CN100350403C - 用于过程状态监测和端点检测的斜率对门限变换的方法及设备 - Google Patents

用于过程状态监测和端点检测的斜率对门限变换的方法及设备 Download PDF

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Publication number
CN100350403C
CN100350403C CNB2003801057276A CN200380105727A CN100350403C CN 100350403 C CN100350403 C CN 100350403C CN B2003801057276 A CNB2003801057276 A CN B2003801057276A CN 200380105727 A CN200380105727 A CN 200380105727A CN 100350403 C CN100350403 C CN 100350403C
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value
threshold
slope
monitored
transition
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Expired - Fee Related
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CN1726479A (zh
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Y·戈特基斯
V·卡茨
D·赫姆克尔
R·基斯特勒
N·J·布赖特
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Lam Research Corp
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Lam Research Corp
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0243—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults model based detection method, e.g. first-principles knowledge model
    • G05B23/0254—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults model based detection method, e.g. first-principles knowledge model based on a quantitative model, e.g. mathematical relationships between inputs and outputs; functions: observer, Kalman filter, residual calculation, Neural Networks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/23—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by multiple measurements, corrections, marking or sorting processes
    • H10P74/238—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by multiple measurements, corrections, marking or sorting processes comprising acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection or in-situ thickness measurement

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Artificial Intelligence (AREA)
  • Evolutionary Computation (AREA)
  • Mathematical Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Drying Of Semiconductors (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
CNB2003801057276A 2002-12-13 2003-12-11 用于过程状态监测和端点检测的斜率对门限变换的方法及设备 Expired - Fee Related CN100350403C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/318,967 2002-12-13
US10/318,967 US6859765B2 (en) 2002-12-13 2002-12-13 Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection

Publications (2)

Publication Number Publication Date
CN1726479A CN1726479A (zh) 2006-01-25
CN100350403C true CN100350403C (zh) 2007-11-21

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CNB2003801057276A Expired - Fee Related CN100350403C (zh) 2002-12-13 2003-12-11 用于过程状态监测和端点检测的斜率对门限变换的方法及设备

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Country Link
US (2) US6859765B2 (https=)
EP (1) EP1570363B1 (https=)
JP (2) JP2006510228A (https=)
KR (1) KR101007159B1 (https=)
CN (1) CN100350403C (https=)
AU (1) AU2003303494A1 (https=)
TW (1) TWI232530B (https=)
WO (1) WO2004061693A1 (https=)

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US11504821B2 (en) 2017-11-16 2022-11-22 Applied Materials, Inc. Predictive filter for polishing pad wear rate monitoring
JP6525044B1 (ja) * 2017-12-13 2019-06-05 オムロン株式会社 監視システム、学習装置、学習方法、監視装置及び監視方法
KR102103150B1 (ko) * 2018-03-14 2020-04-22 (주)아이티공간 구동부의 정밀 예지 보전방법
KR102103145B1 (ko) * 2018-03-14 2020-04-22 (주)아이티공간 구동부의 정밀 예지 보전방법
KR102103143B1 (ko) * 2018-03-14 2020-04-22 (주)아이티공간 구동부의 정밀 예지 보전방법
KR102103147B1 (ko) * 2018-03-14 2020-04-22 (주)아이티공간 구동부의 정밀 예지 보전방법
KR102103144B1 (ko) * 2018-03-14 2020-04-22 (주)아이티공간 구동부의 정밀 예지 보전방법
CN109118274B (zh) * 2018-07-25 2021-11-16 武汉轻工大学 任务点去噪分类方法、系统、终端设备及存储介质
WO2020185242A1 (en) * 2019-03-08 2020-09-17 Kla-Tencor Corporation Dynamic amelioration of misregistration measurement
US11455154B2 (en) 2020-12-10 2022-09-27 International Business Machines Corporation Vector-based identification of software dependency relationships

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Also Published As

Publication number Publication date
KR20050084998A (ko) 2005-08-29
US20050125202A1 (en) 2005-06-09
KR101007159B1 (ko) 2011-01-12
WO2004061693A1 (en) 2004-07-22
TWI232530B (en) 2005-05-11
AU2003303494A1 (en) 2004-07-29
CN1726479A (zh) 2006-01-25
US20040117054A1 (en) 2004-06-17
EP1570363B1 (en) 2011-05-18
US7010468B2 (en) 2006-03-07
JP2012238882A (ja) 2012-12-06
US6859765B2 (en) 2005-02-22
TW200414396A (en) 2004-08-01
EP1570363A4 (en) 2006-04-12
EP1570363A1 (en) 2005-09-07
JP2006510228A (ja) 2006-03-23

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