CH668126A5 - Optisches system fuer spektralgeraete. - Google Patents

Optisches system fuer spektralgeraete. Download PDF

Info

Publication number
CH668126A5
CH668126A5 CH2809/85A CH280985A CH668126A5 CH 668126 A5 CH668126 A5 CH 668126A5 CH 2809/85 A CH2809/85 A CH 2809/85A CH 280985 A CH280985 A CH 280985A CH 668126 A5 CH668126 A5 CH 668126A5
Authority
CH
Switzerland
Prior art keywords
optical system
grating
dispersion
dispersing member
plane
Prior art date
Application number
CH2809/85A
Other languages
German (de)
English (en)
Inventor
Stefan Florek
Helmut-Ross Becker
Hans-Juergen Dobschal
Joachim Mohr
Original Assignee
Zeiss Jena Veb Carl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DD26478984A external-priority patent/DD226962B1/de
Priority claimed from DD26641684A external-priority patent/DD256060A3/de
Application filed by Zeiss Jena Veb Carl filed Critical Zeiss Jena Veb Carl
Publication of CH668126A5 publication Critical patent/CH668126A5/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1809—Echelle gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/04—Slit arrangements slit adjustment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J2003/1828—Generating the spectrum; Monochromators using diffraction elements, e.g. grating with order sorter or prefilter

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
CH2809/85A 1984-07-02 1985-07-01 Optisches system fuer spektralgeraete. CH668126A5 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DD26478984A DD226962B1 (de) 1984-07-02 1984-07-02 Optisches system fuer echelle-spektrometer
DD26641684A DD256060A3 (de) 1984-08-20 1984-08-20 Echelle-spektrometer

Publications (1)

Publication Number Publication Date
CH668126A5 true CH668126A5 (de) 1988-11-30

Family

ID=25747899

Family Applications (1)

Application Number Title Priority Date Filing Date
CH2809/85A CH668126A5 (de) 1984-07-02 1985-07-01 Optisches system fuer spektralgeraete.

Country Status (6)

Country Link
US (1) US4690559A (https=)
JP (1) JPS6156921A (https=)
CH (1) CH668126A5 (https=)
DE (1) DE3516183A1 (https=)
FR (1) FR2566902B1 (https=)
GB (1) GB2163567B (https=)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD260326B5 (de) * 1987-05-04 1993-11-25 Zeiss Carl Jena Gmbh Justierbare echelle-spektrometer-anordnung und verfahren zu dessen justage
US4820048A (en) * 1987-11-19 1989-04-11 The Perkin-Elmer Corporation Detector for a spectrometer
DD292078A5 (de) * 1990-02-15 1991-07-18 ���k���������������@����@�����@���@�������������k�� Fchelle-polychromator
DD294087A5 (de) * 1990-04-27 1991-09-19 ���@��@����@�����@���@�������������k�� Spektrometer
JPH0534273A (ja) * 1991-07-29 1993-02-09 Kanzaki Paper Mfg Co Ltd レターデーシヨン測定装置
FR2687471B1 (fr) * 1992-02-18 1994-07-01 Centre Nat Rech Scient Dispositif de spectrographie.
DE19635046A1 (de) * 1996-08-29 1998-03-05 Nis Ingenieurgesellschaft Mbh Spektralanalytische Vorrichtung und Verfahren zur Bestimmung von Elementzusammensetzungen und -konzentrationen
DE19651677A1 (de) * 1996-12-12 1998-06-18 Spectro Analytical Instr Optisches Emmissionsspektrometer mit steuerbarer Blende
US5923482A (en) * 1997-03-14 1999-07-13 Waters Investments Limited Changing astigmatism in an optical system
US6163559A (en) * 1998-06-22 2000-12-19 Cymer, Inc. Beam expander for ultraviolet lasers
DE19900308B4 (de) * 1999-01-07 2010-11-25 Spectro Analytical Instruments Gmbh Echelle-Spektrometer geringer Baugröße mit zweidimensionalem Detektor
DE10011462C2 (de) * 2000-03-10 2002-05-08 Ges Zur Foerderung Angewandter Optik Optoelektronik Quantenelektronik & Spektroskopie Ev Optisches Spektrometer mit Astigmatismuskompensation
US6636305B2 (en) 2001-09-13 2003-10-21 New Chromex, Inc. Apparatus and method for producing a substantially straight instrument image
DE102005024271B4 (de) 2005-05-27 2014-03-27 Carl Zeiss Microscopy Gmbh Gitterspektrometersystem und Verfahren zur Messwerterfassung
US7483135B2 (en) * 2006-07-14 2009-01-27 Thermo Electron Scientific Instruments, Llc Confocal spectrometer with astigmatic aperturing
US20090273840A1 (en) 2008-05-02 2009-11-05 Mclaughlin Sheldon Wavelength dispersing device
CN111183342B (zh) 2017-11-30 2023-05-02 安捷伦科技有限公司 多色仪系统和方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3521957A (en) * 1965-09-01 1970-07-28 Yissum Res Dev Co Grazing incidence spectroscopic methods and apparatus
FR2052134A5 (https=) * 1969-07-21 1971-04-09 Cameca
US3658423A (en) * 1971-01-14 1972-04-25 Spectrametrics Inc Echelle spectrometer
US4068954A (en) * 1976-01-09 1978-01-17 Instruments S.A. Monochromator having a concave holographic grating
US4049353A (en) * 1976-08-11 1977-09-20 Spectrametrics, Incorporated Spectrometric system and cassette
DD141862B1 (de) * 1979-01-03 1981-02-25 Joachim Mohr Optisches system fuer spektralgeraete
DD148254A1 (de) * 1979-12-21 1981-05-13 Joachim Mohr Optische anordnung fuer gekreuzte dispersion

Also Published As

Publication number Publication date
GB2163567B (en) 1988-03-02
US4690559A (en) 1987-09-01
DE3516183A1 (de) 1986-01-09
GB8516395D0 (en) 1985-07-31
FR2566902A1 (fr) 1986-01-03
JPS6156921A (ja) 1986-03-22
FR2566902B1 (fr) 1989-10-27
GB2163567A (en) 1986-02-26
JPH0584451B2 (https=) 1993-12-02

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PL Patent ceased