CN108981998A - A kind of electrostatic adsorption force test platform and its force measuring method - Google Patents
A kind of electrostatic adsorption force test platform and its force measuring method Download PDFInfo
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- CN108981998A CN108981998A CN201810894782.6A CN201810894782A CN108981998A CN 108981998 A CN108981998 A CN 108981998A CN 201810894782 A CN201810894782 A CN 201810894782A CN 108981998 A CN108981998 A CN 108981998A
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- absorption film
- substrate plate
- adsorption force
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
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- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The invention discloses a kind of electrostatic adsorption force test platform and its force measuring methods, including platform base, substrate plate, base frame, cross ball screw driving device, Electrostatic Absorption film and absorption membrane support and matched control acquisition interface window；The base frame and cross ball screw driving device are mounted on platform base, and substrate plate setting is installed on base frame；The absorption membrane support is installed on cross ball screw driving device, drives absorption membrane support to move along the tangential and normal direction of substrate plate by the cross ball screw driving device；The Electrostatic Absorption film is arranged in absorption membrane support and parallel with substrate plate；Of the invention a kind of electrostatic adsorption force test platform and force measuring method, can in identical platform respectively accurate easily measurement obtain Electrostatic Absorption film normal direction and tangential electrostatic adsorption force, measurement process is reasonable, and measurement is accurate.
Description
Technical field
The invention belongs to electrostatic adsorption force field of measuring technique more particularly to a kind of electrostatic adsorption force test platform and its surveys
Power method.
Background technique
Electrostatic Absorption phenomenon is widely present in life.Common Electrostatic Absorption refers to when the object of static electrification is close to another
When the object of a not static electrification, due to electrostatic induction, do not have the interior of articles of static electrification can gather on one side close to static electrification object
With the polar charge of opposite charge entrained by charged object (other side generate equivalent homophilic charge), since the charges of different polarity are mutually attracting
Draw, " Electrostatic Absorption " phenomenon will be shown.There is the performance of energy adsorbed target object just because of Electrostatic Absorption, so that it is very
Various occasions early are widely used in, if electrostatic sorts, electrostatic printer, industrial dedusting and electrostatic chuck etc..
With the development of society and the progress of science and technology, artificial intelligence is more and more concerned, the movement portion of these intellectual products
Divide or end effector needs to contact with body surface mostly, its function is realized in the form of absorption.It is adsorbed compared to tradition
Mode such as vacuum suction, magnetic suck etc., Electrostatic Absorption have the advantages such as low energy consumption, wide adaptability, fast response time.From 1973
Since Wardly is put forward for the first time electrostatic chuck concept, Electrostatic Absorption is gradually shown in the form of electrostatic suction piece, Electrostatic Absorption film etc.
Come, and has application in various aspects such as climbing robot, human body recovery mechanism, pipeline cleaning machine people, robot grippers.
For Electrostatic Absorption mainly using Electrostatic Absorption film as the form of expression, Electrostatic Absorption film is by electrode arrangement to PET, silica gel etc.
On high molecular material, a kind of film of electrostatic adsorption force can be generated after electrode both ends are powered.Due to the influence of electrostatic adsorption force
Factor is numerous, extremely difficult by theoretical research derivation quantization electrostatic adsorption force, is then quantization electrostatic by laboratory facilities test
One of effective way for adsorption capacity, theoretical research and practical application for Electrostatic Absorption have very big facilitation.
Adsorption capacity means of testing common at present is usually to be measured with weight beam or measure tangential electrostatic by suspension counterweight
Adsorption capacity, these test method artifical influence factors are more, and there are certain defects for measurement process, and dynamometry direction is single, surveyed number
According to also not accurate enough.
Summary of the invention
For the defects of existing test method, in order to accurately easily measure electrostatic respectively in identical platform
The normal direction of adsorbed film and tangential electrostatic adsorption force devise following electrostatic adsorption force test platform and its force measuring method.
A kind of electrostatic adsorption force test platform of the invention, including the rolling of platform base, substrate plate, base frame, cross
Ballscrew driving device, Electrostatic Absorption film and absorption membrane support and matched control acquisition interface window；The base frame
It is mounted on platform base with cross ball screw driving device, substrate plate setting is installed on base frame；The adsorbed film
Bracket is installed on cross ball screw driving device, drives absorption membrane support by the cross ball screw driving device
Tangential and normal direction along substrate plate moves；The Electrostatic Absorption film is installed on absorption membrane support and, measurement parallel with substrate plate
When normal direction electrostatic adsorption force, the motor normal direction main story button on computer in the interface LabVIEW is first clicked, lead screw is made to drive film branch
Electrostatic Absorption film on frame is leaned on into substrate plate along normal direction and is in close contact until three-dimensional force sensor on acquisition interface in LabVIEW
Collected power reaches the power of prescribed level, clicks motor stop button in LabVIEW later, that is, completes the application preloaded.
Clicking the motor normal direction anti-pass button on computer in the interface LabVIEW again after a certain period of time makes Electrostatic Absorption film and substrate plate edge
Normal direction is detached from, and the maximum normal force F1 being recorded on three-dimensional force sensor is read in the interface computer LabVIEW；Next again
Clicking the motor normal direction main story button on computer in the interface LabVIEW makes Electrostatic Absorption film and substrate plate tighten contiguity in normal direction
After power reaches as before and preloads, clicking motor stop button in the interface LabVIEW stops Electrostatic Absorption film for touching
Movement leads to high-voltage electricity after a certain period of time to Electrostatic Absorption film, and clicking normal direction reversion button in the interface LabVIEW makes Electrostatic Absorption film
It is detached from along normal direction and substrate plate, is normal direction Electrostatic Absorption with F2-F1 to record maximum normal force F2 in whole process
Power (when measurement normal direction electrostatic adsorption force, has Van der Waals force etc. after Electrostatic Absorption film and substrate plate contact and generates, so to apply
Add and preload, be in close contact it in normal direction, to reduce the influence to dynamometry effect such as Van der Waals force).
Similarly, when measuring tangential electrostatic adsorption force, the motor normal direction main story button on computer in the interface LabVIEW is clicked
Stop button is clicked after first allowing Electrostatic Absorption film to contact in normal direction with substrate plate, is clicked in the interface LabVIEW after a certain period of time
The tangential main story button of motor make lead screw that Electrostatic Absorption film be driven tangentially to be detached from record at this time tangential with substrate plate maximum to inhale
Attached power F3, allows Electrostatic Absorption film to contact along normal direction with substrate plate again later, clicks the stop button in the interface LabVIEW and to quiet
Electro Sorb film leads to high-voltage electricity after a certain period of time, and the motor in the click interface LabVIEW, which tangentially inverts button, makes Electrostatic Absorption film edge
It is tangential to be detached from maximum tangential adsorption capacity F4 after substrate plate record is powered, it is tangential electrostatic adsorption force with F4-F3.(measurement is tangential
It does not need application normal direction when electrostatic adsorption force to preload, because restraining force, shadow can be generated by being applied with when preloading measurement tangential force
Ring dynamometry effect).
Further, the absorption membrane support includes bottom plate, vertical plate, film seat and three-dimensional force sensor；The vertical plate is erect solid
It is scheduled on bottom plate, the film seat is fixed on side of the vertical plate towards substrate plate by three-dimensional force sensor；Vertical plate, film seat and substrate
Plate three is parallel to each other, and tangential electrostatic adsorption force and normal direction electrostatic adsorption force are measured by three-dimensional force sensor.
Further, the Electrostatic Absorption film is bonded in side of the film seat towards substrate plate by silica gel, if to replace quiet
Electro Sorb film only needs Electrostatic Absorption film raising an angle with pocket knife from film seat, then pulls off, and can test
When guarantee Electrostatic Absorption film strong bond to film seat on, can also facilitate the replacement of Electrostatic Absorption film, be convenient for more testing.
Further, the cross ball screw driving device includes tangential ball-screw slide unit mould group and normal direction ball wire
Thick stick slide unit mould group；The tangential ball-screw slide unit mould group and normal direction ball-screw slide unit Mo Zu include rack, lead screw, cunning respectively
Block, guide rod, limit switch, shaft coupling and driving motor；The lead screw is rotationally connected with rack, and guide rod is fixed on rack simultaneously
Parallel with lead screw, slide block set is loaded on lead screw and guide rod and between lead screw by being threadedly engaged, and the driving motor is solid
Due to rack, the output shaft of driving motor is connected to one end of lead screw by shaft coupling, and there are two limits for fixed installation in rack
It switchs to limit the motion range of sliding block；Driving motor is stepper motor, and when motion is desired, control stepper motor passes through shaft coupling
Device drives the absorption membrane support connected on lead screw and sliding block to move together.
Further, the cross ball screw driving device further includes connecting plate, the tangential ball-screw slide unit mould
The rack of group is fixedly installed in platform base, and the rack of the normal direction ball-screw slide unit mould group passes through the fixed peace of the connecting plate
On the sliding block of tangential ball-screw slide unit mould group；The bottom plate is fixedly mounted on the sliding block of normal direction ball-screw slide unit mould group
On.
Further, A-frame I, stabilized structure, Neng Goucheng are fixedly connected between the base frame and platform base
By stronger normal force and tangential force, guarantee the accuracy of dynamometry.
Further, A-frame II is fixedly connected between the bottom plate and vertical plate；Stabilized structure is able to bear stronger
Normal force and tangential force guarantee the accuracy of dynamometry.
Further, the base frame is equipped with the horizontal slot for mounting substrate plate, is equipped with and is used at horizontal slot
The fastener that substrate plate is fastened, substrate plate are conveniently replaceable, conducive to the phase for the substrate plate and Electrostatic Absorption film for carrying out different parameters
Close experimental study.
Further, the matched control acquisition interface window is that control electricity is provided in computer LabVIEW software
The button of machine revolving speed and direction of motor rotation and being capable of collected power in each dimension of real-time display three-dimensional force sensor
The interface of size, the button include normal direction main story, normal direction anti-pass, tangential rotating forward, tangential reversion, stop button and control speed
The 0-9 grade of degree totally 10 buttons, clicking corresponding button can control revolving speed and the direction of motor；From three-dimensional force in the interface
Sensor, which starts to collect power acquisition, terminates all collected power of process all can cash out with curve graph, can also therefrom read
Get maximum power or the power of any time in whole process.
Electrostatic adsorption force force measuring method of the invention, including normal direction Electrostatic Absorption force measuring method and tangential electrostatic adsorption force
Force measuring method；
When measuring normal direction electrostatic adsorption force, electrostatic adsorption force F1 when not leading to high-voltage electricity on Electrostatic Absorption film is first measured, then measure
Electrostatic adsorption force when logical high-voltage electricity on Electrostatic Absorption film, method particularly includes: first click the electricity on computer in the interface LabVIEW
Machine normal direction rotates forward button, makes lead screw drive the Electrostatic Absorption film on absorption membrane support along normal direction close to substrate plate and is in close contact straight
Into LabVIEW, the collected power of three-dimensional force sensor reaches the power of prescribed level on acquisition interface, clicks in LabVIEW later
Motor stop button completes the application preloaded, then click the motor normal direction reversion button on computer in the interface LabVIEW
It is detached from Electrostatic Absorption film and substrate plate along normal direction, reads in the interface computer LabVIEW and be recorded on three-dimensional force sensor
Maximum normal force F1；Next clicking the motor normal direction rotating forward button on computer in the interface LabVIEW again makes Electrostatic Absorption
Film and substrate plate are in close contact after power reaches as before and preloads in normal direction, click motor in the interface LabVIEW
Stop button makes Electrostatic Absorption film stop motion, after leading to high-voltage electricity to Electrostatic Absorption film, clicks normal direction reversion in the interface LabVIEW
Button is detached from Electrostatic Absorption film along normal direction and substrate plate, to record maximum normal force F2 in whole process, uses F2-F1
As normal direction electrostatic adsorption force；
When measuring tangential electrostatic adsorption force, electrostatic adsorption force F3 when not leading to high-voltage electricity on Electrostatic Absorption film is first measured, then measure
Electrostatic adsorption force when logical high-voltage electricity on Electrostatic Absorption film, method particularly includes: click the motor on computer in the interface LabVIEW
Normal direction rotates forward after button first allows Electrostatic Absorption film to contact in normal direction with substrate plate and clicks stop button, then clicks LabVIEW circle
Motor in face tangentially rotate forward button make lead screw drive Electrostatic Absorption film be tangentially detached from substrate plate record at this time it is tangential most
Big adsorption capacity F3, allows Electrostatic Absorption film to contact along normal direction with substrate plate again later, and the stop button in the click interface LabVIEW is simultaneously
Lead to high-voltage electricity to Electrostatic Absorption film, the motor in the click interface LabVIEW, which tangentially inverts button, takes off Electrostatic Absorption film tangentially
Maximum tangential adsorption capacity F4, is tangential electrostatic adsorption force with F4-F3 after being powered from substrate plate record.
The above force measuring method follows strictly control variable principle, and the scientific and effective interference for eliminating other power can be reasonable,
Accurately measure electrostatic adsorption force.
The beneficial effects of the present invention are: a kind of electrostatic adsorption force test platform of the invention and its force measuring method, Neng Gou
In identical platform respectively accurately easily measure Electrostatic Absorption film normal direction and tangential electrostatic adsorption force, measurement process is reasonable,
Measurement is accurate.
Detailed description of the invention
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution in the prior art
Embodiment or attached drawing needed to be used in the description of the prior art are briefly described.In the accompanying drawings, similar element or portion
Divide and is generally identified by similar appended drawing reference.In attached drawing, each element or part might not be drawn according to actual ratio.
Fig. 1 is LabVIEW control interface schematic diagram；
Fig. 2 is LabVIEW data acquisition interface schematic diagram；
Fig. 3 is perspective view of the invention；
Another viewing angle constructions schematic diagram Fig. 4 of the invention；
Fig. 5 is normal direction electrostatic adsorption force dynamometry procedural block diagram；
Fig. 6 is tangential electrostatic adsorption force dynamometry procedural block diagram.
Specific embodiment
It is described in detail below in conjunction with embodiment of the attached drawing to technical solution of the present invention.Following embodiment is only used for
Clearly illustrate technical solution of the present invention, therefore be only used as example, and cannot be used as a limitation and limit protection model of the invention
It encloses.
It should be noted that unless otherwise indicated, technical term or scientific term used in this application should be this hair
The ordinary meaning that bright one of ordinary skill in the art are understood.
It is as shown in Figure 1, 2: a kind of electrostatic adsorption force test platform of the present embodiment, including platform base 14, substrate plate 3,
Base frame 2, cross ball screw driving device, Electrostatic Absorption film 4 and absorption membrane support；The base frame 2 and cross
Shape ball screw driving device is mounted on platform base 14, and the setting of substrate plate 3 is installed on base frame 2；The adsorbed film branch
Frame is installed on cross ball screw driving device, drives absorption membrane support edge by the cross ball screw driving device
The tangential and normal direction of substrate plate 3 is mobile；The Electrostatic Absorption film 4 is installed on absorption membrane support and, measurement parallel with substrate plate 3
When normal direction electrostatic adsorption force, by clicking, motor normal direction rotates forward button in LabVIEW software in computer, allows Electrostatic Absorption film 4
It is close along normal direction with substrate plate 3 and be in close contact and generate power until reaching sets requirement, that is, the application preloaded is completed, waits one
Motor normal direction in LabVIEW software is clicked in computer after fixing time again and inverts button, makes Electrostatic Absorption film along normal direction and substrate
Plate is detached from, and records maximum normal force F1 in entire test process；Click in computer motor method in LabVIEW software again later
To rotating forward after button contact with substrate plate 3 by Electrostatic Absorption film 4 and reach identical and preload, give Electrostatic Absorption film logical high-voltage electricity one
After fixing time, and Electrostatic Absorption film and substrate plate are detached from along normal direction and records maximum normal force F2, is method with F2-F1
To electrostatic adsorption force (when measurement normal direction electrostatic adsorption force, Van der Waals force etc. is had after Electrostatic Absorption film and substrate plate contact and is produced
It is raw, preloaded so to apply, be in close contact it in normal direction, to reduce the influence to dynamometry effect such as Van der Waals force).
Similarly, when measuring tangential electrostatic adsorption force, first click in computer normal direction in LabVIEW software rotate forward button allow it is quiet
Electro Sorb film 4 clicks in computer stop button in LabVIEW software after contacting in normal direction with substrate plate 3, after a certain period of time
Click the tangential suction of maximum for tangentially rotating forward that button is detached from Electrostatic Absorption film tangentially in record whole process in LabVIEW software
Attached power F3 clicks stop button in LabVIEW after allowing Electrostatic Absorption film 4 to contact with substrate plate 3 again later, lead to one timing of high-voltage electricity
Between after click tangentially to rotate forward button in LabVIEW Electrostatic Absorption film is made tangentially to be detached from substrate plate and record tangential maximum adsorption power
F4 is tangential electrostatic adsorption force with F4-F3.It (does not need application normal direction when measuring tangential electrostatic adsorption force to preload, because applying
Restraining force can be generated when preloading measurement tangential force by having added, and influence dynamometry effect).
In the present embodiment, the absorption membrane support includes bottom plate 9, vertical plate 7, film seat 5 and three-dimensional force sensor 6；It is described vertical
The setting of plate 7 is fixed on bottom plate 9, and the film seat 5 is fixed on vertical plate 7 towards the side of substrate plate 3 by three-dimensional force sensor 6；
Vertical plate 7, film seat 5 and 3 three of substrate plate are parallel to each other, and tangential electrostatic adsorption force and normal direction are measured by three-dimensional force sensor 6
Electrostatic adsorption force；The Electrostatic Absorption film 4 is bonded in film seat 5 towards the side of substrate plate 3 by silica gel, if to replace electrostatic
Adsorbed film 4 only needs to pull off Electrostatic Absorption film 4 from film seat 5, can guarantee 4 jail of Electrostatic Absorption film in experiment
It adheres and is connected on film seat 5, can also facilitate the replacement of Electrostatic Absorption film 4, be convenient for more testing.
In the present embodiment, the cross ball screw driving device includes tangential ball-screw slide unit mould group and normal direction rolling
Ballscrew slide unit mould group；The tangential ball-screw slide unit mould group and normal direction ball-screw slide unit Mo Zu include respectively rack 17,
Lead screw 18, sliding block 10, guide rod 11, limit switch 16, shaft coupling 12 and driving motor 13；The lead screw 18 is rotationally connected with machine
Frame 17, guide rod 11 are fixed on rack 17 and parallel with lead screw 18, sliding block 10 be set on lead screw 18 and guide rod 11 and with
By being threadedly engaged between lead screw 18, the driving motor 13 is fixed on rack 17, and the output shaft of driving motor 13 passes through shaft coupling
Device 12 is connected to one end of lead screw 18, and the movement model that sliding block 10 is limited there are two limit switch 16 is fixedly mounted in rack 17
It encloses；Driving motor 13 is stepper motor, and when motion is desired, control stepper motor drives lead screw 18 and sliding block by shaft coupling 12
The absorption membrane support connected on 10 moves together, and the cross ball screw driving device further includes connecting plate 15, described to cut
Platform base 14, the rack of the normal direction ball-screw slide unit mould group are fixedly installed in the rack 17 of ball-screw slide unit mould group
17 are fixedly mounted on the sliding block 10 of tangential ball-screw slide unit mould group by the connecting plate 15；The bottom plate 9 is fixedly mounted
On the sliding block 10 of normal direction ball-screw slide unit mould group.
In the present embodiment, A-frame I 1, the bottom plate are fixedly connected between the base frame 2 and platform base 14
A-frame II 8 is fixedly connected between 9 and vertical plate 7；Stabilized structure is able to bear stronger normal force and tangential force, guarantees
The accuracy of dynamometry.
In the present embodiment, the base frame 2 is equipped with the horizontal slot for mounting substrate plate 3, sets at horizontal slot
There is the fastener for fastening substrate plate 3, substrate plate 3 is conveniently replaceable, and is conducive to carry out different base plate 3 and Electrostatic Absorption film 4
Related Experimental Study.
In the present embodiment, the matched control acquisition interface window is that control is provided in computer LabVIEW software
The button of motor speed processed and direction of motor rotation and can be collected in each dimension of real-time display three-dimensional force sensor
The interface of the size of power, the button include normal direction main story, normal direction anti-pass, tangential rotating forward, tangential reversion, stop button and control
The 0-9 grade of speed processed totally 10 buttons, clicking corresponding buttons can control revolving speed and the direction of motor；In the interface from
Three-dimensional force sensor, which starts to collect power acquisition, terminates all collected power of process can all be showed with curve graph, can also be with
Therefrom read maximum power or the power of any time in whole process.
A kind of electrostatic adsorption force force measuring method of the present embodiment, including normal direction Electrostatic Absorption force measuring method and tangential electrostatic
Adsorption capacity force measuring method；
When measuring normal direction electrostatic adsorption force, electrostatic adsorption force F1 when not leading to high-voltage electricity on Electrostatic Absorption film is first measured, then measure
Electrostatic adsorption force when logical high-voltage electricity on Electrostatic Absorption film, method particularly includes: first click the electricity on computer in the interface LabVIEW
Machine normal direction rotates forward button, makes lead screw drive the Electrostatic Absorption film on absorption membrane support along normal direction close to substrate plate and is in close contact straight
Into LabVIEW, the collected power of three-dimensional force sensor reaches the power of prescribed level on acquisition interface, clicks in LabVIEW later
Motor stop button completes the application preloaded, click the motor method on computer in the interface LabVIEW again after a certain period of time
Electrostatic Absorption film and substrate plate are detached from along normal direction to reversion button, and three-dimensional force sensing is read in the interface computer LabVIEW
The maximum normal force F1 being recorded on device；Next the motor normal direction on computer in the interface LabVIEW is clicked again rotates forward button
It is in close contact Electrostatic Absorption film and substrate plate in normal direction after power reaches as before and preloads, clicks LabVIEW
Motor stop button makes Electrostatic Absorption film stop motion in interface, leads to high-voltage electricity after a certain period of time to Electrostatic Absorption film, clicks
Normal direction reversion button is detached from Electrostatic Absorption film along normal direction and substrate plate in the interface LabVIEW, to record whole process
Middle maximum normal force F2, is normal direction electrostatic adsorption force with F2-F1；Measure normal direction electrostatic adsorption force when, when Electrostatic Absorption film with
The generation such as Van der Waals force is had after substrate plate contact, is preloaded so to apply, is in close contact it in normal direction, to reduce
The influence to dynamometry effect such as Van der Waals force and other adsorption capacities.And the energization of Electrostatic Absorption film needs certain time, above-mentioned mistake
The certain time that journey is mentioned all is identical.
When measuring tangential electrostatic adsorption force, electrostatic adsorption force F3 when not leading to high-voltage electricity on Electrostatic Absorption film is first measured, then
Electrostatic adsorption force when measuring logical high-voltage electricity on Electrostatic Absorption film, method particularly includes: it clicks on computer in the interface LabVIEW
Motor normal direction rotates forward after button first allows Electrostatic Absorption film to contact in normal direction with substrate plate and clicks stop button, after a certain period of time again
Motor in the click interface LabVIEW, which tangentially rotates forward button, makes lead screw that Electrostatic Absorption film be driven tangentially to be detached from record with substrate plate
Tangential maximum adsorption power F3 at this time, allows Electrostatic Absorption film to contact along normal direction with substrate plate again later, clicks in the interface LabVIEW
Stop button and lead to high-voltage electricity after a certain period of time to Electrostatic Absorption film, the motor clicked in the interface LabVIEW is tangentially inverted and is pressed
Button makes Electrostatic Absorption film tangentially be detached from maximum tangential adsorption capacity F4 after substrate plate record is powered, and is tangential electrostatic with F4-F3
Adsorption capacity；Do not needed when measuring tangential electrostatic adsorption force apply normal direction preload because be applied with preload after measure tangential force
When can generate restraining force, influence dynamometry effect, and tangential electrostatic adsorption force is much larger than Van der Waals force etc., therefore do not need to apply pre-
Load.And the energization of Electrostatic Absorption film needs certain time, and the certain time that the above process is mentioned all is identical.
The above force measuring method follows strictly control variable principle, and the scientific and effective interference for eliminating other power can be reasonable,
Accurately measure electrostatic adsorption force.
Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations；To the greatest extent
Pipe present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: its according to
So be possible to modify the technical solutions described in the foregoing embodiments, or to some or all of the technical features into
Row equivalent replacement；And these are modified or replaceed, various embodiments of the present invention technology that it does not separate the essence of the corresponding technical solution
The range of scheme should all cover within the scope of the claims and the description of the invention.
Claims (10)
1. a kind of electrostatic adsorption force test platform, it is characterised in that: including platform base, substrate plate, base frame, cross rolling
Ballscrew driving device, Electrostatic Absorption film and absorption membrane support and matched control acquisition interface window；The base frame
It is mounted on platform base with cross ball screw driving device, substrate plate setting is installed on base frame；The adsorbed film
Bracket is installed on cross ball screw driving device, drives absorption membrane support by the cross ball screw driving device
Tangential and normal direction along substrate plate moves；The Electrostatic Absorption film is installed on absorption membrane support and parallel with substrate plate.
2. a kind of electrostatic adsorption force test platform according to claim 1, it is characterised in that: the absorption membrane support includes
Bottom plate, vertical plate, film seat and three-dimensional force sensor；The vertical plate setting is fixed on bottom plate, and the film seat is sensed by three-dimensional force
Device is fixed on side of the vertical plate towards substrate plate.
3. a kind of electrostatic adsorption force test platform according to claim 2, it is characterised in that: the Electrostatic Absorption film passes through
Silica gel is bonded in side of the film seat towards substrate plate.
4. a kind of electrostatic adsorption force test platform according to claim 3, it is characterised in that: the cross ball-screw
Driving device includes tangential ball-screw slide unit mould group and normal direction ball-screw slide unit mould group；The tangential ball-screw slide unit mould
Group and normal direction ball-screw slide unit Mo Zu include rack, lead screw, sliding block, guide rod, limit switch, shaft coupling and driving electricity respectively
Machine；The lead screw is rotationally connected with rack, and guide rod is fixed on rack and parallel with lead screw, and slide block set is loaded on lead screw and guide rod
Pass through above and between lead screw and be threadedly engaged, the driving motor is fixed on rack, and the output shaft of driving motor passes through shaft coupling
Device is connected to one end of lead screw, and the motion range that sliding block is limited there are two limit switch is fixedly mounted in rack.
5. a kind of electrostatic adsorption force test platform according to claim 4, it is characterised in that: the cross ball-screw
Driving device further includes connecting plate, and the rack of the tangential ball-screw slide unit mould group is fixedly installed in platform base, the method
It is fixedly mounted on the sliding block of tangential ball-screw slide unit mould group to the rack of ball-screw slide unit mould group by the connecting plate；
The bottom plate is fixedly mounted on the sliding block of normal direction ball-screw slide unit mould group.
6. a kind of electrostatic adsorption force test platform according to claim 1, it is characterised in that: the base frame and platform
A-frame I is fixedly connected between pedestal.
7. a kind of electrostatic adsorption force test platform according to claim 2, it is characterised in that: between the bottom plate and vertical plate
It is fixedly connected with A-frame II.
8. a kind of electrostatic adsorption force test platform described in -7 any claims according to claim 1, it is characterised in that: described
Base frame is equipped with the horizontal slot for mounting substrate plate, and the fastening for fastening substrate plate is equipped at horizontal slot
Part.
9. a kind of electrostatic adsorption force test platform according to claim 1, it is characterised in that: the matched control acquisition
Interfaces windows be in computer LabVIEW software be provided with control motor speed and direction of motor rotation button and can
The interface of the size of collected power in each dimension of real-time display three-dimensional force sensor, the button include normal direction main story, method
To anti-pass, it is tangential rotate forward, tangential reversion, stop button and control the 0-9 of speed totally 10 buttons, clicking corresponding button can
To control revolving speed and the direction of motor；All processes of power acquisition end are collected in the interface since three-dimensional force sensor to adopt
The power collected can all be showed with curve graph, therefrom to read maximum power or the power of any time in whole process.
10. a kind of electrostatic adsorption force force measuring method, it is characterised in that: including normal direction Electrostatic Absorption force measuring method and tangential electrostatic
Adsorption capacity force measuring method；
When measuring normal direction electrostatic adsorption force, electrostatic adsorption force F1 when not leading to high-voltage electricity on Electrostatic Absorption film is first measured, then measure
Electrostatic adsorption force when logical high-voltage electricity on Electrostatic Absorption film, method particularly includes: first click the electricity on computer in the interface LabVIEW
Machine normal direction rotates forward button, makes lead screw drive the Electrostatic Absorption film on absorption membrane support along normal direction close to substrate plate and is in close contact straight
Into LabVIEW, the collected power of three-dimensional force sensor reaches the power of prescribed level on acquisition interface, clicks in LabVIEW later
Motor stop button completes the application preloaded, then click the motor normal direction reversion button on computer in the interface LabVIEW
It is detached from Electrostatic Absorption film and substrate plate along normal direction, reads in the interface computer LabVIEW and be recorded on three-dimensional force sensor
Maximum normal force F1；Next clicking the motor normal direction rotating forward button on computer in the interface LabVIEW again makes Electrostatic Absorption
Film and substrate plate are in close contact after power reaches as before and preloads in normal direction, click motor in the interface LabVIEW
Stop button makes Electrostatic Absorption film stop motion, after leading to high-voltage electricity to Electrostatic Absorption film, clicks normal direction reversion in the interface LabVIEW
Button is detached from Electrostatic Absorption film along normal direction and substrate plate, to record maximum normal force F2 in whole process, uses F2-F1
As normal direction electrostatic adsorption force；
When measuring tangential electrostatic adsorption force, electrostatic adsorption force F3 when not leading to high-voltage electricity on Electrostatic Absorption film is first measured, then measure
Electrostatic adsorption force when logical high-voltage electricity on Electrostatic Absorption film, method particularly includes: click the motor on computer in the interface LabVIEW
Normal direction rotates forward after button first allows Electrostatic Absorption film to contact in normal direction with substrate plate and clicks stop button, then clicks LabVIEW circle
Motor in face tangentially rotate forward button make lead screw drive Electrostatic Absorption film be tangentially detached from substrate plate record at this time it is tangential most
Big adsorption capacity F3, allows Electrostatic Absorption film to contact along normal direction with substrate plate again later, and the stop button in the click interface LabVIEW is simultaneously
Lead to high-voltage electricity to Electrostatic Absorption film, the motor in the click interface LabVIEW, which tangentially inverts button, takes off Electrostatic Absorption film tangentially
Maximum tangential adsorption capacity F4, is tangential electrostatic adsorption force with F4-F3 after being powered from substrate plate record.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810894782.6A CN108981998B (en) | 2018-08-08 | 2018-08-08 | Electrostatic adsorption force test platform and force measurement method thereof |
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| CN110693399A (en) * | 2019-10-09 | 2020-01-17 | 达英科(南京)设备有限公司 | Complete set of outer wall cleaning robot equipment and outer wall cleaning method thereof |
| CN111207867A (en) * | 2020-01-17 | 2020-05-29 | 西安理工大学 | Electrostatic adsorption force test platform |
| CN117053965A (en) * | 2023-08-09 | 2023-11-14 | 南京航空航天大学 | Adsorption force test and automatic reset platform and test and speed planning method |
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| CN117053965B (en) * | 2023-08-09 | 2024-01-30 | 南京航空航天大学 | Adsorption force test and automatic reset platform and test and speed planning method |
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