CN100350217C - 用于光学扫描计量用具的位置测量装置的扫描单元 - Google Patents

用于光学扫描计量用具的位置测量装置的扫描单元 Download PDF

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Publication number
CN100350217C
CN100350217C CNB2004100334530A CN200410033453A CN100350217C CN 100350217 C CN100350217 C CN 100350217C CN B2004100334530 A CNB2004100334530 A CN B2004100334530A CN 200410033453 A CN200410033453 A CN 200410033453A CN 100350217 C CN100350217 C CN 100350217C
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CN
China
Prior art keywords
lens
light
lens combination
cell
imaging
Prior art date
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Expired - Fee Related
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CNB2004100334530A
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English (en)
Chinese (zh)
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CN1536338A (zh
Inventor
W·霍尔扎普菲尔
E·迈尔
U·本纳
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Dr Johannes Heidenhain GmbH
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Dr Johannes Heidenhain GmbH
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Publication of CN1536338A publication Critical patent/CN1536338A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
CNB2004100334530A 2003-04-11 2004-04-09 用于光学扫描计量用具的位置测量装置的扫描单元 Expired - Fee Related CN100350217C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10317736A DE10317736A1 (de) 2003-04-11 2003-04-11 Abtasteinheit für eine Positionsmesseinrichtung zum optischen Abtasten einer Maßverkörperung
DE10317736.1 2003-04-11

Publications (2)

Publication Number Publication Date
CN1536338A CN1536338A (zh) 2004-10-13
CN100350217C true CN100350217C (zh) 2007-11-21

Family

ID=32864487

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2004100334530A Expired - Fee Related CN100350217C (zh) 2003-04-11 2004-04-09 用于光学扫描计量用具的位置测量装置的扫描单元

Country Status (6)

Country Link
US (1) US7230726B2 (https=)
EP (1) EP1467185B1 (https=)
JP (1) JP4559105B2 (https=)
CN (1) CN100350217C (https=)
DE (1) DE10317736A1 (https=)
ES (1) ES2550403T3 (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005013222B4 (de) * 2005-03-17 2015-12-31 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102005015743B4 (de) 2005-04-06 2018-08-23 Dr. Johannes Heidenhain Gmbh Abtasteinheit für eine Positionsmesseinrichtung zum optischen Abtasten einer Maßverkörperung und Positionsmesseinrichtung
JP4953653B2 (ja) * 2006-02-15 2012-06-13 株式会社ミツトヨ 光電式エンコーダ
JP5087239B2 (ja) * 2006-06-26 2012-12-05 株式会社ミツトヨ 光電式エンコーダ
JP5294009B2 (ja) * 2008-10-14 2013-09-18 株式会社安川電機 絶対位置検出装置および絶対位置検出装置を搭載したモータ
US8902434B2 (en) * 2010-08-19 2014-12-02 Elesta Relays Gmbh Position measuring device and method for determining an absolute position
DE102011007459B4 (de) * 2011-04-15 2023-05-11 Dr. Johannes Heidenhain Gmbh Optische Längenmesseinrichtung
JP6359254B2 (ja) 2013-09-03 2018-07-18 株式会社ミツトヨ 光電式エンコーダ
DE102014002221A1 (de) 2014-02-21 2015-08-27 Elmotec Statomat Vertriebs Gmbh Verfahren und Vorrichtung zum Wickeln von Polsternen
JP6629014B2 (ja) 2015-09-08 2020-01-15 株式会社ミツトヨ エンコーダ
ES2701307T3 (es) * 2016-06-07 2019-02-21 Heidenhain Gmbh Dr Johannes Medida materializada así como dispositivo de medición de posición
DE102022200195A1 (de) 2022-01-11 2023-07-13 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
CN114696193B (zh) * 2022-06-02 2022-11-01 杭州灵西机器人智能科技有限公司 用于3d测量的多线激光系统、产生及扫描方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5251012A (en) * 1990-08-09 1993-10-05 Elektrotechnik Kg Electro-optical scanner
US5822125A (en) * 1996-12-20 1998-10-13 Eastman Kodak Company Lenslet array system
CN1282416A (zh) * 1997-10-20 2001-01-31 帕特辛·豪 具有至少一张透镜片的光编码器
US6437345B1 (en) * 1998-05-14 2002-08-20 Zeptosens Ag Sensing unit provided with separated detection light guiding
US6449099B2 (en) * 2000-03-23 2002-09-10 Rohm Co., Ltd. Lens array and lens array assembly
WO2002084223A1 (en) * 2001-04-11 2002-10-24 Renishaw Plc Absolute position measurement

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4112295A (en) * 1974-12-30 1978-09-05 Instytut Geodezji I Kartograffi Apparatus for direct measurement of displacements with a holographic scale
JPH0616142B2 (ja) * 1984-03-26 1994-03-02 キヤノン株式会社 レンズ形成装置
NL8502988A (nl) * 1985-11-01 1987-06-01 Philips Nv Halfgeleidende radieele fotodetector, en inrichting bevattende een dergelijke detector.
GB9926574D0 (en) * 1999-11-11 2000-01-12 Renishaw Plc Absolute position measurement
JP4271841B2 (ja) * 2000-04-05 2009-06-03 ローム株式会社 レンズアレイユニットおよびこれを備えた光学装置
DE10022619A1 (de) 2000-04-28 2001-12-06 Heidenhain Gmbh Dr Johannes Abtasteinheit für eine optische Positionsmesseinrichtung
DE10217726A1 (de) * 2002-04-17 2003-11-27 Heidenhain Gmbh Dr Johannes Optische Positionsmesseinrichtung
DE10323088A1 (de) * 2003-05-16 2004-12-02 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5251012A (en) * 1990-08-09 1993-10-05 Elektrotechnik Kg Electro-optical scanner
US5822125A (en) * 1996-12-20 1998-10-13 Eastman Kodak Company Lenslet array system
CN1282416A (zh) * 1997-10-20 2001-01-31 帕特辛·豪 具有至少一张透镜片的光编码器
US6437345B1 (en) * 1998-05-14 2002-08-20 Zeptosens Ag Sensing unit provided with separated detection light guiding
US6449099B2 (en) * 2000-03-23 2002-09-10 Rohm Co., Ltd. Lens array and lens array assembly
WO2002084223A1 (en) * 2001-04-11 2002-10-24 Renishaw Plc Absolute position measurement

Also Published As

Publication number Publication date
DE10317736A1 (de) 2004-10-28
JP4559105B2 (ja) 2010-10-06
EP1467185A1 (de) 2004-10-13
US20040246500A1 (en) 2004-12-09
CN1536338A (zh) 2004-10-13
EP1467185B1 (de) 2015-10-07
ES2550403T3 (es) 2015-11-06
US7230726B2 (en) 2007-06-12
JP2004317503A (ja) 2004-11-11

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