CN100442388C - 将mos选择门用于相变存储器 - Google Patents

将mos选择门用于相变存储器 Download PDF

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CN100442388C
CN100442388C CNB038255901A CN03825590A CN100442388C CN 100442388 C CN100442388 C CN 100442388C CN B038255901 A CNB038255901 A CN B038255901A CN 03825590 A CN03825590 A CN 03825590A CN 100442388 C CN100442388 C CN 100442388C
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storer
phase
transistor
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CN1714403A (zh
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M·吉勒
T·A·劳里
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Ovonyx Inc
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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C13/00Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0004Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements comprising amorphous/crystalline phase transition cells
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C13/00Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0021Auxiliary circuits
    • G11C13/0069Writing or programming circuits or methods
    • G11C2013/0071Write using write potential applied to access device gate
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C2213/00Indexing scheme relating to G11C13/00 for features not covered by this group
    • G11C2213/70Resistive array aspects
    • G11C2213/79Array wherein the access device being a transistor

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  • Crystallography & Structural Chemistry (AREA)
  • Semiconductor Memories (AREA)

Abstract

可以利用NMOS场效应晶体管(22)来驱动相变存储器(10)的存储单元(16)。结果,可以大大减少泄漏电流。

Description

将MOS选择门用于相变存储器
(1)技术领域
背景技术
本发明主要涉及电子存储器,尤其涉及使用相变材料的电子存储器
相变材料可以呈现出至少两种不同状态。这些状态可以称为非晶或结晶状态。可以选择性地启动这些状态之间的转变。因为非晶状态通常呈现出比结晶状态更高的电阻率,所以可以区分这些状态。非晶状态包括一个较无序的原子结构。通常可以采用任何相变材料。然而,在些实施例中,薄膜硫族化物合金材料可能特别合适。
相变是可逆的。因此,响应于温度的变化,存储器可以从非晶变成结晶状态并且可以再回到非晶状态,反之亦然。实际上,可以将各存储器单元视为可编程电阻器,它可逆地在较高和较低的电阻状态之间变化。
现在相变存储器有泄漏电流。因此,需要减少现有相变存储器中的泄漏电流。
附图说明简要说明
图1为本发明的一个实施例的示意图;和
图2为本发明的一个实施例的系统图。
详细说明
参见图1,相变存储器10可包括多条导线或列12,包括列12a-12c和包括行14a-14c在内的多个行14。在各行14和各列12的交叉处是存储元件或存储单元16。
各单元16可包括相变存储元件18、电阻器20和n型金属氧化物半导体(NMOS)选择门22。相变存储材料的例子包括,但不限于,碲-锗-锑(TexGeySbz)材料或GeSbTe合金类的硫族化物元素成分,虽然本发明的范围不仅限于这些。另选地,可以使用另一相变材料,该材料的电性能(例如:电阻、电容等)可以通过应用诸如光、热或电流之类的能量来改变。在此特定实施例中,硫族化物层10可具有约300-600
Figure C0382559000031
的厚度。当将合适的电位施加至诸如字线14之类的导线时,可以将NMOS选择门导通,通过包括存储元件18的接地允许对电流的连接。存储元件18可以与字线12相耦合。
可以将相变存储器18加热至一高温以使材料非晶化并复位存储元件(例如:程序0)。将存储材料的体积加热至较低的结晶温度使该材料结晶并置位存储元件(例如:程序1)。应了解分别用非晶和结晶材料与复位或置位相关联是常规方法,且至少可以采取反常规方法。还应从此例了解可以通过改变流过存储材料体积的电流和持续时间来部分地置位或复位。
在相变存储元件18处于非晶或较低传导状态时的复位状态中,位线12b(在本例中,可能作为选择位)提供复位电流,而与其相邻的位线12a和12c在一个实施例中具有0伏特。同时,假设单元16e是选择单元,字线14b具有电位Vdd,而相邻的字线14a和14c具有零伏特。
相似地,在复位状态中,当相变材料处于较导电状态时,位线12b流过设定电流,而相邻位线12a和12c为0伏特。同时,在一个实施例中,具有选择单元16e的字线14b具有电压Vdd而相邻位线14a和14c可以是0伏特。该电压Vdd可以是电源电压。
为了读取存储单元,读电流出现在选择的位线12b上,而相邻位线的电压为零。选择的字线14b具有电位Vdd而相邻位线14a和14c具有0伏特。
因此,在本发明的一个实施例中,存储器阵列10具有专用接地。然而,可以反转偏置,但在该情况下,偏置整个阵列10。
沿相邻位线12上的相邻字线之间的隔离可以通过例如沟槽隔离或多晶硅场电极隔离提供。源线与各字线14平行并由两个相邻字线14共享。根据可接受多少沿源线压降决定各源线可以每4、8或16位周期性地与金属接地线接触。
通常,选择器件22电流驱动可以匹配或超过相变存储单元18的复位电流。
然而,在一些实施例中,字线14不需要金属条,因为它们通常不传递大电流。通常在一些实施例中,单个金属层就足够了。
在一些实施例中,可以采用基于处理器的系统来实现,该系统包括与总线52耦合的处理器50。在一个实施例中,总线52又依次与相变存储器10和无线接口54相耦合。处理器50可以是例如通用处理器或数字信号处理器。
虽然参照有限几个实施例描述了本发明,但本技术领域的技术人员会理解对其的各种修改和变形。旨在只要在本发明的精神和范围内的各种修改和变形都由所附的权利要求所覆盖。

Claims (8)

1.一种相变存储器,其特征在于,包括:
第一相变存储器单元,具有:第一导线;与所述第一导线相耦合的存储元件;和第二导线,所述存储元件通过金属氧化物半导体场效应晶体管与所述第二导线相耦合,所述场效应晶体管的漏极耦合到所述存储器单元而源极接地;
第二相变存储器单元,具有第三导线,平行于所述第二导线延伸;以及
所述第一相变存储器单元的所述源极与所述第二导线平行,并且与所述第二和第三导线共享。
2.如权利要求1所述的存储器,其特征在于,所述晶体管为NMOS晶体管。
3.如权利要求1所述的存储器,其特征在于,所述第一导线为位线。
4.如权利要求1所述的存储器,其特征在于,所述第二导线为字线。
5.如权利要求1所述的存储器,其特征在于,还包括与所述元件和所述晶体管串联的电阻。
6.如权利要求1所述的存储器,其特征在于,所述晶体管栅极与所述第二导线耦合。
7.如权利要求6所述的存储器,其特征在于,所述晶体管具有与所述元件相耦合的漏极。
8.如权利要求1所述的存储器,其特征在于,所述晶体管的源极接地。
CNB038255901A 2002-12-13 2003-04-28 将mos选择门用于相变存储器 Expired - Lifetime CN100442388C (zh)

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US10/318,705 US6912146B2 (en) 2002-12-13 2002-12-13 Using an MOS select gate for a phase change memory

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KR100610014B1 (ko) * 2004-09-06 2006-08-09 삼성전자주식회사 리키지 전류 보상 가능한 반도체 메모리 장치
US7339813B2 (en) * 2004-09-30 2008-03-04 Sharp Laboratories Of America, Inc. Complementary output resistive memory cell
CN101044577B (zh) * 2004-10-21 2011-06-15 Nxp股份有限公司 具有相变存储单元的集成电路和对相变存储单元寻址的方法
US7319608B2 (en) * 2005-06-30 2008-01-15 International Business Machines Corporation Non-volatile content addressable memory using phase-change-material memory elements
KR100735525B1 (ko) * 2006-01-04 2007-07-04 삼성전자주식회사 상변화 메모리 장치
US7495946B2 (en) * 2006-03-02 2009-02-24 Infineon Technologies Ag Phase change memory fabricated using self-aligned processing
US7646006B2 (en) 2006-03-30 2010-01-12 International Business Machines Corporation Three-terminal cascade switch for controlling static power consumption in integrated circuits
US7545667B2 (en) * 2006-03-30 2009-06-09 International Business Machines Corporation Programmable via structure for three dimensional integration technology
US7663134B2 (en) * 2007-07-10 2010-02-16 Taiwan Semiconductor Manufacturing Company, Ltd. Memory array with a selector connected to multiple resistive cells
US7633079B2 (en) * 2007-09-06 2009-12-15 International Business Machines Corporation Programmable fuse/non-volatile memory structures in BEOL regions using externally heated phase change material
CN101968973B (zh) * 2010-09-21 2013-11-20 中国科学院上海微系统与信息技术研究所 能抑制位线间漏电流的相变存储器电路
CN104978988B (zh) 2015-05-22 2017-08-25 江苏时代全芯存储科技有限公司 记忆体装置
US9659646B1 (en) 2016-01-11 2017-05-23 Crossbar, Inc. Programmable logic applications for an array of high on/off ratio and high speed non-volatile memory cells
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US20040113134A1 (en) 2004-06-17
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WO2004055826A1 (en) 2004-07-01
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KR20050095827A (ko) 2005-10-04
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