CH626489A5 - - Google Patents
Download PDFInfo
- Publication number
- CH626489A5 CH626489A5 CH963678A CH963678A CH626489A5 CH 626489 A5 CH626489 A5 CH 626489A5 CH 963678 A CH963678 A CH 963678A CH 963678 A CH963678 A CH 963678A CH 626489 A5 CH626489 A5 CH 626489A5
- Authority
- CH
- Switzerland
- Prior art keywords
- vacuum
- airlock
- bar
- components
- working chamber
- Prior art date
Links
Classifications
-
- H10P72/0456—
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H10P72/3212—
-
- H10P72/3314—
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/53—Means to assemble or disassemble
- Y10T29/53096—Means to assemble or disassemble including means to provide a controlled environment
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/837,232 US4166563A (en) | 1977-09-27 | 1977-09-27 | Transfer machine for sealing electronic or like components under vacuum |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH626489A5 true CH626489A5 (enExample) | 1981-11-13 |
Family
ID=25273887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH963678A CH626489A5 (enExample) | 1977-09-27 | 1978-09-14 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4166563A (enExample) |
| JP (1) | JPS5463695A (enExample) |
| CH (1) | CH626489A5 (enExample) |
| DE (1) | DE2841767A1 (enExample) |
| FR (1) | FR2403866A1 (enExample) |
| GB (1) | GB2007778B (enExample) |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4392435A (en) * | 1979-08-03 | 1983-07-12 | United Kingdom Atomic Energy Authority | Transport apparatus |
| DE3119037A1 (de) * | 1981-05-13 | 1982-12-02 | Ganzhorn u. Stirn GmbH + Co, 7170 Schwäbisch Hall | Verfahren und vorrichtung zum sterilisieren |
| JPS57206046A (en) * | 1981-06-15 | 1982-12-17 | Hitachi Ltd | Wafer conveying device |
| NL8203318A (nl) * | 1982-08-24 | 1984-03-16 | Integrated Automation | Inrichting voor processing van substraten. |
| US4799911A (en) * | 1987-07-13 | 1989-01-24 | Varo, Inc. | Image intensifier tube with integral CCD digital readout |
| US4540326A (en) * | 1982-09-17 | 1985-09-10 | Nacom Industries, Inc. | Semiconductor wafer transport system |
| JPS60187485A (ja) * | 1984-03-06 | 1985-09-24 | Raifu Technol Kenkyusho | 接合装置 |
| US4619573A (en) * | 1984-03-09 | 1986-10-28 | Tegal Corporation | Article transport apparatus |
| US4576828A (en) * | 1984-05-17 | 1986-03-18 | Geotel, Inc. | Method and apparatus for plasma spray coating |
| US4624617A (en) * | 1984-10-09 | 1986-11-25 | David Belna | Linear induction semiconductor wafer transportation apparatus |
| EP0178336B1 (en) * | 1984-10-16 | 1987-09-09 | International Business Machines Corporation | Vacuum transfer device |
| DE3601408C1 (de) * | 1986-01-18 | 1987-03-12 | Sartorius Gmbh | Oberschalige Analysenwaage mit Waegekammerschleuse |
| HU207175B (en) * | 1986-02-12 | 1993-03-01 | Tungsram Reszvenytarsasag | Device for manufacturing discharge tube of a sodium vapour discharge lamp |
| US5090609A (en) * | 1989-04-28 | 1992-02-25 | Hitachi, Ltd. | Method of bonding metals, and method and apparatus for producing semiconductor integrated circuit device using said method of bonding metals |
| NL8901598A (nl) * | 1989-06-23 | 1991-01-16 | Soltec Bv | Met een beschermgas werkende soldeermachine, voorzien van automatisch werkende sluisdeuren. |
| JPH04262865A (ja) * | 1991-01-22 | 1992-09-18 | Kenji Kondo | はんだ付け装置 |
| SE9200630L (sv) * | 1992-03-02 | 1993-07-12 | Quartz Proline Handelsbolag C | Foerfarande och anlaeggning foer framstaellning av piezoelektriska resonatorer |
| WO1994000868A1 (en) | 1992-06-26 | 1994-01-06 | Materials Research Corporation | Transport system for wafer processing line |
| US5433639A (en) * | 1993-08-18 | 1995-07-18 | Santa Barbara Research Center | Processing of vacuum-sealed dewar assembly |
| DE4432730A1 (de) * | 1994-09-14 | 1996-03-21 | Emitec Emissionstechnologie | Verfahren zur Herstellung einer metallischen Struktur |
| US5799860A (en) * | 1995-08-07 | 1998-09-01 | Applied Materials, Inc. | Preparation and bonding of workpieces to form sputtering targets and other assemblies |
| US6206176B1 (en) * | 1998-05-20 | 2001-03-27 | Applied Komatsu Technology, Inc. | Substrate transfer shuttle having a magnetic drive |
| US6213704B1 (en) | 1998-05-20 | 2001-04-10 | Applied Komatsu Technology, Inc. | Method and apparatus for substrate transfer and processing |
| US6517303B1 (en) | 1998-05-20 | 2003-02-11 | Applied Komatsu Technology, Inc. | Substrate transfer shuttle |
| US6215897B1 (en) | 1998-05-20 | 2001-04-10 | Applied Komatsu Technology, Inc. | Automated substrate processing system |
| US6298685B1 (en) | 1999-11-03 | 2001-10-09 | Applied Materials, Inc. | Consecutive deposition system |
| US20030183490A1 (en) * | 2000-05-09 | 2003-10-02 | Friedrich Eschenweck | Longitudinal conveyor |
| US6935828B2 (en) * | 2002-07-17 | 2005-08-30 | Transfer Engineering And Manufacturing, Inc. | Wafer load lock and magnetically coupled linear delivery system |
| US7306133B2 (en) * | 2003-04-25 | 2007-12-11 | St Assembly Test Services Ltd. | System for fabricating an integrated circuit package on a printed circuit board |
| DE102019211212B4 (de) | 2019-07-29 | 2025-03-27 | Rehm Thermal Systems Gmbh | Mechatronischer Vorhang für eine Prozesskammer zur Durchführung thermischer Prozesse in der Fertigung elektronischer Baugruppen |
| CN119382649B (zh) * | 2024-10-10 | 2025-08-01 | 东晶电子金华有限公司 | 一种小型石英晶体谐振器封装方法及设备 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3202406A (en) * | 1960-07-27 | 1965-08-24 | Clevite Corp | Furnace apparatus and conveyor therefor |
| US3317106A (en) * | 1963-08-19 | 1967-05-02 | Dix Engineering Co | Solder boat |
| US3717119A (en) * | 1971-07-30 | 1973-02-20 | Gen Motors Corp | Vacuum processing machine for aluminizing headlamp reflectors |
| US3914836A (en) * | 1974-06-21 | 1975-10-28 | Us Army | Method for processing quartz crystal resonators |
| US4030622A (en) * | 1975-05-23 | 1977-06-21 | Pass-Port Systems, Inc. | Wafer transport system |
-
1977
- 1977-09-27 US US05/837,232 patent/US4166563A/en not_active Expired - Lifetime
-
1978
- 1978-09-12 FR FR7827141A patent/FR2403866A1/fr active Granted
- 1978-09-14 CH CH963678A patent/CH626489A5/fr not_active IP Right Cessation
- 1978-09-15 GB GB7837060A patent/GB2007778B/en not_active Expired
- 1978-09-26 DE DE19782841767 patent/DE2841767A1/de not_active Withdrawn
- 1978-09-27 JP JP11903778A patent/JPS5463695A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| GB2007778B (en) | 1982-03-10 |
| JPS5463695A (en) | 1979-05-22 |
| JPS5724004B2 (enExample) | 1982-05-21 |
| GB2007778A (en) | 1979-05-23 |
| FR2403866B1 (enExample) | 1982-03-12 |
| US4166563A (en) | 1979-09-04 |
| FR2403866A1 (fr) | 1979-04-20 |
| DE2841767A1 (de) | 1979-04-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CH626489A5 (enExample) | ||
| EP0060151B1 (fr) | Installation de traitement de matériaux pour la production de semi-conducteurs | |
| EP2179236B1 (fr) | Procédé de traitement d'un support de transport pour le convoyage et le stockage atmosphérique de substrats semi-conducteurs | |
| WO2001053449A1 (fr) | Dispositif de culture cellulaire et tissulaire a circulation perfectionnee de fluide de culture | |
| FR2482782A1 (fr) | Appareil de traitement de galettes a semi-conducteurs | |
| EP1630854A2 (fr) | Interface sous vide entre une boîte de mini-environnement et un équipement | |
| FR2705165A1 (fr) | Installation de traitement par plasma et procédé pour son exploitation. | |
| EP0388332A1 (fr) | Dispositif d'injection de gaz sous pression et débits élevés dans une enceinte étanche avec récupération du gaz | |
| EP2066261A1 (fr) | Machine pour remplir de semence des paillettes d'insémination artificielle | |
| EP0388333A1 (fr) | Dispositif pour l'exécution de traitements thermiques enchainés en continu sous vide | |
| CH629154A5 (fr) | Appareil de transfert de pieces entre une presse a injecter et une machine d'etirage-soufflage. | |
| EP0565490B1 (fr) | Procédé de développement de films photographiques pour laboratoires automatisés et magasin d'entreposage de bobines de films pour la mise en oeuvre du procédé | |
| EP0434487A1 (fr) | Dispositif de stockage de produits métallurgiques, tels que brames minces | |
| FR3038454A1 (fr) | Dispositif de generation de dihydrogene gazeux | |
| FR2551632A1 (fr) | Procede pour prelever des echantillons de cigarettes sur une machine d'assemblage de filtres | |
| EP2377151A1 (fr) | Procede de descente en pression dans un sas de chargement et de dechargement et equipement associe | |
| WO2018033261A1 (fr) | Système de lamination, installation incluant un tel système de lamination et procédé de lamination mis en oeuvre à l'aide d'un tel système de lamination | |
| FR2527110A1 (fr) | Moule a chauffage electrique et procede de moulage de barrettes de connexion en metal, notamment pour elements de batterie | |
| CA1151370A (fr) | Dispositif d'alimentation automatique en busulures d'une presse de moulage de couvercles pour batteries d'accumulateurs | |
| EP0282403A1 (fr) | Système de cristallogénèse, notamment pour vaisseau spatial | |
| EP0328471A1 (fr) | Procédé d'assemblage automatique d'une pièce conique scindée dans une coupelle et moyens destinés à le mettre en oeuvre | |
| CH364212A (fr) | Machine à postes multiples pour la mise en conserve | |
| EP4433760A1 (fr) | Système de réfrigération et procédé de chargement d'un tel système de réfrigération | |
| FR2526699A1 (fr) | Appareil et procede pour realiser la commande programmee de fonctions de travail, notamment pour le soudage d'elements de batterie | |
| WO2023213811A1 (fr) | Système de vannes pour automate de culture cellulaire. |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased | ||
| PL | Patent ceased |