CH711778B1 - System zur optischen Kohärenztomographie, umfassend ein zoombares Kepler-System. - Google Patents

System zur optischen Kohärenztomographie, umfassend ein zoombares Kepler-System. Download PDF

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Publication number
CH711778B1
CH711778B1 CH00325/17A CH3252017A CH711778B1 CH 711778 B1 CH711778 B1 CH 711778B1 CH 00325/17 A CH00325/17 A CH 00325/17A CH 3252017 A CH3252017 A CH 3252017A CH 711778 B1 CH711778 B1 CH 711778B1
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CH
Switzerland
Prior art keywords
variable
optical
optics
eye
measuring beam
Prior art date
Application number
CH00325/17A
Other languages
German (de)
English (en)
Inventor
Högele Artur
Steffen Joachim
Hauger Christoph
Matz Holger
Original Assignee
Zeiss Carl Meditec Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeiss Carl Meditec Ag filed Critical Zeiss Carl Meditec Ag
Publication of CH711778B1 publication Critical patent/CH711778B1/de

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Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
    • A61B3/0091—Fixation targets for viewing direction
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
    • A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
    • A61B3/102—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for optical coherence tomography [OCT]
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
    • A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
    • A61B3/12—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for looking at the eye fundus, e.g. ophthalmoscopes
    • A61B3/1225—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for looking at the eye fundus, e.g. ophthalmoscopes using coherent radiation
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
    • A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
    • A61B3/13—Ophthalmic microscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02029—Combination with non-interferometric systems, i.e. for measuring the object
    • G01B9/0203—With imaging systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
    • G01B9/02035—Shaping the focal point, e.g. elongated focus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives
    • G02B21/025—Objectives with variable magnification
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Biophysics (AREA)
  • Animal Behavior & Ethology (AREA)
  • Veterinary Medicine (AREA)
  • Public Health (AREA)
  • Surgery (AREA)
  • Molecular Biology (AREA)
  • Ophthalmology & Optometry (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Radiology & Medical Imaging (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Eye Examination Apparatus (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CH00325/17A 2014-09-19 2015-09-21 System zur optischen Kohärenztomographie, umfassend ein zoombares Kepler-System. CH711778B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014014182 2014-09-19
PCT/EP2015/001872 WO2016041640A1 (de) 2014-09-19 2015-09-21 System zur optischen kohärenztomographie, umfassend ein zoombares kepler-system

Publications (1)

Publication Number Publication Date
CH711778B1 true CH711778B1 (de) 2019-06-14

Family

ID=54199160

Family Applications (1)

Application Number Title Priority Date Filing Date
CH00325/17A CH711778B1 (de) 2014-09-19 2015-09-21 System zur optischen Kohärenztomographie, umfassend ein zoombares Kepler-System.

Country Status (6)

Country Link
US (2) US9662010B2 (OSRAM)
EP (1) EP2997880B1 (OSRAM)
JP (1) JP6696977B2 (OSRAM)
CH (1) CH711778B1 (OSRAM)
DE (2) DE112015004256A5 (OSRAM)
WO (1) WO2016041640A1 (OSRAM)

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DE102023126430A1 (de) 2023-09-28 2025-04-03 Precitec Optronik Gmbh Messvorrichtung und Verfahren zum Messen der Dicke eines Wafers

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Publication number Priority date Publication date Assignee Title
DE102023126430A1 (de) 2023-09-28 2025-04-03 Precitec Optronik Gmbh Messvorrichtung und Verfahren zum Messen der Dicke eines Wafers

Also Published As

Publication number Publication date
DE112015004256A5 (de) 2017-06-01
US20170245755A1 (en) 2017-08-31
US20160081545A1 (en) 2016-03-24
EP2997880B1 (en) 2019-02-06
JP2017533004A (ja) 2017-11-09
WO2016041640A1 (de) 2016-03-24
US9662010B2 (en) 2017-05-30
US10092179B2 (en) 2018-10-09
JP6696977B2 (ja) 2020-05-20
EP2997880A1 (en) 2016-03-23
DE102015012387A1 (de) 2016-03-24

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