CN100354621C - Laser divergence angle measuring instrument and measuring method - Google Patents
Laser divergence angle measuring instrument and measuring method Download PDFInfo
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- CN100354621C CN100354621C CNB200310123408XA CN200310123408A CN100354621C CN 100354621 C CN100354621 C CN 100354621C CN B200310123408X A CNB200310123408X A CN B200310123408XA CN 200310123408 A CN200310123408 A CN 200310123408A CN 100354621 C CN100354621 C CN 100354621C
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- divergence angle
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Abstract
The present invention relates to a laser divergence angle measuring instrument which comprises a rotating fine-tuning frame 1, a two-dimensional fine-tuning frame, a column-shaped matching piece, a three-dimensional fine-tuning frame, a cone pulling optical fiber, a constant current power supply and an optical power meter, wherein the rotating fine-tuning frame can be finely tuned by rotation and is arranged on a base; the two-dimensional fine-tuning frame is fixed on the rotating fine-tuning frame and can be finely tuned in the direction of an X shaft and a Y shaft; the column-shaped matching piece is fixed on the two-dimensional fine-tuning frame, and a circular groove is arranged on the column-shaped matching piece; the three-dimensional fine-tuning frame is arranged on the base; the cone pulling optical fiber is fixed on the three-dimensional fine-tuning frame; the constant current power supply is arranged on the base and is connected with a laser device pin; the optical power meter is connected with the optical fibers and is arranged on the base.
Description
Affiliated technical field
The invention belongs to the optoelectronic device manufacturing process technology field, more specifically say so a kind of laser divergence angle measuring instrument and measuring method thereof.
Background technology
With in the preparation process of semiconductor laser, the performance parameter of core component chip of laser has directly determined the performance of entire device and module in optical fiber communication.
The outgoing beam of chip of laser has certain angle of divergence, and at X, different angles is arranged on the Y direction.Be to improve the coupling efficiency of laser beam and optical fiber, placement one lens on the outgoing beam optical axis usually, according to the different mining of laser beam and technological requirement with sphere or non-spherical lens.Its angle of divergence of chip of laser for different batches is inconsistent, and the size of lens and parameter are all fixed.The waist spot is less, the new light beam of concentration of energy for the outgoing beam that makes the different angles of divergence all can reconstruct by identical lens, needs to adjust the distance of chip and lens.With the TO encapsulated laser is example, just adjusts the position of chip on heat sink.Light beam after before TO laser instrument block, can't detecting scioptics, and can't adjust the relative position of chip of laser and lens after blocking a shot.Therefore must at first record the angle of divergence characteristic of chip, with this as its choice of location foundation on heat sink.
The method of Laser Measurement device far-field divergence angle mainly contains photodetector mensuration and CCD photographic process at present.
Photodetector mensuration: fixed laser, detector is placed at primary importance place at laser beam, and detector is moved along the circular arc that with the laser instrument exiting surface is the center of circle, in moving process, measure the relative light intensity value of diverse location by detector current, write down this position simultaneously, till detector does not have response; Along vertical this in-plane rotary laser certain angle, repeat previous step; Rotary laser rotates an angle of 90 degrees until laser instrument again.Behind computer processing data, can draw laser instrument X, Y directional divergence angle.
Said method can't be measured the too little laser beam of bore, because detector test surface and laser facula comparability are intended, the number of times of detector traverse measurement just seldom causes the method to lose efficacy.
The CCD photographic process: fixed laser, place ccd sensor perpendicular to optical axis direction, microcomputer pick-up transducers output signal can obtain the strong and weak relatively of laser instrument light field according to each picture element induced potential, draws the angle of divergence by the light field halfwidth again.
Because the angle of divergence that MICROCOMPUTER PROCESSING obtains directly is decided by ccd sensor, therefore require CCD that higher linear response degree is arranged.Practice shows that the linear response degree of CCD has stronger wavelength selectivity, and the method requires very high for ccd sensor, and precision is low.
Summary of the invention
Low in order to solve existing divergence angle measurement method precision, the shortcoming that measurement range is narrow the objective of the invention is to, and a kind of divergence angle measurement instrument and measuring method are provided, and this measuring instrument adopts brand-new physical construction, can measure the very little laser facula of bore; For all very high measuring accuracy of the laser instrument of various wavelength.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of laser divergence angle measuring instrument of the present invention is characterized in that, comprising:
One rotary fine adjustment frame, the rotatable fine setting of this rotary fine adjustment frame, this rotary fine adjustment frame is installed on the base;
One two-dimentional micropositioning stage is fixed on the rotary fine adjustment frame, and this two dimension micropositioning stage can be in X, Y direction fine setting;
One column type counterpart, this column type counterpart is fixed on the two-dimentional micropositioning stage, has one first circular groove on this column type counterpart;
One three-dimensional micropositioning stage, this three-dimensional micropositioning stage is installed on the base;
One tapered fiber is fixed on the three-dimensional micropositioning stage;
One constant-current supply, this constant-current supply is installed on the base, and this constant-current supply links to each other with the laser instrument pin;
One light power meter, this light power meter links to each other with optical fiber, and this light power meter is installed on the base.
Wherein in first circular groove of column type counterpart, snap in and be combined with a circular clamp, there is one second circular groove the centre of this circular clamp, one square groove is arranged below second circular groove, this square groove is used for the chip of laser base to be fixed, and has a circular hole at the center of second circular groove;
Wherein the diameter of the circular hole at the second circular groove center on the anchor clamps is less than the diameter of second circular groove and greater than the base lead pin pitch.
A kind of laser divergence angle measuring method of the present invention is characterized in that, comprises the steps:
1) adjusts two-dimentional micropositioning stage, make the end laser instrument exiting surface convergence two dimension micropositioning stage to be measured center of circle;
Whether 2) rotary fine adjustment frame is positioned at the micropositioning stage center of circle with microscopic examination end laser instrument to be measured exiting surface, and repeating step 1 to laser instrument exiting surface is in the micropositioning stage center of circle;
3) power on to laser instrument, regulate just light power meter reading maximum of three-dimensional micropositioning stage, the light intensity maximum that promptly enters the end of probe optical fiber head;
4) fine tuning rotary fine adjustment frame, and record the same intervals anglec of rotation and corresponding luminous power reading are till light power meter reading no change;
5) adjust rotary fine adjustment frame, repeating step 4 in the other direction;
6) anchor clamps are rotated an angle, repeating step 4,5 to anchor clamps rotation surpasses 90 degree;
7) send Computer Processing with data, can obtain complete optical field distribution and X, Y directional divergence angle numerical value.
Wherein end of probe maintains static in measuring process.
Wherein end to be measured is transferred no translation certainly in measuring process.
The invention has the beneficial effects as follows: adopt optical fiber head to survey distribution of light intensity, investigative range is little, can measure the very little laser facula of bore; Light intensity signal input optical power meter can be provided with the light power meter parameter to adapt to the measurement of different wave length light field; In measuring process, only there is the optical fiber of transferring certainly of laser instrument not move, improved measuring accuracy greatly.
Description of drawings:
For further specifying technology contents of the present invention, the present invention is described in further detail below in conjunction with drawings and Examples, wherein:
Fig. 1 is the structural representation of a kind of divergence angle measurement instrument of the present invention.
Fig. 2 is a kind of divergence angle measurement instrument of the present invention anchor clamps front view (FV)s.
Fig. 3 is a kind of divergence angle measurement instrument of the present invention anchor clamps cross sectional side views.
Fig. 4 is a kind of divergence angle measurement instrument of the present invention column type counterpart front view (FV).
Fig. 5 is a kind of divergence angle measurement instrument of the present invention column type counterpart vertical view.
Embodiment:
See also Fig. 1, Fig. 2, Fig. 3, Fig. 4 and shown in Figure 5, a kind of laser divergence angle measuring instrument of the present invention, comprising:
One rotary fine adjustment frame 1, this rotary fine adjustment frame 1 rotatable fine setting, this rotary fine adjustment frame 1 is installed in (among Fig. 1) on the base 10;
One two-dimentional micropositioning stage 2 is fixed on the rotary fine adjustment frame 1, and this two dimension micropositioning stage 2 can be at X, the Y direction fine setting;
One column type counterpart 3, this column type counterpart 3 are fixed on the two-dimentional micropositioning stage 2, have one first circular groove 31 (among Fig. 4, Fig. 5) on this column type counterpart 3; Wherein in the circular groove 31 of column type counterpart 3, snap in and be combined with a circular clamp 5, there is one second circular groove 51 (among Fig. 2, Fig. 3) centre of this circular clamp 5, one square groove 52 is arranged below second circular groove 51, it is fixing that this square groove 52 is used for chip of laser base 4, has a circular hole 53 at the center of second circular groove 51; Wherein the diameter of the circular hole 53 at second circular groove, 51 centers on the anchor clamps 5 is less than the diameter of second circular groove 51 and greater than base 4 lead pin pitchs.
One three-dimensional micropositioning stage 7, this three-dimensional micropositioning stage 7 is installed on the base 10;
One tapered fiber 6 is fixed on the three-dimensional micropositioning stage 7;
One constant-current supply 8 (constant-current supply 8 is a prior art), this constant-current supply 8 is installed on the base 10, and this constant-current supply 8 links to each other with the laser instrument pin;
One light power meter 9 (light power meter 9 is a prior art), this light power meter 9 links to each other with optical fiber 6, and this light power meter 9 is installed on the base 10.
A kind of laser divergence angle measuring method of the present invention comprises the steps:
1) adjusts micropositioning stage 2, make end laser instrument exiting surface convergence micropositioning stage to be measured 1 center of circle;
2) the rotary fine adjustment frame 1, whether is positioned at micropositioning stage 1 center of circle with microscopic examination end laser instrument to be measured exiting surface, and repeating step 1 to laser instrument exiting surface is in micropositioning stage 1 center of circle;
3) power on to laser instrument, regulate micropositioning stage 7 and make light power meter reading maximum, promptly enter the light intensity maximum of end of probe optical fiber head;
4) the fine tuning micropositioning stage 1, and record the same intervals anglec of rotation and corresponding luminous power reading are till light power meter reading no change;
5) adjust micropositioning stage 1, repeating step 4 in the other direction;
6) with anchor clamps 5 rotations one angle, repeating step 4,5 to anchor clamps 5 rotations surpass 90 degree;
7) send Computer Processing with data, can obtain complete optical field distribution and X, Y directional divergence angle numerical value.
Wherein end of probe maintains static in measuring process.
Wherein end to be measured is transferred no translation certainly in measuring process.
In the embodiment of Fig. 2, Fig. 3, Fig. 4, Fig. 5, counterpart 3 and anchor clamps 5 are stainless steel material.Adopt Machining Technology, obtain a high 5mm, the right cylinder of diameter 30mm, i.e. laser instrument anchor clamps 5 blanks.Engrave angle at this right cylinder front surface, its effect is the rotational angle that can determine anchor clamps 5 in measuring process in view of the above; At the circular groove 51 of the dark 1.5mm of this right cylinder front surface centre drill one diameter 5.6mm, its effect provides the fixed position of laser base 4; The heart bores the circular hole 53 of a diameter 3mm more therein, and its effect is to make laser base 4 pins cause anchor clamps 5 back sides; Mill out the square groove 52 of a dark 1.5mm in circular groove 51 bottoms, its size is by wedge and fixed screw decision thereof; At square groove centre drill one screw with the stationary wedge thing.Adopt Machining Technology to obtain a length and be the rectangular parallelepiped of the wide 10mm of the high 60mm of 36mm, i.e. column type counterpart 3 blanks.The protrusion position of former and later two fixed screws is arranged in its bottom, and its effect is that column type counterpart 3 is fixed on the two-dimentional micropositioning stage 2; Milling an internal diameter at its top is the semicircle groove 32 of the dark 5mm of 30mm, and anchor clamps 5 snap in this groove and free to rotate; On counterpart 3, add one again and guarantee the stable of anchor clamps 5 with its fixture that coincide.A breach 31 greater than anchor clamps 5 back side circular holes 53 is milled at counterpart 3 back sides.Its objective is and to make the laser base pin cause counterpart 3 back sides.
In the embodiment in figure 1, the laser base 4 of finishing paster is fixed on anchor clamps 5 central authorities; Anchor clamps 5 snap in counterpart 3 grooves; Guarantee that the laser instrument pin does not touch anchor clamps 3 or counterpart 5.On rotary fine adjustment frame 1, fix two-dimentional micropositioning stage 2; Fixing column type counterpart 3 on micropositioning stage 2; Tapered fiber 6 is fixed on the three-dimensional micropositioning stage 7 and send light power meter 9 to detect.Constant-current supply 8 can provide from zero to 50 milliamperes of electric currents.Its output terminal is connected with the laser instrument pin.Light power meter 9 can provide various semiconductor laser wavelength measurement ranges.
Claims (6)
1, a kind of laser divergence angle measuring instrument is characterized in that, comprising:
One rotary fine adjustment frame, the rotatable fine setting of this rotary fine adjustment frame, this rotary fine adjustment frame is installed on the base;
One two-dimentional micropositioning stage is fixed on the rotary fine adjustment frame, and this two dimension micropositioning stage can be in X, Y direction fine setting;
One column type counterpart, this column type counterpart is fixed on the two-dimentional micropositioning stage, has one first circular groove on this column type counterpart;
One three-dimensional micropositioning stage, this three-dimensional micropositioning stage is installed on the base;
One tapered fiber is fixed on the three-dimensional micropositioning stage;
One constant-current supply, this constant-current supply is installed on the base, and this constant-current supply links to each other with the laser instrument pin;
One light power meter, this light power meter links to each other with optical fiber, and this light power meter is installed on the base.
2, laser divergence angle measuring instrument as claimed in claim 1, it is characterized in that, wherein in first circular groove of column type counterpart, snap in and be combined with a circular clamp, there is one second circular groove the centre of this circular clamp, one square groove is arranged below second circular groove, this square groove is used for the chip of laser base to be fixed, and has a circular hole at the center of second circular groove;
3, laser divergence angle measuring instrument as claimed in claim 2 is characterized in that, wherein the diameter of the circular hole at the second circular groove center on the anchor clamps is less than the diameter of second circular groove and greater than the base lead pin pitch.
4, a kind of laser divergence angle measuring method is characterized in that, comprises the steps:
1) adjusts two-dimentional micropositioning stage, make the end laser instrument exiting surface convergence micropositioning stage to be measured center of circle;
Whether 2) rotary fine adjustment frame is positioned at the micropositioning stage center of circle with microscopic examination end laser instrument to be measured exiting surface, and repeating step 1 to laser instrument exiting surface is in the micropositioning stage center of circle;
3) power on to laser instrument, regulate three-dimensional micropositioning stage and make light power meter reading maximum, promptly enter the light intensity maximum of end of probe optical fiber head;
4) fine tuning micropositioning stage, and record the same intervals anglec of rotation and corresponding luminous power reading are till light power meter reading no change;
5) adjust micropositioning stage, repeating step 4 in the other direction;
6) anchor clamps are rotated an angle, repeating step 4,5 to anchor clamps rotation surpasses 90 degree;
7) send Computer Processing with data, can obtain complete optical field distribution and X, Y directional divergence angle numerical value.
5, laser divergence angle measuring method as claimed in claim 4 is characterized in that wherein end of probe maintains static in measuring process.
6, laser divergence angle measuring method as claimed in claim 4 is characterized in that, wherein end to be measured is transferred no translation certainly in measuring process.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200310123408XA CN100354621C (en) | 2003-12-26 | 2003-12-26 | Laser divergence angle measuring instrument and measuring method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200310123408XA CN100354621C (en) | 2003-12-26 | 2003-12-26 | Laser divergence angle measuring instrument and measuring method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1635354A CN1635354A (en) | 2005-07-06 |
| CN100354621C true CN100354621C (en) | 2007-12-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB200310123408XA Expired - Fee Related CN100354621C (en) | 2003-12-26 | 2003-12-26 | Laser divergence angle measuring instrument and measuring method |
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Families Citing this family (15)
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|---|---|---|---|---|
| CN100370223C (en) * | 2005-12-21 | 2008-02-20 | 哈尔滨工业大学 | Double hole type measural apparatus for scattering angle of laser beam |
| CN100429478C (en) * | 2007-01-15 | 2008-10-29 | 哈尔滨工业大学 | Microlen array based laser beam divegence angle testing method |
| CN102539125B (en) * | 2011-04-21 | 2014-01-08 | 北京国科世纪激光技术有限公司 | Device for measuring vertical divergence angle of high-power laser diode array |
| CN102539116B (en) * | 2011-04-21 | 2014-03-26 | 北京国科世纪激光技术有限公司 | Method and device for measuring vertical divergence angle of high-power laser diode array |
| CN102507159B (en) * | 2011-11-28 | 2015-05-20 | 成都优博创技术有限公司 | Light emission end focal length measurement positioning device and measurement method thereof |
| CN103645471B (en) * | 2013-12-20 | 2016-01-06 | 中国科学院合肥物质科学研究院 | Laser radar detection light source divergence angle measurement apparatus and method |
| CN104764591B (en) * | 2015-03-23 | 2016-02-24 | 深圳市创鑫激光股份有限公司 | A kind of measuring method of laser beam divergence and device |
| CN105606039B (en) * | 2015-12-22 | 2018-10-16 | 中国科学院长春光学精密机械与物理研究所 | A kind of method and device of precise measuring source collimation |
| CN107727362B (en) * | 2017-09-27 | 2023-10-31 | 南京春辉科技实业有限公司 | Detection device and detection method for deviation value of emergent light spots of optical fiber bundle |
| CN108548656B (en) * | 2018-03-29 | 2021-08-03 | 昂纳信息技术（深圳）有限公司 | Test device and test system for TO-CAN laser |
| CN109186757A (en) * | 2018-07-23 | 2019-01-11 | 江苏天元激光科技有限公司 | A kind of semiconductor laser beam quality test device and its test method |
| CN109974975B (en) * | 2019-04-02 | 2020-10-16 | 武汉锐科光纤激光技术股份有限公司 | Device for index test of pulse fiber laser |
| CN112945521B (en) * | 2021-01-27 | 2023-06-20 | 广东天讯达资讯科技股份有限公司 | Laser divergence angle testing device based on camera two-point testing method |
| CN113029527B (en) * | 2021-03-25 | 2024-04-16 | 苏州阿格斯医疗技术有限公司 | Measuring device and measuring method for lateral optical fiber lens |
| CN114166097B (en) * | 2021-10-28 | 2023-12-08 | 中国科学院合肥物质科学研究院 | Real-time beam angle measurement system using short optical fiber |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85205319U (en) * | 1985-11-30 | 1987-11-07 | 陕西师范大学 | Laser divergance angle measuring meter |
| JPH11254158A (en) * | 1998-03-09 | 1999-09-21 | Mitsubishi Electric Corp | Measuring instrument for widening angle of laser beam and adjusting device for laser beam incidence in laser device |
| CN1407324A (en) * | 2001-08-20 | 2003-04-02 | 中国科学院光电技术研究所 | Laser beam divergent angle test method |
-
2003
- 2003-12-26 CN CNB200310123408XA patent/CN100354621C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85205319U (en) * | 1985-11-30 | 1987-11-07 | 陕西师范大学 | Laser divergance angle measuring meter |
| JPH11254158A (en) * | 1998-03-09 | 1999-09-21 | Mitsubishi Electric Corp | Measuring instrument for widening angle of laser beam and adjusting device for laser beam incidence in laser device |
| CN1407324A (en) * | 2001-08-20 | 2003-04-02 | 中国科学院光电技术研究所 | Laser beam divergent angle test method |
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| CN1635354A (en) | 2005-07-06 |
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