CN1407324A - Laser beam divergence angle testing method - Google Patents
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- CN1407324A CN1407324A CN 01108756 CN01108756A CN1407324A CN 1407324 A CN1407324 A CN 1407324A CN 01108756 CN01108756 CN 01108756 CN 01108756 A CN01108756 A CN 01108756A CN 1407324 A CN1407324 A CN 1407324A
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- 238000012545 processing Methods 0.000 abstract description 5
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Abstract
The invention discloses a method for quickly, simply and conveniently measuring a divergence angle of a laser beam. The invention adopts a measuring device consisting of a detected laser, a diaphragm, a standard lens, a CCD camera and a computer, wherein the CCD camera is used for receiving a signal of a focusing light spot formed by a light beam of the laser on a back focal plane of the standard lens, and the computer is used for processing the light spot signal output by the CCD camera and calculating the far field divergence angle 2 theta of the laser beam emitted by the laser. The method provided by the invention is simple to operate, can simultaneously measure the beam divergence angles of the laser in different directions, and is particularly suitable for measuring the laser beams with small calibers, small divergence angles and non-radial symmetry.
Description
The present invention relates to a kind of method of testing laser beam divergence angle.
The size of the beam quality of laser, power directly influences the beam quality decisive role sometimes of the application, particularly laser of laser instrument.The evaluation laser beam quality index of system the most is a beam parameter product, i.e. the product of the beam diameter of laser and its far-field divergence angle.Wherein, the beam divergence angle of laser is a kind of important indicator of estimating laser instrument, decision laser application field.For example, beam divergence angle is big and itself exist the semiconductor laser of astigmatism generally only to be used for optical read/write head, optical communication etc.; And little solid, the gas laser of beam divergence angle then is widely used in scientific experiment, optical interference detection, free space optical communication, laser ranging, laser material processing and laser surgey.Therefore, measuring laser beam far-field divergence angle range of application is bigger.
The method of measuring laser beam far-field divergence angle mainly comprises the photodiode detector mensuration at present:
Place one dimension at the primary importance place of laser beam and move adjusting bracket, place photodiode detector on the adjusting bracket, detector is connected to the light intensity display; Detector is moved along a certain direction (for example x direction of principal axis), and the light intensity value when measuring diverse location in moving process (relative value) is noted the position coordinates of this point, simultaneously till not having response to detector; Obtain the curve of light distribution of laser beam thus, and then obtain the diameter d of laser beam spot in this direction
1Detector is placed the second place place of laser beam, in like manner measure diameter d at this position laser facula
2And according to formula
Obtain the far-field divergence angle θ (wherein, l is the spacing between the primary importance and the second place) of light beam.
There is following defective in said method: 1, can't measure the too little laser beam of bore.Because the laser beam bore is too little, detector along the number of times of a certain direction (for example x direction of principal axis) traverse measurement laser facula just seldom causes and can't use said method to measure.2, measuring method is loaded down with trivial details.Because this method at every turn can only measuring laser beam in the angle of divergence of a certain direction.If want the angle of divergence of measuring laser beam, then must be again repeat above-mentioned measurement, computation process along the other direction of laser beam at other direction (for example y direction of principal axis).And this method is very strict to the movement requirement of direction of measurement, if the angle of divergence direction of the motion track of detector in measuring process and the laser beam of surveying is not at same straight line, can cause measurement result to exist than mistake, especially, all the more so for having rotational symmetric laser beam.
The objective of the invention is to overcome the deficiencies in the prior art and a kind of method of quick, the easy measuring laser beam angle of divergence is provided.
Purpose of the present invention can realize by following technical measures:
---form measurement mechanism with tested laser instrument, diaphragm, standard lens, CCD camera and computing machine;
---the light beam that makes laser instrument converges on the back focal plane of standard lens through passing through standard lens behind the diaphragm again;
---adjust the CCD camera, the photosensitive target surface of ccd detector is overlapped with the back focal plane of standard lens;
---the output of CCD camera is connected to computing machine;
---the theoretical big or small δ of the focal beam spot of light beam on the standard lens focal plane by the COMPUTER CALCULATION laser instrument;
---receive the signal of the light beam of laser instrument at the focal beam spot of the back focal plane place of standard lens formation by the CCD camera;
---by the hot spot signal of Computer Processing CCD camera output, obtain the big or small φ of this focal beam spot;
---go out far-field divergence angle 2 θ of the laser beam that laser instrument sends by COMPUTER CALCULATION.
The present invention has following advantage with respect to prior art: because method provided by the invention is only carried out one-shot measurement to hot spot, therefore no matter its spot size, do not influence measurement result, so can measure the beam divergence angle of large and small bore simultaneously, relative prior art especially is fit to measure the laser beam of high-quality small-bore, small divergence angle.Simultaneously, owing to only need at place's station acquisition hot spot, even therefore the measured laser light beam is non-radial symmetry light beam, its measurement result is correct too, so this method especially is fit to measure the optical parameter of non-radial symmetry laser beam.And this method only needs the hot spot at place's station acquisition measured laser light beam, by calculating the test result that can obtain laser beam divergence, does not need repeatedly mobile sniffer to take multiple measurements, and is simple, convenient.Because the laser beam hot spot signal that the CCD camera receives is handled by computing machine, therefore can select the coordinate axis of hot spot to finish calculating arbitrarily, so easily the while Laser Measurement at the beam divergence angle of each different directions.
Description of drawings:
Accompanying drawing is an embodiment of the invention laser beam divergent angle measurement mechanism structural representation.
The invention will be further described below in conjunction with accompanying drawing and embodiment.
Among the embodiment one, the beam divergence angle of detection laser is taked following method: as shown in drawings, form the pick-up unit of the embodiment of the invention one with tested laser instrument 1, diaphragm 2, standard lens 3, CCD camera 4 and computing machine 5.Wherein, the laser beam wavelength that sends of laser instrument 1 is λ=0.808 * 10
-3Mm; The aperture of diaphragm 2 is D=5mm; The focal length of standard lens 3 is f
1=250mm.
As shown in drawings, the laser beam that laser instrument 1 sends again by standard lens 3, forms focal beam spot at the back focal plane place of standard lens 3 through behind the diaphragm 2.
Adjust CCD camera 4, the photosensitive target surface of the ccd detector of CCD camera 4 is overlapped with the back focal plane of standard lens 3, focal beam spot is positioned on the photosensitive target surface of ccd detector.
The output of CCD camera 4 is connected to computing machine 5.
The big or small δ of the focal beam spot of light beam on standard lens 3 back focal planes that calculating laser instrument 1 sends
1:
According to the formula δ=1.22 λ f/D of Rayleigh criterion 1., (wherein, D is the aperture of the diaphragm, and λ is the measured laser wavelength, and f is the focal length of standard lens), in embodiment one, laser beam wavelength λ=0.808 * 10 that laser instrument 1 sends
-3Mm; The aperture D of diaphragm 2
1=5mm; The focal distance f of standard lens 3
1=250mm substitution is formula 1., calculates by computing machine, obtains the diameter δ of the focal beam spot of laser beam on the back focal plane of standard lens 3
1=0.049mm.
The signal of the focal beam spot that the laser beam that sends by CCD camera 4 reception laser instruments 1 forms at the back focal plane place of standard lens 3.
Handle the focal beam spot signal that the CCD camera is exported by computing machine 5, ask for the diameter φ of focal beam spot
1:
The laser beam that the laser instrument 1 that receives by computing machine 5 processing CCD cameras 4 sends obtains the whole two-dimensional illumination intensity distribution of the light beam focal beam spot of laser instrument at the focal beam spot signal that the back focal plane place of standard lens 3 forms.As required, take out the laser intensity one dimension distribution curve of required direction of measurement, from distribution curve, light intensity is dropped to peaked 1/e
2The curve that (promptly 0.136) located rises, the size of stop envelope is as the spot diameter size φ of laser beam in this position
1=4.410mm.
Calculate far-field divergence angle 2 θ of laser beam
1:
According to the geometric optical imaging rule, pass through formula
(in the formula, θ is the far-field divergence angle of laser beam; φ is the diameter of the focal beam spot that forms at the back focal plane place of standard lens 3 of the laser beam that sends of laser instrument 1; δ is the theoretical diameter size of the focal beam spot of laser beam on the back focal plane of standard lens 3), far-field divergence angle 2 θ of calculating light beam
1: the δ as a result that previous calculations is gone out
1=0.049mm, φ
1=4.410mm, and the focal distance f of standard lens 3
1=250mm substitution is formula 2., calculates by computing machine, obtains θ
1=0.5 °=9.5 milliradians; Promptly calculate far-field divergence angle 2 θ of laser beam
1=1 °, i.e. 19 milliradians.
The measurement mechanism of the embodiment of the invention two as shown in drawings.The beam divergence angle of detection laser is taked following method: form pick-up unit with tested laser instrument 1, square hole diaphragm 2, standard lens 3, CCD camera 4 and computing machine 5.Wherein, the laser beam wavelength that sends of laser instrument 1 is λ=0.808 * 10
-3Mm; The length of side of square hole diaphragm 2 is L=10mm; The focal length of standard lens 3 is f
1=250mm.
As shown in drawings, the desired collimation light beam that laser instrument 1 sends again by standard lens 3, forms focal beam spot at the back focal plane place of standard lens 3 through behind the diaphragm 2.
Adjust CCD camera 4, the photosensitive target surface of the ccd detector of CCD camera 4 is overlapped with the back focal plane of standard lens 3, focal beam spot is positioned on the photosensitive target surface of ccd detector.
The output of CCD camera 4 is connected to computing machine 5.
Calculate the diameter δ of the focal beam spot of light beam on standard lens 3 back focal planes of laser equipment
2:
According to formula δ
2=1.22 λ f/L 3., in embodiment two, laser beam wavelength λ=0.808 * 10 that laser instrument 1 sends
-3Mm, the length of side of square hole diaphragm 2 is L=10mm, the focal distance f of standard lens 3
1=250mm substitution is formula 3., calculates by computing machine, obtains the diameter δ of the focal beam spot of light beam on the back focal plane of standard lens 3 of laser instrument 1
2=0.025mm.
The signal of the focal beam spot that the laser beam that sends by CCD camera 4 reception laser instruments 1 forms at the back focal plane place of standard lens 3.
Handle the focal beam spot signal that CCD camera 4 is exported by computing machine 5, ask for the diameter φ of this hot spot
2:
The laser beam that the laser instrument 1 that receives by Computer Processing CCD camera 4 sends obtains the whole two-dimensional illumination intensity distribution of laser beam focal beam spot at the focal beam spot signal that the back focal plane place of standard lens 3 forms.As required, take out the laser intensity one dimension distribution curve of required direction of measurement, from distribution curve, light intensity is dropped to peaked l/e
2The size of the curve terminal envelope that (promptly 0.136) located is as the light beam of the laser instrument 1 spot diameter size φ in this position
2=2.520mm.
Calculate far-field divergence angle 2 θ of the light beam of laser instrument 1
2:
According to the formula described in the embodiment one 2., calculate far-field divergence angle 2 θ of light beam
2: the δ as a result that previous calculations is gone out
2=0.025mm, φ
2=2.520mm, and the focal distance f of standard lens 3
1=250mm substitution is formula 2., calculates by computing machine, obtains θ
2=0.286 °=5 milliradians promptly calculate far-field divergence angle 2 θ of the light beam of laser instrument 1
1=0.56 °, i.e. 10 milliradians.
Claims (1)
1, a kind of method of testing of laser beam divergent angle is characterized in that finishing by following steps:
---with tested laser instrument (1), diaphragm (2), standard lens (3), CCD camera (4) and computing machine (5) composition measuring apparatus;
---the light beam that makes laser instrument (1) through diaphragm (2) after again by standard lens (3), converge on the back focal plane of standard lens (3);
---adjust CCD camera (4), the photosensitive target surface of its CCD camera (4) is overlapped with the back focal plane of standard lens (3);
---the output of CCD camera (4) is connected to computing machine (5);
---calculate the theoretical big or small δ of the focal beam spot of light beam on standard lens (3) back focal plane of laser instrument (1) by computing machine (5);
---cross CCD camera (4) and receive the signal of the light beam of laser instrument (1) at the focal beam spot of the back focal plane place of standard lens (3) formation;
---handle the hot spot signal that CCD camera (4) is exported by computing machine (5), obtain the big or small φ of this focal beam spot;
---calculate far-field divergence angle 2 θ of the laser beam that laser instrument (1) sends by computing machine (5).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB011087560A CN1180232C (en) | 2001-08-20 | 2001-08-20 | Laser beam divergence angle testing method |
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|---|---|---|---|
| CNB011087560A CN1180232C (en) | 2001-08-20 | 2001-08-20 | Laser beam divergence angle testing method |
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| CN1180232C CN1180232C (en) | 2004-12-15 |
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| CN100354621C (en) * | 2003-12-26 | 2007-12-12 | 中国科学院半导体研究所 | Laser divergence angle measuring instrument and measuring method |
| CN100370223C (en) * | 2005-12-21 | 2008-02-20 | 哈尔滨工业大学 | Double hole type measural apparatus for scattering angle of laser beam |
| CN100429478C (en) * | 2007-01-15 | 2008-10-29 | 哈尔滨工业大学 | Microlen array based laser beam divegence angle testing method |
| CN101603858B (en) * | 2009-07-15 | 2010-08-04 | 中国科学院上海光学精密机械研究所 | laser beam quality BQ factor detector |
| CN101839761B (en) * | 2009-03-19 | 2011-08-31 | 中国科学院物理研究所 | System and method for measuring diameter of laser beam |
| CN102384836A (en) * | 2010-09-01 | 2012-03-21 | 中国科学院光电研究院 | Laser multi-parameter real-time measuring device |
| CN102539125A (en) * | 2011-04-21 | 2012-07-04 | 北京国科世纪激光技术有限公司 | Device for measuring vertical divergence angle of high-power laser diode array |
| CN103575239A (en) * | 2013-11-15 | 2014-02-12 | 南京信息工程大学 | Light beam parallel degree testing device and method |
| CN104536149A (en) * | 2014-12-23 | 2015-04-22 | 中国科学院上海光学精密机械研究所 | Single-lens near-field and far-field benchmark unit |
| CN104764591A (en) * | 2015-03-23 | 2015-07-08 | 深圳市创鑫激光股份有限公司 | Method and device for measuring laser divergence angle |
| CN105372043A (en) * | 2015-12-18 | 2016-03-02 | 天津力神电池股份有限公司 | Laser focus test and laser energy assessment device |
| CN105606039A (en) * | 2015-12-22 | 2016-05-25 | 中国科学院长春光学精密机械与物理研究所 | Method and device for precisely measuring light source parallelism |
| CN106443638A (en) * | 2016-08-31 | 2017-02-22 | 北京锐安科技有限公司 | Analysis method, verification system and verification method of laser echo transmission characteristic |
| WO2019075940A1 (en) * | 2017-10-19 | 2019-04-25 | 深圳光峰科技股份有限公司 | Light source spot detection method and detection device |
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| CN112229607A (en) * | 2020-09-30 | 2021-01-15 | 西安理工大学 | Device and method for measuring far-field beam expansion and scintillation characteristics in turbulent atmosphere |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100354621C (en) * | 2003-12-26 | 2007-12-12 | 中国科学院半导体研究所 | Laser divergence angle measuring instrument and measuring method |
| CN100370223C (en) * | 2005-12-21 | 2008-02-20 | 哈尔滨工业大学 | Double hole type measural apparatus for scattering angle of laser beam |
| CN100429478C (en) * | 2007-01-15 | 2008-10-29 | 哈尔滨工业大学 | Microlen array based laser beam divegence angle testing method |
| CN101839761B (en) * | 2009-03-19 | 2011-08-31 | 中国科学院物理研究所 | System and method for measuring diameter of laser beam |
| CN101603858B (en) * | 2009-07-15 | 2010-08-04 | 中国科学院上海光学精密机械研究所 | laser beam quality BQ factor detector |
| CN102384836A (en) * | 2010-09-01 | 2012-03-21 | 中国科学院光电研究院 | Laser multi-parameter real-time measuring device |
| CN102384836B (en) * | 2010-09-01 | 2014-01-29 | 中国科学院光电研究院 | Laser multi-parameter real-time measuring device |
| CN102539125A (en) * | 2011-04-21 | 2012-07-04 | 北京国科世纪激光技术有限公司 | Device for measuring vertical divergence angle of high-power laser diode array |
| CN102539125B (en) * | 2011-04-21 | 2014-01-08 | 北京国科世纪激光技术有限公司 | Device for measuring vertical divergence angle of high-power laser diode array |
| CN103575239A (en) * | 2013-11-15 | 2014-02-12 | 南京信息工程大学 | Light beam parallel degree testing device and method |
| CN103575239B (en) * | 2013-11-15 | 2016-03-23 | 南京信息工程大学 | Light beam parallelism pick-up unit and method |
| CN104536149A (en) * | 2014-12-23 | 2015-04-22 | 中国科学院上海光学精密机械研究所 | Single-lens near-field and far-field benchmark unit |
| CN104764591B (en) * | 2015-03-23 | 2016-02-24 | 深圳市创鑫激光股份有限公司 | A kind of measuring method of laser beam divergence and device |
| CN104764591A (en) * | 2015-03-23 | 2015-07-08 | 深圳市创鑫激光股份有限公司 | Method and device for measuring laser divergence angle |
| CN105372043A (en) * | 2015-12-18 | 2016-03-02 | 天津力神电池股份有限公司 | Laser focus test and laser energy assessment device |
| CN105606039A (en) * | 2015-12-22 | 2016-05-25 | 中国科学院长春光学精密机械与物理研究所 | Method and device for precisely measuring light source parallelism |
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| CN106443638A (en) * | 2016-08-31 | 2017-02-22 | 北京锐安科技有限公司 | Analysis method, verification system and verification method of laser echo transmission characteristic |
| WO2019075940A1 (en) * | 2017-10-19 | 2019-04-25 | 深圳光峰科技股份有限公司 | Light source spot detection method and detection device |
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| CN112229607A (en) * | 2020-09-30 | 2021-01-15 | 西安理工大学 | Device and method for measuring far-field beam expansion and scintillation characteristics in turbulent atmosphere |
| CN112229607B (en) * | 2020-09-30 | 2022-07-05 | 西安理工大学 | Device and method for measuring far-field beam expansion and scintillation characteristics in turbulent atmosphere |
| CN112945521A (en) * | 2021-01-27 | 2021-06-11 | 广东天讯达资讯科技股份有限公司 | Laser device divergence angle testing device based on camera two-point testing method |
| CN114935828A (en) * | 2022-04-29 | 2022-08-23 | 中国科学院西安光学精密机械研究所 | Method for debugging focal plane of optical fiber coupling lens |
| CN114935828B (en) * | 2022-04-29 | 2023-04-11 | 中国科学院西安光学精密机械研究所 | Method for debugging focal plane of optical fiber coupling lens |
| CN115356088A (en) * | 2022-09-22 | 2022-11-18 | 中国科学院长春光学精密机械与物理研究所 | Method and mechanism for testing far-field divergence angle of fundamental mode Gaussian laser |
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