CN100399503C - 基板处理装置 - Google Patents
基板处理装置 Download PDFInfo
- Publication number
- CN100399503C CN100399503C CNB2005101250679A CN200510125067A CN100399503C CN 100399503 C CN100399503 C CN 100399503C CN B2005101250679 A CNB2005101250679 A CN B2005101250679A CN 200510125067 A CN200510125067 A CN 200510125067A CN 100399503 C CN100399503 C CN 100399503C
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- loam cake
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Abstract
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Claims (4)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005023565A JP2006210808A (ja) | 2005-01-31 | 2005-01-31 | 基板処理装置 |
JP2005022859 | 2005-01-31 | ||
JP2005023565 | 2005-01-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1815684A CN1815684A (zh) | 2006-08-09 |
CN100399503C true CN100399503C (zh) | 2008-07-02 |
Family
ID=36907784
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005101250679A Active CN100399503C (zh) | 2005-01-31 | 2005-11-17 | 基板处理装置 |
Country Status (2)
Country | Link |
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JP (1) | JP2006210808A (zh) |
CN (1) | CN100399503C (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5176958B2 (ja) | 2006-08-02 | 2013-04-03 | 旭硝子株式会社 | 光拡散層形成用塗布液および光拡散板 |
JP5449720B2 (ja) * | 2008-08-26 | 2014-03-19 | 株式会社Sokudo | 基板処理装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09226882A (ja) * | 1996-02-23 | 1997-09-02 | Dainichi Shoji Kk | 基板用カセット |
JP2000012448A (ja) * | 1998-06-26 | 2000-01-14 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
JP2000269297A (ja) * | 1999-03-16 | 2000-09-29 | Tokyo Ohka Kogyo Co Ltd | 処理ユニット構築体 |
JP2000353732A (ja) * | 1999-06-10 | 2000-12-19 | Tokyo Electron Ltd | 基板処理方法 |
JP2002270490A (ja) * | 2001-03-12 | 2002-09-20 | Dainippon Screen Mfg Co Ltd | 基板処理装置および基板処理システム |
US6468351B1 (en) * | 1999-06-07 | 2002-10-22 | Matsushita Electric Industrial Co., Ltd. | Vacuum processing apparatus with improved maintainability |
-
2005
- 2005-01-31 JP JP2005023565A patent/JP2006210808A/ja active Pending
- 2005-11-17 CN CNB2005101250679A patent/CN100399503C/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09226882A (ja) * | 1996-02-23 | 1997-09-02 | Dainichi Shoji Kk | 基板用カセット |
JP2000012448A (ja) * | 1998-06-26 | 2000-01-14 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
JP2000269297A (ja) * | 1999-03-16 | 2000-09-29 | Tokyo Ohka Kogyo Co Ltd | 処理ユニット構築体 |
US6468351B1 (en) * | 1999-06-07 | 2002-10-22 | Matsushita Electric Industrial Co., Ltd. | Vacuum processing apparatus with improved maintainability |
JP2000353732A (ja) * | 1999-06-10 | 2000-12-19 | Tokyo Electron Ltd | 基板処理方法 |
JP2002270490A (ja) * | 2001-03-12 | 2002-09-20 | Dainippon Screen Mfg Co Ltd | 基板処理装置および基板処理システム |
Also Published As
Publication number | Publication date |
---|---|
JP2006210808A (ja) | 2006-08-10 |
CN1815684A (zh) | 2006-08-09 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: SCREEN GROUP CO., LTD. Free format text: FORMER NAME: DAINIPPON SCREEN MFG. CO., LTD. Owner name: DAINIPPON SCREEN MFG. CO., LTD. Free format text: FORMER NAME: DAINIPPON MESH PLATE MFR. CO., LTD. |
|
CP01 | Change in the name or title of a patent holder |
Address after: Kyoto Japan Patentee after: Skilling Group Address before: Kyoto Japan Patentee before: DAINIPPON SCREEN MFG Co.,Ltd. Address after: Kyoto Japan Patentee after: DAINIPPON SCREEN MFG Co.,Ltd. Address before: Kyoto Japan Patentee before: Dainippon Screen Mfg. Co.,Ltd. |