CN100399501C - 具有降低工艺变化敏感度的成像器光电二极管电容器结构 - Google Patents
具有降低工艺变化敏感度的成像器光电二极管电容器结构 Download PDFInfo
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- CN100399501C CN100399501C CNB200480028774XA CN200480028774A CN100399501C CN 100399501 C CN100399501 C CN 100399501C CN B200480028774X A CNB200480028774X A CN B200480028774XA CN 200480028774 A CN200480028774 A CN 200480028774A CN 100399501 C CN100399501 C CN 100399501C
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14689—MOS based technologies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/50—Control of the SSIS exposure
- H04N25/57—Control of the dynamic range
- H04N25/59—Control of the dynamic range by controlling the amount of charge storable in the pixel, e.g. modification of the charge conversion ratio of the floating node capacitance
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
- H04N25/77—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
- H04N25/771—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components comprising storage means other than floating diffusion
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Light Receiving Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Abstract
Description
Claims (28)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/635,580 US6780666B1 (en) | 2003-08-07 | 2003-08-07 | Imager photo diode capacitor structure with reduced process variation sensitivity |
US10/635,580 | 2003-08-07 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008100967669A Division CN101290945B (zh) | 2003-08-07 | 2004-07-30 | 形成像素单元和集成电路的方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1864240A CN1864240A (zh) | 2006-11-15 |
CN100399501C true CN100399501C (zh) | 2008-07-02 |
Family
ID=32869834
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB200480028774XA Expired - Fee Related CN100399501C (zh) | 2003-08-07 | 2004-07-30 | 具有降低工艺变化敏感度的成像器光电二极管电容器结构 |
CN2008100967669A Expired - Fee Related CN101290945B (zh) | 2003-08-07 | 2004-07-30 | 形成像素单元和集成电路的方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008100967669A Expired - Fee Related CN101290945B (zh) | 2003-08-07 | 2004-07-30 | 形成像素单元和集成电路的方法 |
Country Status (9)
Country | Link |
---|---|
US (2) | US6780666B1 (zh) |
EP (1) | EP1665341B1 (zh) |
JP (1) | JP2007502016A (zh) |
KR (1) | KR100777384B1 (zh) |
CN (2) | CN100399501C (zh) |
AT (1) | ATE502401T1 (zh) |
DE (1) | DE602004031856D1 (zh) |
TW (1) | TWI240411B (zh) |
WO (1) | WO2005017982A1 (zh) |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2005005573A (ja) * | 2003-06-13 | 2005-01-06 | Fujitsu Ltd | 撮像装置 |
US6780666B1 (en) * | 2003-08-07 | 2004-08-24 | Micron Technology, Inc. | Imager photo diode capacitor structure with reduced process variation sensitivity |
US7064406B2 (en) * | 2003-09-03 | 2006-06-20 | Micron Technology, Inc. | Supression of dark current in a photosensor for imaging |
JP4317115B2 (ja) * | 2004-04-12 | 2009-08-19 | 国立大学法人東北大学 | 固体撮像装置、光センサおよび固体撮像装置の動作方法 |
US7015844B1 (en) * | 2004-08-30 | 2006-03-21 | Micron Technology, Inc. | Minimized SAR-type column-wide ADC for image sensors |
KR100672993B1 (ko) * | 2005-01-19 | 2007-01-24 | 삼성전자주식회사 | 자가 승압 기능을 갖는 이미지 센서, 자가 승압 방법 및상기 이미지 센서 형성 방법 |
CN101164334B (zh) * | 2005-04-07 | 2010-12-15 | 国立大学法人东北大学 | 光传感器、固体摄像装置和固体摄像装置的动作方法 |
KR100744807B1 (ko) * | 2005-07-25 | 2007-08-01 | 매그나칩 반도체 유한회사 | Cmos 이미지센서 및 그 제조방법 |
KR100749261B1 (ko) * | 2005-09-28 | 2007-08-13 | 매그나칩 반도체 유한회사 | 시모스 이미지센서 |
US20070153105A1 (en) * | 2005-12-29 | 2007-07-05 | Sung Chih-Ta S | Method and device of high efficiency image capturing |
KR100801758B1 (ko) * | 2006-01-19 | 2008-02-11 | 엠텍비젼 주식회사 | 이미지 센서 및 그 제어 방법 |
KR100782308B1 (ko) * | 2006-07-14 | 2007-12-06 | 삼성전자주식회사 | 입사 광량에 따라 광전류 경로를 선택할 수 있는 cmos이미지 센서와 이미지 센싱 방법 |
US20080023783A1 (en) * | 2006-07-25 | 2008-01-31 | Micron Technology, Inc. | Sensing capacitance in column sample and hold circuitry in a CMOS imager and improved capacitor design |
US7649559B2 (en) * | 2006-08-30 | 2010-01-19 | Aptina Imaging Corporation | Amplifier offset cancellation devices, systems, and methods |
US7531374B2 (en) * | 2006-09-07 | 2009-05-12 | United Microelectronics Corp. | CMOS image sensor process and structure |
US7944020B1 (en) | 2006-12-22 | 2011-05-17 | Cypress Semiconductor Corporation | Reverse MIM capacitor |
KR100922931B1 (ko) * | 2006-12-27 | 2009-10-22 | 동부일렉트로닉스 주식회사 | 씨모스 이미지 센서 및 그 제조 방법 |
US7719590B2 (en) * | 2007-03-16 | 2010-05-18 | International Business Machines Corporation | High dynamic range imaging cell with electronic shutter extensions |
US7948535B2 (en) * | 2007-11-30 | 2011-05-24 | International Business Machines Corporation | High dynamic range imaging cell with electronic shutter extensions |
JP5656484B2 (ja) | 2010-07-07 | 2015-01-21 | キヤノン株式会社 | 固体撮像装置および撮像システム |
JP5697371B2 (ja) * | 2010-07-07 | 2015-04-08 | キヤノン株式会社 | 固体撮像装置および撮像システム |
JP5645513B2 (ja) | 2010-07-07 | 2014-12-24 | キヤノン株式会社 | 固体撮像装置及び撮像システム |
JP5751766B2 (ja) | 2010-07-07 | 2015-07-22 | キヤノン株式会社 | 固体撮像装置および撮像システム |
JP5885401B2 (ja) | 2010-07-07 | 2016-03-15 | キヤノン株式会社 | 固体撮像装置および撮像システム |
JP5643555B2 (ja) | 2010-07-07 | 2014-12-17 | キヤノン株式会社 | 固体撮像装置及び撮像システム |
US8294077B2 (en) * | 2010-12-17 | 2012-10-23 | Omnivision Technologies, Inc. | Image sensor having supplemental capacitive coupling node |
JP5247829B2 (ja) * | 2011-01-11 | 2013-07-24 | キヤノン株式会社 | 固体撮像装置及びその製造方法、並びに、カメラ |
US8643132B2 (en) * | 2011-06-08 | 2014-02-04 | Omnivision Technologies, Inc. | In-pixel high dynamic range imaging |
JP6547158B2 (ja) * | 2014-12-08 | 2019-07-24 | 株式会社ブルックマンテクノロジ | 光検出素子及び固体撮像装置 |
US9888185B1 (en) * | 2016-12-20 | 2018-02-06 | Omnivision Technologies, Inc. | Row decoder for high dynamic range image sensor using in-frame multi-bit exposure control |
US10263031B2 (en) * | 2017-02-01 | 2019-04-16 | Omnivision Technologies, Inc. | Feedback capacitor and method for readout of hybrid bonded image sensors |
KR102510520B1 (ko) * | 2017-10-31 | 2023-03-15 | 삼성전자주식회사 | 이미지 센서 |
WO2019107083A1 (ja) * | 2017-11-30 | 2019-06-06 | パナソニックIpマネジメント株式会社 | 撮像装置 |
US11063034B2 (en) | 2019-06-27 | 2021-07-13 | Micron Technology, Inc. | Capacitor structures |
US12009177B2 (en) * | 2020-06-29 | 2024-06-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Detection using semiconductor detector |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1293863A (zh) * | 1998-03-16 | 2001-05-02 | 光子图像系统股份有限公司 | 有源线性传感器 |
US20020117690A1 (en) * | 1999-07-14 | 2002-08-29 | Rhodes Howard E. | CMOS imager with storage capacitor |
US6489619B2 (en) * | 2001-04-27 | 2002-12-03 | Xerox Corporation | Pixel circuit with selectable capacitor load for multi-mode X-ray imaging |
US6512544B1 (en) * | 1998-06-17 | 2003-01-28 | Foveon, Inc. | Storage pixel sensor and array with compression |
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JP2965777B2 (ja) * | 1992-01-29 | 1999-10-18 | オリンパス光学工業株式会社 | 固体撮像装置 |
GB9619088D0 (en) * | 1996-09-12 | 1996-10-23 | Vlsi Vision Ltd | Ofset cancellation in array image sensors |
JP2001177084A (ja) * | 1999-12-14 | 2001-06-29 | Olympus Optical Co Ltd | 固体撮像素子 |
JP2001085658A (ja) * | 1999-09-09 | 2001-03-30 | Sony Corp | 固体撮像装置 |
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US6903394B2 (en) * | 2002-11-27 | 2005-06-07 | Micron Technology, Inc. | CMOS imager with improved color response |
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US6780666B1 (en) * | 2003-08-07 | 2004-08-24 | Micron Technology, Inc. | Imager photo diode capacitor structure with reduced process variation sensitivity |
-
2003
- 2003-08-07 US US10/635,580 patent/US6780666B1/en not_active Expired - Lifetime
-
2004
- 2004-07-23 US US10/897,114 patent/US7008816B2/en not_active Expired - Lifetime
- 2004-07-30 WO PCT/US2004/024598 patent/WO2005017982A1/en active Application Filing
- 2004-07-30 CN CNB200480028774XA patent/CN100399501C/zh not_active Expired - Fee Related
- 2004-07-30 JP JP2006522628A patent/JP2007502016A/ja active Pending
- 2004-07-30 DE DE602004031856T patent/DE602004031856D1/de active Active
- 2004-07-30 CN CN2008100967669A patent/CN101290945B/zh not_active Expired - Fee Related
- 2004-07-30 EP EP04757391A patent/EP1665341B1/en not_active Not-in-force
- 2004-07-30 AT AT04757391T patent/ATE502401T1/de not_active IP Right Cessation
- 2004-07-30 KR KR1020067002627A patent/KR100777384B1/ko active IP Right Grant
- 2004-08-06 TW TW093123745A patent/TWI240411B/zh not_active IP Right Cessation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1293863A (zh) * | 1998-03-16 | 2001-05-02 | 光子图像系统股份有限公司 | 有源线性传感器 |
US6512544B1 (en) * | 1998-06-17 | 2003-01-28 | Foveon, Inc. | Storage pixel sensor and array with compression |
US20020117690A1 (en) * | 1999-07-14 | 2002-08-29 | Rhodes Howard E. | CMOS imager with storage capacitor |
US6489619B2 (en) * | 2001-04-27 | 2002-12-03 | Xerox Corporation | Pixel circuit with selectable capacitor load for multi-mode X-ray imaging |
Also Published As
Publication number | Publication date |
---|---|
US6780666B1 (en) | 2004-08-24 |
TW200520214A (en) | 2005-06-16 |
WO2005017982A1 (en) | 2005-02-24 |
CN101290945B (zh) | 2010-07-28 |
EP1665341A4 (en) | 2008-03-12 |
TWI240411B (en) | 2005-09-21 |
US7008816B2 (en) | 2006-03-07 |
CN101290945A (zh) | 2008-10-22 |
CN1864240A (zh) | 2006-11-15 |
KR20060034305A (ko) | 2006-04-21 |
EP1665341A1 (en) | 2006-06-07 |
JP2007502016A (ja) | 2007-02-01 |
US20050032281A1 (en) | 2005-02-10 |
ATE502401T1 (de) | 2011-04-15 |
DE602004031856D1 (de) | 2011-04-28 |
EP1665341B1 (en) | 2011-03-16 |
KR100777384B1 (ko) | 2007-11-19 |
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