CN100372088C - Automatic bonding method of MEMS high temp pressure sensor - Google Patents
Automatic bonding method of MEMS high temp pressure sensor Download PDFInfo
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- CN100372088C CN100372088C CNB200610009745XA CN200610009745A CN100372088C CN 100372088 C CN100372088 C CN 100372088C CN B200610009745X A CNB200610009745X A CN B200610009745XA CN 200610009745 A CN200610009745 A CN 200610009745A CN 100372088 C CN100372088 C CN 100372088C
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Abstract
The present invention provides an automatic bonding method of an MEMS high-temperature pressure sensor. An automatic bonding machine which is composed of a mesa, a material flow table which is arranged on the mesa, a manipulator, a heating furnace and a microscope is selected for automatic bonding; the manipulator of the automatic bonding machine is installed on a four degrees of freedom work table of the manipulator which is controlled by four shafts; the heating furnace is installed on a two degrees of freedom positioning work table which is controlled by two shafts; the microscope is installed on an automatic focusing work table of the microscope, which comprises a shaft which can move up and down. The present invention realizes the high-precision alignment work of an MEMS high-temperature pressure sensor for both facades and the reverse side based on the high micro-vision precision and non-contact type measurement; the visual and micro-force information are combined so the high precision, the lossless grabbing operation and the transportation of chips and glass matrix are realized. Owing to the high automation degree of the automatic bonding machine, the automatic bonding machine has manufacturing capability in bulk; therefore, production efficiency is improved.
Description
(1) technical field
What the present invention relates to is a kind of processing method of transducer, specifically a kind of transducer electrostatic bonding method.
(2) background technology
Silicon-glass electrostatic bonding technology is widely used in the manufacturing of pressure sensor, at MEMS and IC manufacturing field critical role is arranged.It simultaneously also is the important process flow process in the MEMS high-temp pressure sensor manufacture process.During the bonding of MEMS high-temp pressure sensor, no matter be positive sensitivity or reverse side sensitivity.Sensitive circuit center palpus and pressure guide hole centrally aligned.But, adopt handwork in the electrostatic bonding operation of MEMS high-temp pressure sensor at present.Compare with the automatic anode linkage technology, present manual key cooperation already has following deficiency and defective: 1, alignment precision is low, chip sensitive circuit center and and the glass-based pressure guide hole can not accurately aim at, especially when reverse side sensitive sensor bonding, influence the performance of transducer.2, consistency is poor, and handwork causes the consistency of sensor performance poor.3, efficient is low, has limited the batch manufacturing of MEMS high-temp pressure sensor.
(3) summary of the invention
The object of the present invention is to provide the high precision alignment in a kind of silicon-glass anode linkage technical process that can improve the MEMS high-temp pressure sensor, improve the quality of products the MEMS high-temp pressure sensor automated bonding method of enhancing productivity simultaneously.
The object of the present invention is achieved like this: it is selected by table top, is arranged on the automated bonding machine that logistics platform, operator, heating furnace and microscope on the table top are formed; The operator of automated bonding machine is installed on the 4DOF operator workbench of being controlled by 4 axles, heating furnace is installed on the 2DOF positioning table of being controlled by 2 axles, and microscope is installed on the microscope automatic focusing workbench that comprises the axle that can move up and down;
1, sensor chip and glass substrate are placed into respectively in the carrier through after the ultrasonic waves for cleaning, are placed on the logistics platform, and heating furnace is warmed to 420 ℃;
2, system initialization, the start-up operation hand rotates to logistics platform top, under the control of little power sensing, the harmless sensor chip that grasps;
3, running fix workbench, feasible the 1st hot spot with heating furnace of 3 hot spots is positioned at the microscopic fields of view center, the rotary manipulation hand, the carrying sensor chip is placed into the 1st hot spot place in microscopically under the control of little power sensing;
4, under the SERVO CONTROL of micro-vision, by image processing and identification, the control positioning table moves, and makes the center, visual field that is centered close to of sensor chip sensitive circuit;
5, operator rotates to logistics platform top, under the control of little power sensing, and the harmless glass substrate that grasps;
6, rotary manipulation hand, the carrying glass substrate is in microscopically;
7, under the SERVO CONTROL of micro-vision, by image processing and identification, the control operation hand moves, and makes the center, visual field that is centered close to of glass substrate pressure guide hole;
8, place glass substrate straight down under the control of little power sensing to sensor chip, when both just contact, add direct voltage 1200V, anodal and sensor chip communicates, and negative pole and glass substrate communicate, and bonding begins;
9, encapsulation header is depressed on the glass substrate, loads, and operator is withdrawn from simultaneously, is used for the bonding operation of the 2nd transducer;
The rest may be inferred, and after operator was withdrawn from from the 3rd hot spot, the 1st transducer bonding finished, grasp taking-up by operator, be placed on the logistics platform, carry out the bonding operation of the 4th transducer then, so circulate, realized the automated bonding work flow of transducer.
The present invention is for the high precision alignment in the silicon-glass anode linkage technical process that realizes the MEMS high-temp pressure sensor, improve the quality of products, enhance productivity simultaneously, towards the batch manufacturing of MEMS transducer, select to have having the following advantages of manufacturing function in batches based on computer-controlled this technology of automatic anode technology:
1, based on high accuracy, the non-contact measurement of micro-vision, be the front or the high precision alignment operation of reverse side MEMS high-temp pressure sensor no matter realized;
2, merge vision/little power visual information, realize the high accuracy of chip and glass-based, the harmless extracting and carrying;
3, the high automation degree of equipment makes it have manufacturing capacity in batches, has improved production efficiency.
(4) description of drawings
Fig. 1 is the structural representation of automated bonding machine of the present invention;
Fig. 2 is the front view of automated bonding machine of the present invention;
Fig. 3 is the vertical view of Fig. 1;
Fig. 4 is the left view of Fig. 1.
(5) embodiment
For a more detailed description to the present invention for example below in conjunction with accompanying drawing:
The composition of MEMS high-temp pressure sensor automated bonding machine comprises table top 1, and logistics platform 2, operator 3, heating furnace 4 and microscope 5 are set on table top.Operator is installed in by axle I, axle II, axle III and axle IV control, can be on accurate motion 4DOF operator workbench aspect X, Y, Z and W4.Be used for the setting movement of control operation hand on the 4DOF operator workbench, the extracting and the carrying of the finished product behind realization chip, glass-based and the bonding; Heating furnace is installed in by axle V and axle VI control, can be aspect two of X, Y accurately on the 2DOF positioning table of motion.The 2DOF positioning table is used to control that heating furnace accurately moves along two aspects of X, Y and at the auxiliary automatic aligning of realizing silicon chip and glass-based down of image vision; But microscope is installed on the microscope automatic focusing workbench of the accurate tape spool VII that moves of Y direction.Wherein said microscope is the variable microscope of multiple.Microscope automatic focusing workbench is used to control the variable microscope of multiple, thereby constitutes a varifocal micro-vision system.
Below the course of work of the present invention is further described:
1, chip and matrix are placed into respectively in the carrier through after the ultrasonic waves for cleaning, are placed on the logistics platform, and heating furnace is warmed to 420 ℃;
2, system initialization, the start-up operation hand rotates to logistics platform top, under the control of little power sensing, the harmless sensor chip that grasps;
3, running fix workbench, feasible the 1st hot spot with heating furnace of 3 hot spots is positioned at the microscopic fields of view center.The rotary manipulation hand, the carrying chip is placed into the 1st hot spot place in microscopically under the control of little power sensing;
4, under the SERVO CONTROL of micro-vision, by image processing and identification, the control positioning table moves, and makes the center, visual field that is centered close to of chip sensitive circuit;
5, rotate to logistics platform top, under the control of little power sensing, the harmless glass substrate that grasps;
6, rotary manipulation hand, the carrying chip is in microscopically;
7, under the SERVO CONTROL of micro-vision, by image processing and identification, the control operation hand moves, and makes the center, visual field that is centered close to of glass substrate pressure guide hole;
8, place glass substrate straight down under the control of little power sensing to chip, when both just contact, add direct voltage 1200V, anodal and chip communicates, and negative pole and glass substrate communicate, and bonding begins;
9, encapsulation header is depressed on the glass substrate, loads.Operator is withdrawn from simultaneously, is used for the bonding operation of the 2nd transducer;
10, the rest may be inferred, and after operator was withdrawn from from the 3rd hot spot, the 1st transducer bonding finished, and grasped by operator and take out, and is placed on the logistics platform, carries out the bonding operation of the 4th transducer then.So circulate, realized the automated bonding work flow of transducer.
Every test comprises that each working table movement precision, image alignment precision and Micro-force sensor index test result are as follows:
Operator workbench testing result
| Title | Test item | The x axle | The y axle | The z axle | The w axle |
| Workbench | Movement travel (mm) | 50mm | 50mm | 10mm | 274° |
| Repetitive positioning accuracy (μ m) | 1.5μm | 1.5μm | 1.5μm | 0.015° | |
| Motion Resolution rate (μ m) | 0.5μm | 0.5μm | 0.5μm | 0.005° |
The positioning table testing result
| Title | Test item | The x axle | The y axle |
| Workbench | Movement travel (mm) | 80mm | 10mm |
| Repetitive positioning accuracy (μ m) | 1.5μm | 1.5μm | |
| Motion Resolution rate (μ m) | 0.5μm | 0.5μm |
Microscope automatic focusing workbench testing result
| Title | Test item | Technical indicator |
| Workbench | Movement travel (mm) | 20mm |
| Repetitive positioning accuracy (μ m) | 1.5μm | |
| Motion Resolution rate (μ m) | 0.5μm |
Micro-vision system testing result (vision localization precision)
| Title | Test item | Technical indicator | Testing result | ||||
| Object lens | Positioning resolution (μ m) | 4.0μm | 3.81 | 3.79 | 3.80 | 3.81 | 3.80 |
The Micro-force sensor testing result
| Title | Range (mN) | Precision (%F.S) | Resolution (mN) |
| One dimension power transducer | 3000 | 0.5％ | 5 |
Claims (1)
1. MEMS high-temp pressure sensor automated bonding method is characterized in that: its is selected by table top, is arranged on the automated bonding machine that logistics platform, operator, heating furnace and microscope on the table top are formed; The operator of automated bonding machine is installed on the 4DOF operator workbench of being controlled by 4 axles, heating furnace is installed on the 2DOF positioning table of being controlled by 2 axles, and microscope is installed on the microscope automatic focusing workbench that comprises the axle that can move up and down;
(1), sensor chip and glass substrate be through after the ultrasonic waves for cleaning, is placed into respectively in the carrier, is placed on the logistics platform, heating furnace is warmed to 420 ℃;
(2), system initialization, the start-up operation hand rotates to logistics platform top, under the control of little power sensing, the harmless sensor chip that grasps;
(3), the running fix workbench, make the 1st hot spot of heating furnace be positioned at the microscopic fields of view center with 3 hot spots, the rotary manipulation hand, the carrying sensor chip is placed into the 1st hot spot place in microscopically under the control of little power sensing;
(4), under the SERVO CONTROL of micro-vision, by image processing and identification, the control positioning table moves, and makes the center, visual field that is centered close to of sensor chip sensitive circuit;
(5), operator rotates to logistics platform top, under the control of little power sensing, the harmless glass substrate that grasps;
(6), the rotary manipulation hand, the carrying glass substrate in microscopically;
(7), under the SERVO CONTROL of micro-vision, by image processing and identification, the control operation hand moves, and makes the center, visual field that is centered close to of glass substrate pressure guide hole;
(8), under the control of little power sensing, place glass substrate straight down to sensor chip, when both just contact, add direct voltage 1200V, anodal and sensor chip communicates, negative pole and glass substrate communicate, bonding begins;
(9), encapsulation header is depressed on the glass substrate, loads, operator is withdrawn from simultaneously, is used for the bonding operation of the 2nd transducer;
The rest may be inferred, and after operator was withdrawn from from the 3rd hot spot, the 1st transducer bonding finished, grasp taking-up by operator, be placed on the logistics platform, carry out the bonding operation of the 4th transducer then, so circulate, realized the automated bonding work flow of transducer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200610009745XA CN100372088C (en) | 2006-02-27 | 2006-02-27 | Automatic bonding method of MEMS high temp pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200610009745XA CN100372088C (en) | 2006-02-27 | 2006-02-27 | Automatic bonding method of MEMS high temp pressure sensor |
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| Publication Number | Publication Date |
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| CN1834601A CN1834601A (en) | 2006-09-20 |
| CN100372088C true CN100372088C (en) | 2008-02-27 |
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| CNB200610009745XA Expired - Fee Related CN100372088C (en) | 2006-02-27 | 2006-02-27 | Automatic bonding method of MEMS high temp pressure sensor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103723677A (en) * | 2014-01-10 | 2014-04-16 | 苏州大学 | Assembling and packaging system and method of sensor |
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|---|---|---|---|---|
| CN102275869B (en) * | 2011-08-03 | 2014-04-09 | 苏州大学 | Equipment and method for bonding single chip and wafer |
| CN102659072B (en) * | 2012-05-18 | 2014-08-06 | 山东理工大学 | Bonding equipment for chips and wafers |
| CN103204462B (en) * | 2013-03-27 | 2015-05-20 | 山东理工大学 | Low-temperature ultrasonic anodic bonding device for silicon wafers and glass pieces |
| CN103145096B (en) * | 2013-03-27 | 2015-04-08 | 山东理工大学 | Low-temperature ultrasound anodic bonding method of silicon wafer and glass sheet |
| CN103280417A (en) * | 2013-06-17 | 2013-09-04 | 华进半导体封装先导技术研发中心有限公司 | Flexible substrate encapsulating device |
| CN104051318B (en) * | 2014-07-04 | 2017-02-01 | 格科微电子（上海）有限公司 | Automatic packaging system and automatic packaging method of image sensor chip |
| CN104528633A (en) * | 2014-12-02 | 2015-04-22 | 哈尔滨工业大学 | Multifunctional bonding experimental facility based on micro-electromechanical system technology |
| CN106365113B (en) * | 2016-10-26 | 2017-10-31 | 华东师范大学 | A kind of automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials |
| CN108408684B (en) * | 2018-04-17 | 2020-06-16 | 大连理工大学 | Alignment bonding device for manufacturing MEMS (micro-electromechanical system) device |
| CN108981998B (en) * | 2018-08-08 | 2020-09-29 | 重庆大学 | Electrostatic adsorption force test platform and force measurement method thereof |
| CN112973814B (en) * | 2021-03-03 | 2022-03-18 | 北京理工大学 | Interlayer automatic alignment bonding device and method for multilayer microfluidic chip |
| CN113457755B (en) * | 2021-04-12 | 2022-09-13 | 清华大学 | Micro-fluidic chip bonding equipment integrating alignment and hot baking based on microscopic imaging |
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|---|---|---|---|---|
| GB1207253A (en) * | 1968-07-04 | 1970-09-30 | Valery Ivanovich Soin | A device for the precision bonding of circuits by thermocompression method |
| JPH0669286A (en) * | 1992-08-19 | 1994-03-11 | Hitachi Ltd | Bonding apparatus |
| CN1136160C (en) * | 2000-06-02 | 2004-01-28 | 中国科学院上海冶金研究所 | Glass/silicon binding device used for mking micro mechanical parts and its application |
| CN1588618A (en) * | 2004-09-10 | 2005-03-02 | 北京工业大学 | Static bonding process with suspending movable sensitive structure |
| CN1610056A (en) * | 2004-11-12 | 2005-04-27 | 江苏大学 | Silicon chip / glass ring bonding apparatus |
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2006
- 2006-02-27 CN CNB200610009745XA patent/CN100372088C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1207253A (en) * | 1968-07-04 | 1970-09-30 | Valery Ivanovich Soin | A device for the precision bonding of circuits by thermocompression method |
| JPH0669286A (en) * | 1992-08-19 | 1994-03-11 | Hitachi Ltd | Bonding apparatus |
| CN1136160C (en) * | 2000-06-02 | 2004-01-28 | 中国科学院上海冶金研究所 | Glass/silicon binding device used for mking micro mechanical parts and its application |
| CN1588618A (en) * | 2004-09-10 | 2005-03-02 | 北京工业大学 | Static bonding process with suspending movable sensitive structure |
| CN1610056A (en) * | 2004-11-12 | 2005-04-27 | 江苏大学 | Silicon chip / glass ring bonding apparatus |
Non-Patent Citations (2)
| Title |
|---|
| MEMS器件微装配系统的设计与研制. 陈立国，孙立宁，荣伟彬等.中国机械工程，第16卷第14期. 2005 * |
| MEMS封装技术. 陈一梅，黄元庆.传感器技术，第24卷第3期. 2005 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103723677A (en) * | 2014-01-10 | 2014-04-16 | 苏州大学 | Assembling and packaging system and method of sensor |
| CN103723677B (en) * | 2014-01-10 | 2016-04-20 | 苏州大学 | A kind of sensor assembling package system and assembling method for packing |
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| CN1834601A (en) | 2006-09-20 |
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