CN108981998B - Electrostatic adsorption force test platform and force measurement method thereof - Google Patents
Electrostatic adsorption force test platform and force measurement method thereof Download PDFInfo
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- CN108981998B CN108981998B CN201810894782.6A CN201810894782A CN108981998B CN 108981998 B CN108981998 B CN 108981998B CN 201810894782 A CN201810894782 A CN 201810894782A CN 108981998 B CN108981998 B CN 108981998B
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- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
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Abstract
The invention discloses an electrostatic adsorption force testing platform and a force measuring method thereof, wherein the platform comprises a platform base, a base plate, a base frame, a cross ball screw driving device, an electrostatic adsorption film, an adsorption film bracket and a matched control acquisition interface window; the base frame and the cross ball screw driving device are both arranged on the platform base, and the base plate is vertically arranged on the base frame; the adsorption film bracket is arranged on a cross-shaped ball screw driving device, and the adsorption film bracket is driven to move along the tangential direction and the normal direction of the base plate by the cross-shaped ball screw driving device; the electrostatic adsorption film is arranged on the adsorption film bracket and is parallel to the base plate; according to the electrostatic adsorption force testing platform and the force measuring method, the normal and tangential electrostatic adsorption forces of the electrostatic adsorption film can be accurately and conveniently measured on the same platform, the measuring process is reasonable, and the measurement is accurate.
Description
Technical Field
The invention belongs to the technical field of electrostatic adsorption force measurement, and particularly relates to an electrostatic adsorption force test platform and a force measurement method thereof.
Background
The electrostatic adsorption phenomenon is widely present in life. The conventional electrostatic adsorption is that when an object with static electricity is close to another object without static electricity, due to electrostatic induction, one side of the object without static electricity close to the object with static electricity accumulates charges with opposite polarity to the charges carried by the object with static electricity (the other side generates the same charge), and due to the attraction of charges of opposite polarities, the phenomenon of "electrostatic adsorption" is shown. Just because of the ability of electrostatic adsorption to adsorb target objects, electrostatic adsorption has been widely used in various applications, such as electrostatic sorting, electrostatic printers, industrial dust removal, and electrostatic clamps.
With the development of society and the advancement of technology, artificial intelligence is more and more concerned, and most of the moving parts or end effectors of these intelligent products need to be in contact with the surface of an object to realize the functions thereof in an adsorption manner. Compared with the traditional adsorption modes such as vacuum adsorption, magnetic adsorption and the like, the electrostatic adsorption has the advantages of low energy consumption, wide adaptability, high response speed and the like. Since the electrostatic chuck concept was first proposed by Wardly in 1973, electrostatic adsorption was gradually expressed in the form of electrostatic adsorption sheets, electrostatic adsorption films and the like, and has applications in various aspects such as wall-climbing robots, human body rehabilitation mechanisms, pipeline cleaning robots, robot grippers and the like.
The electrostatic adsorption mainly takes an electrostatic adsorption film as an expression form, and the electrostatic adsorption film is a thin film which is formed by arranging electrodes on high polymer materials such as PET, silica gel and the like and can generate electrostatic adsorption force after two ends of the electrodes are electrified. Due to a plurality of influence factors of the electrostatic adsorption force, the electrostatic adsorption force is difficult to derive and quantify through theoretical research, and the test through an experimental means is one of effective ways for quantifying the electrostatic adsorption force, so that the method has a great promotion effect on the theoretical research and the practical application of the electrostatic adsorption. At present, the common adsorption force test means is that a spring dynamometer is used for measuring or weights are hung to measure the tangential electrostatic adsorption force, the test methods have many artificial influence factors, the measurement process has certain defects, the force measurement direction is single, and the measured data is not accurate enough.
Disclosure of Invention
Aiming at the defects in the existing testing method, in order to accurately and conveniently measure the normal direction electrostatic adsorption force and the tangential direction electrostatic adsorption force of the electrostatic adsorption film on the same platform, the following electrostatic adsorption force testing platform and a force measuring method thereof are designed.
The invention discloses an electrostatic adsorption force test platform which comprises a platform base, a base plate, a base frame, a cross-shaped ball screw driving device, an electrostatic adsorption film, an adsorption film bracket and a matched control acquisition interface window, wherein the base plate is arranged on the platform base; the base frame and the cross ball screw driving device are both arranged on the platform base, and the base plate is vertically arranged on the base frame; the adsorption film bracket is arranged on a cross-shaped ball screw driving device, and the adsorption film bracket is driven to move along the tangential direction and the normal direction of the base plate by the cross-shaped ball screw driving device; the static adsorption film is arranged on the adsorption film support and is parallel to the base plate, when normal static adsorption force is measured, a motor normal forward transmission button in a LabVIEW interface on a computer is clicked, so that the lead screw drives the static adsorption film on the film support to lean against the base plate along the normal direction and to be in close contact with the base plate until force collected by a three-dimensional force sensor on a collection interface in the LabVIEW reaches force with a specified size, and then a motor stop button in the LabVIEW is clicked, so that pre-load application is completed. Clicking a motor normal direction reverse transmission button in a LabVIEW interface on the computer after a certain time to separate the electrostatic adsorption film from the base plate along the normal direction, and reading the maximum normal force F1 recorded on the three-dimensional force sensor in the LabVIEW interface of the computer; and then clicking a motor normal forward button in a LabVIEW interface on a computer to enable the electrostatic adsorption film to be in close contact with the base plate in the normal direction until the force reaches the same preload as the previous force, clicking a motor stop button in the LabVIEW interface to enable the electrostatic adsorption film to stop moving, after applying high voltage for a certain time, clicking a normal reverse button in the LabVIEW interface to enable the electrostatic adsorption film to be separated from the base plate along the normal direction, so that the maximum normal force F2 in the whole process is recorded, and using F2-F1 as the normal electrostatic adsorption force (when measuring the normal electrostatic adsorption force, Van der Waals force and the like are generated after the electrostatic adsorption film is in contact with the base plate, so that the preload is applied to enable the electrostatic adsorption film to be in close contact in the normal direction, and the influence of the Van der Waals force and the like on the force measuring.
Similarly, when measuring the tangential electrostatic adsorption force, clicking a motor normal forward button in a LabVIEW interface on a computer to enable an electrostatic adsorption film to be contacted with a base plate in the normal direction, then clicking a stop button, clicking the motor tangential forward button in the LabVIEW interface after a certain time to enable a screw rod to drive the electrostatic adsorption film to be separated from the base plate in the tangential direction to record the tangential maximum adsorption force F3 at the moment, then enabling the electrostatic adsorption film to be contacted with the base plate in the normal direction, clicking the stop button in the LabVIEW interface to enable the electrostatic adsorption film to be electrified for a certain time, clicking a motor tangential reverse button in the LabVIEW interface to enable the electrostatic adsorption film to be separated from the base plate in the tangential direction to record the electrified maximum tangential adsorption force F4, and using F4-F3 to obtain the tangential electrostatic adsorption force. (the normal preload is not needed to be applied when the tangential electrostatic adsorption force is measured, because the preload is applied to measure the tangential force, the constraint force is generated, and the force measuring effect is influenced).
Further, the adsorption film bracket comprises a bottom plate, a vertical plate, a film seat and a three-dimensional force sensor; the vertical plate is vertically fixed on the bottom plate, and the membrane seat is fixed on one side, facing the base plate, of the vertical plate through the three-dimensional force sensor; the vertical plate, the membrane seat and the base plate are parallel to each other, and tangential electrostatic adsorption force and normal electrostatic adsorption force are measured through the three-dimensional force sensor.
Furthermore, the electrostatic adsorption film is bonded on one side, facing the base plate, of the film base through silica gel, if the electrostatic adsorption film needs to be replaced, only a corner of the electrostatic adsorption film needs to be opened from the film base through a knife, and then the electrostatic adsorption film is pulled down, so that the electrostatic adsorption film can be firmly bonded on the film base in an experiment, the replacement of the electrostatic adsorption film can be facilitated, and more experiments can be conveniently carried out.
Furthermore, the cross-shaped ball screw driving device comprises a tangential ball screw sliding table module and a normal ball screw sliding table module; the tangential ball screw sliding table module and the normal ball screw sliding table module respectively comprise a rack, a screw, a sliding block, a guide rod, a limit switch, a coupler and a driving motor; the lead screw is rotationally connected to the rack, the guide rod is fixed to the rack and parallel to the lead screw, the sliding block is sleeved on the lead screw and the guide rod and is in threaded fit with the lead screw, the driving motor is fixed to the rack, an output shaft of the driving motor is connected to one end of the lead screw through a coupler, and two limit switches are fixedly mounted on the rack to limit the movement range of the sliding block; the driving motor is a stepping motor, and when the movement is needed, the stepping motor is controlled to drive the lead screw and the adsorption film bracket connected to the slide block to move together through the coupler.
The cross-shaped ball screw driving device further comprises a connecting plate, the rack of the tangential ball screw sliding table module is fixedly arranged on the platform base, and the rack of the normal ball screw sliding table module is fixedly arranged on the sliding block of the tangential ball screw sliding table module through the connecting plate; the bottom plate is fixedly installed on the sliding block of the normal ball screw sliding table module.
Furthermore, a triangular support I is fixedly connected between the base frame and the platform base, the structure is stable, strong normal force and tangential force can be borne, and the accuracy of force measurement is guaranteed.
Further, a triangular support II is fixedly connected between the bottom plate and the vertical plate; the structure is firm, can bear stronger normal force and tangential force, guarantees the accuracy of dynamometry.
Furthermore, a horizontal slot for mounting the base plate is arranged on the base frame, a fastener for fastening the base plate is arranged at the horizontal slot, the base plate is convenient to replace, and the base plate and the electrostatic adsorption film with different parameters can be conveniently subjected to related experimental research.
Furthermore, the matched control acquisition interface window is an interface which is provided with buttons for controlling the rotating speed and the rotating direction of the motor and can display the magnitude of the force acquired in each dimension of the three-dimensional force sensor in real time in computer LabVIEW software, the buttons comprise 10 buttons of normal forward transmission, normal reverse transmission, tangential forward rotation, tangential reverse rotation, stop buttons and 0-9 levels for controlling the speed, and the rotating speed and the direction of the motor can be controlled by clicking the corresponding buttons; the force acquired in all processes from the beginning of the acquisition of the three-dimensional force sensor to the end of the acquisition of the force in the interface can be presented in a curve chart, and the maximum force in the whole process or the force at any moment can be read from the curve chart.
The invention relates to a method for measuring electrostatic adsorption force, which comprises a normal electrostatic adsorption force measuring method and a tangential electrostatic adsorption force measuring method;
when normal direction electrostatic adsorption force is measured, firstly, the electrostatic adsorption force F1 on the electrostatic adsorption film when high voltage electricity is not connected is measured, and then the electrostatic adsorption force on the electrostatic adsorption film when high voltage electricity is connected is measured, and the specific method comprises the following steps: clicking a normal forward button of a motor in a LabVIEW interface on a computer to enable a lead screw to drive an electrostatic adsorption film on an adsorption film support to be close to a base plate along the normal direction and to be in close contact with the base plate until the force acquired by a three-dimensional force sensor on an acquisition interface in the LabVIEW reaches a force with a specified size, then clicking a stop button of the motor in the LabVIEW to finish the application of a preload, clicking a normal reverse button of the motor in the LabVIEW interface on the computer to enable the electrostatic adsorption film to be separated from the base plate along the normal direction, and reading the maximum normal force F1 recorded on the three-dimensional force sensor in the LabVIEW interface of the computer; then clicking a normal forward button of a motor in a LabVIEW interface on a computer to enable the electrostatic adsorption film to be in close contact with the base plate in the normal direction until the force reaches the same preload as the force before, clicking a stop button of the motor in the LabVIEW interface to enable the electrostatic adsorption film to stop moving, after applying high voltage to the electrostatic adsorption film, clicking a normal reverse button in the LabVIEW interface to enable the electrostatic adsorption film to be separated from the base plate along the normal direction, and accordingly recording the maximum normal force F2 in the whole process, wherein F2-F1 is the normal electrostatic adsorption force;
when measuring tangential electrostatic adsorption power, firstly measuring the electrostatic adsorption power F3 on the electrostatic adsorption film when high voltage electricity is not connected, and then measuring the electrostatic adsorption power on the electrostatic adsorption film when high voltage electricity is connected, the specific method is as follows: clicking a normal forward button of a motor in a LabVIEW interface on a computer to enable an electrostatic adsorption film to be in contact with a base plate in the normal direction, then clicking a stop button, clicking a tangential forward button of the motor in the LabVIEW interface to enable a lead screw to drive the electrostatic adsorption film to be separated from the base plate in the tangential direction to record the tangential maximum adsorption force F3 at the moment, then enabling the electrostatic adsorption film to be in contact with the base plate in the normal direction, clicking the stop button in the LabVIEW interface to enable the electrostatic adsorption film to be electrified with high voltage, clicking a tangential reverse button of the motor in the LabVIEW interface to enable the electrostatic adsorption film to be separated from the base plate in the tangential direction to record the electrified maximum tangential adsorption force F4, and using F4-F3 to obtain the.
The force measuring method strictly follows the principle of controlling variables, scientifically and effectively eliminates the interference of other forces, and can reasonably and accurately measure the electrostatic adsorption force.
The invention has the beneficial effects that: according to the electrostatic adsorption force testing platform and the force measuring method thereof, the normal and tangential electrostatic adsorption forces of the electrostatic adsorption film can be accurately and conveniently measured on the same platform, the measuring process is reasonable, and the measurement is accurate.
Drawings
In order to more clearly illustrate the detailed description of the invention or the technical solutions in the prior art, the drawings that are needed in the detailed description of the invention or the prior art will be briefly described below. In the drawings, like elements or portions are generally identified by like reference numerals. In the drawings, elements or portions are not necessarily drawn to scale.
FIG. 1 is a schematic view of a LabVIEW control interface;
FIG. 2 is a schematic view of a LabVIEW data collection interface;
FIG. 3 is a perspective view of the present invention;
FIG. 4 is a schematic view of another embodiment of the present invention;
FIG. 5 is a block diagram of a normal electrostatic adhesion force measurement process;
FIG. 6 is a block diagram of a tangential electrostatic attraction force measurement process.
Detailed Description
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and therefore are only examples, and the protection scope of the present invention is not limited thereby.
It is to be noted that, unless otherwise specified, technical or scientific terms used herein shall have the ordinary meaning as understood by those skilled in the art to which the invention pertains.
As shown in fig. 1 and 2: the electrostatic adsorption force test platform comprises a platform base 14, a base plate 3, a base frame 2, a cross-shaped ball screw driving device, an electrostatic adsorption film 4 and an adsorption film bracket; the base frame 2 and the cross ball screw driving device are both arranged on the platform base 14, and the base plate 3 is vertically arranged on the base frame 2; the adsorption film bracket is arranged on a cross-shaped ball screw driving device, and the adsorption film bracket is driven by the cross-shaped ball screw driving device to move along the tangential direction and the normal direction of the base plate 3; the electrostatic adsorption film 4 is arranged on the adsorption film support and is parallel to the base plate 3, when normal electrostatic adsorption force is measured, a normal forward button of a motor in LabVIEW software in a computer is clicked, the electrostatic adsorption film 4 and the base plate 3 are enabled to be close to each other in the normal direction and to be in close contact with each other to generate force until a set requirement is met, namely, application of preload is completed, after a certain time is waited, a normal reverse button of the motor in the LabVIEW software in the computer is clicked, the electrostatic adsorption film is enabled to be separated from the base plate in the normal direction, and the maximum normal force F1 in the whole testing process is recorded; then clicking a normal rotation button of a motor in LabVIEW software in a computer to enable the electrostatic adsorption film 4 to be in contact with the base plate 3 and achieve the same preload, after applying high voltage to the electrostatic adsorption film for a certain time, enabling the electrostatic adsorption film to be separated from the base plate along the normal direction to record the maximum normal force F2, and using F2-F1 as the normal electrostatic adsorption force (when the normal electrostatic adsorption force is measured, Van der Waals force and the like are generated after the electrostatic adsorption film is in contact with the base plate, so that the preload is applied to enable the electrostatic adsorption film to be in close contact with the base plate in the normal direction, and the influence of the Van der Waals force and the like on the force measuring effect is reduced).
Similarly, when measuring the tangential electrostatic adsorption force, firstly clicking a normal forward rotation button in LabVIEW software in a computer to enable the electrostatic adsorption film 4 to be in contact with the base plate 3 in the normal direction, then clicking a stop button in the LabVIEW software in the computer, clicking a tangential forward rotation button in the LabVIEW software after a certain time to enable the electrostatic adsorption film to be separated from the base plate in the tangential direction to record the maximum tangential adsorption force F3 in the whole process, then enabling the electrostatic adsorption film 4 to be in contact with the base plate 3, then clicking a stop button in the LabVIEW, after electrifying the high voltage for a certain time, clicking a tangential forward rotation button in the LabVIEW to enable the electrostatic adsorption film to be separated from the base plate in the tangential direction to record the maximum tangential adsorption force F4, and F4-F3. (the normal preload is not needed to be applied when the tangential electrostatic adsorption force is measured, because the preload is applied to measure the tangential force, the constraint force is generated, and the force measuring effect is influenced).
In this embodiment, the adsorption film support includes a bottom plate 9, a vertical plate 7, a film base 5, and a three-dimensional force sensor 6; the vertical plate 7 is vertically fixed on the bottom plate 9, and the membrane seat 5 is fixed on one side of the vertical plate 7 facing the base plate 3 through the three-dimensional force sensor 6; the vertical plate 7, the membrane seat 5 and the base plate 3 are parallel to each other, and tangential electrostatic adsorption force and normal electrostatic adsorption force are measured through the three-dimensional force sensor 6; the electrostatic adsorption membrane 4 is bonded on one side of the membrane base 5 facing the base plate 3 through silica gel, if the electrostatic adsorption membrane 4 needs to be replaced, the electrostatic adsorption membrane 4 only needs to be pulled from the membrane base 5, the electrostatic adsorption membrane 4 can be firmly bonded on the membrane base 5 in an experiment, the replacement of the electrostatic adsorption membrane 4 can be facilitated, and more experiments can be conveniently carried out.
In this embodiment, the cross-shaped ball screw driving device includes a tangential ball screw sliding table module and a normal ball screw sliding table module; the tangential ball screw sliding table module and the normal ball screw sliding table module respectively comprise a rack 17, a screw 18, a sliding block 10, a guide rod 11, a limit switch 16, a coupler 12 and a driving motor 13; the lead screw 18 is rotationally connected to the rack 17, the guide rod 11 is fixed to the rack 17 and parallel to the lead screw 18, the slider 10 is sleeved on the lead screw 18 and the guide rod 11 and is in threaded fit with the lead screw 18, the driving motor 13 is fixed to the rack 17, an output shaft of the driving motor 13 is connected to one end of the lead screw 18 through the coupler 12, and the rack 17 is fixedly provided with two limit switches 16 to limit the movement range of the slider 10; the driving motor 13 is a stepping motor, when the movement is needed, the stepping motor is controlled to drive the screw 18 and the adsorption film bracket connected to the sliding block 10 to move together through the coupler 12, the cross-shaped ball screw driving device further comprises a connecting plate 15, the rack 17 of the tangential ball screw sliding table module is fixedly installed on the platform base 14, and the rack 17 of the normal ball screw sliding table module is fixedly installed on the sliding block 10 of the tangential ball screw sliding table module through the connecting plate 15; and the bottom plate 9 is fixedly arranged on a sliding block 10 of the normal ball screw sliding table module.
In this embodiment, a triangular bracket i 1 is fixedly connected between the base frame 2 and the platform base 14, and a triangular bracket ii 8 is fixedly connected between the bottom plate 9 and the vertical plate 7; the structure is firm, can bear stronger normal force and tangential force, guarantees the accuracy of dynamometry.
In this embodiment, the base frame 2 is provided with a horizontal slot for mounting the base plate 3, the horizontal slot is provided with a fastener for fastening the base plate 3, the base plate 3 is convenient to replace, and relevant experimental studies of different base plates 3 and electrostatic adsorption films 4 are facilitated.
In this embodiment, the matched control acquisition interface window is an interface in which buttons for controlling the rotation speed and the rotation direction of the motor and capable of displaying the magnitude of the force acquired in each dimension of the three-dimensional force sensor in real time are arranged in computer LabVIEW software, the buttons include 10 buttons of normal forward transmission, normal reverse transmission, tangential forward rotation, tangential reverse rotation, stop buttons and 0-9 stages for controlling the speed, and the rotation speed and the direction of the motor can be controlled by clicking the corresponding buttons; the force acquired in all processes from the beginning of the acquisition of the three-dimensional force sensor to the end of the acquisition of the force in the interface can be represented by a curve graph, and the maximum force in the whole process or the force at any moment can be read from the curve graph.
The electrostatic adsorption force measuring method comprises a normal electrostatic adsorption force measuring method and a tangential electrostatic adsorption force measuring method;
when normal direction electrostatic adsorption force is measured, firstly, the electrostatic adsorption force F1 on the electrostatic adsorption film when high voltage electricity is not connected is measured, and then the electrostatic adsorption force on the electrostatic adsorption film when high voltage electricity is connected is measured, and the specific method comprises the following steps: clicking a normal forward rotation button of a motor in a LabVIEW interface on a computer to enable a lead screw to drive an electrostatic adsorption film on an adsorption film support to be close to a base plate along the normal direction and to be in close contact with the base plate until the force acquired by a three-dimensional force sensor on an acquisition interface in the LabVIEW reaches a force with a specified size, clicking a stop button of the motor in the LabVIEW to finish the application of a preload, clicking a normal reverse rotation button of the motor in the LabVIEW interface on the computer to enable the electrostatic adsorption film to be separated from the base plate along the normal direction after a certain time, and reading the maximum normal force F1 recorded on the three-dimensional force sensor in the LabVIEW interface of the computer; then clicking a normal forward button of a motor in a LabVIEW interface on a computer to enable the electrostatic adsorption film to be in close contact with the base plate in the normal direction until the force reaches the same preload as the force before, clicking a stop button of the motor in the LabVIEW interface to enable the electrostatic adsorption film to stop moving, after applying high voltage to the electrostatic adsorption film for a certain time, clicking a normal reverse button in the LabVIEW interface to enable the electrostatic adsorption film to be separated from the base plate along the normal direction, and accordingly recording the maximum normal force F2 in the whole process, wherein F2-F1 is the normal electrostatic adsorption force; in the measurement of the normal electrostatic adsorption force, van der waals force or the like is generated after the electrostatic adsorption film comes into contact with the base plate, and therefore, a preload is applied so as to bring the electrostatic adsorption film into close contact with the base plate in the normal direction, thereby reducing the influence of van der waals force or other adsorption force or the like on the force measurement effect. Moreover, the electrostatic adsorption film needs a certain time for electrifying, and the certain time mentioned in the above process is the same.
When measuring tangential electrostatic adsorption power, firstly measuring the electrostatic adsorption power F3 on the electrostatic adsorption film when high voltage electricity is not connected, and then measuring the electrostatic adsorption power on the electrostatic adsorption film when high voltage electricity is connected, the specific method is as follows: clicking a normal forward button of a motor in a LabVIEW interface on a computer to enable an electrostatic adsorption film to be in contact with a base plate in the normal direction, clicking a stop button, clicking a tangential forward button of the motor in the LabVIEW interface after a certain time to enable a lead screw to drive the electrostatic adsorption film to be separated from the base plate in the tangential direction to record the tangential maximum adsorption force F3 at the moment, then enabling the electrostatic adsorption film to be in contact with the base plate in the normal direction, clicking a stop button in the LabVIEW interface and enabling the electrostatic adsorption film to be electrified for a certain time, clicking a tangential reverse button of the motor in the LabVIEW interface to enable the electrostatic adsorption film to be separated from the base plate in the tangential direction to record the electrified maximum tangential adsorption force F4, and using F4-F3 to be the tangential electrostatic adsorption; the normal preload is not required to be applied when the tangential electrostatic adsorption force is measured, because the constraint force is generated when the tangential force is measured after the preload is applied, the force measuring effect is influenced, and the tangential electrostatic adsorption force is far greater than the Van der Waals force and the like, the preload is not required to be applied. Moreover, the electrostatic adsorption film needs a certain time for electrifying, and the certain time mentioned in the above process is the same.
The force measuring method strictly follows the principle of controlling variables, scientifically and effectively eliminates the interference of other forces, and can reasonably and accurately measure the electrostatic adsorption force.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention, and they should be construed as being included in the following claims and description.
Claims (8)
1. The utility model provides an electrostatic absorption power test platform which characterized in that: the device comprises a platform base, a base plate, a base frame, a cross-shaped ball screw driving device, an electrostatic adsorption film, an adsorption film bracket and a matched control acquisition interface window; the base frame and the cross ball screw driving device are both arranged on the platform base, and the base plate is vertically arranged on the base frame; the adsorption film bracket is arranged on a cross-shaped ball screw driving device, and the adsorption film bracket is driven to move along the tangential direction and the normal direction of the base plate by the cross-shaped ball screw driving device; the electrostatic adsorption film is arranged on the adsorption film bracket and is parallel to the base plate; the cross-shaped ball screw driving device comprises a tangential ball screw sliding table module and a normal ball screw sliding table module; the tangential ball screw sliding table module and the normal ball screw sliding table module respectively comprise a rack, a screw, a sliding block, a guide rod, a limit switch, a coupler and a driving motor; the lead screw is rotationally connected to the rack, the guide rod is fixed to the rack and parallel to the lead screw, the sliding block is sleeved on the lead screw and the guide rod and is in threaded fit with the lead screw, the driving motor is fixed to the rack, an output shaft of the driving motor is connected to one end of the lead screw through a coupler, and two limit switches are fixedly mounted on the rack to limit the movement range of the sliding block; the matched control acquisition interface window is provided with buttons for controlling the rotating speed and the rotating direction of the motor and an interface capable of displaying the magnitude of the force acquired in each dimension of the three-dimensional force sensor in real time in computer LabVIEW software, the buttons comprise 10 buttons including normal forward rotation buttons, normal reverse rotation buttons, tangential forward rotation buttons, tangential reverse rotation buttons and stop buttons and 0-9 buttons for controlling the speed, and the rotating speed and the direction of the motor can be controlled by clicking the corresponding buttons; all the forces collected in the process from the beginning of the collection of the three-dimensional force sensor to the end of the collection of the force in the interface can be represented by a curve graph, so that the maximum force in the whole process or the force at any moment can be read from the curve graph.
2. The electrostatic attraction force test platform of claim 1, wherein: the adsorption film bracket comprises a bottom plate, a vertical plate, a film seat and a three-dimensional force sensor; the vertical plate is vertically fixed on the bottom plate, and the membrane seat is fixed on one side, facing the base plate, of the vertical plate through the three-dimensional force sensor.
3. The electrostatic attraction force test platform of claim 2, wherein: the electrostatic adsorption film is bonded on one side of the film base, which faces the base plate, through silica gel.
4. The electrostatic adhesion force test platform of claim 3, wherein: the cross-shaped ball screw driving device further comprises a connecting plate, the rack of the tangential ball screw sliding table module is fixedly arranged on the platform base, and the rack of the normal ball screw sliding table module is fixedly arranged on the sliding block of the tangential ball screw sliding table module through the connecting plate; the bottom plate is fixedly installed on the sliding block of the normal ball screw sliding table module.
5. The electrostatic attraction force test platform of claim 1, wherein: a triangular support I is fixedly connected between the base frame and the platform base.
6. The electrostatic attraction force test platform of claim 2, wherein: a triangular support II is fixedly connected between the bottom plate and the vertical plate.
7. An electrostatic chuck force testing platform according to any one of claims 1 to 6, wherein: the base frame is provided with a horizontal slot for mounting the base plate, and the horizontal slot is provided with a fastener for fastening the base plate.
8. A method of testing using the electrostatic adhesion test platform of any of claims 1-7, wherein: the method comprises a normal electrostatic adsorption force measuring method and a tangential electrostatic adsorption force measuring method;
when normal direction electrostatic adsorption force is measured, firstly, the electrostatic adsorption force F1 on the electrostatic adsorption film when high voltage electricity is not connected is measured, and then the electrostatic adsorption force on the electrostatic adsorption film when high voltage electricity is connected is measured, and the specific method comprises the following steps: clicking a normal forward button of a motor in a LabVIEW interface on a computer to enable a lead screw to drive an electrostatic adsorption film on an adsorption film support to be close to a base plate along the normal direction and to be in close contact with the base plate until the force acquired by a three-dimensional force sensor on an acquisition interface in the LabVIEW reaches a force with a specified size, then clicking a stop button of the motor in the LabVIEW to finish the application of a preload, clicking a normal reverse button of the motor in the LabVIEW interface on the computer to enable the electrostatic adsorption film to be separated from the base plate along the normal direction, and reading the maximum normal force F1 recorded on the three-dimensional force sensor in the LabVIEW interface of the computer; then clicking a normal forward button of a motor in a LabVIEW interface on a computer to enable the electrostatic adsorption film to be in close contact with the base plate in the normal direction until the force reaches the same preload as the force before, clicking a stop button of the motor in the LabVIEW interface to enable the electrostatic adsorption film to stop moving, after applying high voltage to the electrostatic adsorption film, clicking a normal reverse button in the LabVIEW interface to enable the electrostatic adsorption film to be separated from the base plate along the normal direction, and accordingly recording the maximum normal force F2 in the whole process, wherein F2-F1 is the normal electrostatic adsorption force;
when measuring tangential electrostatic adsorption power, firstly measuring the electrostatic adsorption power F3 on the electrostatic adsorption film when high voltage electricity is not connected, and then measuring the electrostatic adsorption power on the electrostatic adsorption film when high voltage electricity is connected, the specific method is as follows: clicking a normal forward button of a motor in a LabVIEW interface on a computer to enable an electrostatic adsorption film to be in contact with a base plate in the normal direction, then clicking a stop button, clicking a tangential forward button of the motor in the LabVIEW interface to enable a lead screw to drive the electrostatic adsorption film to be separated from the base plate in the tangential direction to record the tangential maximum adsorption force F3 at the moment, then enabling the electrostatic adsorption film to be in contact with the base plate in the normal direction, clicking the stop button in the LabVIEW interface to enable the electrostatic adsorption film to be electrified with high voltage, clicking a tangential reverse button of the motor in the LabVIEW interface to enable the electrostatic adsorption film to be separated from the base plate in the tangential direction to record the electrified maximum tangential adsorption force F4, and using F4-F3 to obtain the.
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| CN201810894782.6A CN108981998B (en) | 2018-08-08 | 2018-08-08 | Electrostatic adsorption force test platform and force measurement method thereof |
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| CN201810894782.6A CN108981998B (en) | 2018-08-08 | 2018-08-08 | Electrostatic adsorption force test platform and force measurement method thereof |
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| CN108981998A CN108981998A (en) | 2018-12-11 |
| CN108981998B true CN108981998B (en) | 2020-09-29 |
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