CN106365113B - A kind of automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials - Google Patents
A kind of automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials Download PDFInfo
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- CN106365113B CN106365113B CN201610947271.7A CN201610947271A CN106365113B CN 106365113 B CN106365113 B CN 106365113B CN 201610947271 A CN201610947271 A CN 201610947271A CN 106365113 B CN106365113 B CN 106365113B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00349—Creating layers of material on a substrate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2900/00—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems
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- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Composite Materials (AREA)
- Materials Engineering (AREA)
- Microscoopes, Condenser (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
The invention provides a kind of automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials, in stacking two-dimensional layer material, need the manually operated rotatable stage of operator and slide, a structure can only be adjusted every time, and display of operator's observation sample on visualization interface is also needed to while adjustment so as to make optimal case to next successive step, this not only takes a significant amount of time but also operated very cumbersome.The present invention can make operator while visualization interface is observed, objective table and slide are carried out to adjust simultaneously, the time of stacking block calibration is reduced, the flexibility of experiment is added, is had a good application prospect in the manufacture view based on two-dimensional layer dissimilar materials.
Description
Technical field
The invention belongs to nanosecond science and technology field, and in particular to a kind of automatic calibration type behaviour of stacking two-dimensional layer dissimilar materials
Make platform.
Background technology
In recent years, we are directed to finding the new photoelectricity mechanism for breaking through conventional semiconductors equipment limit always, and will
It is applied to detection with collecting lower energy photon.Current most promising method is then to utilize absorption of the material to light, produces heat energy,
Free electron is caused to move, so that driving current generation, i.e. photoelectric effect.It was found that the graphite material of monoatomic layer ---
The success of graphene is produced has started a new situation for our research.Moreover, current research result shows other classes
It is similar to the two-dimensional material of graphene and the hetero-junctions of graphene formation shows potential photo-thermal effect.Experiment confirms two-dimensional material
The photoelectric effect of the hetero-junctions of preparation can detect the photon of sub-bandgap, while extensive, electric tuning, wideband and hypervelocity can be realized.
But it is due to that two-dimensional layer scantling is small, general yardstick only has several to tens microns, and position has
Randomness, this brings difficulty to the preparation of two-dimensional layer hetero-junctions, and it is difficult main in terms of accurate alignment.Because just two-dimentional
Laminated hetero material when making two-dimensional layer material could be observed by means of high magnification microscope itself
Arrive.If wanted successfully by the multi-material stack of a micro-nano scale dimensions into dissimilar materials, its difficulty is very huge.Two kinds of two dimensions
Laminated hetero multi-material stack angle can directly influence the heterojunction device performance subsequently done.It is optimal heterogeneous in order to obtain
Material builds pattern, and we are accomplished by one can carry out the transfer station of angle adjustment to material at any time.The present invention be exactly in order to
Effectively solve this problem.
The content of the invention
It is an object of the invention to provide it is a kind of can at any time, while two kinds of materials are carried out with the transfer control of angle adjustments
Platform, when it is used for stacking two-dimensional layer material, operator's notice need to only be placed on the real-time dynamic change that visualization interface is shown
Process, constantly controls rotary control switch, and the two-dimensional materials different to two kinds carry out different angle adjustments, in the most short time
Inside realize that optimal hetero-junctions is built, reduce the experimental implementation time, lift conventional efficient.
The present invention proposes a kind of automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials, including operating space and aobvious
Show area；Wherein, the operating space includes：Automatic calibration intermediate plate platform and central operator's panel.
In the automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials proposed by the present invention, the automatic calibration intermediate plate
Platform includes：Rotating band, intermediate plate platform base, intermediate plate platform support and counter-jib；The intermediate plate platform support is arranged on the intermediate plate platform bottom
On seat；The intermediate plate platform base is arranged on the rotating band；The counter-jib and intermediate plate platform support connection；The balance
There is slide placement region on arm.
In the automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials proposed by the present invention, the central operator's panel is set
Put in the rotating band, it includes：Operating desk base, operating desk support frame, microscope mechanism and stage mechanism；The behaviour
Make platform support frame to be fixed on the operating desk base；The microscope mechanism and the stage mechanism are fixed on the operation
On platform support frame.
In the automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials proposed by the present invention, microscope mechanism bag
Include：Microscope rotating shaft, microscope expansion link, microscope and image controller；The microscope rotating shaft is arranged on the operating desk
On support frame；The two ends of the microscope expansion link are connected with the microscope and the microscope rotating shaft respectively；Described image
Controller and microscope connection.
In the automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials proposed by the present invention, the stage mechanism bag
Include：Objective table rotating shaft, rotatable stage, warm table, warm table console and rotary control switch；The objective table rotating shaft is fixed
On the operating desk support frame；The rotatable stage and objective table rotating shaft connection；The warm table and the heating
Platform console is connected；The rotatable stage is arranged on the top of the warm table；The warm table console is arranged on described
On operating desk base；The controlling switch is connected with the warm table console and the rotating band.
In the automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials proposed by the present invention, the viewing area is by visual
Change interface composition, it is connected with described image controller.
In the automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials proposed by the present invention, the automatic calibration intermediate plate
Platform includes two intermediate plate platform supports, and it is symmetricly set on the rotating band, the two ends of the counter-jib respectively with two
The intermediate plate platform support connection.
In the automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials proposed by the present invention, the warm table console
Including：Lifting mechanism and motor；The motor is connected with the rotary control switch；The motor is arranged on the lifting mechanism
It is interior.
In the automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials proposed by the present invention, the rotary control switch
Including：Rotating band controlling switch and warm table rotary control switch；The rotating band controlling switch is connected with the rotating band；Institute
Warm table rotary control switch is stated to be connected with the warm table console.
In the automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials proposed by the present invention, the rotating band is circle
Conveyer belt.
The automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials proposed by the present invention, in stacking two-dimensional layer material
When, it is necessary to operator carries out rotatable stage and slide manually, can only adjust every time on one side, and while adjustment
Need according to display of the sample on visualization interface to make optimal case to next successive step.
The present invention is realized to be adjusted to objective table and automatic glass slide, is reduced the time of material calibration, is added experiment
Flexibility.Had a good application prospect in the manufacture view based on two-dimensional layer dissimilar materials.
The automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials proposed by the present invention, the automatic calibration intermediate plate platform
Can by rotary control switch, adjust rotating band motion realizes that counter-jib mechanization rotates automatically, and then realize sample from
Dynamic rotation.
The automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials proposed by the present invention, the warm table console energy
Enough by rotary control switch, the work of micromachine is adjusted, and then drives warm table mechanization to rotate automatically, sample is finally realized
The automatic rotation of product.
The automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials proposed by the present invention, when automatically rotation intermediate plate platform and
The configuration of rotary heating platform is before at one piece, operator only needs manually operated rotary control switch, stacking block, operator's sight
Only need to concern visualization interface and show that result can make sample Adjusted Option, real-time stacking adjustment can be carried out, improved
Operating efficiency, reduces experimental complexities.
The present invention mainly realizes the motorized rotational of counter-jib and warm table, using conveyer belt as a rotating band,
Realizing that switch control rotating band is rotated causes the sample in counter-jib center to rotate, and being built into one using micromachine has expansion link
Inside the lifting mechanism being made, realize that switch control micromachine is rotated and cause the objective table rotation of warm table top to obtain sample
Rotation.When two pieces component is combined at one piece, it is possible at the same time by visual while mechanical adjustment two pieces component operation
Change interface ceaselessly to compare two materials, when reaching the angle that operator wants, just can carry out next step operation.
Brief description of the drawings
Fig. 1 is the functional framework figure of the automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials of the present invention.
Fig. 2 is the side view of the automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials of the present invention.
Fig. 3 for stacking two-dimensional layer dissimilar materials of the present invention automatic calibration type operating desk in rotating band structural representation
Figure.
Fig. 4 a for stacking two-dimensional layer dissimilar materials of the present invention automatic calibration type operating desk in warm table console knot
Structure schematic diagram.
Fig. 4 b show for the structure of lifting mechanism in the automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials of the present invention
It is intended to.
Fig. 5-11 is that stacking two-dimensional layer materials process principle of the present invention shows figure.
Embodiment
With reference to specific examples below and accompanying drawing, the invention will be described in further detail.Implement process, the bar of the present invention
Part, experimental method etc., are the universal knowledege and common knowledge of this area in addition to the following content specially referred to, the present invention
Content is not particularly limited.
As shown in Figures 1 to 4, the automatic calibration type operating desk of the stacking two-dimensional layer dissimilar materials in the present embodiment, bag
Include operating space A and viewing area B.
In the present embodiment, operating space A includes：Automatic calibration intermediate plate platform and central operator's panel.
In the present embodiment, automatic calibration intermediate plate platform includes：Rotating band 14, intermediate plate platform base 13, intermediate plate platform support 9 and balance
Arm 12；Intermediate plate platform support 9 is arranged on intermediate plate platform base 13；Intermediate plate platform base 13 is arranged on rotating band 14；The He of counter-jib 12
Intermediate plate platform support 9 is connected；There is slide placement region 121 on counter-jib 12.
In the present embodiment, central operator's panel is arranged in rotating band 14, and it includes：Operating desk base 15, operating desk support
Frame 1, microscope mechanism and stage mechanism；Operating desk support frame 1 is fixed on operating desk base 15；Microscope mechanism and loading
Platform mechanism is fixed on operating desk support frame 1.
In the present embodiment, microscope mechanism includes：Microscope rotating shaft 7, microscope expansion link 17, microscope 3 and image control
Device 2 processed；Microscope rotating shaft 7 is arranged on operating desk support frame 1；The two ends of microscope expansion link 17 respectively with microscope 3 and aobvious
Micro mirror rotating shaft 7 is connected；Image controller 2 and microscope 3 are connected.
In the present embodiment, stage mechanism includes：Objective table rotating shaft 8, rotatable stage 4, warm table 5, warm table control
Platform 6 and rotary control switch；Objective table rotating shaft 8 is fixed on operating desk support frame 1；Rotatable stage 4 and objective table rotating shaft 8 connect
Connect；Warm table 5 is connected with warm table console 6；Rotatable stage 4 is arranged on the top of warm table 5；Warm table console 6 is set
Put on operating desk base 15；Controlling switch is connected with warm table console 6 and rotating band 14.
In the present embodiment, viewing area B is made up of visualization interface 16, and it is connected with image controller 2；Visualization interface 16
Including display, Projection Display is carried out to two-dimensional layer material by image controller 2.
In the present embodiment, automatic calibration intermediate plate platform includes two intermediate plate platform supports 9, and it is symmetricly set on rotating band 14,
The two ends of counter-jib 12 are connected with two intermediate plate platform supports 9 respectively.
In the present embodiment, warm table console 6 includes：Lifting mechanism 61 and motor 62；Motor 62 and rotary control switch
Connection；Motor 62 is arranged in lifting mechanism 61.
In the present embodiment, because demand is moved in the fine setting of experiment, lifting mechanism is connected about 61 by micrometer caliper measuring staff 611
Connect, can partly reach the rise and fall purpose of lifting mechanism 61 on lifting mechanism by rotating.
In the present embodiment, rotary control switch includes：Rotating band controlling switch 10 and warm table rotary control switch 11；Rotation
Turn band controlling switch 10 to be connected with rotating band 14；Warm table rotary control switch 11 is connected with warm table console 6.
In the present embodiment, rotating band 14 is circular conveyer belt.
In the present embodiment, rotatable stage 4 can be manually adjusted to the angle of specimen material, by objective table rotating shaft 8
Control, can be fixed on operating desk support frame 1 and material angle adjustment is carried out in stacking block.Warm table console 6 can
So that warm table 5 and rotatable stage 4 move up and down and realize 360 degree of rotations by warm table rotary control switch 11.When
When adjusting rotating band controlling switch 10 and warm table rotary control switch 11 simultaneously, automatic calibration intermediate plate platform and warm table 5 can be same
When rotate, operator now can according to visualization interface 16 show result adjust scheme, real-time stacking tune can be carried out
It is whole, operating efficiency is improved, experimental complexities are reduced.There is slide placement location on counter-jib 12, need carrying when using
Polymer is affixed on slide.Rotating band 14, is controlled by rotating band controlling switch 10, is acted on slide is adjusted during sample angle
It is huge.Visualization interface 16, can observe sample and rotary sample process by it.
Need to change the sample on rotatable stage 4, microscope rotating shaft 7 and microscope in the present embodiment, during stacking block
Microscope 3 can be moved to the place for not influenceing operator to change sample by expansion link 17, it is to avoid the presence influence of microscope 3 is more
The time that conversion materials are spent.Rotating band 14 is made up of conventional conveyor.Warm table console 6 is by micromachine 61 and lifting mechanism
62 are constituted, and the rotation moved up and down with warm table of warm table 5 can be achieved.When operator carries out stacking calibration, control is only needed
Two rotary control switches just can carry out angle change by simultaneously to two-dimensional layer material in two, according to visualization interface 16
Display makes optimal hetero-junctions and builds choice.
The Principle of Process of stacking two-dimensional layer material of the present invention is：Two-dimensional layer material generally can all be made in one piece of substrate it
On, make two-dimensional layer dissimilar materials be the two-dimensional layer material on one piece of substrate is transferred on another piece of substrate, it is necessary to
It is noted that needing to carry out position correction with the material on second piece of substrate during material for transfer, finally two multi-material stacks are risen
Come.The present invention is that major experimental step is as follows in order to simplify the difficulty of calibration, reduce the time of calibration：
As shown in Fig. 5 to Figure 11, arrow meaning is transfer step order, and a is material to be transferred, and b is substrate, first
Step, sample is placed on rotatable stage.Second step, rotatable stage is risen, and is to rise warm table, warm table band in fact
Dynamic rotatable stage rises.3rd, after the polymer d on material a to be transferred and slide c is fully contacted, warm table adds
Heat.4th, decline it after rotatable stage temperature reaches necessarily, material a to be transferred can be transferred to polymerization by this step
On thing d.5th step, gets out target material e, and places it on rotatable stage, and the sample on the polymer d of top passes through
Microscope, warm table console, rotatable stage, the combination of rotation intermediate plate platform carry out angle adjustments to two materials, have calibrated
Into rear rising objective table.6th step, after material a to be transferred and target material e is contacted, warm table heating.7th step, removes load
The dissimilar materials of material a to be transferred and target material e formation is obtained after slide c and polymer d.
The protection content of the present invention is not limited to above example.Under the spirit and scope without departing substantially from inventive concept, this
Art personnel it is conceivable that change and advantage be all included in the present invention, and using appended claims as protect
Protect scope.
Claims (5)
1. a kind of automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials, it is characterised in that including operating space (A) and aobvious
Show area (B)；Wherein,
The operating space (A) includes：Automatic calibration intermediate plate platform and central operator's panel；
The automatic calibration intermediate plate platform includes：Rotating band (14), intermediate plate platform base (13), intermediate plate platform support (9) and counter-jib
(12)；The intermediate plate platform support (9) is arranged on the intermediate plate platform base (13)；The intermediate plate platform base (13) is arranged on described
On rotating band (14)；The counter-jib (12) and the intermediate plate platform support (9) connection；There is slide to put on the counter-jib (12)
Put region (121)；
The central operator's panel is arranged in the rotating band (14), and it includes：Operating desk base (15), operating desk support frame
(1), microscope mechanism and stage mechanism；The operating desk support frame (1) is fixed on the operating desk base (15)；It is described
Microscope mechanism and the stage mechanism are fixed on the operating desk support frame (1)；
The microscope mechanism includes：Microscope rotating shaft (7), microscope expansion link (17), microscope (3) and image controller
(2)；The microscope rotating shaft (7) is arranged on the operating desk support frame (1)；The two ends of the microscope expansion link (17) point
It is not connected with the microscope (3) and the microscope rotating shaft (7)；Described image controller (2) and the microscope (3) are even
Connect；
The stage mechanism includes：Objective table rotating shaft (8), rotatable stage (4), warm table (5), warm table console (6)
And rotary control switch；The objective table rotating shaft (8) is fixed on the operating desk support frame (1)；The rotatable stage (4)
With the objective table rotating shaft (8) connection；The warm table (5) is connected with the warm table console (6)；The rotatable stage
(4) it is arranged on the top of the warm table (5)；The warm table console (6) is arranged on the operating desk base (15)；Institute
Controlling switch is stated to be connected with the warm table console (6) and the rotating band (14)；
The viewing area (B) is made up of visualization interface (16), and it is connected with described image controller (2).
2. the automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials as claimed in claim 1, it is characterised in that described
Automatic calibration intermediate plate platform includes two intermediate plate platform supports (9), and it is symmetricly set on the rotating band (14), the balance
The two ends of arm (12) are connected with two intermediate plate platform supports (9) respectively.
3. the automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials as claimed in claim 1, it is characterised in that described
Warm table console (6) includes：Lifting mechanism (61) and motor (62)；The motor (62) connects with the rotary control switch
Connect；The motor (62) is arranged in the lifting mechanism (61).
4. the automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials as claimed in claim 1, it is characterised in that described
Rotary control switch includes：Rotating band controlling switch (10) and warm table rotary control switch (11)；The rotating band control is opened
(10) are closed to be connected with the rotating band (14)；The warm table rotary control switch (11) connects with the warm table console (6)
Connect.
5. the automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials as claimed in claim 1, it is characterised in that described
Rotating band (14) is circular conveyer belt.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610947271.7A CN106365113B (en) | 2016-10-26 | 2016-10-26 | A kind of automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610947271.7A CN106365113B (en) | 2016-10-26 | 2016-10-26 | A kind of automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials |
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| CN106365113B true CN106365113B (en) | 2017-10-31 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108303057A (en) * | 2018-02-06 | 2018-07-20 | 内蒙古自治区计量测试研究院 | A kind of cover protectometer calibrating installation |
| CN109065735A (en) * | 2018-06-19 | 2018-12-21 | 广东工业大学 | A kind of method for accurately building of two-dimensional material Robert Van de Walle hetero-junctions |
| CN109052315B (en) * | 2018-08-01 | 2021-07-23 | 南方科技大学 | Two-dimensional material transfer system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH0733253A (en) * | 1993-07-23 | 1995-02-03 | Daifuku Co Ltd | Pallet stacking device |
| CN1136160C (en) * | 2000-06-02 | 2004-01-28 | 中国科学院上海冶金研究所 | Glass/silicon binding device used for mking micro mechanical parts and its application |
| CN100372088C (en) * | 2006-02-27 | 2008-02-27 | 哈尔滨工业大学 | Automatic bonding method of MEMS high temp pressure sensor |
| TWI478271B (en) * | 2007-08-10 | 2015-03-21 | 尼康股份有限公司 | Substrate bonding device and substrate bonding method |
| CN101691203B (en) * | 2009-09-17 | 2012-07-04 | 大连理工大学 | Method and device for alignment and assembly of glass micro nanofluidic chip |
| JP2011091230A (en) * | 2009-10-23 | 2011-05-06 | Ushio Inc | Workpiece sticking device |
| CN206255838U (en) * | 2016-10-26 | 2017-06-16 | 华东师范大学 | A kind of automatic calibration type operating desk of stacking two-dimensional layer dissimilar materials |
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