CN2444223Y - Laser measuring device - Google Patents
Laser measuring device Download PDFInfo
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- CN2444223Y CN2444223Y CN 00259742 CN00259742U CN2444223Y CN 2444223 Y CN2444223 Y CN 2444223Y CN 00259742 CN00259742 CN 00259742 CN 00259742 U CN00259742 U CN 00259742U CN 2444223 Y CN2444223 Y CN 2444223Y
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- measuring device
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- laser measuring
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The utility model relates to a device used for monitoring and measuring the shape, the size and the light intensity distribution of laser focal spots. The utility model is composed of a laser, a sample chamber, a focusing optical element, a target material, a positioning system, an attenuation piece, an objective lens, a filter piece, a CCD imaging system, a computer, etc. The utility model uses the CCD imaging system for enlarging and imaging the laser spots for displaying the shape, the size and the light intensity distribution of the focal spots in real time and uses the computer for monitoring the size of the focal spots in real time. The utility model has the advantages of convenient and simple operation, wide measuring dynamic range, fast speed and direct viewing.
Description
The utility model relates to a kind of laser measuring device for measuring, particularly relates to the device of a kind of monitoring and Laser Measurement focal spot shapes, size and light distribution.
In the research of high light and matter interaction, generally need be with laser focusing, so that obtain high laser power density.Laser Measurement focal spot size and light distribution are a kind of routine measurements, measure focal spot size and light distribution fast, accurately, in real time and will help the carrying out studied.The method of traditional measurement focal spot size is a knife-edge method, this is a kind of ancient method, it is with a sharp blade, direction perpendicular to beam propagation, substep crosscut focused beam, the variation of light beam power after the measurement edge of a knife whenever makes a move by the change curve of laser power with the blade walking, is derived the diameter of beam cross section.In order to record focused spot diameter, must change the position of blade along direction of beam propagation, repeatedly repeat above process, find out minimum beam cross section diameter, be focused spot diameter.Must guarantee the direction normal beam direction that blade is advanced during measurement.Can accurately measure the focal spot size of Gaussian beam with this method, but when beam cross section is not garden shape, then need to repeat to cut from different orientation.For the light spot shape of complexity, be difficult to record focal spot size with the method.This method operation is loaded down with trivial details, can not the The real time measure focal spot size, can not show the distribution of the shape and the light intensity of focal spot, and this method only can be measured the aerial focal spot size of light beam concentrating element, can not be used for the focal spot size that real-time Laser Measurement focuses on solid and is contained in the liquids and gases of sample cell.
The purpose of this utility model is to overcome the shortcoming of prior art, become phase system that laser spot is amplified imaging by CCD, show focal spot shapes and light distribution in real time, and by the computer real-time monitoring focal spot size, thereby provide a kind of easy and simple to handle, measure wide dynamic range, fast, the device that intuitively, can show focal spot size, shape and light distribution in real time.
The purpose of this utility model is achieved in that
This device becomes phase system and computing machine etc. to constitute by laser instrument, sample chamber, focusing optical element, target material, positioning system, attenuator, object lens, optical filter, CCD.
With Fig. 1 is the example explanation: expand bundle by Laser Output Beam through beam expander, turn to through the steering reflection mirror group, through the diaphragm setting beam direction, light beam enters vacuum target chamber by vacuum window, the focusing optical element focuses of the light beam on the solid target, the target positioning system is adjusted the distance between target and condenser lens, the scattered light that sends from focus passes through vacuum window, beam splitter, attenuator arrives object lens, it amplifies imaging on the CCD chip with focus, and demonstration focal spot shapes and light distribution in real time on display screen, optical filter only allows the light of certain wavelength to pass through, computing machine carries out data acquisition and processing (DAP) to this image, quantitatively provides focal spot size and light distribution.Finish the purpose of this utility model like this.
By adjusting the spacing of concentrating element and target, can find out the smallest focal spot size.
The utility model also can be used for measuring focal spot shapes, size and the light distribution of laser focusing in liquid and gaseous sample.
The utility model can also save beam expander.
The utility model can also save the steering reflection mirror group.
The utility model can also save diaphragm.
The utility model can also save beam splitter.
The utility model both can carry out under vacuum environment, also can carry out under antivacuum.
Focusing optical element of the present utility model can be one to polylith lens, sphere or aspheric surface reflect focalization mirror.
The utility model can also replace the target positioning system with the positioning system of control focusing optical element.
Target material of the present utility model can be solid, liquid or gas.
Of the present utility model simple to operate, can carry out real-time quantitative to focal spot size, shape and the light distribution of complicated shape and measure, both can be used for Gaussian beam, also can be used for the non-Gasussian light bundle.Therefore, the utility model is a kind of easy, fast, determines the device of laser focal spot size and light distribution intuitively.
Below in conjunction with drawings and Examples the utility model is elaborated:
Fig. 1 is a device synoptic diagram of the present utility model,
Fig. 2 is embodiment 2 synoptic diagram of the present utility model.
Embodiment 1,
Press monitoring laser shown in Figure 1 to the focal spot size size of solid target focusing and the light distribution at focal spot place.The output beam of laser instrument 1 expands bundle through beam expander 2, turn 90 degrees through catoptron 3, diaphragm 4,5 aligned bundle directions, light beam enters vacuum target chamber 7 by vacuum window 6, condenser lens 8 focuses of the light beam on the solid target 9, the distance that target positioning system 10 is adjusted between target and condenser lens, the scattered light that sends from focus passes through vacuum window 11, beam splitter 12, attenuator 13, arrive object lens 14, it amplifies imaging with focusing, 15 of optical filters allow the light of certain wavelength to pass through, and the resembling on the display screen of CCD camera 16 of focus of having amplified shows in real time, 17 pairs of these images of computing machine carry out data acquisition and processing (DAP), quantitatively provide focal spot size and light distribution.
Embodiment 2,
By shown in Figure 2, the light distribution at Laser Measurement focal spot size size and focal spot place.The output beam of laser instrument 1 expands bundle through beam expander 2, turn 90 degrees through catoptron 3, diaphragm 4,5 aligned bundle directions, light beam line focus lens 8 incide in the sample chamber 7, the distance that target positioning system 10 is adjusted between sample chamber and condenser lens, be filled with liquid 9 in the sample chamber, the scattered light that sends from focus is through beam splitter 12, attenuator 13 arrives object lens 14, and it is with the focusing imaging and will resemble amplification, 15 of optical filters allow the light of certain wavelength to pass through, resembling on the display screen of CCD camera 16 of the focus of having amplified shows that in real time 17 pairs of these images of computing machine carry out data acquisition and processing (DAP), quantitatively provide focal spot size and light distribution.
Embodiment 3,
Press embodiment 1 and make, remove beam expander 2, steering reflection mirror group 3 and diaphragm 4,5, replace lens 8 to focus on non-spherical reflector.
Embodiment 4,
Press embodiment 2 and make, replace liquid to charge in the sample chamber with gas, system replaces target positioning system 10 with the control lens position.
Embodiment 5,
Press embodiment 2 and make, remove beam expander 2, steering reflection mirror group 3 and diaphragm 4,5, with two lens focus laser.
Embodiment 6,
Press embodiment 2 and make, remove beam splitter 12.
Claims (9)
1. a laser measuring device for measuring is characterized in that: be made of laser instrument, beam expanding lens, steering reflection mirror group, diaphragm, vacuum target chamber, condenser lens, solid target, target positioning system, beam splitter, attenuator, object lens, optical filter, CCD camera and computing machine;
Expand bundle by Laser Output Beam through beam expander, turn to through the steering reflection mirror group, through the diaphragm setting beam direction, light beam enters vacuum target chamber by vacuum window, the focusing optical element focuses of the light beam on the solid target, the target positioning system is adjusted the distance between target and condenser lens, the scattered light that sends from focus passes through vacuum window, beam splitter, attenuator arrives object lens, it amplifies imaging on the CCD camera with focus, and demonstration focal spot shapes and light distribution in real time on display screen, computing machine carries out data acquisition and processing (DAP) to this image, quantitatively provides focal spot size and light distribution.
2. by the described laser measuring device for measuring of claim 1, it is characterized in that: also solid target can be changed to liquid target or gas target.
3. by the described laser measuring device for measuring of claim 1, it is characterized in that: can also save beam expander.
4. by the described laser measuring device for measuring of claim 1, it is characterized in that: can also save the steering reflection mirror group.
5. by the described laser measuring device for measuring of claim 1, it is characterized in that: can also save diaphragm.
6. by the described laser measuring device for measuring of claim 1, it is characterized in that: can also under antivacuum, carry out.
7. by the described laser measuring device for measuring of claim 1, it is characterized in that: described focusing optical element can be one to polylith lens, sphere or aspheric surface reflect focalization mirror.
8. by the described laser measuring device for measuring of claim 1, it is characterized in that: can also replace the target positioning system with the positioning system of control focusing optical element.
9. by the described laser measuring device for measuring of claim 1, it is characterized in that: can also save beam splitter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00259742 CN2444223Y (en) | 2000-11-06 | 2000-11-06 | Laser measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00259742 CN2444223Y (en) | 2000-11-06 | 2000-11-06 | Laser measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2444223Y true CN2444223Y (en) | 2001-08-22 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 00259742 Expired - Fee Related CN2444223Y (en) | 2000-11-06 | 2000-11-06 | Laser measuring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2444223Y (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1313805C (en) * | 2003-08-22 | 2007-05-02 | 中国科学院上海光学精密机械研究所 | Strong laser pulse light strength distribution test system |
| CN1314991C (en) * | 2005-03-21 | 2007-05-09 | 中国工程物理研究院激光聚变研究中心 | Method for mounting and adjusting focusing lens of off-axis paraboloid |
| CN102169015A (en) * | 2010-12-21 | 2011-08-31 | 北京理工大学 | A femtojoule level laser micro energy meter capable of measuring and observing simultaneously |
| CN101592787B (en) * | 2008-05-28 | 2011-11-23 | 北京中视中科光电技术有限公司 | Device for adjusting light path and method thereof |
| CN102384836A (en) * | 2010-09-01 | 2012-03-21 | 中国科学院光电研究院 | Laser multi-parameter real-time measuring device |
| CN102589846A (en) * | 2011-12-14 | 2012-07-18 | 长春理工大学 | Dynamic testing system for far-field laser hit ratio |
| CN102706541A (en) * | 2012-06-15 | 2012-10-03 | 北京理工大学 | System for detecting comprehensive performance of laser radiator based on virtual instrument |
| CN104748674A (en) * | 2013-12-27 | 2015-07-01 | 上海微电子装备有限公司 | Focus monitoring device and method |
| CN106271048A (en) * | 2016-08-29 | 2017-01-04 | 大族激光科技产业集团股份有限公司 | Laser processing device and method |
| CN106872144A (en) * | 2017-01-05 | 2017-06-20 | 中国原子能科学研究院 | Light laser focal spot uniformity on-line monitoring method |
| CN108188570A (en) * | 2018-01-24 | 2018-06-22 | 华南理工大学 | A kind of double focus laser system of processing and its processing method |
| CN108318800A (en) * | 2017-12-30 | 2018-07-24 | 北京工业大学 | A kind of GaN base semiconductor laser chip detection device and method |
| CN108548481A (en) * | 2018-02-24 | 2018-09-18 | 厦门盈趣科技股份有限公司 | A kind of measuring system and method for laser spot size |
-
2000
- 2000-11-06 CN CN 00259742 patent/CN2444223Y/en not_active Expired - Fee Related
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1313805C (en) * | 2003-08-22 | 2007-05-02 | 中国科学院上海光学精密机械研究所 | Strong laser pulse light strength distribution test system |
| CN1314991C (en) * | 2005-03-21 | 2007-05-09 | 中国工程物理研究院激光聚变研究中心 | Method for mounting and adjusting focusing lens of off-axis paraboloid |
| CN101592787B (en) * | 2008-05-28 | 2011-11-23 | 北京中视中科光电技术有限公司 | Device for adjusting light path and method thereof |
| CN102384836B (en) * | 2010-09-01 | 2014-01-29 | 中国科学院光电研究院 | Laser multi-parameter real-time measuring device |
| CN102384836A (en) * | 2010-09-01 | 2012-03-21 | 中国科学院光电研究院 | Laser multi-parameter real-time measuring device |
| CN102169015A (en) * | 2010-12-21 | 2011-08-31 | 北京理工大学 | A femtojoule level laser micro energy meter capable of measuring and observing simultaneously |
| CN102169015B (en) * | 2010-12-21 | 2012-08-01 | 北京理工大学 | A femtojoule level laser micro energy meter capable of measuring and observing simultaneously |
| CN102589846A (en) * | 2011-12-14 | 2012-07-18 | 长春理工大学 | Dynamic testing system for far-field laser hit ratio |
| CN102589846B (en) * | 2011-12-14 | 2013-08-14 | 长春理工大学 | Dynamic testing system for far-field laser hit ratio |
| CN102706541B (en) * | 2012-06-15 | 2015-04-29 | 北京理工大学 | System for detecting comprehensive performance of laser radiator based on virtual instrument |
| CN102706541A (en) * | 2012-06-15 | 2012-10-03 | 北京理工大学 | System for detecting comprehensive performance of laser radiator based on virtual instrument |
| CN104748674A (en) * | 2013-12-27 | 2015-07-01 | 上海微电子装备有限公司 | Focus monitoring device and method |
| CN106271048A (en) * | 2016-08-29 | 2017-01-04 | 大族激光科技产业集团股份有限公司 | Laser processing device and method |
| CN106271048B (en) * | 2016-08-29 | 2019-06-07 | 大族激光科技产业集团股份有限公司 | Laser processing device and method |
| CN106872144A (en) * | 2017-01-05 | 2017-06-20 | 中国原子能科学研究院 | Light laser focal spot uniformity on-line monitoring method |
| CN106872144B (en) * | 2017-01-05 | 2020-05-15 | 中国原子能科学研究院 | Strong laser focal spot uniformity online monitoring method |
| CN108318800A (en) * | 2017-12-30 | 2018-07-24 | 北京工业大学 | A kind of GaN base semiconductor laser chip detection device and method |
| CN108318800B (en) * | 2017-12-30 | 2020-06-26 | 北京工业大学 | GaN-based semiconductor laser chip detection device and method |
| CN108188570A (en) * | 2018-01-24 | 2018-06-22 | 华南理工大学 | A kind of double focus laser system of processing and its processing method |
| CN108548481A (en) * | 2018-02-24 | 2018-09-18 | 厦门盈趣科技股份有限公司 | A kind of measuring system and method for laser spot size |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |