CN100419955C - 用于制造有机发光显示器的基底支撑板转移装置 - Google Patents
用于制造有机发光显示器的基底支撑板转移装置 Download PDFInfo
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- CN100419955C CN100419955C CNB2006101089395A CN200610108939A CN100419955C CN 100419955 C CN100419955 C CN 100419955C CN B2006101089395 A CNB2006101089395 A CN B2006101089395A CN 200610108939 A CN200610108939 A CN 200610108939A CN 100419955 C CN100419955 C CN 100419955C
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- substrate support
- support plate
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- transfer apparatus
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- 239000000758 substrate Substances 0.000 title claims abstract description 118
- 238000000034 method Methods 0.000 claims abstract description 20
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000010453 quartz Substances 0.000 abstract description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 13
- 239000011521 glass Substances 0.000 description 22
- 239000011159 matrix material Substances 0.000 description 5
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 230000032683 aging Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 208000034189 Sclerosis Diseases 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000002274 desiccant Substances 0.000 description 1
- 239000012769 display material Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/842—Containers
- H10K50/8426—Peripheral sealing arrangements, e.g. adhesives, sealants
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/841—Self-supporting sealing arrangements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S269/00—Work holders
- Y10S269/90—Supporting structure having work holder receiving apertures or projections
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
Description
Claims (20)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2005-0069815 | 2005-07-29 | ||
KR1020050069815 | 2005-07-29 | ||
KR1020050069815A KR100711875B1 (ko) | 2005-07-29 | 2005-07-29 | 유기 발광표시장치 제조용 석영 플레이트 지지장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1905128A CN1905128A (zh) | 2007-01-31 |
CN100419955C true CN100419955C (zh) | 2008-09-17 |
Family
ID=37674350
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2006101089395A Active CN100419955C (zh) | 2005-07-29 | 2006-07-28 | 用于制造有机发光显示器的基底支撑板转移装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7651079B2 (zh) |
JP (1) | JP4339335B2 (zh) |
KR (1) | KR100711875B1 (zh) |
CN (1) | CN100419955C (zh) |
TW (1) | TWI324494B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103743239A (zh) * | 2013-12-27 | 2014-04-23 | 深圳市华星光电技术有限公司 | 石英卡夹装置及其制作方法与带该石英卡夹装置的oled高温炉 |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100711875B1 (ko) * | 2005-07-29 | 2007-04-25 | 삼성에스디아이 주식회사 | 유기 발광표시장치 제조용 석영 플레이트 지지장치 |
US8603288B2 (en) * | 2008-01-18 | 2013-12-10 | Rockwell Collins, Inc. | Planarization treatment of pressure sensitive adhesive for rigid-to-rigid substrate lamination |
EP2749412B1 (en) | 2008-01-18 | 2016-09-14 | Rockwell Collins, Inc. | Substrate lamination method |
US8486535B1 (en) | 2010-05-24 | 2013-07-16 | Rockwell Collins, Inc. | Systems and methods for adherable and removable thin flexible glass |
CN102092018B (zh) * | 2011-01-14 | 2012-09-26 | 富泰华工业(深圳)有限公司 | 定位治具 |
CN102608772A (zh) * | 2011-01-24 | 2012-07-25 | 深圳富泰宏精密工业有限公司 | 视窗安装治具 |
KR101329762B1 (ko) * | 2011-09-05 | 2013-11-15 | 주식회사 에스에프에이 | 평면디스플레이용 박막 증착장치 |
KR102006874B1 (ko) * | 2011-11-30 | 2019-08-05 | 삼성디스플레이 주식회사 | 평판 디스플레이 패널용 트레이 |
US9981460B1 (en) | 2014-05-06 | 2018-05-29 | Rockwell Collins, Inc. | Systems and methods for substrate lamination |
CN104354146B (zh) * | 2014-09-28 | 2016-04-06 | 上海锅炉厂有限公司 | 双锥台防变形装配架 |
CN105598869A (zh) * | 2014-10-31 | 2016-05-25 | 富泰华工业(深圳)有限公司 | 定位装置 |
CN108803273A (zh) * | 2018-06-01 | 2018-11-13 | 苏州市东成办公科技有限公司 | 一种装有柔性支撑板的静电式复印机 |
CN110125835A (zh) * | 2019-05-17 | 2019-08-16 | 扬州辰亚光学科技有限公司 | 一种手机玻璃面板固定基座 |
CN111408517B (zh) * | 2020-03-21 | 2021-06-01 | 安徽容纳新能源科技有限公司 | 一种笔记本电脑显示屏组装装置及方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001168182A (ja) * | 1999-12-08 | 2001-06-22 | Clean Surface Gijutsu:Kk | フォトマスク基板等の搬送具 |
CN1456036A (zh) * | 2001-07-12 | 2003-11-12 | 广濑电子系统株式会社 | 基板运送装置 |
US20040107911A1 (en) * | 2002-12-02 | 2004-06-10 | Hur Gwang Ho | Substrate support member for use in FPD manufacturing apparatus |
JP2004172438A (ja) * | 2002-11-21 | 2004-06-17 | Mikuni Kogyo:Kk | 基板搬送装置 |
Family Cites Families (19)
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US3155383A (en) * | 1962-10-11 | 1964-11-03 | Link Division Of General Prec | Precision positioning apparatus |
US3787039A (en) * | 1972-02-04 | 1974-01-22 | R Zeichman | Pneumatic hold down table |
JPS55134414A (en) * | 1979-04-06 | 1980-10-20 | Hitachi Ltd | Precise moving unit |
US4768698A (en) * | 1986-10-03 | 1988-09-06 | Pace Incorporated | X-Y table with θ rotation |
KR0129662B1 (ko) * | 1987-10-30 | 1998-04-07 | 고다까 토시오 | 이동 테이블 장치 |
US5022619A (en) * | 1988-12-09 | 1991-06-11 | Tokyo Aircraft Instrument Co., Ltd. | Positioning device of table for semiconductor wafers |
US5623853A (en) * | 1994-10-19 | 1997-04-29 | Nikon Precision Inc. | Precision motion stage with single guide beam and follower stage |
US5760564A (en) * | 1995-06-27 | 1998-06-02 | Nikon Precision Inc. | Dual guide beam stage mechanism with yaw control |
US6575737B1 (en) | 1997-06-04 | 2003-06-10 | Applied Materials, Inc. | Method and apparatus for improved substrate handling |
KR100746828B1 (ko) * | 2001-05-15 | 2007-08-07 | 엘지전자 주식회사 | 유기 전계발광 소자의 봉지장치 및 방법 |
JP4198334B2 (ja) * | 2001-06-01 | 2008-12-17 | 富士通マイクロエレクトロニクス株式会社 | Xyステージを用いた処理方法及び装置 |
JP4614588B2 (ja) | 2001-06-29 | 2011-01-19 | 三洋電機株式会社 | エレクトロルミネッセンス表示装置の製造方法 |
US20030031538A1 (en) | 2001-06-30 | 2003-02-13 | Applied Materials, Inc. | Datum plate for use in installations of substrate handling systems |
KR100404342B1 (ko) | 2001-07-10 | 2003-11-03 | 주식회사 아펙스 | 자외선 조사장치 |
TW579564B (en) | 2001-08-31 | 2004-03-11 | Asyst Technologies | Unified frame, system for transferring semiconductor wafers and related substrate objects, and system for transporting wafers |
US20030072639A1 (en) | 2001-10-17 | 2003-04-17 | Applied Materials, Inc. | Substrate support |
JP2003323978A (ja) | 2002-04-26 | 2003-11-14 | Sanyo Electric Co Ltd | エレクトロルミネッセンス表示装置の製造方法 |
JP2004317862A (ja) | 2003-04-17 | 2004-11-11 | Mitsubishi Electric Corp | 大型映像表示装置 |
KR100711875B1 (ko) * | 2005-07-29 | 2007-04-25 | 삼성에스디아이 주식회사 | 유기 발광표시장치 제조용 석영 플레이트 지지장치 |
-
2005
- 2005-07-29 KR KR1020050069815A patent/KR100711875B1/ko active IP Right Grant
-
2006
- 2006-07-06 JP JP2006186862A patent/JP4339335B2/ja active Active
- 2006-07-11 TW TW095125212A patent/TWI324494B/zh active
- 2006-07-18 US US11/489,646 patent/US7651079B2/en active Active
- 2006-07-28 CN CNB2006101089395A patent/CN100419955C/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001168182A (ja) * | 1999-12-08 | 2001-06-22 | Clean Surface Gijutsu:Kk | フォトマスク基板等の搬送具 |
CN1456036A (zh) * | 2001-07-12 | 2003-11-12 | 广濑电子系统株式会社 | 基板运送装置 |
JP2004172438A (ja) * | 2002-11-21 | 2004-06-17 | Mikuni Kogyo:Kk | 基板搬送装置 |
US20040107911A1 (en) * | 2002-12-02 | 2004-06-10 | Hur Gwang Ho | Substrate support member for use in FPD manufacturing apparatus |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103743239A (zh) * | 2013-12-27 | 2014-04-23 | 深圳市华星光电技术有限公司 | 石英卡夹装置及其制作方法与带该石英卡夹装置的oled高温炉 |
CN103743239B (zh) * | 2013-12-27 | 2015-05-20 | 深圳市华星光电技术有限公司 | 石英卡夹装置及其制作方法与带该石英卡夹装置的oled高温炉 |
Also Published As
Publication number | Publication date |
---|---|
CN1905128A (zh) | 2007-01-31 |
TWI324494B (en) | 2010-05-01 |
US20070022895A1 (en) | 2007-02-01 |
TW200733798A (en) | 2007-09-01 |
KR20070014844A (ko) | 2007-02-01 |
JP4339335B2 (ja) | 2009-10-07 |
JP2007042625A (ja) | 2007-02-15 |
KR100711875B1 (ko) | 2007-04-25 |
US7651079B2 (en) | 2010-01-26 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20090116 Address after: Gyeonggi Do Korea Suwon Patentee after: Samsung Mobile Display Co., Ltd. Address before: Gyeonggi Do Korea Suwon Patentee before: Samsung SDI Co., Ltd. |
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ASS | Succession or assignment of patent right |
Owner name: SAMSUNG MOBILE DISPLAY CO., LTD. Free format text: FORMER OWNER: SAMSUNG SDI CO., LTD. Effective date: 20090116 |
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ASS | Succession or assignment of patent right |
Owner name: SAMSUNG DISPLAY CO., LTD. Free format text: FORMER OWNER: SAMSUNG MOBILE DISPLAY CO., LTD. Effective date: 20121108 |
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C41 | Transfer of patent application or patent right or utility model | ||
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Effective date of registration: 20121108 Address after: South Korea Gyeonggi Do Yongin Patentee after: Samsung Display Co., Ltd. Address before: Gyeonggi Do Korea Suwon Patentee before: Samsung Mobile Display Co., Ltd. |