CN102384836B - Laser multi-parameter real-time measuring device - Google Patents
Laser multi-parameter real-time measuring device Download PDFInfo
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- CN102384836B CN102384836B CN201010268566.4A CN201010268566A CN102384836B CN 102384836 B CN102384836 B CN 102384836B CN 201010268566 A CN201010268566 A CN 201010268566A CN 102384836 B CN102384836 B CN 102384836B
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Abstract
The invention relates to a multi-parameter real-time measuring device for laser beams, which comprises a measured laser light source, a beam splitter, a controller, a frequency domain relevant parameter measuring device, a time domain relevant parameter measuring device, a space relevant parameter measuring device, an energy/power relevant parameter measuring device, a polarization state relevant parameter measuring device, measuring parameter integrated processing devices and a display device, wherein the beam splitter is used for respectively transmitting laser to each measuring device, the controller is used for controlling the beam splitter and each measuring device, the measuring parameter integrated processing devices are arranged behind each measuring device and are used for collecting measurement results of each measuring device and carrying out data processing and statistics, and the display device is arranged behind the measuring parameter integrated processing devices and is used for displaying the measuring results. When the laser multi-parameter real-time measuring device is adopted, the multi-aspect measurement can be carried out by aiming at the measured laser light source, the overall, efficient and real-time measurement and monitoring on the laser light source output characteristics can be realized, and faster and more convenient measurement is provided for the debugging and study of a laser.
Description
Technical field
The present invention relates to laser parameter measurement technical field, especially a kind of device that laser beam is carried out to multi-parameter real-time measurement.
Background technology
In order to meet different needs, light beam for a LASER Light Source output need to carry out many-sided measurement, such as: spectral width, spot size, hot spot percentage modulation Rayleigh distance, beam waist position, the angle of divergence, directive property, beam quality factor, single pulse energy, energy stability, average power, power stability, repetition frequency, pulse width, pulse stability, output signal-to-noise ratio, polarization direction, degree of polarization etc.And existing laser parameter testing tool can only be tested for several laser parameters of single or close association, can not cross over many each side such as time domain, frequency domain, energy, simultaneously, comprehensively measure a plurality of parameters.This makes in carrying out the test process of LASER Light Source output beam characteristic, needs numerous instruments to measure one by one, wastes time and energy, and can not well hold the duty of laser instrument.Such as when the laser instrument that is low to moderate a pulse in tens of minutes for repetition frequency is measured, carry out the parameter of energy meter ranging pulse energy aspect, photodiode is in conjunction with the parameter of oscilloscope measurement Laser output time domain aspect, and beam quality analysis instrument is measured laser M
2the test of a plurality of steps such as the factor, not only wastes time and energy, and the time state corresponding to laser parameter of fore-and-aft survey, also makes measurement result can not well reflect the real-time characteristic of laser instrument.
Such as the laser parameter measuring device that application number is 200610167350.2, adopt diffuse reflection imaging light target to reflect tested lasing light emitter, after then processing by image pick-up card, show.This device is only confined to the correlation parameter that pulsewidth, frequency, image etc. can be obtained by image pick-up card, can not comprehensively reflect many-sided state of measured laser bundle.
Summary of the invention
The object of the invention is to solve the problem occurring in above-mentioned prior art, and a kind of centre wavelength, spectral width, the spectral distribution that can simultaneously measure on frequency domain is provided; Repetition frequency in time domain, pulse width, pulse stability; Spot size on space, the hot spot percentage modulation angle of divergence, directive property, beam quality factor; Single pulse energy in energy/power, energy stability, average power, power stability, output signal-to-noise ratio; Polarization direction on polarization state, degree of polarization; And the laser multi-parameter real-time measuring device of the comprehensive parameters such as beam waist position, the M2 factor.This device can be measured for the comprehensive parameters of frequency domain, time domain, energy/power, polarization state and instantaneous calculating thus simultaneously, realization to LASER Light Source output characteristics comprehensively, efficient, measurement and monitoring in real time, for debugging and the research of laser instrument provides more fast, has measured more easily.
The invention provides a kind of laser parameter measurement system, comprise measured laser light source, also comprise:
Light-dividing device, realizes the laser of measured laser light source output is assigned in each test macro in accordance with the appropriate ratio;
Control device, controls each measurement mechanism and light-dividing device, comprises functions such as realizing open and close, synchronous triggering.
Spectrum correlation parameter measuring apparatus, realizes the measurement to frequency domain correlation parameters such as centre wavelength, spectral width, spectral distribution;
Time domain correlation parameter measurement mechanism, realizes the measurement to time domain correlation parameters such as repetition frequency, pulse width, pulse stabilities;
Space correlation parameter measuring apparatus, realizes the correlation parameter on the spaces such as spot size, the hot spot percentage modulation angle of divergence, directive property, beam quality factor is measured;
Energy/power correlation parameter measurement mechanism, realizes the measurement to single pulse energy, energy stability, average power, power stability, output signal-to-noise ratio homenergic/power-related parameter;
Polarization state correlation parameter measurement mechanism, realizes the measurement to correlation parameters such as polarization direction, degree of polarizations;
Measurement parameter Integrated Processing Unit, carries out measurement of correlation parametric synthesis processing (gather, calculating, statistics etc.), realizes the real-time calculating to correlation parameters such as beam waist position, the M2 factors;
Display device, is connected with said apparatus, shows the parameter of the described measured laser that described device obtains.
Compared with the prior art the present invention has advantages of as follows:
1. device of the present invention can carry out the measurement of frequency domain, time domain, space, energy/power, polarization state for LASER Light Source simultaneously, the smog surveying instrument of this leap many aspects is tested and is existed essence different for several parameters in a certain respect such as frequency domain, time domain, space from existing instrument, and device of the present invention can be realized comprehensive, efficient, the real-time measurement and monitoring to LASER Light Source output characteristics.
2. device of the present invention can be exported LASER Light Source after the measurement in real time of a plurality of parameters in realization, calculate in real time the complicated laser beam parameters such as the M2 factor, and carry out statistical treatment, obtain between these complex parameters, or the relation curve between complex parameters and other arbitrary parameters, thereby better detection laser light source output characteristics, and existing apparatus can not be realized such function.
Accompanying drawing explanation
Fig. 1 is the structural representation of the real-time example 1 of laser multi-parameter real-time measuring device of the present invention.
Fig. 2 is the structural representation of the real-time example 2 of laser multi-parameter real-time measuring device of the present invention.
embodiment
In order to make object of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the present invention is described in more detail.
As shown in Figure 1, be the structural representation of laser multi-parameter real-time measuring system embodiment of the present invention, it comprises measured laser light source 1; Be arranged at after measured laser light source 1, for laser being distributed to the light-dividing device 2 of each measurement mechanism; For controlling the control device 3 of light-dividing device 2 and each measurement mechanism; Spectrum correlation parameter measuring apparatus 4; Time domain correlation parameter measurement mechanism 5; Space correlation parameter measuring apparatus 6; Energy/power correlation parameter measurement mechanism 7; Polarization state correlation parameter measurement mechanism 8; Be arranged at after each measurement mechanism, for collecting the measurement result of each measurement mechanism, carry out the measurement parameter Integrated Processing Unit 9 of data processing, statistics; After being arranged at measurement parameter Integrated Processing Unit 9, for the display device 10 of display measurement result.
Wherein, measured light 1 can be continuous laser source or pulsed laser light source arbitrarily; Light-dividing device 2 for by measured laser bundle according to different-energy demand, high-level efficiency, be assigned to each measurement mechanism accurately; Control device 3 is for controlling light-dividing device to the ratio of each measurement mechanism dispensing light, and the duty of each measurement mechanism; Spectrum correlation parameter measuring apparatus 4 is used for realizing the measurement to frequency domain correlation parameters such as centre wavelength, spectral width, spectral distribution, spectrum stabilities, can in conjunction with science CCD camera, realize by optical grating element; Time domain correlation parameter measurement mechanism 5 is used for realizing the measurement to time domain correlation parameters such as repetition frequency, pulse width, pulse stability, pulse waveforms, can be by electrooptical devices such as photodiodes in conjunction with realizing for the signal acquisition circuit of simulated data; Space correlation parameter measuring apparatus 6 is used for realizing the measurement to space correlation parameters such as spot size, the hot spot percentage modulation angle of divergence, beam-pointings, can realize by science CCD camera combining image treatment circuit and software; Energy/power correlation parameter measurement mechanism 7 is used for realizing the measurement to single pulse energy, energy stability, average power, power stability, output signal-to-noise ratio homenergic/power-related parameter, can in conjunction with data acquisition circuit, realize by energy meter/power meter; Polarization state correlation parameter measurement mechanism 8 is used for realizing the measurement to correlation parameters such as polarization direction, degree of polarizations, can pass through Amici prism or polaroid, in conjunction with 4 quadrant detector, realizes; Measurement parameter Integrated Processing Unit 9 is used for carrying out the processing such as the gathering of measurement result, calculating, statistics, can be used for carrying out the calculating of the correlation parameters such as beam waist position, the M2 factor, can be used for carrying out the real-time rendering of measurement result, result of calculation parameter correlation curve, can in conjunction with software calculation procedure, realize by data acquisition circuit; Display device, for display measurement result, can realize by output devices such as displays.
Embodiment 2
As shown in Figure 2, be the structural representation of laser multi-parameter real-time measuring system embodiment of the present invention, it comprises measured laser light source 1; Be arranged at after measured laser light source 1, for laser being distributed to the light-dividing device 2 of each measurement mechanism; For controlling the control device 3 of light-dividing device 2 and each measurement mechanism; Spectrum correlation parameter measuring apparatus 4; Time domain correlation parameter measurement mechanism 5; Energy/power correlation parameter measurement mechanism 7; Be arranged at after each measurement mechanism, for collecting the measurement result of each measurement mechanism, carry out the measurement parameter Integrated Processing Unit 9 of data processing, statistics; After being arranged at measurement parameter Integrated Processing Unit 9, for the display device 10 of display measurement result.
Wherein, measured light 1 can be continuous laser source or pulsed laser light source arbitrarily; Light-dividing device 2 for by measured laser bundle according to different-energy demand, high-level efficiency, be assigned to each measurement mechanism accurately; Control device 3 is for controlling light-dividing device to the ratio of each measurement mechanism dispensing light, and the duty of each measurement mechanism; Spectrum correlation parameter measuring apparatus 4 is used for realizing the measurement to frequency domain correlation parameters such as centre wavelength, spectral width, spectral distribution, spectrum stabilities, can be by buying such as the spectrometer of Avantes company is realized; Time domain correlation parameter measurement mechanism 5 is used for realizing the measurement to time domain correlation parameters such as repetition frequency, pulse width, pulse stability, pulse waveforms, can in conjunction with the oscillograph of Imtech, realize by electrooptical devices such as photodiodes; Energy/power correlation parameter measurement mechanism 7 is used for realizing the measurement to single pulse energy, energy stability, average power, power stability, output signal-to-noise ratio homenergic/power-related parameter, can realize by the energy meter probe incorporated energy meter gauge outfit of THORLABS company; Measurement parameter Integrated Processing Unit 9 is used for carrying out the processing such as the gathering of measurement result, calculating, statistics, is used for carrying out the statistics of measurement result, can realize by the software calculation procedure on microcomputer; Display device, for display measurement result, can realize by printer.
Claims (5)
1. a laser parameter measurement system, comprises measured light, it is characterized in that, also comprises:
Light-dividing device, the light that is used for realizing the output of measured laser light source is assigned in each test macro in accordance with the appropriate ratio;
Spectrum correlation parameter measuring apparatus, realizes comprising the measurement of the spectrum correlation parameter of centre wavelength, spectral width, spectral distribution;
Time domain correlation parameter measurement mechanism, realizes comprising the measurement of the time domain correlation parameter of repetition frequency, pulse width, pulse stability;
Space correlation parameter measuring apparatus, realizes comprising the measurement of the space correlation parameter of spot size, the hot spot percentage modulation angle of divergence, directive property, beam quality factor;
Energy/power correlation parameter measurement mechanism, realizes comprising the measurement of the energy/power correlation parameter of single pulse energy, energy stability, average power, power stability, output signal-to-noise ratio;
Polarization state correlation parameter measurement mechanism, realizes comprising the measurement of the polarization state correlation parameter of polarization direction, degree of polarization;
Measurement parameter Integrated Processing Unit, is used for comprising the measurement of correlation parametric synthesis processing that gathers, calculates, adds up, and realizes the real-time calculating to beam waist position, M2 factor correlation parameter;
Display device, is connected with said apparatus, shows the parameter of the described measured laser that described device obtains;
Control device, realizes open and close, synchronous Trigger Function for each measurement mechanism and light-dividing device being controlled, being comprised.
2. by system claimed in claim 1, it is characterized in that, described light-dividing device, also for regulating the laser direction of controlling output, is realized according to accurate constant intensity ratio and will be assigned in described each test cell by photometry.
3. by the system described in claim 1 or 2, it is characterized in that, described control device is also for regulating light-dividing device and each measurement mechanism, guarantee that each measurement mechanism is on apart from the suitable position of measured laser light source, regulate the position of the inner key element of each measurement mechanism can realize accurate measurement.
4. by system claimed in claim 1, it is characterized in that, described spectrum correlation parameter measuring apparatus, time domain correlation parameter measurement mechanism, space correlation parameter measuring apparatus, energy/power correlation parameter measurement mechanism, polarization state correlation parameter measurement mechanism, by control device, realize one of them or several any open and close, carry out interim switching.
5. by system claimed in claim 1, it is characterized in that, described spectrum correlation parameter measuring apparatus is used for realizing the measurement to centre wavelength, spectral width, spectral distribution, spectrum stability parameter, by optical grating element, in conjunction with CCD camera, catch diffraction light and realize, or realize by spectral instrument;
Described time domain correlation parameter measurement mechanism is used for realizing the measurement to repetition frequency, pulse width, pulse stability, pulse waveform parameter, by electrooptical device combination, for the signal acquisition circuit of simulated data, realize, or realize in conjunction with oscillograph by electrooptical device;
Described space correlation parameter measuring apparatus is used for realizing the measurement to spot size, the hot spot percentage modulation angle of divergence, beam-pointing parameter, by CCD camera combining image treatment circuit and software, realizes;
Described energy/power correlation parameter measurement mechanism is used for realizing the measurement to single pulse energy, energy stability, average power, power stability, output signal-to-noise ratio parameter, by energy meter/power meter, pops one's head in, and in conjunction with data acquisition circuit, realizes;
Described polarization state correlation parameter measurement mechanism is used for realizing the measurement to polarization direction, degree of polarization parameter, by Amici prism or polaroid, in conjunction with 4 quadrant detector, realizes; Or by Amici prism or polaroid, in conjunction with energy meter, realize; Or by Amici prism or polaroid, in conjunction with CCD camera, realize;
Described measurement parameter Integrated Processing Unit is used for carrying out the gathering of measurement result, calculating, statistical treatment, be used for carrying out the calculating of beam waist position, M2 factor parameter, be used for carrying out the real-time rendering of measurement result, result of calculation parameter correlation curve, by data acquisition circuit, in conjunction with software calculation procedure, realize;
Described measurement parameter Integrated Processing Unit also, for by a certain data curve plotting that test obtains for a long time output, calculates impact or relation output between any measured parameter.
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