CN100447523C - 坐标测量机中使用的测量探测器 - Google Patents
坐标测量机中使用的测量探测器 Download PDFInfo
- Publication number
- CN100447523C CN100447523C CNB2005800215905A CN200580021590A CN100447523C CN 100447523 C CN100447523 C CN 100447523C CN B2005800215905 A CNB2005800215905 A CN B2005800215905A CN 200580021590 A CN200580021590 A CN 200580021590A CN 100447523 C CN100447523 C CN 100447523C
- Authority
- CN
- China
- Prior art keywords
- measurement
- pedestal
- stilt
- tip holder
- surveyingpin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
- G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
- G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
- G01B5/012—Contact-making feeler heads therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
- G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
- G01B7/012—Contact-making feeler heads therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
Claims (6)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0401660A SE527248C2 (sv) | 2004-06-28 | 2004-06-28 | Mätprob för användning i koordinatmätmaskiner |
SE04016606 | 2004-06-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101014826A CN101014826A (zh) | 2007-08-08 |
CN100447523C true CN100447523C (zh) | 2008-12-31 |
Family
ID=32733689
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005800218320A Expired - Fee Related CN100533053C (zh) | 2004-06-28 | 2005-06-20 | 坐标测量机中使用的测量探测器 |
CNB2005800215905A Expired - Fee Related CN100447523C (zh) | 2004-06-28 | 2005-06-20 | 坐标测量机中使用的测量探测器 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005800218320A Expired - Fee Related CN100533053C (zh) | 2004-06-28 | 2005-06-20 | 坐标测量机中使用的测量探测器 |
Country Status (7)
Country | Link |
---|---|
US (2) | US7627956B2 (zh) |
EP (2) | EP1766325B1 (zh) |
JP (3) | JP4486682B2 (zh) |
CN (2) | CN100533053C (zh) |
ES (1) | ES2425863T3 (zh) |
SE (1) | SE527248C2 (zh) |
WO (2) | WO2006001756A1 (zh) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE527248C2 (sv) * | 2004-06-28 | 2006-01-31 | Hexagon Metrology Ab | Mätprob för användning i koordinatmätmaskiner |
US9551575B2 (en) | 2009-03-25 | 2017-01-24 | Faro Technologies, Inc. | Laser scanner having a multi-color light source and real-time color receiver |
DE102009015920B4 (de) | 2009-03-25 | 2014-11-20 | Faro Technologies, Inc. | Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung |
JP5337656B2 (ja) * | 2009-10-01 | 2013-11-06 | 株式会社トプコン | 測定方法及び測定装置 |
DE102009057101A1 (de) | 2009-11-20 | 2011-05-26 | Faro Technologies, Inc., Lake Mary | Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung |
US9210288B2 (en) | 2009-11-20 | 2015-12-08 | Faro Technologies, Inc. | Three-dimensional scanner with dichroic beam splitters to capture a variety of signals |
US9529083B2 (en) | 2009-11-20 | 2016-12-27 | Faro Technologies, Inc. | Three-dimensional scanner with enhanced spectroscopic energy detector |
US9113023B2 (en) | 2009-11-20 | 2015-08-18 | Faro Technologies, Inc. | Three-dimensional scanner with spectroscopic energy detector |
US8630314B2 (en) | 2010-01-11 | 2014-01-14 | Faro Technologies, Inc. | Method and apparatus for synchronizing measurements taken by multiple metrology devices |
US9628775B2 (en) | 2010-01-20 | 2017-04-18 | Faro Technologies, Inc. | Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations |
US8615893B2 (en) | 2010-01-20 | 2013-12-31 | Faro Technologies, Inc. | Portable articulated arm coordinate measuring machine having integrated software controls |
US9607239B2 (en) | 2010-01-20 | 2017-03-28 | Faro Technologies, Inc. | Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations |
US9163922B2 (en) | 2010-01-20 | 2015-10-20 | Faro Technologies, Inc. | Coordinate measurement machine with distance meter and camera to determine dimensions within camera images |
US8898919B2 (en) | 2010-01-20 | 2014-12-02 | Faro Technologies, Inc. | Coordinate measurement machine with distance meter used to establish frame of reference |
WO2011090892A2 (en) | 2010-01-20 | 2011-07-28 | Faro Technologies, Inc. | Coordinate measurement machines with removable accessories |
US8832954B2 (en) | 2010-01-20 | 2014-09-16 | Faro Technologies, Inc. | Coordinate measurement machines with removable accessories |
US8284407B2 (en) | 2010-01-20 | 2012-10-09 | Faro Technologies, Inc. | Coordinate measuring machine having an illuminated probe end and method of operation |
US9879976B2 (en) | 2010-01-20 | 2018-01-30 | Faro Technologies, Inc. | Articulated arm coordinate measurement machine that uses a 2D camera to determine 3D coordinates of smoothly continuous edge features |
US8875409B2 (en) | 2010-01-20 | 2014-11-04 | Faro Technologies, Inc. | Coordinate measurement machines with removable accessories |
US8677643B2 (en) | 2010-01-20 | 2014-03-25 | Faro Technologies, Inc. | Coordinate measurement machines with removable accessories |
US20110178762A1 (en) | 2010-01-20 | 2011-07-21 | Faro Technologies, Inc. | Portable Articulated Arm Coordinate Measuring Machine with Multiple Communication Channels |
DE102010020925B4 (de) | 2010-05-10 | 2014-02-27 | Faro Technologies, Inc. | Verfahren zum optischen Abtasten und Vermessen einer Umgebung |
DE102010023354B4 (de) | 2010-06-10 | 2023-05-25 | Jenoptik Industrial Metrology Germany Gmbh | Tastarm für ein Oberflächenmeßgerät |
JP2013539541A (ja) | 2010-09-08 | 2013-10-24 | ファロ テクノロジーズ インコーポレーテッド | プロジェクタを有するレーザスキャナまたはレーザ追跡装置 |
US9168654B2 (en) | 2010-11-16 | 2015-10-27 | Faro Technologies, Inc. | Coordinate measuring machines with dual layer arm |
DE102012100609A1 (de) | 2012-01-25 | 2013-07-25 | Faro Technologies, Inc. | Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung |
US8997362B2 (en) | 2012-07-17 | 2015-04-07 | Faro Technologies, Inc. | Portable articulated arm coordinate measuring machine with optical communications bus |
DE102012109481A1 (de) | 2012-10-05 | 2014-04-10 | Faro Technologies, Inc. | Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung |
US9513107B2 (en) | 2012-10-05 | 2016-12-06 | Faro Technologies, Inc. | Registration calculation between three-dimensional (3D) scans based on two-dimensional (2D) scan data from a 3D scanner |
US10067231B2 (en) | 2012-10-05 | 2018-09-04 | Faro Technologies, Inc. | Registration calculation of three-dimensional scanner data performed between scans based on measurements by two-dimensional scanner |
NL1040175C2 (en) * | 2013-04-23 | 2014-10-27 | Xpress Holding B V | A vibrating system with multiple and equal natural frequencies. |
GB201513850D0 (en) * | 2015-08-05 | 2015-09-16 | Renishaw Plc | Coordinate positioning machine |
DE102015122844A1 (de) | 2015-12-27 | 2017-06-29 | Faro Technologies, Inc. | 3D-Messvorrichtung mit Batteriepack |
CN107976165B (zh) * | 2016-10-24 | 2019-11-08 | 上海中国弹簧制造有限公司 | 三坐标测量机自动测量稳定杆的方法 |
GB2568459B (en) * | 2017-10-13 | 2020-03-18 | Renishaw Plc | Coordinate positioning machine |
GB2582972B (en) | 2019-04-12 | 2021-07-14 | Renishaw Plc | Coordinate positioning machine |
DE102019115630B3 (de) * | 2019-06-07 | 2020-08-13 | Carl Zeiss Industrielle Messtechnik Gmbh | Schwenktaster |
EP3889543B1 (de) * | 2020-04-01 | 2023-06-07 | Leica Geosystems AG | Six-dof-messhilfsmittelmodul zur bestimmung von 3d-koordinaten von zu vermessenden punkten einer objektoberfläche |
DE102020114673B3 (de) * | 2020-06-02 | 2021-07-01 | Carl Zeiss Industrielle Messtechnik Gmbh | Sphärischer Parallelmanipulator, Schwenkeinrichtung und Messgerät |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4084323A (en) * | 1975-05-13 | 1978-04-18 | Rolls-Royce Limited | Measuring apparatus |
US5715729A (en) * | 1994-11-29 | 1998-02-10 | Toyoda Koki Kabushiki Kaisha | Machine tool having parallel structure |
US5743020A (en) * | 1996-09-27 | 1998-04-28 | Sheldon; Paul C. | Three-axis continuous probe |
CN1181034A (zh) * | 1995-03-15 | 1998-05-06 | 拉皮克有限责任公司 | 工业模件和用于测量与上述模件相关的运动的装置 |
US6336375B1 (en) * | 1994-03-02 | 2002-01-08 | Renishaw, Plc | Coordinate positioning machine |
Family Cites Families (43)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS5724805A (en) * | 1980-07-21 | 1982-02-09 | Mitsutoyo Mfg Co Ltd | Touch signal probe |
DE3506892A1 (de) * | 1985-02-27 | 1986-09-04 | Fa. Carl Zeiss, 7920 Heidenheim | Tastkopf fuer koordinatenmessmaschinen |
CH672089A5 (zh) * | 1985-12-16 | 1989-10-31 | Sogeva Sa | |
GB8629437D0 (en) * | 1986-12-09 | 1987-01-21 | Reinshaw Plc | Displacement-sensing probe |
JPH02212047A (ja) * | 1989-02-14 | 1990-08-23 | Mitsubishi Heavy Ind Ltd | デジタイズ装置 |
DE3905952A1 (de) * | 1989-02-25 | 1990-08-30 | Kugelfischer G Schaefer & Co | Mehrkoordinatenmesstaster |
EP0415579A1 (en) * | 1989-08-30 | 1991-03-06 | Renishaw plc | Touch probe |
DE3934056A1 (de) * | 1989-10-12 | 1991-05-08 | Zeiss Carl Fa | Tastkopf fuer koordinatenmessgeraete |
JPH05228799A (ja) * | 1992-02-25 | 1993-09-07 | Yamazaki Mazak Corp | タッチセンサツール |
JPH05296740A (ja) * | 1992-04-17 | 1993-11-09 | Sekisui Chem Co Ltd | ワーク表面形状認識装置 |
US5333514A (en) * | 1992-04-24 | 1994-08-02 | Toyoda Koki Kabushiki Kaisha | Parallel robot |
DE4300026A1 (de) * | 1993-01-02 | 1994-07-07 | Andreas Lotze | Tastkopf für Koordinatenmeßgeräte |
JPH07148679A (ja) * | 1993-11-25 | 1995-06-13 | Toyoda Mach Works Ltd | パラレルロボット |
GB9324218D0 (en) * | 1993-11-25 | 1994-01-12 | Renishaw Plc | Position determination machines |
GB9401692D0 (en) * | 1994-01-28 | 1994-03-23 | Renishaw Plc | Performing measurement or calibration on positioning machines |
DE69536045D1 (de) * | 1994-03-02 | 2010-04-01 | Renishaw Plc | Koordinaten-Positionierungsmaschine |
JP3275549B2 (ja) * | 1994-07-07 | 2002-04-15 | キタムラ機械株式会社 | 測定装置組込み式のnc工作機械 |
DE19534535C2 (de) * | 1995-09-18 | 2000-05-31 | Leitz Mestechnik Gmbh | Koordinatenmeßmaschine |
DE19611130A1 (de) * | 1996-03-21 | 1997-09-25 | Vdw Verein Deutscher Werkzeugm | Vorrichtung zur Erzeugung einer definierten Positionierung und Orientierung mindestens einer Plattform |
US5887356A (en) * | 1996-09-03 | 1999-03-30 | Sheldon/Van Someren, Inc. | Multi-axis continuous probe |
US5836082A (en) * | 1996-09-27 | 1998-11-17 | Sheldon/Van Someren Inc. | Three-axis probe |
JPH10213403A (ja) * | 1997-01-29 | 1998-08-11 | Toshiba Mach Co Ltd | 三次元座標測定装置 |
GB9724453D0 (en) * | 1997-11-20 | 1998-01-14 | Renishaw Plc | Measuring or positioning machine |
DE19822195C1 (de) * | 1998-05-16 | 2000-01-27 | Aesculap Ag & Co Kg | Haltevorrichtung für ein chirurgisches Instrument |
JP3443030B2 (ja) * | 1999-03-31 | 2003-09-02 | オークマ株式会社 | 測定装置 |
JP2000304529A (ja) * | 1999-04-22 | 2000-11-02 | Ricoh Co Ltd | プローブ装置及び形状測定装置 |
JP3663318B2 (ja) * | 1999-05-27 | 2005-06-22 | 独立行政法人科学技術振興機構 | パラレルメカニズムの運動誤差補正方法およびその装置 |
JP3352055B2 (ja) * | 1999-06-16 | 2002-12-03 | 株式会社ミツトヨ | タッチ信号プローブの着座機構 |
JP3359006B2 (ja) * | 1999-06-18 | 2002-12-24 | 株式会社ミツトヨ | 着座機構 |
US6497548B1 (en) * | 1999-08-05 | 2002-12-24 | Shambhu Nath Roy | Parallel kinematics mechanism with a concentric sperical joint |
JP3806273B2 (ja) * | 1999-09-17 | 2006-08-09 | 株式会社ジェイテクト | 四自由度パラレルロボット |
JP2001280925A (ja) * | 2000-03-28 | 2001-10-10 | Minolta Co Ltd | 三次元形状計測装置 |
DE10018214A1 (de) * | 2000-04-12 | 2001-10-25 | Dreier Technology Ag Chur | Verfahren und Vorrichtung zum Vermessen von Fertigungsmaschinen |
CN1092092C (zh) * | 2000-04-21 | 2002-10-09 | 清华大学 | 两维移动一维转动空间三轴并联机床结构 |
GB0019200D0 (en) * | 2000-08-05 | 2000-09-27 | Renishaw Plc | Bearing arrangement |
JP2003097940A (ja) * | 2001-09-21 | 2003-04-03 | Ricoh Co Ltd | 形状測定方法、形状測定装置、形状測定用のコンピュータプログラムを格納する記憶媒体及び形状測定用のコンピュータプログラム |
US7040033B2 (en) * | 2001-10-05 | 2006-05-09 | Trustees Of Stevens Institute Of Technology | Six degrees of freedom precision measuring system |
JP2003202213A (ja) * | 2001-10-29 | 2003-07-18 | Mitsutoyo Corp | 姿勢検出センサ、加速度センサ及びそれを用いた移動経路計測装置 |
JP2004276203A (ja) * | 2003-03-18 | 2004-10-07 | Toyoda Mach Works Ltd | パラレルリンク機械 |
SE527248C2 (sv) * | 2004-06-28 | 2006-01-31 | Hexagon Metrology Ab | Mätprob för användning i koordinatmätmaskiner |
JP4275632B2 (ja) * | 2005-03-01 | 2009-06-10 | 新日本工機株式会社 | パラレルメカニズム機構のキャリブレーション方法、キャリブレーションの検証方法、キャリブレーションの検証プログラム、データ採取方法及び空間位置補正における補正データ採取方法 |
JP4638327B2 (ja) * | 2005-10-17 | 2011-02-23 | 新日本工機株式会社 | パラレルメカニズム装置、パラレルメカニズム装置のキャリブレーション方法、キャリブレーションプログラム、及び記録媒体 |
GB0722477D0 (en) * | 2007-11-15 | 2007-12-27 | Secretary Trade Ind Brit | Microprobe |
-
2004
- 2004-06-28 SE SE0401660A patent/SE527248C2/sv not_active IP Right Cessation
-
2005
- 2005-06-20 ES ES05754094T patent/ES2425863T3/es active Active
- 2005-06-20 CN CNB2005800218320A patent/CN100533053C/zh not_active Expired - Fee Related
- 2005-06-20 JP JP2007519156A patent/JP4486682B2/ja not_active Expired - Fee Related
- 2005-06-20 CN CNB2005800215905A patent/CN100447523C/zh not_active Expired - Fee Related
- 2005-06-20 WO PCT/SE2005/000957 patent/WO2006001756A1/en active Application Filing
- 2005-06-20 US US11/630,671 patent/US7627956B2/en not_active Expired - Fee Related
- 2005-06-20 EP EP05754094.0A patent/EP1766325B1/en not_active Not-in-force
- 2005-06-20 JP JP2007519155A patent/JP2008504554A/ja active Pending
- 2005-06-20 EP EP05754036A patent/EP1766324A1/en not_active Ceased
- 2005-06-20 US US11/630,672 patent/US7500319B2/en not_active Expired - Fee Related
- 2005-06-20 WO PCT/SE2005/000958 patent/WO2006001757A1/en active Application Filing
-
2010
- 2010-12-17 JP JP2010281742A patent/JP2011081014A/ja active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4084323A (en) * | 1975-05-13 | 1978-04-18 | Rolls-Royce Limited | Measuring apparatus |
US6336375B1 (en) * | 1994-03-02 | 2002-01-08 | Renishaw, Plc | Coordinate positioning machine |
US5715729A (en) * | 1994-11-29 | 1998-02-10 | Toyoda Koki Kabushiki Kaisha | Machine tool having parallel structure |
CN1181034A (zh) * | 1995-03-15 | 1998-05-06 | 拉皮克有限责任公司 | 工业模件和用于测量与上述模件相关的运动的装置 |
US5743020A (en) * | 1996-09-27 | 1998-04-28 | Sheldon; Paul C. | Three-axis continuous probe |
Also Published As
Publication number | Publication date |
---|---|
CN100533053C (zh) | 2009-08-26 |
JP4486682B2 (ja) | 2010-06-23 |
SE527248C2 (sv) | 2006-01-31 |
CN101014826A (zh) | 2007-08-08 |
SE0401660L (sv) | 2005-12-29 |
US7627956B2 (en) | 2009-12-08 |
US20080282564A1 (en) | 2008-11-20 |
EP1766325A1 (en) | 2007-03-28 |
WO2006001757A1 (en) | 2006-01-05 |
SE0401660D0 (sv) | 2004-06-28 |
EP1766325B1 (en) | 2013-05-29 |
JP2008504554A (ja) | 2008-02-14 |
EP1766324A1 (en) | 2007-03-28 |
ES2425863T3 (es) | 2013-10-17 |
JP2008504555A (ja) | 2008-02-14 |
US7500319B2 (en) | 2009-03-10 |
CN101124452A (zh) | 2008-02-13 |
WO2006001756A1 (en) | 2006-01-05 |
US20080034601A1 (en) | 2008-02-14 |
JP2011081014A (ja) | 2011-04-21 |
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Effective date of registration: 20180111 Address after: Swiss Herberge Patentee after: Hexagon Technology Center Address before: Stockholm Patentee before: Hexconn Stock Co. Effective date of registration: 20180111 Address after: Stockholm Patentee after: Hexconn Stock Co. Address before: Custer land, Sweden Patentee before: Hexagon Metrology Ab |
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