DE10317736A1 - Abtasteinheit für eine Positionsmesseinrichtung zum optischen Abtasten einer Maßverkörperung - Google Patents

Abtasteinheit für eine Positionsmesseinrichtung zum optischen Abtasten einer Maßverkörperung Download PDF

Info

Publication number
DE10317736A1
DE10317736A1 DE10317736A DE10317736A DE10317736A1 DE 10317736 A1 DE10317736 A1 DE 10317736A1 DE 10317736 A DE10317736 A DE 10317736A DE 10317736 A DE10317736 A DE 10317736A DE 10317736 A1 DE10317736 A1 DE 10317736A1
Authority
DE
Germany
Prior art keywords
lens
scanning unit
unit according
lenses
cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE10317736A
Other languages
German (de)
English (en)
Inventor
Ulrich Benner
Elmar Dr. Mayer
Wolfgang Dr. Holzapfel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Priority to DE10317736A priority Critical patent/DE10317736A1/de
Priority to EP04006521.1A priority patent/EP1467185B1/de
Priority to ES04006521.1T priority patent/ES2550403T3/es
Priority to JP2004100790A priority patent/JP4559105B2/ja
Priority to CNB2004100334530A priority patent/CN100350217C/zh
Priority to US10/821,518 priority patent/US7230726B2/en
Publication of DE10317736A1 publication Critical patent/DE10317736A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715Scale reading or illumination devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
DE10317736A 2003-04-11 2003-04-11 Abtasteinheit für eine Positionsmesseinrichtung zum optischen Abtasten einer Maßverkörperung Withdrawn DE10317736A1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE10317736A DE10317736A1 (de) 2003-04-11 2003-04-11 Abtasteinheit für eine Positionsmesseinrichtung zum optischen Abtasten einer Maßverkörperung
EP04006521.1A EP1467185B1 (de) 2003-04-11 2004-03-18 Linsenanordnung für einen optischen Encoder
ES04006521.1T ES2550403T3 (es) 2003-04-11 2004-03-18 Disposición de lente para un codificador óptico
JP2004100790A JP4559105B2 (ja) 2003-04-11 2004-03-30 測定本体を光学的に走査するエンコーダ用の走査ユニット
CNB2004100334530A CN100350217C (zh) 2003-04-11 2004-04-09 用于光学扫描计量用具的位置测量装置的扫描单元
US10/821,518 US7230726B2 (en) 2003-04-11 2004-04-09 Scanning unit for a position measuring instrument for optical scanning of a object measuring graduation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10317736A DE10317736A1 (de) 2003-04-11 2003-04-11 Abtasteinheit für eine Positionsmesseinrichtung zum optischen Abtasten einer Maßverkörperung

Publications (1)

Publication Number Publication Date
DE10317736A1 true DE10317736A1 (de) 2004-10-28

Family

ID=32864487

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10317736A Withdrawn DE10317736A1 (de) 2003-04-11 2003-04-11 Abtasteinheit für eine Positionsmesseinrichtung zum optischen Abtasten einer Maßverkörperung

Country Status (6)

Country Link
US (1) US7230726B2 (https=)
EP (1) EP1467185B1 (https=)
JP (1) JP4559105B2 (https=)
CN (1) CN100350217C (https=)
DE (1) DE10317736A1 (https=)
ES (1) ES2550403T3 (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7423768B2 (en) 2005-04-06 2008-09-09 Dr. Johannes Heidenhain Gmbh Scanning unit for a position measuring system for the optical scanning of a scale and position measuring system utilizing such a scanning unit
DE102014002221A1 (de) 2014-02-21 2015-08-27 Elmotec Statomat Vertriebs Gmbh Verfahren und Vorrichtung zum Wickeln von Polsternen
DE102005013222B4 (de) * 2005-03-17 2015-12-31 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102022200195A1 (de) 2022-01-11 2023-07-13 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4953653B2 (ja) * 2006-02-15 2012-06-13 株式会社ミツトヨ 光電式エンコーダ
JP5087239B2 (ja) * 2006-06-26 2012-12-05 株式会社ミツトヨ 光電式エンコーダ
JP5294009B2 (ja) * 2008-10-14 2013-09-18 株式会社安川電機 絶対位置検出装置および絶対位置検出装置を搭載したモータ
US8902434B2 (en) * 2010-08-19 2014-12-02 Elesta Relays Gmbh Position measuring device and method for determining an absolute position
DE102011007459B4 (de) * 2011-04-15 2023-05-11 Dr. Johannes Heidenhain Gmbh Optische Längenmesseinrichtung
JP6359254B2 (ja) 2013-09-03 2018-07-18 株式会社ミツトヨ 光電式エンコーダ
JP6629014B2 (ja) 2015-09-08 2020-01-15 株式会社ミツトヨ エンコーダ
ES2701307T3 (es) * 2016-06-07 2019-02-21 Heidenhain Gmbh Dr Johannes Medida materializada así como dispositivo de medición de posición
CN114696193B (zh) * 2022-06-02 2022-11-01 杭州灵西机器人智能科技有限公司 用于3d测量的多线激光系统、产生及扫描方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4112295A (en) * 1974-12-30 1978-09-05 Instytut Geodezji I Kartograffi Apparatus for direct measurement of displacements with a holographic scale
JPH0616142B2 (ja) * 1984-03-26 1994-03-02 キヤノン株式会社 レンズ形成装置
NL8502988A (nl) * 1985-11-01 1987-06-01 Philips Nv Halfgeleidende radieele fotodetector, en inrichting bevattende een dergelijke detector.
DE59101604D1 (de) * 1990-08-09 1994-06-16 Hohner Elektrotechnik Kg Optoelektronische Abtasteinrichtung.
US5822125A (en) * 1996-12-20 1998-10-13 Eastman Kodak Company Lenslet array system
CA2214193A1 (en) * 1997-10-20 1999-04-20 Pat Sin Hao Optical encoder
GB9810350D0 (en) * 1998-05-14 1998-07-15 Ciba Geigy Ag Organic compounds
GB9926574D0 (en) * 1999-11-11 2000-01-12 Renishaw Plc Absolute position measurement
JP4116224B2 (ja) * 2000-03-23 2008-07-09 ローム株式会社 レンズアレイの製造方法
JP4271841B2 (ja) * 2000-04-05 2009-06-03 ローム株式会社 レンズアレイユニットおよびこれを備えた光学装置
DE10022619A1 (de) 2000-04-28 2001-12-06 Heidenhain Gmbh Dr Johannes Abtasteinheit für eine optische Positionsmesseinrichtung
GB0109057D0 (en) 2001-04-11 2001-05-30 Renishaw Plc Absolute postition measurement
DE10217726A1 (de) * 2002-04-17 2003-11-27 Heidenhain Gmbh Dr Johannes Optische Positionsmesseinrichtung
DE10323088A1 (de) * 2003-05-16 2004-12-02 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005013222B4 (de) * 2005-03-17 2015-12-31 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US7423768B2 (en) 2005-04-06 2008-09-09 Dr. Johannes Heidenhain Gmbh Scanning unit for a position measuring system for the optical scanning of a scale and position measuring system utilizing such a scanning unit
DE102005015743B4 (de) 2005-04-06 2018-08-23 Dr. Johannes Heidenhain Gmbh Abtasteinheit für eine Positionsmesseinrichtung zum optischen Abtasten einer Maßverkörperung und Positionsmesseinrichtung
DE102014002221A1 (de) 2014-02-21 2015-08-27 Elmotec Statomat Vertriebs Gmbh Verfahren und Vorrichtung zum Wickeln von Polsternen
DE102022200195A1 (de) 2022-01-11 2023-07-13 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung

Also Published As

Publication number Publication date
JP4559105B2 (ja) 2010-10-06
EP1467185A1 (de) 2004-10-13
US20040246500A1 (en) 2004-12-09
CN1536338A (zh) 2004-10-13
EP1467185B1 (de) 2015-10-07
ES2550403T3 (es) 2015-11-06
US7230726B2 (en) 2007-06-12
CN100350217C (zh) 2007-11-21
JP2004317503A (ja) 2004-11-11

Similar Documents

Publication Publication Date Title
DE102009047361B4 (de) Vorrichtung zur optischen Abbildung
DE69518630T2 (de) Opto-elektronisches skalen-ablese-apparat
EP0896206A2 (de) Abtasteinheit für eine optische Positionsmesseinrichtung
EP3056934B1 (de) Messkopf einer endoskopischen vorrichtung und verfahren zur inspektion und messung eines objektes
EP0223009B1 (de) Lichtelektrische Positionsmesseinrichtung
EP1497609B1 (de) Optische positionsmesseinrichtung
EP1923673A2 (de) Positionsmesseinrichtung
DE102008007319A1 (de) Optische Positionsmesseinrichtung
EP1467185B1 (de) Linsenanordnung für einen optischen Encoder
DE102015218539B4 (de) Optische Positionsmesseinrichtung
EP3260820B1 (de) Optische positionsmesseinrichtung
EP1122574A2 (de) Mikroskop-Aufbau
DE10058239A1 (de) Positionsmeßeinrichtung
DE102009038028B4 (de) Detektoranordnung mit erhöhter Empfindlichkeit durch Lichtablenkelemente mit einer ebenen Lichteintrittsfläche
EP1477774B1 (de) Positionsmesseinrichtung
EP1152211A2 (de) Optische Messanordnung insbesondere zur Schichtdickenmessung
DE3329603A1 (de) Anordnung zur automatischen scharfeinstellung fotografischer kameras
DE102005015743B4 (de) Abtasteinheit für eine Positionsmesseinrichtung zum optischen Abtasten einer Maßverkörperung und Positionsmesseinrichtung
DE102016108384B3 (de) Vorrichtung und Verfahren zur lichtblattartigen Beleuchtung einer Probe
DE112019007693B4 (de) Bildleseeinrichtung
DE102019108561A1 (de) Refraktometer und Verfahren zur Bestimmung des Brechungsindex eines Prozessmediums mit einem Refraktometer
DE4303162A1 (de) Photoelektrisches Längen- bzw. Winkelmeßsystem
DE10346380B4 (de) Positionsmesseinrichtung
DE102007028943A1 (de) Abtasteinheit für eine optische Positionsmesseinrichtung
DE102009056178A1 (de) Bildaufnehmer, Bilderzeugungseinrichtung sowie Spektroskop für die ortsaufgelöste Spektroskopie

Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
R120 Application withdrawn or ip right abandoned