FR2566902B1 - Systeme optique pour spectroscope - Google Patents

Systeme optique pour spectroscope

Info

Publication number
FR2566902B1
FR2566902B1 FR858509825A FR8509825A FR2566902B1 FR 2566902 B1 FR2566902 B1 FR 2566902B1 FR 858509825 A FR858509825 A FR 858509825A FR 8509825 A FR8509825 A FR 8509825A FR 2566902 B1 FR2566902 B1 FR 2566902B1
Authority
FR
France
Prior art keywords
spectroscope
optical system
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR858509825A
Other languages
English (en)
Other versions
FR2566902A1 (fr
Inventor
Stefan Florek
Helmut Becker-Ross
Hans-Jurgen Dobschal
Joachim Mohr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DD26478984A external-priority patent/DD226962B1/de
Priority claimed from DD26641684A external-priority patent/DD256060A3/de
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Publication of FR2566902A1 publication Critical patent/FR2566902A1/fr
Application granted granted Critical
Publication of FR2566902B1 publication Critical patent/FR2566902B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1809—Echelle gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/04—Slit arrangements slit adjustment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J2003/1828—Generating the spectrum; Monochromators using diffraction elements, e.g. grating with order sorter or prefilter
FR858509825A 1984-07-02 1985-06-27 Systeme optique pour spectroscope Expired FR2566902B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DD26478984A DD226962B1 (de) 1984-07-02 1984-07-02 Optisches system fuer echelle-spektrometer
DD26641684A DD256060A3 (de) 1984-08-20 1984-08-20 Echelle-spektrometer

Publications (2)

Publication Number Publication Date
FR2566902A1 FR2566902A1 (fr) 1986-01-03
FR2566902B1 true FR2566902B1 (fr) 1989-10-27

Family

ID=25747899

Family Applications (1)

Application Number Title Priority Date Filing Date
FR858509825A Expired FR2566902B1 (fr) 1984-07-02 1985-06-27 Systeme optique pour spectroscope

Country Status (6)

Country Link
US (1) US4690559A (fr)
JP (1) JPS6156921A (fr)
CH (1) CH668126A5 (fr)
DE (1) DE3516183A1 (fr)
FR (1) FR2566902B1 (fr)
GB (1) GB2163567B (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD260326B5 (de) * 1987-05-04 1993-11-25 Zeiss Carl Jena Gmbh Justierbare echelle-spektrometer-anordnung und verfahren zu dessen justage
US4820048A (en) * 1987-11-19 1989-04-11 The Perkin-Elmer Corporation Detector for a spectrometer
DD292078A5 (de) * 1990-02-15 1991-07-18 ���k���������������@����@�����@���@�������������k�� Fchelle-polychromator
DD294087A5 (de) * 1990-04-27 1991-09-19 ���@��@����@�����@���@�������������k�� Spektrometer
JPH0534273A (ja) * 1991-07-29 1993-02-09 Kanzaki Paper Mfg Co Ltd レターデーシヨン測定装置
FR2687471B1 (fr) * 1992-02-18 1994-07-01 Centre Nat Rech Scient Dispositif de spectrographie.
DE19635046A1 (de) * 1996-08-29 1998-03-05 Nis Ingenieurgesellschaft Mbh Spektralanalytische Vorrichtung und Verfahren zur Bestimmung von Elementzusammensetzungen und -konzentrationen
DE19651677A1 (de) * 1996-12-12 1998-06-18 Spectro Analytical Instr Optisches Emmissionsspektrometer mit steuerbarer Blende
US5923482A (en) * 1997-03-14 1999-07-13 Waters Investments Limited Changing astigmatism in an optical system
US6163559A (en) * 1998-06-22 2000-12-19 Cymer, Inc. Beam expander for ultraviolet lasers
DE19900308B4 (de) * 1999-01-07 2010-11-25 Spectro Analytical Instruments Gmbh Echelle-Spektrometer geringer Baugröße mit zweidimensionalem Detektor
DE10011462C2 (de) * 2000-03-10 2002-05-08 Ges Zur Foerderung Angewandter Optik Optoelektronik Quantenelektronik & Spektroskopie Ev Optisches Spektrometer mit Astigmatismuskompensation
US6636305B2 (en) 2001-09-13 2003-10-21 New Chromex, Inc. Apparatus and method for producing a substantially straight instrument image
DE102005024271B4 (de) 2005-05-27 2014-03-27 Carl Zeiss Microscopy Gmbh Gitterspektrometersystem und Verfahren zur Messwerterfassung
US7483135B2 (en) * 2006-07-14 2009-01-27 Thermo Electron Scientific Instruments, Llc Confocal spectrometer with astigmatic aperturing
US20090273840A1 (en) * 2008-05-02 2009-11-05 Mclaughlin Sheldon Wavelength dispersing device
WO2019106443A1 (fr) 2017-11-30 2019-06-06 Agilent Technologies, Inc. Systèmes et procédés polychromateurs

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3521957A (en) * 1965-09-01 1970-07-28 Yissum Res Dev Co Grazing incidence spectroscopic methods and apparatus
FR2052134A5 (fr) * 1969-07-21 1971-04-09 Cameca
US3658423A (en) * 1971-01-14 1972-04-25 Spectrametrics Inc Echelle spectrometer
US4068954A (en) * 1976-01-09 1978-01-17 Instruments S.A. Monochromator having a concave holographic grating
US4049353A (en) * 1976-08-11 1977-09-20 Spectrametrics, Incorporated Spectrometric system and cassette
DD141862B1 (de) * 1979-01-03 1981-02-25 Joachim Mohr Optisches system fuer spektralgeraete
DD148254A1 (de) * 1979-12-21 1981-05-13 Joachim Mohr Optische anordnung fuer gekreuzte dispersion

Also Published As

Publication number Publication date
FR2566902A1 (fr) 1986-01-03
DE3516183A1 (de) 1986-01-09
GB8516395D0 (en) 1985-07-31
GB2163567B (en) 1988-03-02
US4690559A (en) 1987-09-01
JPS6156921A (ja) 1986-03-22
CH668126A5 (de) 1988-11-30
GB2163567A (en) 1986-02-26
JPH0584451B2 (fr) 1993-12-02

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Legal Events

Date Code Title Description
TP Transmission of property
CD Change of name or company name
TP Transmission of property
ST Notification of lapse