posts on coil rack 15 penetrates respectively in vacuum cup 4 and corresponding three holes of micropositioner upper cover 3; Along the circumferential direction by three vertical slot, be equally divided into three sections on the outer wall of motor casing 14, described three vacuum capture post 16 vertically motion in three vertical slot respectively; The permanent magnet of Lorentz motor and motor casing 14 link together with pedestal 1.
The axis of first watt of type permanent magnet 11 and second watt of type permanent magnet 12 is coaxially arranged along Z-direction, and first watt of type permanent magnet 11 is identical with second watt of type permanent magnet 12 magnetizing direction, radially and by the annulus outside surface points to the center of circle; Cylindrical coil 13 is between first watt of type permanent magnet 11 and second watt of type permanent magnet 12, and coaxially arranged with first watt of type permanent magnet 11 and second watt of type permanent magnet 12, as shown in Figure 3.
Oriented module is comprised of three cylinder ball bearing guide bushings, the axle sleeve 21 of described ball bearing guide bushing is separately fixed in three circular holes that are the equilateral triangle distribution at coil rack 15 middle parts, 22 of the guide poles of described ball bearing guide bushing are separately fixed at motor casing 14 bottoms, and penetrate respectively in the axle sleeve 21 of corresponding ball bearing guide bushing;
Measurement module is a linear grid ruler sensor module, and this linear grid ruler sensor module is comprised of linear grid ruler 31, linear grid ruler mount pad 32, grating reading head 33 and grating reading head mount pad 34; Linear grid ruler 31 is arranged in the groove vertically of coil rack 15 middle parts by linear grid ruler mount pad 32; Grating reading head 33 is arranged on the position corresponding with linear grid ruler mount pad 32 in motor casing 14 by grating reading head mount pad 34, and makes grating reading head 33 and linear grid ruler 32 positioned opposite, guarantees to have certain interval between the two simultaneously.
The principle of work of a kind of 6-freedom micro-motion platform with the automatic capturing lifting mechanism that the utility model provides is: when carried thing or silicon chip to be carved are placed on vacuum cup 4, vacuum cup 4 vacuumizes by the hole of below, carried thing or silicon chip to be carved are fixed on to the micropositioner top, along with micropositioner is carried out predetermined motion, when the carried thing or wait carving silicon chip, complete after movement locus while needing to remove, at first stop vacuum cup 4 vacuum suction, start working to the automatic capturing lifting mechanism, three vacuum that are connected with the coil rack 15 of cylindrical coil 13 capture post 16 and vacuumize, carried thing or silicon chip to be carved are held, then after, be subject to Lorentz force vertically upward in the magnetic field of the sensing central axis generated at tile-shaped magnet steel after cylindrical coil 13 energisings, three vacuum capture post 16 and hold carried thing or silicon chip to be carved and follow cylindrical coil 13 and be raised up to desired height, three vacuum capture post 16 and stop vacuumizing, until carried thing or silicon chip to be carved are removed by other devices, until carried thing or silicon chip to be carved are removed, change new carried thing or new silicon chip to be carved, three vacuum capture post 16 and hold new carried thing or new silicon chip to be carved, the logical anti-phase electric heel of cylindrical coil 13 drops to bottom with cylindrical coil 13, three vacuum capture post 16 and stop vacuumizing, after cylindrical coil 13 outages, quit work.

Claims (2)

1. the 6-freedom micro-motion platform with the automatic capturing lifting mechanism, contain realize micro displacement workbench in surface level along directions X, Y-direction and rotate the first electromagnetic force driver module of three degree of freedom motion and realize that micro displacement workbench is along the Z direction around Z axis, the second electromagnetic force driver module of the motion of the three degree of freedom that rotates and rotate around Y-axis around X-axis, also contain vacuum cup (4), micropositioner upper cover (3) and pedestal (1), described vacuum cup (4) is arranged in the groove of micropositioner upper cover (3) upper surface, described the first electromagnetic force driver module and the second electromagnetic force drive module setting are between micropositioner upper cover (3) and pedestal (1), the motor coil of described the first electromagnetic force driver module and the second electromagnetic force driver module is partly the stationary part of driver module, all magnetic steel of motor of described the first electromagnetic force driver module and the second electromagnetic force driver module and iron yoke are partly the mover part of driver module, vacuum cup (4) is arranged on micropositioner upper cover (3) and partly links together with the mover of driver module, it is characterized in that: described 6-freedom micro-motion platform also contains an automatic capturing lifting mechanism (5), described automatic capturing lifting mechanism (5) is arranged in the below of micropositioner upper cover (3), this automatic capturing lifting mechanism (5) comprises driver module, oriented module and measurement module,
Described driver module is a moving-coil type Lorentz motor, this Lorentz motor is by first watt of type permanent magnet (11), second watt of type permanent magnet (12), cylindrical coil (13), motor casing (14), coil rack (15) and vacuum capture post (16) and form, described motor casing (14) is the open circles column type, be provided with a ring type deep trough between the inside and outside wall of hollow cylinder, the outer ring surface of ring type deep trough is evenly equipped with six first watt type permanent magnet (11), interior ring surface along motor casing (14) ring type deep trough is evenly equipped with six second watt type permanent magnet (12), and corresponding one by one, cylindrical coil (13) and the coaxial placement of motor casing (14), and be arranged in the magnetic field that first watt of type permanent magnet (11) of ring type deep trough and second watt of type permanent magnet (12) form, along the circumferential direction be evenly equipped with three vacuum and capture post (16) on coil rack (15), three vacuum capture post (16) and penetrate respectively in vacuum cup (4) and corresponding three holes of micropositioner upper cover (3), along the circumferential direction by three vertical slot, be equally divided into three sections on the outer wall of motor casing (14), described three vacuum capture post (16) vertically motion in three vertical slot respectively, the permanent magnet of Lorentz motor and motor casing (14) link together with pedestal (1),
Described oriented module is comprised of three cylinder ball bearing guide bushings, the axle sleeve of described ball bearing guide bushing (21) is separately fixed in three circular holes that are the equilateral triangle distribution at coil rack (15) middle part, the guide pole of described ball bearing guide bushing (22) is separately fixed at motor casing (14) bottom, and penetrates respectively in the axle sleeve (21) of corresponding ball bearing guide bushing;
Described measurement module adopts a linear grid ruler sensor module, and this linear grid ruler sensor module is comprised of linear grid ruler (31), linear grid ruler mount pad (32), grating reading head (33) and grating reading head mount pad (34); Linear grid ruler (31) is arranged in the groove vertically of coil rack (15) middle part by linear grid ruler mount pad (32); Grating reading head (33) is arranged on the position corresponding with linear grid ruler mount pad (32) in motor casing (14) by grating reading head mount pad (34), and make grating reading head (33) and linear grid ruler (31) positioned opposite, guarantee to have certain interval between the two simultaneously.
2. a kind of 6-freedom micro-motion platform with the automatic capturing lifting mechanism as claimed in claim 1, it is characterized in that: first watt of type permanent magnet (11) is coaxially arranged along Z-direction with the axis of second watt of type permanent magnet (12), first watt of type permanent magnet (11) is identical with second watt of type permanent magnet (12) magnetizing direction, radially and by the annulus outside surface points to the center of circle; Cylindrical coil (13) is positioned between first watt of type permanent magnet (11) and second watt of type permanent magnet (12), and coaxially arranged with first watt of type permanent magnet (11) and second watt of type permanent magnet (12).
CN2013203465938U 2013-06-17 2013-06-17 Six-DOF (degree of freedom) micropositioner with automatic grabbing and lifting mechanism Active CN203365914U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106430088A (en) * 2016-08-30 2017-02-22 上海交通大学 Large-stroke six-degree-of-freedom magnetic-suspension magnetically-driven nano positioning platform
CN109426092A (en) * 2017-08-31 2019-03-05 上海微电子装备(集团)股份有限公司 A kind of movement mould group and method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106430088A (en) * 2016-08-30 2017-02-22 上海交通大学 Large-stroke six-degree-of-freedom magnetic-suspension magnetically-driven nano positioning platform
CN109426092A (en) * 2017-08-31 2019-03-05 上海微电子装备(集团)股份有限公司 A kind of movement mould group and method
CN109426092B (en) * 2017-08-31 2020-06-16 上海微电子装备(集团)股份有限公司 Motion module and method

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Address after: 100084 Beijing Haidian District Beijing 100084 box 82 box, Tsinghua University Patent Office

Co-patentee after: U-PRECISION TECH CO., LTD.

Patentee after: Tsinghua University

Address before: 100084 Beijing Haidian District Beijing 100084 box 82 box, Tsinghua University Patent Office

Co-patentee before: U-Precision Tech Co., Ltd.

Patentee before: Tsinghua University